On-line closed sampling device for High-K precursor material

Abstract

The utility model discloses an on-line closed sampling device for a High-K precursor material, which relates to the technical field of semiconductor materials, and comprises a main sampling pipeline, and further comprises a main sampling pipeline, a sampling bottle, a material collecting device, a material collecting device and a material collecting device, the nitrogen pipeline is connected with the main sampling pipeline through a nitrogen branch pipe; the vacuum pipeline is connected with the main sampling pipeline through a vacuum branch pipe; the plurality of valves are sequentially arranged according to numbers and are configured to realize vacuumizing, nitrogen replacement, material filling and sampling operations through the switch combination; according to the device disclosed by the utility model, a negative pressure sampling mode is combined with nitrogen replacement, so that air and moisture in a sampling container and a pipeline can be quickly removed before sampling, a sampling environment is ensured to meet the water-free and oxygen-free requirements, and a high-K precursor material is effectively prevented from going bad or causing safety accidents due to contact with the moisture and oxygen in the air.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor materials technology, specifically to an online closed sampling device for High-K precursor materials. Background Technology

[0002] With the rapid development of the semiconductor materials industry, the requirements for material sampling technology are also increasing. High-K precursor materials, as a key component of emerging semiconductor materials, have unique physicochemical properties, such as high activity, high viscosity, flammability and explosiveness, and high value, which put forward more stringent requirements for the sampling process.

[0003] Currently, most samplers on the market use positive pressure sampling. The basic principle of positive pressure sampling is that after the pressure of the sampling container and the pipeline is balanced, the sample flows into the sampling container by gravity.

[0004] For High-K precursor materials, water and oxygen isolation are fundamental requirements during the sampling process to prevent the materials from deteriorating or causing safety accidents due to contact with moisture and oxygen in the air. However, existing samplers cannot effectively remove air and moisture from the sampling container due to positive pressure sampling, thus increasing the risk of sample contamination.

[0005] In view of the above, this application is hereby submitted. Utility Model Content

[0006] The purpose of this invention is to provide an online closed sampling device for High-K precursor materials to solve the problems mentioned in the background art.

[0007] To solve the above-mentioned technical problems, this utility model provides an online closed sampling device for High-K precursor materials, including a main sampling pipeline, and further comprising:

[0008] The main sampling pipeline is connected at one end to the material collection equipment and at the other end to the sampling bottle;

[0009] The nitrogen pipeline is connected to the main sampling pipeline via a nitrogen branch pipe.

[0010] The vacuum line is connected to the main sampling line via a vacuum branch pipe;

[0011] Valves 1, 2, 3, 4, 5, 6, 7, 8, and 9 are distributed on the main sampling pipeline, nitrogen pipeline, and vacuum pipeline.

[0012] Multiple valves are arranged sequentially according to their numbers and configured to perform vacuuming, nitrogen purging, material filling, and sampling operations through a combination of switches.

[0013] Furthermore, it also includes a control module, which is electrically connected to the nine valves and configured to automatically perform the following operations:

[0014] Vacuuming is performed by opening valves three through eight in sequence. After closing valve seven, valve two is opened to purge nitrogen. The control module is further configured as follows:

[0015] During the negative pressure sampling phase, control valves five, six, and seven are opened to create a vacuum for 15 seconds, then valves one, two, and four are closed and opened to draw in the sample for 5 seconds.

[0016] After sampling is completed, control valves nine and two are opened to push the residual material back into the extraction equipment, and three vacuuming and nitrogen filling cycles are performed to clean the pipeline.

[0017] Furthermore, the valve is located on the side of the main sampling pipeline near the material extraction equipment;

[0018] The second valve is located at the inlet end of the nitrogen pipeline;

[0019] The next seven valves are sequentially installed at the intersection of the main sampling pipeline and the vacuum pipeline, with valves seven and eight located on the vacuum pipeline;

[0020] The sampling bottle is connected to valves four and five via detachable interfaces. Valve four is directly connected to the main sampling pipeline, and valve five is connected to the vacuum pipeline. After sampling is completed, the sampling bottle can be disassembled as a whole, along with valves four and five.

[0021] Furthermore, the nitrogen pipeline is connected to the main sampling pipeline via valve two, and a one-way valve is provided between valve two and the main sampling pipeline to prevent material from flowing back into the nitrogen pipeline. The vacuum pipeline is connected to the main sampling pipeline via valve seven and valve eight, where valve eight is the main control valve of the vacuum pipeline and valve seven is the branch regulating valve of the vacuum pipeline.

[0022] Furthermore, the main sampling pipeline is equipped with a quick-sealing cap at its end, which can seal the pipeline opening after the sampling bottle is disassembled. The cap has a built-in elastic sealing ring and a locking mechanism.

[0023] Compared with the prior art, the beneficial effects of this utility model are: by combining negative pressure sampling with nitrogen replacement, this device can quickly remove air and moisture from the sampling container and pipeline before sampling, ensuring that the sampling environment meets the requirements of being water-free and oxygen-free, and effectively preventing High-K precursor materials from deteriorating or causing safety accidents due to contact with moisture and oxygen in the air. Attached Figure Description

[0024] Figure 1 This is a flowchart of nitrogen vacuum replacement for an online closed sampling device for High-K precursor materials.

[0025] In the diagram: 1. Valve 1; 2. Valve 2; 3. Valve 3; 4. Valve 4; 5. Valve 5; 6. Valve 6; 7. Valve 7; 8. Valve 8; 9. Valve 9; 10. Main sampling line; 11. Nitrogen line; 12. Vacuum line. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figure 1 This utility model provides a technical solution: an online closed sampling device for High-K precursor materials, including a main sampling pipeline 10, one end of which is connected to a material extraction device, and the other end is connected to a sampling bottle. It is also equipped with a nitrogen pipeline 11 connected to the main sampling pipeline 10 via a nitrogen branch pipe, and a vacuum pipeline 12 connected to the main sampling pipeline 10 via a vacuum branch pipe. Valves 1 to 9 are arranged sequentially on the main sampling pipeline 10, nitrogen pipeline 11, and vacuum pipeline 12, allowing the system to switch between multiple operating modes through flexible valve switching combinations.

[0028] Furthermore, the negative pressure sampling method is combined with nitrogen replacement. Before sampling, by opening the corresponding valve combination, the main sampling pipeline 10 and the sampling container are first evacuated using the vacuum pipeline 12. Then, nitrogen is injected through the nitrogen pipeline 11 to replace the air and moisture in the sampling container and pipeline, thereby reducing the risk of sample contamination during the sampling process and ensuring the accuracy and reliability of the sampling.

[0029] Please see Figure 1 This utility model provides a technical solution: an online closed sampling device for High-K precursor materials, including a valve 1 located on the side of the main sampling pipeline 10 near the material extraction equipment, so that the operator can easily open the valve 1 when sampling is required, thereby allowing the material to smoothly enter the main sampling pipeline 10. The valve 2 is located at the inlet end of the nitrogen pipeline 11, which facilitates nitrogen replacement operation when necessary, thereby ensuring that the sampling environment is pure and free of impurities.

[0030] Furthermore, at the intersection of the main sampling line 10 and the vacuum line 12, seven valves are arranged in sequence. This design not only enables operations such as vacuuming, nitrogen replacement, and material filling to be accurately achieved through precise valve control, but also effectively avoids confusion and errors during the operation process.

[0031] Furthermore, valves 7 and 8 are installed on the vacuum line 12, allowing operators to easily control the opening and closing of the vacuum line 12 and adjust the vacuum level, thereby ensuring that the sampling container and the line can be effectively evacuated.

[0032] Furthermore, valve 9 is placed at the end of the main sampling pipeline 10, close to the sampling bottle, so that the operator can quickly close valve 9 after sampling, effectively preventing material leakage and ensuring the safety and accuracy of the sampling process.

[0033] Please see Figure 1 This utility model provides a technical solution: an online closed sampling device for High-K precursor materials, including a control module. This module is electrically connected to nine valves. The operator only needs to pre-set the program, and the control module will automatically open valves 3 to 8 in sequence to perform vacuuming. Then, after closing valve 7, it will automatically open valve 2 to perform nitrogen replacement, which reduces the burden of manual operation and ensures the stability and accuracy of the sampling process.

[0034] Please see Figure 1 This utility model provides a technical solution: an online closed sampling device for High-K precursor materials, including a sampling bottle connected to valve 4 and valve 5 via a detachable interface. Valve 4 is directly connected to the main sampling pipeline 10, while valve 5 is connected to the vacuum pipeline 12. After sampling, the sampling bottle and its connected valves 4 and 5 can be easily disassembled from the system as a whole. Since the sampling bottle and its connected valves may have residual samples or be contaminated after sampling, the overall disassembly allows these components to be easily and thoroughly cleaned and disinfected, thereby ensuring the accuracy and safety of the next sampling and effectively avoiding cross-contamination between samples.

[0035] Please see Figure 1 This utility model provides a technical solution: an online closed sampling device for High-K precursor materials, including a vacuum pipeline 12 connected to the main sampling pipeline 10 via valve 7 and valve 8. Valve 8 serves as the main control valve of the vacuum pipeline 12, undertaking the main on / off control task, while valve 7 serves as a branch regulating valve, capable of precisely adjusting the vacuum level as needed to meet diverse sampling requirements. During the sampling process, the regulating function of valve 7 ensures the stability of the vacuum level, thereby improving the accuracy and reliability of sampling.

[0036] Please see Figure 1This utility model provides a technical solution: an online closed sampling device for High-K precursor materials, including a nitrogen pipeline 11 connected to the main sampling pipeline 10 via a valve 2. A one-way valve is set between the two to effectively prevent the material from flowing back from the main sampling pipeline 10 to the nitrogen pipeline 11, avoiding cross-contamination between different materials and ensuring the purity of nitrogen and the cleanliness of the sampling environment.

[0037] Furthermore, the one-way valve prevents material backflow from adversely affecting the accuracy of sampling results, thereby improving the accuracy and reliability of sampling.

[0038] Please see Figure 1 This utility model provides a technical solution: an online closed sampling device for High-K precursor materials, including a quick-sealing cap at the end of the main sampling pipeline 10, which enables the pipeline opening to be quickly sealed after the sampling bottle is disassembled. The cap has an elastic sealing ring inside, which can ensure that the pipeline opening is tightly sealed and effectively prevent gas or liquid leakage.

[0039] Please see Figure 1 This utility model provides a technical solution: an online closed sampling device for High-K precursor materials, including a control module that is further finely configured to optimize the sampling process: during the negative pressure sampling stage, control valves 5, 6, and 7 are opened simultaneously and quickly, which can effectively perform vacuuming operation on the sampling system within 15 seconds, quickly remove air and impurities from the system, and create an ideal environment for subsequent sample aspiration.

[0040] Furthermore, these valves are closed, while valve 1, valve 2, and valve 4 are opened, maintaining a precise 5-second time for sample aspiration. This strict time control ensures that the amount and speed of sample aspiration meet the preset standards, thereby improving the accuracy of sampling.

[0041] Furthermore, after sampling is completed, by opening valve 9 and valve 2, the residual material in the sampling system can be pushed back to the extraction equipment, reducing material waste and avoiding potential interference from residual material to subsequent sampling or analysis.

[0042] Furthermore, the system then performs three vacuuming and nitrogen purging cycles. This step not only thoroughly cleans the sampling pipeline, effectively removing residual samples, impurities, and contaminants from the pipeline and ensuring the accuracy and reliability of subsequent sampling, but also protects the pipeline from oxidation and corrosion, further extending its service life.

[0043] Working principle: The control module sequentially opens valves 3 through 8 to create a vacuum in the main sampling pipeline 10 and the section connected to the sampling bottle, removing air and moisture. This process lasts approximately 15 seconds to ensure the sampling environment meets the requirements of being water- and oxygen-free. Subsequently, valve 7 is closed to cut off the vacuum source, preparing for nitrogen purging. Valve 2 is then opened, allowing nitrogen to enter the main sampling pipeline 10 through nitrogen pipeline 11, further replacing any residual air. A one-way valve prevents material from flowing back into nitrogen pipeline 11, ensuring the effectiveness and safety of nitrogen purging. Nitrogen valve 2 is then closed, while valves 1 and 4 are simultaneously opened, allowing material to flow from the material extraction device into the sampling bottle through the main sampling pipeline 10. This process is held for about 5 seconds to ensure the accuracy of the sample volume. All valves related to sampling are closed, and valves 9 and 2 are opened. The pressure of nitrogen is used to push the residual material in the sampling pipeline back to the sampling equipment to avoid material waste and contamination. Three vacuuming and nitrogen filling cycles are performed to thoroughly clean the pipeline and prepare for the next sampling.

Claims

1. An online closed sampling device for High-K precursor materials, comprising a main sampling pipeline (10), characterized in that: Also includes: The main sampling pipeline (10) is connected at one end to the material extraction equipment and at the other end to the sampling bottle; The nitrogen pipeline (11) is connected to the main sampling pipeline (10) via a nitrogen branch pipe; The vacuum line (12) is connected to the main sampling line (10) through a vacuum branch pipe; Valve 1 (1), Valve 2 (2), Valve 3 (3), Valve 4 (4), Valve 5 (5), Valve 6 (6), Valve 7 (7), Valve 8 (8), and Valve 9 (9) are distributed on the main sampling pipeline (10), nitrogen pipeline (11), and vacuum pipeline (12); Multiple valves are arranged sequentially according to their numbers and configured to perform vacuuming, nitrogen purging, material filling, and sampling operations through a combination of switches.

2. The online closed sampling device for High-K precursor materials as described in claim 1, characterized in that: The valve (1) is located on the side of the main sampling pipeline (10) near the material extraction equipment; The valve 2 (2) is located at the inlet end of the nitrogen pipeline (11); The next seven valves are set at the intersection of the main sampling pipeline (10) and the vacuum pipeline (12), with valve seven (7) and valve eight (8) located on the vacuum pipeline (12); The valve nine (9) is located at the end of the main sampling pipeline (10) near the sampling bottle.

3. The online closed sampling device for High-K precursor materials as described in claim 2, characterized in that: It also includes a control module, which is electrically connected to the nine valves and configured to perform the following operations automatically: Open valves three (3) to eight (8) in sequence to evacuate the vacuum, close valve seven (7) and then open valve two (2) to purge with nitrogen.

4. The online closed sampling device for High-K precursor materials as described in claim 3, characterized in that: The sampling bottle is connected to valve four (4) and valve five (5) via a detachable interface. Valve four (4) is directly connected to the main sampling pipeline (10), and valve five (5) is connected to the vacuum pipeline (12). After sampling is completed, the sampling bottle can be disassembled as a whole along with valve four (4) and valve five (5).

5. The online closed sampling device for High-K precursor materials as described in claim 4, characterized in that: The vacuum pipeline (12) is connected to the main sampling pipeline (10) through valve seven (7) and valve eight (8). Valve eight (8) is the main control valve of the vacuum pipeline (12), and valve seven (7) is the branch regulating valve of the vacuum pipeline (12).

6. The online closed sampling device for High-K precursor materials as described in claim 5, characterized in that: The nitrogen pipeline (11) is connected to the main sampling pipeline (10) through valve two (2). A one-way valve is provided between valve two (2) and the main sampling pipeline (10) to prevent material from flowing back to the nitrogen pipeline (11).

7. The online closed sampling device for High-K precursor materials as described in claim 6, characterized in that: The main sampling pipeline (10) is equipped with a quick-sealing cap at the end, which can seal the pipeline opening after the sampling bottle is disassembled. The cap has a built-in elastic sealing ring and locking mechanism.

8. The online closed sampling device for High-K precursor materials as described in claim 7, characterized in that: The control module is further configured as follows: During the negative pressure sampling stage, control valves five (5), six (6), and seven (7) are opened to draw a vacuum for 15 seconds, then close and open valves one (1), two (2), and four (4) to draw in the sample for 5 seconds; After sampling is completed, control valve nine (9) and valve two (2) are opened to push the residual material back into the extraction equipment, and perform three vacuuming and nitrogen filling cycles to clean the pipeline.

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