Semiconductor test sorting machine with AGV (Automatic Guided Vehicle) automatic feeding and discharging functions

Abstract

The utility model provides an AGV automatic feeding and discharging semiconductor test sorting machine, which belongs to the technical field of semiconductor production and comprises a test device, the test device comprises a shell, a host fixedly connected inside the shell, a door body hinged to the middle position of the shell and a screen fixedly connected to the side wall of the shell, and the screen is matched with the host for use; the feeding and discharging device comprises a supporting plate fixedly connected to the interior of the shell, a sliding rail fixedly connected to the side wall of the supporting plate, a sliding part slidably connected to the middle of the sliding rail, a carrier fixedly connected to the upper end of the sliding part and a material disc inserted into the side wall of the middle of the carrier. The beneficial effects of the utility model are that through the cooperative use of the testing device and the loading and unloading device, automatic loading and unloading are realized by the AGV trolley, the automation degree of semiconductor testing and sorting is improved, all parts work cooperatively, loading and unloading and position adjustment of material trays can be completed rapidly and accurately, and the testing period is shortened.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to an AGV-based semiconductor testing and sorting machine for automatic loading and unloading. Background Technology

[0002] Semiconductors are materials whose conductivity at room temperature falls between that of conductors and insulators. The conductivity of semiconductor materials can be altered through doping; the concentration and polarity of impurities incorporated into a semiconductor significantly affect its conductivity. In the semiconductor manufacturing process, semiconductor testing and sorting machines are used to perform performance tests on manufactured chips and sort them based on the test results.

[0003] Traditional semiconductor testing and sorting machines rely heavily on manual operation or simple automated conveyor lines for loading and unloading. Manual loading and unloading is not only inefficient and prone to human error, but also labor-intensive, making it difficult to meet the demands of large-scale, high-efficiency production. While simple automated conveyor lines improve efficiency to some extent, they lack flexibility and intelligent scheduling capabilities. With the rapid development of the semiconductor industry, the requirements for production efficiency and intelligence are constantly increasing. Utility Model Content

[0004] The purpose of this invention is to provide an AGV-based semiconductor testing and sorting machine for automatic loading and unloading, aiming to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] An AGV-based automatic loading and unloading semiconductor testing and sorting machine includes,

[0007] The testing device includes a housing, a main unit fixedly connected inside the housing, a door hinged in the middle of the housing, and a screen fixedly connected to the side wall of the housing, the screen being used in conjunction with the main unit;

[0008] The loading and unloading device includes a support plate fixedly connected inside the housing, a slide rail fixedly connected to the side wall of the support plate, a sliding member slidably connected in the middle of the slide rail, a carrier fixedly connected to the upper end of the sliding member, and a material tray inserted into the middle side wall of the carrier. The carrier runs above the support plate, and the housing has an AGV trolley receiving port in the middle for use with the carrier.

[0009] As a preferred embodiment of the present invention, the loading and unloading device further includes a fixed seat fixedly connected to the bottom of the support plate, a turntable rotatably connected to the center of the fixed seat, and a push rod threadedly connected to the center of the turntable. The end of the push rod is inserted into the inner side of the through hole in the middle of the support plate, and the end of the push rod extends to the lower end of the material tray.

[0010] As a preferred embodiment of this utility model, the loading and unloading device further includes a connecting plate fixedly connected to the bottom of the top rod, and a guide rod fixedly connected to the side wall of the connecting plate. The end of the guide rod is inserted into the middle of the support plate. The guide rod is used in conjunction with the top rod, and the guide rod and the top rod have the same length.

[0011] As a preferred embodiment of this utility model, the loading and unloading device further includes a lifting motor fixedly connected to the side wall of the fixed seat. The output end of the lifting motor is equipped with a pulley for use with the turntable, and a belt adapted to be installed on the side wall of the pulley. The pulley is connected to the turntable via the belt.

[0012] As a preferred embodiment of the present invention, the loading and unloading device further includes a lead screw rotatably connected to the bottom of the support plate, a ball nut threadedly connected to the middle side wall of the lead screw, and a support block fixedly connected to the upper side wall of the ball nut. The upper end of the support block is slidably connected to the side wall of the support plate, and the upper end of the support block is fixedly connected to the end of the carrier.

[0013] As a preferred embodiment of the present invention, the loading and unloading device further includes a translation motor fixedly connected to the bottom side wall of the support plate, and the end of the translation motor is connected to the lead screw drive.

[0014] As a preferred embodiment of the present invention, the loading and unloading device further includes a frame fixedly connected to the upper end of the support plate, a limiting plate fixedly connected to the side wall of the frame, and a limiting cylinder fixedly connected to the side wall of the limiting plate. The frame has a through hole structure in the middle for use with the material tray, and the end of the limiting cylinder extends through and to the inner side of the limiting plate. The limiting plate is engaged with the outer side of the through hole in the middle of the frame.

[0015] Compared with the prior art, the beneficial effects of this utility model are: by using the testing device and the loading and unloading device together, the AGV trolley realizes automatic loading and unloading, reduces manual intervention, improves the automation level of semiconductor testing and sorting, reduces labor costs, and the coordinated work of each component can quickly and accurately complete the loading and unloading of the tray and position adjustment, shorten the testing cycle, improve work efficiency, and ensure testing accuracy. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the internal component structure of this utility model;

[0019] Figure 3 This is one of the schematic diagrams of the overall structure of the loading and unloading device of this utility model;

[0020] Figure 4 This is the second schematic diagram of the overall structure of the loading and unloading device of this utility model;

[0021] Figure 5 This is a side view of the loading and unloading device of this utility model.

[0022] In the diagram: 100, Testing device; 101, Housing; 102, Main unit; 103, Door; 104, Screen; 105, AGV trolley receiving port; 200, Loading / unloading device; 201, Support plate; 202, Slide rail; 203, Sliding component; 204, Carrier; 205, Material tray; 206, Fixed base; 207, Turntable; 208, Top rod; 209, Connecting plate; 210, Guide rod; 211, Lifting motor; 212, Pulley; 213, Belt; 214, Lead screw; 215, Ball nut; 216, Support block; 217, Translation motor; 218, Frame; 219, Limiting plate; 220, Limiting cylinder. Detailed Implementation

[0023] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0024] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0025] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0026] Example

[0027] Reference Figure 1-5This is an embodiment of the present invention, which provides an AGV-based automatic loading and unloading semiconductor testing and sorting machine, comprising:

[0028] The testing device 100 includes a housing 101, a main unit 102 fixedly connected inside the housing 101, a door 103 hinged to the middle of the housing 101, and a screen 104 fixedly connected to the side wall of the housing 101. The screen 104 is used in conjunction with the main unit 102.

[0029] The loading and unloading device 200 includes a support plate 201 fixedly connected inside the housing 101, a slide rail 202 fixedly connected to the side wall of the support plate 201, a sliding member 203 slidably connected to the middle of the slide rail 202, a carrier 204 fixedly connected to the upper end of the sliding member 203, and a material tray 205 inserted into the middle side wall of the carrier 204. The carrier 204 runs above the support plate 201, and the housing 101 has an AGV trolley receiving port 105 in the middle for use with the carrier 204.

[0030] The main unit 102 is fixedly connected inside the housing 101. The main unit 102 is the core control component of the testing device, responsible for processing various test data and issuing control commands. A door 103 is hinged in the middle of the housing 101, facilitating maintenance and repair of the main unit and other components inside the housing by operators. A screen 104 is fixedly connected to the side wall of the housing 101. The screen 104 works in conjunction with the main unit 102 to display test results, equipment status, and other information, allowing operators to monitor the test situation in real time. High-precision positioning markers, such as QR codes or standard positioning fixtures, are installed at the loading and unloading stations of the semiconductor testing and sorting machine. These stations have automatic extension and automatic door opening functions. The AGV is equipped with corresponding positioning sensors, such as vision sensors or infrared sensors. When the AGV travels near the semiconductor testing and sorting machine, the positioning sensors identify the positioning markers and adjust the AGV's position and posture through feedback control to achieve precise docking with the semiconductor testing and sorting machine. The docking mechanism features automatic door opening and automatic material extension, improving the stability and accuracy of AGV material handling. The support plate 201 of the loading / unloading device 200 is fixedly connected inside the housing 101, and the carrier 204 can slide along the slide rail 202 above the support plate 201. A material tray 205 is inserted into the middle side wall of the carrier 204 for placing semiconductors to be tested. An AGV trolley receiving port 105 is provided in the middle of the housing 101 to facilitate material transfer between the AGV trolley and the carrier 204.

[0031] Specifically, the loading and unloading device 200 also includes a fixed base 206 fixedly connected to the bottom of the support plate 201, a turntable 207 rotatably connected to the center of the fixed base 206, and a push rod 208 threadedly connected to the center of the turntable 207. The end of the push rod 208 is inserted into the inner side of the through hole in the middle of the support plate 201, and the end of the push rod 208 extends to the lower end of the material tray 205. The loading and unloading device 200 also includes a connecting plate 209 fixedly connected to the bottom of the push rod 208, and a guide rod fixedly connected to the side wall of the connecting plate 209. 210, the end of the guide rod 210 is inserted into the middle of the support plate 201. The guide rod 210 is used in conjunction with the top rod 208, and the guide rod 210 and the top rod 208 have the same length. The loading and unloading device 200 also includes a lifting motor 211 fixedly connected to the side wall of the fixed seat 206. The output end of the lifting motor 211 is equipped with a pulley 212 that works with the turntable 207, and a belt 213 adapted to be installed on the side wall of the pulley 212. The pulley 212 is connected to the turntable 207 through the belt 213.

[0032] When the turntable 207 rotates, the push rod 208 moves up and down due to the threaded drive, thereby driving the material tray 205 to lift and lower. To ensure the stability of the push rod 208's lifting and lowering, the guide rod 210 works in conjunction with the push rod 208 to provide guidance and stability. The belt pulley 212 is connected to the turntable 207 via the belt 213, and the lifting motor 211 drives the turntable 207 to rotate via the belt drive, thus realizing the lifting and lowering of the material tray 205.

[0033] Furthermore, the loading and unloading device 200 also includes a lead screw 214 rotatably connected to the bottom of the support plate 201, a ball nut 215 threadedly connected to the middle side wall of the lead screw 214, and a support block 216 fixedly connected to the upper side wall of the ball nut 215. The upper end of the support block 216 is slidably connected to the side wall of the support plate 201, and the upper end of the support block 216 is fixedly connected to the end of the carrier 204. The loading and unloading device 200 also includes a translation motor 217 fixedly connected to the bottom side wall of the support plate 201, and the end of the translation motor 217 is drivenly connected to the lead screw 214.

[0034] When the translation motor 217 rotates, it drives the lead screw 214 to rotate. Through the threaded transmission between the lead screw and the ball nut, the ball nut 215 moves along the lead screw 214, thereby driving the support block 216 and the carrier 204 to translate on the support plate 201 and adjust the position of the carrier 204.

[0035] Preferably, the loading and unloading device 200 further includes a frame 218 fixedly connected to the upper end of the support plate 201, a limiting plate 219 fixedly connected to the side wall of the frame 218, and a limiting cylinder 220 fixedly connected to the side wall of the limiting plate 219. The frame 218 has a through hole structure in the middle for use with the material tray 205, and the end of the limiting cylinder 220 extends through and to the inside of the limiting plate 219. The limiting plate 219 is engaged with the outside of the through hole in the middle of the frame 218.

[0036] When the material tray 205 is raised to the designated position, the host 102 controls the limit cylinder 220 to extend and limit and fix the material tray 205 to prevent it from moving during the test.

[0037] In operation, the AGV transports the tray 205 containing semiconductors to the AGV receiving port 105. The translation motor 217 starts, driving the lead screw 214 to rotate, causing the carrier 204 to move along the slide rail 202 to the AGV receiving port 105, docking with the AGV and transferring the tray 205 from the AGV to the carrier 204. The translation motor 217 starts again, moving the carrier 204 and tray 205 to the testing area of ​​the testing device. The limit cylinder 220 extends, limiting and fixing the tray 205 to ensure its stability during testing. The host 102 performs various performance tests on the semiconductors in the tray 205 according to a preset test program. The test results are displayed on the screen 104, allowing operators to monitor the test status in real time. After the test is completed, the limit cylinder 220 retracts, releasing the limit on the tray 205. The translation motor 217 starts, moving the carrier 204 and the tray 205 to the AGV trolley's receiving port 105. The AGV trolley then removes the tested tray 205, completing one cycle of loading, unloading, and testing.

[0038] In summary, the use of AGVs for automated loading and unloading reduces manual intervention, improves the automation level of semiconductor testing and sorting, and lowers labor costs. The coordinated operation of all components in the loading and unloading device enables rapid and accurate loading, unloading, and position adjustment of the trays, shortening the testing cycle and improving work efficiency. The limit cylinder 220 secures the tray 205, ensuring its stability during testing, preventing testing errors caused by tray movement, and improving testing accuracy. The door 103 of the testing device is designed to facilitate maintenance and repair of internal components such as the main unit, reducing maintenance difficulty and time. The reasonable design of the screw-nut drive and belt drive structures in the loading and unloading device, combined with the guiding action of the guide rod 210, ensures the stability and reliability of the equipment operation.

[0039] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0040] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to implementing the present invention) may be omitted.

[0041] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0042] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A semiconductor testing and sorting machine with automatic loading and unloading via AGV, characterized in that: include, The testing device (100) includes a housing (101), a host (102) fixedly connected inside the housing (101), a door (103) hinged in the middle of the housing (101), and a screen (104) fixedly connected to the side wall of the housing (101). The screen (104) is used in conjunction with the host (102). The loading and unloading device (200) includes a support plate (201) fixedly connected inside the housing (101), a slide rail (202) fixedly connected to the side wall of the support plate (201), a sliding member (203) slidably connected to the middle of the slide rail (202), a carrier (204) fixedly connected to the upper end of the sliding member (203), and a material tray (205) inserted into the middle side wall of the carrier (204). The carrier (204) runs above the support plate (201), and the housing (101) has an AGV trolley receiving port (105) in the middle for use with the carrier (204).

2. The AGV automatic loading and unloading semiconductor testing and sorting machine according to claim 1, characterized in that: The loading and unloading device (200) further includes a fixed base (206) fixedly connected to the bottom of the support plate (201), a turntable (207) rotatably connected to the center of the fixed base (206), and a push rod (208) threadedly connected to the center of the turntable (207). The end of the push rod (208) is inserted into the inner side of the middle through hole of the support plate (201), and the end of the push rod (208) extends to the lower end of the material tray (205).

3. The AGV automatic loading and unloading semiconductor testing and sorting machine according to claim 2, characterized in that: The loading and unloading device (200) further includes a connecting plate (209) fixedly connected to the bottom of the top rod (208), and a guide rod (210) fixedly connected to the side wall of the connecting plate (209). The end of the guide rod (210) is inserted into the middle of the support plate (201). The guide rod (210) is used in conjunction with the top rod (208), and the guide rod (210) and the top rod (208) have the same length.

4. The AGV automatic loading and unloading semiconductor testing and sorting machine according to claim 3, characterized in that: The loading and unloading device (200) further includes a lifting motor (211) fixedly connected to the side wall of the fixed base (206). The output end of the lifting motor (211) is equipped with a pulley (212) that works with the turntable (207), and a belt (213) adapted to be installed on the side wall of the pulley (212). The pulley (212) is connected to the turntable (207) via the belt (213).

5. The AGV automatic loading and unloading semiconductor testing and sorting machine according to claim 4, characterized in that: The loading and unloading device (200) further includes a lead screw (214) rotatably connected to the bottom of the support plate (201), a ball nut (215) threadedly connected to the middle side wall of the lead screw (214), and a support block (216) fixedly connected to the upper side wall of the ball nut (215). The upper end of the support block (216) is slidably connected to the side wall of the support plate (201), and the upper end of the support block (216) is fixedly connected to the end of the carrier (204).

6. The AGV automatic loading and unloading semiconductor testing and sorting machine according to claim 5, characterized in that: The loading and unloading device (200) also includes a translation motor (217) fixedly connected to the bottom side wall of the support plate (201), and the end of the translation motor (217) is connected to the lead screw (214) for transmission.

7. The AGV automatic loading and unloading semiconductor testing and sorting machine according to claim 6, characterized in that: The loading and unloading device (200) further includes a frame (218) fixedly connected to the upper end of the support plate (201), a limiting plate (219) fixedly connected to the side wall of the frame (218), and a limiting cylinder (220) fixedly connected to the side wall of the limiting plate (219). The frame (218) has a through hole structure in the middle that cooperates with the material tray (205), and the end of the limiting cylinder (220) extends through and to the inside of the limiting plate (219). The limiting plate (219) is engaged with the outside of the through hole in the middle of the frame (218).

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