Multi-station ultrahigh vacuum exhaust device

Abstract

The utility model relates to the technical field of air exhausting devices, in particular to a multi-station ultrahigh vacuum air exhausting device which comprises a base, a plurality of supporting columns are installed on the edge of the top of the base, a strip-shaped transverse plate is installed between every two adjacent supporting columns, the side face of each strip-shaped transverse plate is connected with at least three adsorption pipes through supporting plates, and the adsorption pipes are connected with the supporting plates. The top of the base is connected with a vacuum furnace, the vacuum furnace is located between the adsorption pipes, the bottom of each adsorption pipe is connected with a plurality of adsorption heads through first flanges, one end of each adsorption head is fixed to the side wall of the vacuum furnace, and the top of the base is provided with a first vacuum pump, a second vacuum pump and a third vacuum pump. According to the utility model, the adsorption heads are uniformly mounted on the side wall of the vacuum furnace, so that when the first vacuum pump, the second vacuum pump and the third vacuum pump are used for vacuumizing, the adsorption heads uniformly exhaust air, the air pressure in the vacuum furnace is kept uniform, and the use effect is improved.

Description

Technical Field

[0001] This utility model relates to the field of exhaust device technology, specifically a multi-station ultra-high vacuum exhaust device. Background Technology

[0002] The multi-station ultra-high vacuum exhaust system is an integrated system that can simultaneously achieve and maintain ultimate vacuum in multiple independent vacuum chambers, and is designed specifically for high-efficiency mass production environments.

[0003] Existing multi-station ultra-high vacuum exhaust devices typically use multi-stage vacuum pumps to evacuate the vacuum chamber through a single extraction port. This results in uneven pressure within the vacuum chamber, which can easily cause damage to the next stage vacuum pump due to excessive pressure. Consequently, the performance is poor. Furthermore, during installation, multi-stage vacuum pumps are usually bolted to the equipment. Disassembly and maintenance require workers to remove each bolt individually with a wrench before disassembly or installation can proceed, which is inconvenient and leads to poor performance.

[0004] Therefore, a multi-station ultra-high vacuum exhaust device is proposed to solve the problems mentioned above. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a multi-station ultra-high vacuum exhaust device, which can solve the problem of uneven air extraction caused by a single extraction port.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a multi-station ultra-high vacuum exhaust device, including a base, a number of support columns are installed on the top edge of the base, a strip-shaped horizontal plate is installed between two adjacent support columns, and at least three adsorption tubes are connected to the side of each strip-shaped horizontal plate through a support plate. A vacuum furnace is connected to the top of the base, and the vacuum furnace is located between the adsorption tubes.

[0007] The bottom of each adsorption tube is connected to several adsorption heads via a first flange, and one end of each adsorption head is fixed to the side wall of the vacuum furnace.

[0008] A first vacuum pump, a second vacuum pump, and a third vacuum pump are provided on the top of the base. Each of the first vacuum pump, the second vacuum pump, and the third vacuum pump is equipped with a suction pipe at its inlet end. A connecting pipe is installed on one side of each suction pipe, and the other end of each connecting pipe is connected to the end of the corresponding suction pipe through a second flange.

[0009] A pair of L-shaped limiting plates are installed on one side of each strip-shaped horizontal plate. An installation plate is provided between each pair of L-shaped limiting plates. One side of the first vacuum pump, the second vacuum pump, and the third vacuum pump is connected to the corresponding installation plate. A strip-shaped fixing plate is provided on one side of each pair of L-shaped limiting plates. The strip-shaped fixing plate is connected to the strip-shaped horizontal plate through an adjustment mechanism.

[0010] Preferably, the adjustment mechanism includes a through groove formed on the side of the strip plate, and a lead screw is rotatably connected inside each through groove. One end of each lead screw extends to one side of the support column, and a sliding block is threaded onto the side of each lead screw. One side of each sliding block extends out of the through groove and is connected to the side of the corresponding strip plate.

[0011] Preferably, when the mounting plate is placed inside the L-shaped limiting plate, the end of the mounting plate near the strip fixing plate extends to one side of the L-shaped limiting plate.

[0012] Preferably, each pair of L-shaped limiting plates has a strip baffle connected to the end away from the strip fixing plate, and one side of the strip baffle abuts against the side of the mounting plate.

[0013] Preferably, each suction tube is equipped with a valve.

[0014] Preferably, each adsorption tube is arranged in a "U" shape.

[0015] Preferably, a control cabinet is installed on the top side of the base, and the controller in the control cabinet is connected to the first vacuum pump, the second vacuum pump, the third vacuum pump and the valve respectively through wires.

[0016] Compared with the prior art, this utility model provides a multi-station ultra-high vacuum exhaust device, which has the following beneficial effects:

[0017] 1. By uniformly installing the adsorption heads on the side wall of the vacuum furnace, the adsorption heads can draw air evenly when the first, second, and third vacuum pumps are used for vacuuming, thus maintaining uniform air pressure inside the vacuum furnace and improving the performance.

[0018] 2. The L-shaped limiting plate can be used to initially fix the mounting plate. Then, by rotating the screw, the strip fixing plate can be tightly pressed against one end of the mounting plate to fix the mounting plate. This completes the installation of the first vacuum pump, the second vacuum pump, and the third vacuum pump. The installation is convenient. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the present utility model. Figure 1 ;

[0020] Figure 2 This is a schematic diagram of the structure of the present utility model. Figure 2 ;

[0021] Figure 3 This is a schematic diagram of the structure of the present invention and the vacuum furnace. Figure 1 ;

[0022] Figure 4 This is a schematic diagram of the structure of the present invention and the vacuum furnace. Figure 2 ;

[0023] Figure 5 This is a schematic diagram of the strip-shaped horizontal plate structure of this utility model;

[0024] Figure 6 This is a side sectional view of the L-shaped limiting plate and mounting plate structure of this utility model.

[0025] In the diagram: 1. Base; 2. Support column; 3. Lead screw; 4. Adsorption tube; 5. Adsorption head; 6. First flange; 7. Strip plate; 8. Connecting pipe; 9. Second flange; 10. L-shaped limiting plate; 11. First vacuum pump; 12. Strip fixing plate; 13. Through groove; 14. Second vacuum pump; 15. Strip baffle; 16. Third vacuum pump; 17. Sliding block; 18. Mounting plate; 19. Valve; 20. Suction pipe; 21. Support plate; 22. Control cabinet. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Example:

[0028] Please see Figure 1 - Figure 6 The multi-station ultra-high vacuum exhaust device in this embodiment includes a base 1, and a control cabinet 22 is installed on one side of the top of the base 1. The control cabinet 22 is equipped with a controller, which is either a control motherboard or a PLC logic controller.

[0029] like Figure 1 and Figure 2 As shown, several support columns 2 are installed on the top edge of the base 1. A strip-shaped horizontal plate 7 is installed between two adjacent support columns 2. At least three adsorption tubes 4 are connected to the side of each strip-shaped horizontal plate 7 through a support plate 21. The adsorption tubes 4 can be fixed by the support plate 21 to keep the adsorption tubes 4 stable.

[0030] like Figure 3 and Figure 4As shown, a vacuum furnace is connected to the top of the base 1. The vacuum furnace is located between the adsorption tubes 4. Each adsorption tube 4 is arranged in a "U" shape. The bottom of each adsorption tube 4 is connected to several adsorption heads 5 through the first flange 6. One end of each adsorption head 5 is fixed to the side wall of the vacuum furnace. The adsorption head 5 is connected to the inside of the vacuum furnace. During use, the adsorption head 5 is set in different positions in the vacuum furnace. In this way, when vacuuming, the air pressure inside the vacuum furnace can be kept uniform, thus improving the use effect.

[0031] like Figure 1 and Figure 2 As shown, a first vacuum pump 11, a second vacuum pump 14, and a third vacuum pump 16 are provided on the top of the base 1. Each of the three vacuum pumps has an intake pipe 20 installed at its inlet end. A connecting pipe 8 is installed on one side of each adsorption pipe 4. The other end of the connecting pipe 8 is connected to the end of the corresponding intake pipe 20 via a second flange 9. Each of the three vacuum pumps is a mechanical pump, a molecular pump, or an ion pump, and they are different from each other. All three are connected to a controller via wires. In actual use, the first vacuum pump 11, the second vacuum pump 14, and the third vacuum pump 16 sequentially draw air out of the corresponding adsorption pipe 4 through the intake pipe 20 and the connecting pipe 8, creating a negative pressure in the adsorption pipe 4. The adsorption pipe 4 then draws out the gas from the vacuum furnace through the adsorption head 5, thus performing vacuuming treatment inside the vacuum furnace and maintaining an ultra-high vacuum environment.

[0032] It should be noted that the outlets of the first vacuum pump 11, the second vacuum pump 14, and the third vacuum pump 16 are all connected to an external gas supply pipeline through pipes, so that the gas drawn into the vacuum can be discharged through the external pipeline.

[0033] It should be noted that each suction pipe 20 is equipped with a valve 19, which is connected to the controller via a wire. In actual use, when one of the first vacuum pump 11, the second vacuum pump 14, and the third vacuum pump 16 is working, the controller can open the corresponding valve 19 and close the other two valves 19, so as not to hinder the vacuuming process.

[0034] like Figure 5 and Figure 6As shown, a pair of L-shaped limiting plates 10 are installed on one side of the strip-shaped horizontal plate 7. An mounting plate 18 is provided between each pair of L-shaped limiting plates 10. One side of the first vacuum pump 11, the second vacuum pump 14, and the third vacuum pump 16 are all connected to the corresponding mounting plate 18. A strip-shaped fixing plate 12 is provided on one side of each pair of L-shaped limiting plates 10. The mounting plate 18 can be limited by the two L-shaped limiting plates 10, which can prevent the mounting plate 18 from coming out of the L-shaped limiting plates 10, thereby fixing the corresponding first vacuum pump 11, second vacuum pump 14, and third vacuum pump 16.

[0035] like Figure 5 As shown, the strip fixing plate 12 is connected to the strip horizontal plate 7 through an adjustment mechanism. The adjustment mechanism includes a through groove 13 on the side of the strip horizontal plate 7. Each through groove 13 is rotatably connected to a lead screw 3. One end of each lead screw 3 extends to one side of the support column 2, and a sliding block 17 is threaded onto the side of each lead screw 3. One side of each sliding block 17 extends out of the through groove 13 and connects to the side of the corresponding strip fixing plate 12. In actual use, after the mounting plate 18 is moved between the corresponding L-shaped limiting plates 10, the operator rotates the lead screw 3. The lead screw 3 will drive the sliding block 17 to move, and the sliding block 17 will drive the strip fixing plate 12 to move, so that the strip fixing plate 12 abuts against one side of the mounting plate 18, fixing the mounting plate 18 between the L-shaped limiting plates 10, which is convenient for fixing.

[0036] like Figure 5 As shown, when the mounting plate 18 is placed inside the L-shaped limiting plate 10, the end of the mounting plate 18 near the strip fixing plate 12 extends to one side of the L-shaped limiting plate 10. Each pair of L-shaped limiting plates 10 is connected to a strip baffle 15 at the end away from the strip fixing plate 12. One side of the strip baffle 15 abuts against the side of the mounting plate 18. A fixed space can be formed between the strip baffle 15, the strip fixing plate 12, and the L-shaped limiting plate 10, so that the mounting plate 18 can be fixed in the space. The fixing is convenient and the mounting plate 18 will not come out of the space.

[0037] The working principle of the above embodiments is as follows:

[0038] During use and installation, the mounting plates 18 on one side of the first vacuum pump 11, the second vacuum pump 14, and the third vacuum pump 16 are moved into the corresponding L-shaped limiting plates 10. Then, the lead screw 3 is rotated, which drives the sliding block 17 to move. The sliding block 17 drives the strip fixing plate 12 to move, so that one side of the strip fixing plate 12 is tightly pressed against the end of the corresponding mounting plate 18, fixing the mounting plate 18 in place. This completes the installation of the first vacuum pump 11, the second vacuum pump 14, and the third vacuum pump 16, which is convenient to install.

[0039] Then, the suction pipes 20 on the first vacuum pump 11, the second vacuum pump 14, and the third vacuum pump 16 are connected to the corresponding connecting pipes 8 through the second flange 9. During use, the controller controls the mechanical pumps in the first vacuum pump 11, the second vacuum pump 14, and the third vacuum pump 16 to work, and the controller simultaneously closes the other two valves 19. The mechanical pumps can suck out the air in the adsorption tube 4 through the suction pipe 20 and the connecting pipe 8, so that the adsorption tube 4 sucks out the air in the vacuum furnace through the adsorption head 5. Under the action of multiple adsorption heads 5, the air in the vacuum furnace can be evenly extracted, so that the air pressure in the vacuum furnace remains uniform.

[0040] After the gas inside the vacuum furnace reaches the preset pressure, the controller shuts off the mechanical pump and closes valve 19. Then, it controls another molecular pump to operate and simultaneously opens its corresponding valve 19. The molecular pump then draws air out of the vacuum furnace through the suction pipe 20, connecting pipe 8, adsorption pipe 4, and adsorption head 5, further improving the vacuum environment inside the vacuum furnace. Finally, the controller controls the final ion pump to operate, opening its corresponding valve 19 and closing the other valves 19. The ion pump performs a final vacuuming operation inside the vacuum furnace, maintaining an ultra-high vacuum environment and improving the performance.

[0041] The installation, connection, or setting methods disclosed in this embodiment are all common mechanical connection methods. As long as they can achieve their beneficial effects, they can be implemented. Therefore, this embodiment will not elaborate on their specific structural composition and working principle.

[0042] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A multi-station ultra-high vacuum exhaust device, characterized in that: Includes a base (1), with several pillars (2) installed on the top edge of the base (1), and strip-shaped horizontal plates (7) installed between two adjacent pillars (2). Each strip-shaped horizontal plate (7) has at least three adsorption tubes (4) connected to its side via a support plate (21). A vacuum furnace is connected to the top of the base (1), and the vacuum furnace is located between the adsorption tubes (4). The bottom of each adsorption tube (4) is connected to several adsorption heads (5) via a first flange (6), and one end of each adsorption head (5) is fixed to the side wall of the vacuum furnace. A first vacuum pump (11), a second vacuum pump (14), and a third vacuum pump (16) are provided on the top of the base (1). The inlet end of the first vacuum pump (11), the second vacuum pump (14), and the third vacuum pump (16) are all equipped with suction pipes (20). A connecting pipe (8) is installed on one side of each of the adsorption pipes (4). The other end of the connecting pipe (8) is connected to the end of the corresponding suction pipe (20) through a second flange (9). A pair of L-shaped limiting plates (10) are installed on one side of each of the strip-shaped horizontal plates (7). An installation plate (18) is provided between each pair of L-shaped limiting plates (10). One side of the first vacuum pump (11), the second vacuum pump (14), and the third vacuum pump (16) is connected to the corresponding installation plate (18). A strip-shaped fixing plate (12) is provided on one side of each pair of L-shaped limiting plates (10). The strip-shaped fixing plate (12) is connected to the strip-shaped horizontal plate (7) through an adjustment mechanism.

2. The multi-station ultra-high vacuum exhaust device according to claim 1, characterized in that: The adjustment mechanism includes a through groove (13) on the side of the strip plate (7). Each through groove (13) is rotatably connected to a lead screw (3). One end of each lead screw (3) extends to one side of the support column (2). Each lead screw (3) is threaded with a sliding block (17) on its side. One side of each sliding block (17) extends out of the through groove (13) and is connected to the side of the corresponding strip plate (12).

3. The multi-station ultra-high vacuum exhaust device according to claim 2, characterized in that: When the mounting plate (18) is placed inside the L-shaped limiting plate (10), one end of the mounting plate (18) near the strip fixing plate (12) extends to one side of the L-shaped limiting plate (10).

4. The multi-station ultra-high vacuum exhaust device according to claim 3, characterized in that: Each pair of L-shaped limiting plates (10) has a strip baffle (15) connected to the end away from the strip fixing plate (12), and one side of the strip baffle (15) abuts against the side of the mounting plate (18).

5. The multi-station ultra-high vacuum exhaust device according to claim 1, characterized in that: Each suction tube (20) is equipped with a valve (19).

6. The multi-station ultra-high vacuum exhaust device according to claim 1, characterized in that: Each adsorption tube (4) is arranged in a "U" shape.

7. The multi-station ultra-high vacuum exhaust device according to claim 5, characterized in that: A control cabinet (22) is installed on one side of the top of the base (1). The controller inside the control cabinet (22) is connected to the first vacuum pump (11), the second vacuum pump (14), the third vacuum pump (16) and the valve (19) respectively through wires.

Images