Weight increasing structure of quartz tuning fork

Abstract

The utility model provides a weighting structure of quartz tuning forks, which is used for weighting a plurality of quartz tuning forks distributed in a tuning fork array, and comprises a mask plate which is arranged at an interval with the tuning fork array, and the spacing distance between the mask plate and the tuning fork array is greater than the thickness of a weighting layer on the quartz tuning forks; a mask window is formed in the position, corresponding to each weighting layer, of the mask plate. In the scheme, the mask plate and the tuning fork array are arranged at an interval, and the spacing distance between the mask plate and the tuning fork array is greater than the thickness of the weighting layer on the quartz tuning fork, so that the edge of the weighting layer can be prevented from being adhered to the inner wall of the mask window during weighting; therefore, the problem that in the prior art, a weighting layer of a small and medium-sized quartz tuning fork adheres to a mask to generate silver scraps is solved, and the preparation precision of the small-sized quartz tuning fork is improved.

Description

Technical Field

[0001] This utility model relates to the field of PVD mask technology, and in particular to a weighting structure for a quartz tuning fork. Background Technology

[0002] PVD masking technology allows for selective coating of specific areas by placing a mask on a substrate, exposing only those areas for deposition. PVD technology includes various methods such as vacuum evaporation, sputtering, and particle deposition, all of which can achieve patterned coating by adding a mask.

[0003] When using patterned masking to add weight to small quartz tuning forks (e.g., 1.6mm×1.0mm, 1.2mm×1.0mm, or 1.0mm×0.8mm), silver dust often occurs, affecting the vibration frequency of the small quartz tuning forks. Analysis revealed that during the weighting process, the plating in the weighted area adheres to the mask window. When the mask is removed after weighting, it breaks off at the adhesion point, resulting in silver dust. This silver dust problem is now considered one of the most pressing issues to address in improving tuning fork quality. Utility Model Content

[0004] Based on the problems existing in the prior art, this utility model aims to solve the technical problem that silver flakes often occur when using patterned masking technology to add weight to small fossil tuning forks.

[0005] This utility model provides a weighting structure for a quartz tuning fork, used to weight several quartz tuning forks distributed in an array. It includes a mask plate spaced apart from the tuning fork array, and the distance between the mask plate and the tuning fork array is greater than the thickness of the weighting layer on the quartz tuning fork.

[0006] The mask plate has mask windows corresponding to the positions of each of the weighted layers.

[0007] According to one embodiment of the present invention, the weighting structure of the quartz tuning fork further includes a partition plate disposed between the mask plate and the tuning fork array, wherein the two side surfaces of the partition plate are respectively attached to the mask plate and the tuning fork array, and the thickness of the partition plate is greater than the thickness of the weighting layer.

[0008] The partition plate has a plurality of first through holes that correspond one-to-one with the mask window. The size of the first through hole in any direction in its plane is not less than the size of the mask window in the corresponding direction in its plane.

[0009] The size of the first through hole in any direction within its plane does not exceed 1.5 times the size of the mask window in the corresponding direction within its plane.

[0010] According to one embodiment of the present invention, the weighting structure of the quartz tuning fork further includes a positioning plate, wherein the positioning plate has a placement opening with a shape matching the shape of the tuning fork array, and the depth of the placement opening does not exceed the thickness of the tuning fork array.

[0011] According to one embodiment of the present invention, the weighting structure of the quartz tuning fork further includes a fixing plate, wherein the partition plate presses the mask plate and the partition plate sequentially onto the surface of the positioning plate;

[0012] The fixing plate has a plurality of second through holes that correspond one-to-one with the mask window. The size of the second through hole in any direction in its plane is not less than the size of the mask window in the corresponding direction in its plane.

[0013] According to one embodiment of the present invention, the thickness of the fixing plate is greater than the thickness of the mask plate.

[0014] According to one embodiment of the present invention, several quartz tuning forks in each row of the tuning fork array are arranged in a straight line along a direction perpendicular to their vibrating arms;

[0015] On the mask, several mask windows in the same row are interconnected;

[0016] On the partition, several first through holes in the same row are interconnected;

[0017] On the fixed plate, several second through holes in the same row are interconnected.

[0018] According to one embodiment of the present invention, two mask plates are symmetrically arranged on both sides of the tuning fork array.

[0019] The beneficial effects of this utility model are:

[0020] This utility model provides a weighting structure for a quartz tuning fork. By spacing the mask plate and the tuning fork array apart, and making the spacing distance between the mask plate and the tuning fork array greater than the thickness of the weighting layer on the quartz tuning fork, the edge of the weighting layer can be prevented from adhering to the inner wall of the mask window during weighting. This avoids the silver dust problem caused by the adhesion between the weighting layer and the mask plate in small quartz tuning forks in the prior art, and improves the manufacturing accuracy of small quartz tuning forks. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the weighting structure of a quartz tuning fork provided in an embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of the positioning plate in an embodiment of this utility model;

[0024] Figure 3 This is a schematic diagram of the mask plate structure in an embodiment of this utility model;

[0025] Figure 4 This is a schematic diagram of the partition structure in an embodiment of this utility model;

[0026] Figure 5 This is a schematic diagram of the structure of the fixing plate in an embodiment of this utility model;

[0027] Reference numerals: 100, tuning fork array; 101, weighting layer; 1, mask plate; 10, mask window; 2, partition plate; 20, first through hole; 3, positioning plate; 30, placement port; 4, fixing plate; 40, second through hole. Detailed Implementation

[0028] The following description of the embodiments is with reference to the accompanying illustrations, which illustrate specific embodiments in which the present invention can be implemented.

[0029] This utility model provides a weighting structure for quartz tuning forks, used to weight several quartz tuning forks arranged in an array in a tuning fork array 100. The tuning fork array 100 includes several arrayed quartz tuning forks. The weighting structure for the quartz tuning forks is as follows: Figure 1 As shown, it includes a mask plate 1 spaced apart from the tuning fork array 100, and the distance between the mask plate 1 and the tuning fork array 100 (referring to the distance between two opposite surfaces of the mask plate 1 and the tuning fork array 100) is greater than the thickness of the weight layer 101 on the quartz tuning fork.

[0030] The mask plate 1 has a mask window 10 corresponding to the position of each weight layer 101, and the shape and size of the mask window 10 are consistent with the shape and size of the corresponding weight layer 101. Specifically, in this embodiment, the weight layer 101 is located at the hammer of the quartz tuning fork, so for a quartz tuning fork, two mask windows 10 need to be opened on the mask plate 1 during the weighting process.

[0031] By spacing the mask 1 and the tuning fork array 100 apart, and making the distance between the mask 1 and the tuning fork array 100 greater than the thickness of the weighting layer 101 on the quartz tuning fork, it is possible to avoid the edge of the weighting layer 101 adhering to the inner wall of the mask window 10 during weighting. This avoids the silver dust problem caused by the adhesion between the weighting layer and the mask in small quartz tuning forks in the prior art, and improves the manufacturing accuracy of small quartz tuning forks.

[0032] Furthermore, in order to facilitate the spacing between the mask plate 1 and the tuning fork array 100, the weighting structure of the quartz tuning fork also includes a partition plate 2 disposed between the mask plate 1 and the tuning fork array 100. The two side surfaces of the partition plate 2 are respectively attached to the mask plate 1 and the tuning fork array 100, and the thickness of the partition plate 2 is greater than the thickness of the weighting layer 101.

[0033] The partition 2 has a plurality of first through holes 20 corresponding one-to-one with the mask window 10. The size of the first through hole 20 in any direction in its plane is not less than the size of the mask window 10 in the corresponding direction in its plane.

[0034] It is easy to understand that by setting a partition 2 between the mask plate 1 and the tuning fork array 100, when arranging the weighting structure of the quartz tuning fork, the partition 2 and the mask plate 1 can be stacked sequentially on the surface of the tuning fork array 100, and the weighting layer 101 is kept in a one-to-one correspondence with the first through hole 20 and the mask window 10 and is concentrically arranged, that is, the mask plate 1 and the tuning fork array 100 are spaced apart; at the same time, compared with other methods, such as setting several support blocks between the mask plate 1 and the tuning fork array 100, this embodiment sets the partition 2 between the mask plate 1 and the tuning fork array 100, which can prevent the mask plate 1 from bending and deforming under gravity, and can also prevent indentations from appearing on the mask plate 1 or the quartz tuning fork.

[0035] Preferably, in order to better support the mask plate 1, the size of the first through hole 20 in any direction in its plane does not exceed 1.5 times the size of the mask window 10 in the corresponding direction in its plane.

[0036] According to one embodiment of the present invention, the weighting structure of the quartz tuning fork further includes a positioning plate 3, the structure of which is as follows: Figure 2 As shown, the positioning plate 3 has a placement opening 30 whose shape matches the shape of the tuning fork array 100, and the depth of the placement opening 30 does not exceed the thickness of the tuning fork array 100.

[0037] Generally, the tuning fork array 100 is directly formed on the wafer, in which case the shape of the placement opening 30 should match the shape of the wafer.

[0038] Furthermore, since the thicknesses of the mask plate 1 and the partition plate 2 are similar (in this embodiment, the thicknesses of both the mask plate 1 and the partition plate 2 are 0.1 mm), in order to ensure that the partition plate 2 and the mask plate 1 are flatly stacked on the surface of the tuning fork array 100, the weighting structure of the quartz tuning fork also includes a fixing plate 4. The fixing plate 4 presses the mask plate 1 and the partition plate 2 sequentially onto the surface of the positioning plate 3. Specifically, the fixing plate 4 can press the mask plate 1 and the partition plate 2 sequentially onto the surface of the positioning plate 3 by magnetic force. Since fixing the mask plate 1 by magnetic force is existing technology, the principle of pressing is not described in detail in this embodiment.

[0039] The fixing plate 4 has a plurality of second through holes 40 that correspond one-to-one with the mask window 10. The size of the second through hole 40 in any direction in its plane is not less than the size of the mask window 10 in the corresponding direction in its plane.

[0040] Preferably, the thickness of the fixing plate 4 is greater than the thickness of the mask plate 1. In one embodiment of this utility model, the thicknesses of the mask plate 1, the partition plate 2, the positioning plate 3, and the fixing plate 4 are 0.1 mm, 0.1 mm, 0.8 mm, and 0.3 mm, respectively.

[0041] The tuning fork array 100 has several quartz tuning forks arranged in a straight line along a direction perpendicular to their vibrating arms in each row. To facilitate the processing of the mask windows 10, the first through-hole 20, and the second through-hole 40 on the mask plate 1, the partition plate 2, and the fixing plate 4, in this embodiment, several mask windows 10 in the same row on the mask plate 1 are interconnected, such as... Figure 3 As shown; on the partition 2, several of the first through holes 20 in the same row are interconnected, as shown in the figure. Figure 4 As shown; on the fixing plate 4, several second through holes 40 in the same row are interconnected, such as... Figure 5As shown. The interconnected mask windows 10, the first through-hole 20, or the second through-hole 40 have a large size, thereby facilitating processing.

[0042] Furthermore, in order to simultaneously increase the weight on both sides of the quartz tuning fork (hammer), two mask plates 1 are symmetrically arranged on both sides of the tuning fork array 100.

[0043] It should be noted that since the double-sided weighting process is an existing technology (such as the YZ860-Ⅱ vacuum silver plating machine developed by Chengdu Youzhen Technology Co., Ltd., which can support double-sided silver plating), the specific principle of the double-sided weighting of the quartz tuning fork will not be elaborated.

[0044] To facilitate understanding of this solution, the following is combined with... Figures 1-5 The working principle of the weighting structure of the quartz tuning fork provided by this utility model is described in detail below:

[0045] During operation, the wafer (with the tuning fork array 100 formed on it) is fixed in the placement port 30, and the mask plate 1, the partition plate 2 and the fixing plate 4 are stacked sequentially on the upper and lower surfaces of the wafer. The weighting layer 101, the mask window 10, the first through hole 20 and the second through hole 40 are aligned one-to-one and concentrically arranged. The fixing plates 4 on both sides can clamp and fix the wafer.

[0046] When the weighting process begins, particles generated by the target material pass sequentially through the second through-hole 40 and the first through-hole 20 in a direction perpendicular or nearly perpendicular to the wafer and are deposited on the hammerhead of the quartz tuning fork. After a period of time, the weighting layer 101 is formed on both sides of the hammerhead.

[0047] In summary, the weighting structure for a quartz tuning fork provided by this utility model, by spacing the mask plate 1 and the tuning fork array 100 apart and making the spacing distance between the mask plate 1 and the tuning fork array 100 greater than the thickness of the weighting layer 101 on the quartz tuning fork, can avoid the weighting layer 101 from sticking to the mask plate 1 during weighting, thereby avoiding the silver dust problem generated when weighting small quartz tuning forks in the prior art and improving the manufacturing accuracy of small quartz tuning forks.

[0048] It should be noted that although the present invention has been disclosed above with specific embodiments, the above embodiments are not intended to limit the present invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the scope defined in the claims.

Claims

1. A weighting structure for a quartz tuning fork, used to weight a plurality of quartz tuning forks arrayed in a tuning fork array (100), characterized in that, Includes a mask plate (1) spaced apart from the tuning fork array (100), wherein the distance between the mask plate (1) and the tuning fork array (100) is greater than the thickness of the weight layer (101) on the quartz tuning fork; The mask plate (1) has a mask window (10) at the position corresponding to each of the weighted layers (101).

2. The weighting structure of the quartz tuning fork according to claim 1, characterized in that, It also includes a partition (2) disposed between the mask (1) and the tuning fork array (100), the two sides of the partition (2) being respectively attached to the mask (1) and the tuning fork array (100), and the thickness of the partition (2) being greater than the thickness of the weighting layer (101); The partition (2) has a plurality of first through holes (20) that correspond one-to-one with the mask window. The size of the first through hole (20) in any direction in its plane is not less than the size of the mask window (10) in the corresponding direction in its plane.

3. The weighting structure of the quartz tuning fork according to claim 2, characterized in that, The size of the first through hole (20) in any direction in its plane does not exceed 1.5 times the size of the mask window (10) in the corresponding direction in its plane.

4. The weighting structure of the quartz tuning fork according to claim 2, characterized in that, It also includes a positioning plate (3), on which a placement opening (30) with a shape matching the shape of the tuning fork array (100) is provided, and the depth of the placement opening (30) does not exceed the thickness of the tuning fork array (100).

5. The weighting structure of the quartz tuning fork according to claim 4, characterized in that, It also includes a fixing plate (4), wherein the partition plate (2) presses the mask plate (1) and the partition plate (2) together on the surface of the positioning plate (3); The fixing plate (4) has a plurality of second through holes (40) that correspond one-to-one with the mask window (10). The size of the second through hole (40) in any direction in its plane is not less than the size of the mask window (10) in the corresponding direction in its plane.

6. The weighting structure of the quartz tuning fork according to claim 5, characterized in that, The thickness of the fixing plate (4) is greater than the thickness of the mask plate (1).

7. The weighting structure of the quartz tuning fork according to claim 5, characterized in that, In each row of the tuning fork array (100), several quartz tuning forks are arranged in a straight line along a direction perpendicular to their vibrating arms. On the mask plate (1), several mask windows (10) in the same row are interconnected; On the partition (2), several of the first through holes (20) in the same row are interconnected; On the fixing plate (4), several second through holes (40) in the same row are interconnected.

8. The weighting structure of the quartz tuning fork according to any one of claims 1 to 7, characterized in that, Two mask plates (1) are symmetrically arranged on both sides of the tuning fork array (100).

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