Cantilever type partition mechanism of cleaning machine

Abstract

The utility model discloses a cantilever type partition mechanism of a cleaning machine, which belongs to the technical field of wafer cleaning equipment and comprises a frame body, a drying chamber, a cleaning chamber and a driving mechanism chamber arranged on the rear side of the drying chamber in the frame body. A drying table is arranged in the drying chamber, and a cleaning table is arranged in the cleaning chamber; a lifting channel is longitudinally arranged between the drying table and the cleaning table, a partition door is arranged in the lifting channel, a lifting mechanism is arranged in the driving mechanism chamber, a long groove is formed in the front side of the lifting channel on the frame body, the front end of the partition door is connected with a plurality of rollers capable of sliding in the long groove, and the rear end of the partition door is connected with the lifting mechanism. The cantilever type partition mechanism of the cleaning machine has the advantages of being simple in structure, safe, reliable, long in service life and convenient to maintain.

Description

Technical Field

[0001] This utility model relates to the technical field of wafer cleaning equipment, and in particular to a cantilevered partition mechanism for a cleaning machine. Background Technology

[0002] In semiconductor device manufacturing, silicon wafers must undergo rigorous cleaning because even minute amounts of contamination can lead to device failure. The purpose of cleaning is to remove surface contaminants, including both organic and inorganic substances. These impurities exist on the silicon wafer surface in various states, such as atomic or ionic, thin films, or particles. Pure water, acidic, or alkaline liquids can be used to clean the silicon wafers.

[0003] Tank cleaning machines can clean multiple silicon wafers simultaneously. They can also clean sapphire substrates for LEDs. The silicon wafer cleaning process typically consists of four stages: loading, cleaning, drying, and unloading. The area containing the loading station and the cleaning tank (also called the process tank) is called the wet zone, while the area containing the spin dryer and the unloading station is called the dry zone. During the cleaning process, materials need to be transferred between the wet and dry zones. However, when materials are not being transferred, the wet and dry zones need to be isolated; otherwise, moisture, acid fumes, and other contaminants from the wet zone will diffuse into the dry zone, causing secondary pollution. To isolate the wet and dry zones and facilitate material transfer, tank cleaning machines usually employ an openable isolation structure. Existing isolation structures typically have their drive mechanisms located above or below the cleaning machine, but these mechanisms are complex, susceptible to corrosion from acid fumes and fumes, and have a short lifespan. Therefore, a low-cost, simple, and easy-to-maintain isolation device is desired to separate the dry and wet zones in a tank cleaning machine. Summary of the Invention

[0004] One of the purposes of this utility model is to provide a cantilevered partition mechanism for a cleaning machine that is simple in structure and easy to maintain, so as to prevent water vapor, acid gas or acid mist from the wet area from spreading to the dry area.

[0005] Another objective of this invention is to provide a cantilevered partition mechanism for a cleaning machine, which prevents moisture, acidic gases, or acid mists from the wet area from spreading to the power unit of the partition mechanism, thus extending its service life.

[0006] The technical solution adopted in this utility model is as follows.

[0007] A cantilevered partition mechanism for a cleaning machine is characterized in that: the cleaning machine includes a frame, within which is a drying chamber, a cleaning chamber located to the right or left of the drying chamber, and a drive mechanism chamber located behind the drying chamber; a drying table is located in the drying chamber, and a cleaning table is located in the cleaning chamber; a longitudinal lifting channel is provided between the drying table and the cleaning table, and a partition door is located within the lifting channel; a lifting mechanism is located within the drive mechanism chamber; a long groove perpendicular to the ground and opening backwards is provided on the front side of the lifting channel on the frame; the front end of the partition door is connected to three rollers that can slide within the long groove; and the rear end of the partition door is connected to the lifting mechanism. A drive mechanism maintenance door communicating with the drive mechanism chamber is provided on the frame.

[0008] The beneficial effects of this invention are as follows: When the partition door rises under the action of the lifting mechanism, it separates the washing chamber and the drying chamber into two unconnected spaces. Using this lifting door to isolate the drying and wet areas, the door is open when materials need to be transferred between them, facilitating material transfer by the robotic arm; when material transfer is not required, the door is closed to prevent moisture, acidic gases, or acid mist from the wet area from spreading into the drying area. This invention employs a cantilever structure, housing the lifting mechanism within the drive mechanism chamber, and includes a drive mechanism inspection door connected to the drive mechanism chamber on the frame for easy maintenance. The front end of the partition door is connected to several rollers that slide within a long groove. The rollers roll within the groove, resulting in low resistance and a simple, safe, and reliable structure.

[0009] As a preferred technical solution, the lifting mechanism includes a guide rail vertically arranged in the drive mechanism chamber, a slider installed on the guide rail, and the rear end of the right side of the partition door connected to the slider; a rack is vertically provided at the rear end of the right side of the partition door; a partition door drive motor is longitudinally connected to the left side of the upright plate, and a drive gear is provided on the output shaft of the partition door drive motor, which meshes with the rack.

[0010] As a preferred technical solution, a sleeve is provided vertically on the left side of the rear end of the partition door, and a counterweight is inserted into the sleeve. The counterweight is connected to the top of the rack.

[0011] This technical solution can improve the stability of the partition door's lifting and lowering.

[0012] As a preferred technical solution, the top of the counterweight is connected to the first vertically installed pole, and the top of the first vertical pole is connected to the top of the rack via a crossbar.

[0013] As a preferred technical solution, the crossbar is connected to the top of the rack via the second upright.

[0014] This technical solution facilitates the maintenance of the drive mechanism.

[0015] As a preferred technical solution, a sealing plate is provided on each side of the partition door, and the sealing plate contacts the rear side of the lifting channel; a corrugated plate is connected between the top of the two sealing plates and the top of the drive mechanism chamber. Furthermore, the sealing plate on each side of the partition door, with its contact with the rear side of the lifting channel and the corrugated plate connecting the top of the two sealing plates to the top of the drive mechanism chamber, prevents volatile substances from the cleaning fluid in the cleaning chamber from entering the drive mechanism chamber and corroding the drive mechanism, thus extending the lifespan of the drive mechanism. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a preferred embodiment of the cantilever partition mechanism of the cleaning machine of this utility model.

[0017] Figure 2 yes Figure 1 The image shows a front view of the cleaning machine.

[0018] Figure 3 yes Figure 2 A sectional view along B-B'.

[0019] Figure 4 yes Figure 3 A magnified view of part A.

[0020] Figure 5 yes Figure 3 A cross-sectional view along C-C'.

[0021] Figure 6 yes Figure 5 A magnified view of part D.

[0022] Figure 7 yes Figure 6 A magnified view of part E.

[0023] Figure 8 yes Figure 6 A magnified view of part F.

[0024] Figure 9 yes Figure 1 The rear view of the cleaning machine shown.

[0025] Figure 10 yes Figure 1 The left view of the cleaning machine shown.

[0026] Figure 11 This is a state diagram of the lifting mechanism.

[0027] Figure 12 yes Figure 11 A magnified view of part G.

[0028] Figure 13 yes Figure 11 A magnified view of part H.

[0029] Figure 14 yes Figure 11 A magnified view of part I.

[0030] Figure 15 yes Figure 11 The top view of the lifting mechanism shown.

[0031] Figure 16 yes Figure 15 A magnified view of part J.

[0032] Figure 17 yes Figure 16 A magnified view of part K.

[0033] Figure 18 yes Figure 11 The diagram shows a state of the lifting mechanism.

[0034] Figure 19 yes Figure 18 A magnified view of part L.

[0035] Figure 20 yes Figure 18 A magnified view of part M.

[0036] Figure 21 This is a schematic diagram of a preferred embodiment of the cantilever partition mechanism of the cleaning machine of this utility model.

[0037] Among them: frame-1; long groove-10; window-11;

[0038] Drying chamber-2; Drying table-21; Wafer basket drying trough-22; Wafer basket inlet / outlet-23;

[0039] Cleaning chamber-3; Cleaning table-31; Wafer basket cleaning tank-32;

[0040] Drive mechanism compartment-4; Drive mechanism maintenance door-41;

[0041] Lifting channel -5;

[0042] Partition door-6; Rollers-61;

[0043] Guide rail - 7; slider - 71; rack - 72; partition door drive motor - 73; drive gear - 74; sleeve - 75; counterweight - 76; first upright - 77; crossbar - 78; second upright - 79; sealing plate - 710; corrugated plate - 711;

[0044] Crystal disk-8; Crystal disk rack-81; Crystal disk rack lifting hook-82; Horizontal track-83; Lifting hook vertical motion drive mechanism-84; Sliding block-85; Sliding block drive device-86. Detailed Implementation

[0045] The present invention will now be further described in conjunction with the accompanying drawings and embodiments.

[0046] Example 1. As... Figure 1-20 As shown, a cantilevered partition mechanism for a cleaning machine is characterized in that: the cleaning machine includes a frame 1, within which a drying chamber 2, a cleaning chamber 3 located to the right of the drying chamber 2, and a drive mechanism chamber 4 located behind the drying chamber 2 within the frame; a drying table 21 is provided in the drying chamber 2, and a cleaning table 31 is provided in the cleaning chamber 3; a longitudinal lifting channel 5 is provided between the drying table 21 and the cleaning table 31, and a partition door 6 is provided within the lifting channel 5; a lifting mechanism is provided within the drive mechanism chamber 4. A drive mechanism maintenance door 41 communicating with the drive mechanism chamber 4 is provided on the frame.

[0047] like Figure 7 , 16 As shown in -17, the lifting mechanism includes a guide rail 7 vertically arranged in the drive mechanism chamber 4, a slider 71 installed on the guide rail 7, and the rear end of the right side of the partition door 6 connected to the slider 71; a rack 72 is vertically arranged at the rear end of the right side of the partition door 6; a partition door drive motor 73 is longitudinally arranged on the left side of the upright plate, and a drive gear 74 is arranged on the output shaft of the partition door drive motor 73, which meshes with the rack 72.

[0048] A sleeve 75 is vertically arranged on the left side of the rear end of the partition door 6. A counterweight 76 is inserted into the sleeve 75. The counterweight 76 is connected to the top of the rack 72, which can improve the stability of the partition door's lifting and lowering.

[0049] Specifically, the top of the counterweight 76 is connected to the vertically positioned first upright 77, and the top of the first upright 77 is connected to the crossbar 78. The crossbar 78 is connected to the top of the rack 72 via the second upright 79. Figure 8 As shown, the front side of the lifting channel 5 on the frame 1 has a long groove 10 with its opening facing backward and perpendicular to the ground. The front end of the partition door 6 is connected to several rollers 61 that can slide within the long groove 10, and the rear end of the partition door 6 is connected to the lifting mechanism. Each side of the partition door 6 is provided with a sealing plate 710, which contacts the rear side of the lifting channel 5; a corrugated plate 711 is connected between the top of the two sealing plates 710 and the top of the drive mechanism chamber 4.

[0050] The drying table 21 is equipped with a wafer basket drying tank 22; the cleaning table 31 is equipped with several wafer basket cleaning tanks 32. The frame 1 has two horizontal rails 83, on which sliding blocks 85 and sliding block drive devices 86 are installed. The sliding blocks 85 are equipped with a vertical motion drive mechanism 84 for lifting hooks, and the horizontal motion drive mechanism 84 for lifting hooks is connected to a wafer rack lifting hook 82. Each cleaning table 31 and drying table 21 is equipped with a wafer rack 81, and wafer racks 8 are mounted on the wafer racks 81.

[0051] When the partition door 6 rises in the lifting mechanism, it separates the cleaning chamber 3 and the drying chamber 2 into two unconnected spaces. This lifting door isolates the drying and wet areas. When materials need to be transferred between the two areas, the door is open to facilitate material transfer by the robotic arm; when no material transfer is needed, the door is closed to prevent moisture, acid fumes, or acid mist from the wet area from spreading into the drying area. This invention employs a cantilever structure, with the lifting mechanism housed within the drive mechanism chamber 4. Each side of the partition door 6 has a sealing plate 710, which contacts the rear side of the lifting channel 5. A corrugated plate 711 connects the top of the two sealing plates 710 to the top of the drive mechanism chamber 4. This prevents volatile substances from the cleaning liquid in the cleaning chamber from entering the drive mechanism chamber 4 and corroding the drive mechanism, thus extending its lifespan. It also features a simple structure, safety, reliability, and ease of maintenance.

[0052] Example 2. (As shown) Figure 21 As shown, the difference between this embodiment and embodiment 1 is that the cleaning chamber 3 is located on the left side of the drying chamber 2.

[0053] The embodiments listed above are for understanding the present utility model only and are not intended to limit the technical solutions described herein. Those skilled in the art can make various changes or modifications, and all equivalent changes or modifications should be covered within the protection scope of the present utility model. Any aspects not detailed in the present utility model are well-known to those skilled in the art.

Claims

1. A cantilever partition mechanism for a cleaning machine, characterized in that: The frame includes a frame (1), a drying chamber (2) inside the frame (1), a cleaning chamber (3) located on the right or left side of the drying chamber (2), and a drive mechanism chamber (4) located on the rear side of the drying chamber (2) inside the frame; a drying table (21) is provided inside the drying chamber (2), and a cleaning table (31) is provided inside the cleaning chamber (3); a vertical lifting channel (5) is provided between the drying table (21) and the cleaning table (31); a partition door (6) is provided inside the lifting channel (5), and a lifting mechanism is provided inside the drive mechanism chamber (4); a long groove (10) with an opening facing backward and perpendicular to the ground is provided on the front side of the lifting channel (5) on the frame (1); the front end of the partition door (6) is connected to several rollers (61) that can slide in the long groove (10), and the rear end of the partition door (6) is connected to the lifting mechanism; a drive mechanism maintenance door (41) connected to the drive mechanism chamber (4) is provided on the frame.

2. The cantilever partition mechanism for a cleaning machine as described in claim 1, characterized in that: The lifting mechanism includes a guide rail (7) vertically arranged in the drive mechanism chamber (4), a slider (71) installed on the guide rail (7), and the rear end of the right side of the partition door (6) connected to the slider (71); a rack (72) is vertically arranged at the rear end of the right side of the partition door (6); a partition door drive motor (73) is longitudinally arranged on the left side of the upright plate, and a drive gear (74) is provided on the output shaft of the partition door drive motor (73), and the drive gear (74) meshes with the rack (72).

3. The cantilever partition mechanism for the cleaning machine as described in claim 2, characterized in that: A sleeve (75) is provided vertically on the left side of the rear end of the partition door (6). A counterweight (76) is inserted inside the sleeve (75), and the counterweight (76) is connected to the top of the rack (72).

4. The cantilever partition mechanism for a cleaning machine as described in claim 3, characterized in that: The top of the counterweight (76) is connected to the first vertical pole (77) which is set vertically, and the top of the first vertical pole (77) is connected to the top of the rack (72) through the crossbar (78).

5. The cantilever partition mechanism for a cleaning machine as described in claim 4, characterized in that: The crossbar (78) is connected to the top of the rack (72) via the second upright (79).

6. The cantilever partition mechanism for a cleaning machine as described in claim 1, characterized in that: Each side of the partition door (6) is provided with a sealing plate (710), and the sealing plate (710) contacts the rear side of the lifting channel (5); a corrugated plate (711) is connected between the top of the two sealing plates (710) and the top of the drive mechanism chamber (4).

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