Gas temperature control mixing device and cold screen equipment

Abstract

The utility model discloses a gas temperature control mixing device and cold shield equipment, the gas temperature control mixing device comprises a gas mixing bottle, the gas mixing bottle is provided with a mixing cavity, and the mixing cavity is provided with a first gas inlet, a second gas inlet and a mixed gas outlet; the nitrogen mechanism is connected with the first gas inlet; the liquid nitrogen bottle is connected with the second gas inlet; the temperature control assembly is arranged between the nitrogen mechanism and the first gas inlet; and / or arranged between the liquid nitrogen bottle and the second gas inlet; the temperature control assembly comprises a first valve and a second valve, and the first valve is used for controlling the fluid supply flow of gaseous nitrogen or liquid nitrogen; the second valve is used for controlling the maximum fluid supply flow of gaseous nitrogen or liquid nitrogen. The gas temperature control mixing device further comprises a cold shield device which is located in a vacuum cavity of the cold shield device, the cold shield device comprises a cold shield device and a cooling pipe fixed to the outer portion of the cold shield device, the cooling pipe is wound around the outer portion of the cold shield device in a spiral mode, and the mixed gas outlet is connected with the gas inlet end of the cooling pipe through a connecting pipe.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a gas temperature control mixing device and a cold screen device. Background Technology

[0002] Vacuum cooling and shielding technology in the vacuum coating process is a key element in ensuring coating quality and stable equipment operation. During coating, high temperatures may cause the substrate (such as plastic or film) to expand or soften, disrupting the uniformity of the film layer. Therefore, the cooling system must maintain a stable substrate temperature.

[0003] In the vacuum coating process, due to specific coating techniques, it is necessary to control the residual carbon dioxide content within the vacuum chamber. However, simply drawing a vacuum cannot completely remove the residual carbon dioxide. Since carbon dioxide sublimates above -78.5℃, and the process requires the introduction of ozone (with a boiling point of -111.9℃), maintaining the temperature between -80℃ and -110℃ will cause carbon dioxide to condense and adsorb onto the surface of the cold shield device, while simultaneously preventing ozone condensation.

[0004] However, the price of conventional refrigerant equipment that can reach -110℃ is too high, making it unsuitable for general experimental equipment. On the other hand, the commonly used liquid nitrogen cooling method is prone to temperatures dropping below -110℃ due to the low temperature of liquid nitrogen, making it impossible to control the temperature between -80℃ and -110℃. Utility Model Content

[0005] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a gas temperature-controlled mixing device and a cooling screen device. The gas temperature-controlled mixing device dynamically regulates the temperature of the gas by setting a temperature control component to ensure that the temperature of the output mixed nitrogen gas meets production requirements. The cooling screen device utilizes the gas temperature-controlled mixing device of this application.

[0006] In a first aspect, a gas temperature-controlled mixing device according to an embodiment of the present invention includes:

[0007] A gas mixing bottle having a mixing chamber, the mixing chamber having a first inlet, a second inlet, and a mixed gas outlet;

[0008] A nitrogen gas supply mechanism is connected to the first air inlet, and the nitrogen gas supply mechanism is used to deliver gaseous nitrogen into the mixing chamber;

[0009] A liquid nitrogen cylinder is connected to the second air inlet, and the liquid nitrogen cylinder is used to deliver liquid nitrogen gas into the mixing chamber;

[0010] A temperature control component is disposed between the nitrogen mechanism and the first air inlet;

[0011] And / or, the temperature control component is disposed between the liquid nitrogen cylinder and the second air inlet;

[0012] The temperature control component includes a first valve and a second valve arranged sequentially along the gas flow direction. The first valve is used to control the fluid supply flow rate of gaseous nitrogen or liquid nitrogen; the second valve is used to control the maximum fluid supply flow rate of gaseous nitrogen or liquid nitrogen.

[0013] A gas temperature-controlled mixing device according to an embodiment of this utility model has at least the following beneficial effects: This application utilizes the thorough mixing of gaseous nitrogen and liquid nitrogen in a mixing chamber to ensure that the temperature of the nitrogen output from the mixing chamber meets production requirements. To further ensure that the temperature of the nitrogen output from the mixing chamber meets production requirements, a temperature control component is used to regulate the gas temperature. Specifically, the temperature control component includes a first valve and a second valve arranged sequentially along the gas flow direction. The first valve controls the fluid supply flow rate of gaseous or liquid nitrogen; the second valve controls the maximum fluid supply flow rate of gaseous or liquid nitrogen. By coordinating and adjusting the flow rate and velocity of the gaseous / liquid nitrogen, dynamic regulation of the temperature and phase of the mixed gas is achieved.

[0014] According to an embodiment of the present invention, a gas temperature-controlled mixing device is provided, wherein the first valve is a diaphragm valve.

[0015] The advantage is that the diaphragm valve can precisely control the supply of gaseous / liquid nitrogen to ensure that the temperature of the nitrogen output from the mixing chamber meets production requirements.

[0016] According to an embodiment of the present invention, in a gas temperature-controlled mixing device, the second valve is a speed regulating valve.

[0017] The advantage is that the speed control valve can precisely control the supply rate of gaseous / liquid nitrogen to ensure that the temperature of the nitrogen output from the mixing chamber meets production requirements.

[0018] According to an embodiment of the present invention, a gas temperature control mixing device is provided with a pressure regulating valve between the temperature control component and the nitrogen mechanism;

[0019] And / or, a pressure regulating valve is provided between the temperature control component and the liquid nitrogen cylinder.

[0020] The advantage is that the pressure regulating valve can ensure stable gas source pressure, avoid fluctuations in the mixing ratio, and ensure that the temperature of the nitrogen output from the mixing chamber meets production requirements.

[0021] According to an embodiment of the present invention, a gas temperature-controlled mixing device includes a mixing chamber comprising a primary mixing chamber, a uniform mixing chamber, and a final mixing chamber that are sequentially connected along the fluid flow direction. The first air inlet and the second air inlet are both disposed on the primary mixing chamber, and the mixed gas outlet is disposed on the final mixing chamber. Along the fluid flow direction, a plurality of uniform mixing chambers are disposed and sequentially connected.

[0022] The advantage is that gaseous and liquid nitrogen come into initial contact in the primary mixing chamber. After contact with gaseous nitrogen, the liquid nitrogen vaporizes into low-temperature nitrogen due to the temperature rise. The vaporization of liquid nitrogen absorbs heat to lower the temperature. As the gaseous nitrogen and some unvaporized liquid nitrogen flow to the final mixing chamber, they pass through the uniform mixing chamber and are fully mixed in the uniform mixing chamber. This ensures that the temperature of the mixed nitrogen reaching the final mixing chamber is constant and meets the production requirements. The final mixing chamber ultimately outputs a uniformly heated mixed gas, ensuring the uniformity of the cooling of the cold screen.

[0023] According to an embodiment of the present invention, a gas temperature-controlled mixing device includes a gas mixing bottle comprising a bottle body, wherein a plurality of partition plates are provided inside the bottle body, and the mixing chamber is divided into a primary mixing chamber, a uniform mixing chamber and a final mixing chamber by the partition plates.

[0024] The advantage is that by setting up multiple uniform mixing chambers and ensuring that the gas / liquid nitrogen can be fully mixed, the temperature of the mixed gas output from the mixing chamber is uniform and meets production requirements.

[0025] According to an embodiment of the present invention, a gas temperature-controlled mixing device is provided, wherein the uniform mixing chamber has an opening for fluid to enter, and the openings of two adjacent uniform mixing chambers face opposite directions.

[0026] The advantage is that the staggered arrangement of uniform mixing chambers effectively extends the mixing path of the mixed gas, which helps to ensure that the temperature of the mixed gas output from the mixing chamber is uniform and meets production requirements.

[0027] According to an embodiment of the present invention, a gas temperature-controlled mixing device comprises a plurality of partition plates arranged alternately along the fluid flow direction, and the gap between the end of the partition plate and the inner wall of the bottle forms an opening for the fluid to enter the uniform mixing chamber.

[0028] The advantage is that the staggered partitions form a "Z"-shaped flow channel, which forces the fluid direction to change alternately, enhances the turbulent mixing efficiency, and helps to ensure that the temperature of the mixed gas output from the mixing chamber is uniform and meets production requirements.

[0029] Secondly, according to an embodiment of the present invention, a cold screen device includes the above-mentioned gas temperature control mixing device, and also includes a cold screen device located inside the vacuum chamber of the cold screen device. The cold screen device includes a cold screen unit and a cooling pipe fixed to the outside of the cold screen unit. The cooling pipe is coiled around the outside of the cold screen unit, and the outlet of the mixed gas is connected to the inlet end of the cooling pipe through a connecting pipe.

[0030] A gas temperature-controlled mixing device according to an embodiment of this utility model has at least the following beneficial effects: by fully mixing gaseous nitrogen and liquid nitrogen in a mixing chamber, the temperature of the nitrogen output from the mixing chamber meets production requirements. To ensure that the temperature of the nitrogen output from the mixing chamber meets production requirements, a temperature control component is also used to regulate the gas temperature. Specifically, the temperature control component includes a first valve and a second valve arranged sequentially along the gas flow direction. The first valve controls the fluid supply flow rate of gaseous or liquid nitrogen; the second valve controls the maximum fluid supply flow rate of gaseous or liquid nitrogen. By coordinating and adjusting the flow rate and velocity of gaseous / liquid nitrogen, dynamic regulation of the temperature and phase state of the mixed gas is achieved. Simultaneously, the cooling shield of this application is placed in a vacuum environment, greatly reducing heat convection and conduction losses. Furthermore, the cooling tube is coiled and wound around the outside of the cooling shield, allowing the mixed gas to circulate within the coiled cooling tube, increasing the heat exchange area and improving the cooling rate.

[0031] A cooling screen device according to an embodiment of the present invention further includes a temperature monitoring component electrically connected to the temperature control component. The temperature monitoring component includes a first detector and a second detector. The first detector is located at the outlet of the mixed gas, and the second detector is located at the outlet end of the cooling pipe.

[0032] The advantage is that the first detector located at the mixing outlet and the second detector located at the cooling pipe outlet can provide real-time temperature feedback and work in conjunction with the temperature control components to automatically correct temperature deviations, ensuring that the temperature of the mixed gas output from the mixing chamber is uniform and meets production requirements.

[0033] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0034] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0035] Figure 1 This is a structural diagram of a cold screen device according to an embodiment of the present utility model;

[0036] Figure 2This is a cross-sectional view of the gas mixing bottle according to an embodiment of the present invention.

[0037] Explanation of reference numerals in the attached figures:

[0038] Gas mixing bottle 100; primary mixing chamber 110; first air inlet 111; second air inlet 112; uniform mixing chamber 120; final mixing chamber 130; mixed gas outlet 131; partition plate 140;

[0039] 200 liquid nitrogen bottles;

[0040] First valve 300;

[0041] Second valve 400;

[0042] Pressure stabilizing valve 500;

[0043] Cooling screen 600;

[0044] Cooling tube 700;

[0045] First detector 800;

[0046] Second detector 900. Detailed Implementation

[0047] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0048] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0049] In the description of a utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If the terms "first" and "second" are used, they are merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly specifying the number of indicated technical features or the order of the indicated technical features.

[0050] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0051] Reference Figure 1 This utility model embodiment provides a cold screen device.

[0052] Specifically, the cold shield equipment includes a gas temperature-controlled mixing device and a cold shield device located in a vacuum chamber. The gas temperature-controlled mixing device is used to provide low-temperature mixed nitrogen gas to the cold shield device.

[0053] like Figure 1 As shown, the gas temperature control mixing device includes a gas mixing bottle 100, a nitrogen mechanism, a liquid nitrogen bottle 200, and a temperature control component. The nitrogen mechanism is used to provide gaseous nitrogen, and the liquid nitrogen bottle 200 is used to provide liquid nitrogen. After the gaseous nitrogen and liquid nitrogen are transported to the mixing chamber of the gas mixing bottle 100 for thorough mixing, the gas mixing bottle 100 outputs a low-temperature mixed gas that meets the production requirements to the cooling screen device.

[0054] Specifically, such as Figure 2 As shown, the inner cavity of the gas mixing bottle 100 is a mixing chamber. Along the gas flow direction, the mixing chamber includes a primary mixing chamber 110, a uniform mixing chamber 120, and a final mixing chamber 130 connected sequentially. The primary mixing chamber 110 is provided with a first air inlet 111 and a second air inlet 112. As shown, a nitrogen mechanism is connected to the first air inlet 111 to deliver gaseous nitrogen into the mixing chamber. The liquid nitrogen bottle 200 is connected to the second air inlet 112 to deliver liquid nitrogen into the mixing chamber. After preliminary mixing in the primary mixing chamber 110, the gaseous and liquid nitrogen pass through multiple uniform mixing chambers 120 for thorough mixing, finally reaching the final mixing chamber 130 and being delivered to the cooling screen device. It is important to note that the temperature of the mixed nitrogen reaching the final mixing chamber 130 must meet production requirements. However, since there is a significant temperature difference between gaseous nitrogen and liquid nitrogen, this application also includes a temperature control component and a temperature monitoring component to ensure that the mixed nitrogen output to the cooling screen device can meet production requirements.

[0055] According to some embodiments of this application, as shown in the figures, this application provides a first embodiment of a cold screen device, in which a temperature control component is disposed between the nitrogen mechanism and the first air inlet 111. Specifically, along the gas flow direction, a first valve 300 and a second valve 400 are sequentially arranged, wherein the first valve 300 is used to control the fluid supply flow rate of gaseous nitrogen; and the second valve 400 is used to control the maximum fluid supply flow rate of gaseous nitrogen. Further, the temperature monitoring component includes a first detector 800 and a second detector 900, wherein the first detector 800 is located on the mixed gas outlet 131, and the second detector 900 is located at the outlet end of the cooling pipe 700 of the cold screen device, wherein the temperature monitoring component and the temperature control component are linked to dynamically adjust the supply amount and attack speed of gaseous nitrogen.

[0056] Understandably, when the mixed nitrogen gas from the final mixing chamber 130 is output to the cooling pipe 700 of the cold shield equipment, the first detector monitors the temperature of the output mixed gas. When the first detector 800 detects that the temperature of the currently output mixed gas is below -110℃, the first detector 800 feeds back information to the equipment's control system. The control system then issues commands to the first valve 300 and the second valve 400. The first valve 300 will increase the flow rate of gaseous nitrogen, and simultaneously, the second valve 400 will synchronously increase the maximum flow rate of gaseous nitrogen, thereby increasing the amount of gaseous nitrogen mixed with liquid nitrogen, thus raising the temperature of the mixed gas and adjusting it to around -110℃. After the mixed nitrogen gas completes its cooling process in the cooling screen equipment, it can be output from the cooling tube 700. At this time, the second detector 900 monitors the temperature of the output mixed nitrogen gas. When the second detector 900 detects that the temperature of the mixed nitrogen gas output from the cooling tube 700 is higher than -80℃, that is, the flow rate of the mixed gas in the cooling tube 700 is insufficient, the second detector 900 feeds back the information to the equipment's control system. The control system issues commands to the first valve 300 and the second valve 400. The first valve 300 will increase the delivery flow rate of gaseous nitrogen. At the same time, the second valve 400 will simultaneously increase the maximum delivery flow rate of gaseous nitrogen, thereby increasing the amount of gaseous nitrogen mixed with liquid nitrogen. This increases the gas delivery speed and flow rate, quickly sending out the mixed gas in the cooling tube 700 and carrying away the heat. When the temperature reaches the set temperature value, the first valve 300 and the second valve 400 repeat the previous dynamic adjustment to ensure that the temperature of the mixed nitrogen gas in the cooling screen equipment can meet the production requirements.

[0057] Alternatively, in a second embodiment of the cold shield device, temperature control components are provided between the nitrogen mechanism and the first air inlet 111, and between the liquid nitrogen cylinder 200 and the second air inlet 112. Similarly, a first valve 300 and a second valve 400 are sequentially arranged between the liquid nitrogen cylinder 200 and the second air inlet 112 along the gas delivery direction, wherein the first valve 300 and the second valve 400 between the liquid nitrogen cylinder 200 and the second air inlet 112 operate on the same principle.

[0058] Understandably, when the mixed nitrogen gas from the final mixing chamber 130 is output to the cooling pipe 700 of the cold shield device, the first detector monitors the temperature of the output mixed gas. When the first detector 800 detects that the temperature of the currently output mixed gas is below -110℃, the first detector 800 feeds back information to the control system of the device. The control system issues instructions to the first valve 300 and the second valve 400 located between the nitrogen mechanism and the first air inlet 111. With the liquid nitrogen output unchanged, the first valve 300 located between the nitrogen mechanism and the first air inlet 111 will increase the flow rate of gaseous nitrogen. At the same time, the second valve 400 will simultaneously increase the maximum flow rate of gaseous nitrogen, thereby increasing the amount of gaseous nitrogen mixed with liquid nitrogen, thus raising the temperature of the mixed gas and adjusting the temperature of the mixed gas to around -110℃.

[0059] Alternatively, when the first detector 800 detects that the temperature of the currently output mixed gas is below -110°C, the first detector 800 feeds back information to the control system of the equipment. The control system issues a command to the first valve 300 and the second valve 400 located between the liquid nitrogen cylinder 200 and the second air inlet 112. With the output of gaseous nitrogen remaining unchanged, the first valve 300 located between the liquid nitrogen cylinder 200 and the second air inlet 112 will reduce the flow rate of liquid nitrogen. At the same time, the second valve 400 will simultaneously reduce the maximum flow rate of liquid nitrogen, thereby reducing the amount of liquid nitrogen mixed with gaseous nitrogen. This causes the temperature of the mixed gas to rise, allowing the temperature of the mixed gas to be adjusted to around -110°C.

[0060] Alternatively, when the first detector 800 detects that the temperature of the currently output mixed gas is below -110℃, the first detector 800 feeds back information to the control system of the equipment. The control system issues a command to the two temperature control components. The two temperature control components work together to adjust the delivery volume or maximum delivery volume of gaseous nitrogen and liquid nitrogen according to the command, so that the temperature of the mixed gas can be increased and adjusted to about -110℃.

[0061] Similarly, when the second detector 900 detects that the temperature of the mixed nitrogen gas output from the cooling tube 700 is higher than -80℃, the second detector 900 feeds back information to the equipment's control system. The control system issues commands to the first valve 300 and the second valve 400 of the two temperature control components, or issues commands to the first valve 300 and the second valve 400 of any one of the temperature control components, or any one of the first valve 300 and the second valve 400 of the two temperature control components, to coordinate and adjust the delivery volume or maximum delivery volume of gaseous nitrogen and liquid nitrogen, thereby increasing the gas delivery speed and flow rate, quickly sending out the mixed gas in the current cooling tube 700 and carrying away the heat. When the temperature reaches the set temperature value, the first valve 300 and the second valve 400 repeat the previous dynamic adjustment to ensure that the temperature of the mixed nitrogen gas in the cold screen device can meet the production requirements.

[0062] That is, it can be understood that this application achieves dynamic temperature control of the mixed gas by coordinating the flow rate (first valve 300) and velocity (second valve 400) of gaseous / liquid nitrogen through dual-end detection.

[0063] Preferably, the first valve 300 is a diaphragm valve, which can precisely control the supply of gaseous / liquid nitrogen to ensure that the temperature of the nitrogen output from the mixing chamber meets the production requirements.

[0064] The second valve 400 is a speed control valve, which can precisely control the supply speed of gaseous / liquid nitrogen. By controlling the supply speed of gaseous / liquid nitrogen and the maximum supply flow rate of gaseous / liquid nitrogen, the temperature of the nitrogen output from the mixing chamber is controlled to ensure that it meets the production requirements.

[0065] According to some embodiments of this application, to ensure the uniformity of the mixed gas output from the final mixing chamber 130, a plurality of uniform mixing chambers 120 are provided. Specifically, as shown in... Figure 2 As shown, the inner cavity of the bottle is provided with multiple partition plates 140, which divide the mixing chamber into a primary mixing chamber 110, a uniform mixing chamber 120, and a final mixing chamber 130. The gap between the end of the partition plate 140 and the inner wall of the bottle forms an opening for fluid to enter the uniform mixing chamber 120. It should be noted that the partition plates 140 are staggered along the fluid flow direction so that the openings of adjacent uniform mixing chambers 120 face opposite directions.

[0066] That is, it can be understood that by setting up multiple uniform mixing chambers 120 to ensure that the gas / liquid nitrogen can be fully mixed, and by using partition plates 140 to form staggered "Z"-shaped flow channels, the fluid direction is forced to change alternately, enhancing the turbulent mixing efficiency and helping to ensure that the temperature of the mixed gas output from the mixing chamber is uniform and meets production requirements. The staggered uniform mixing chambers 120 effectively extend the mixing path of the mixed gas, helping to ensure that the temperature of the mixed gas output from the mixing chamber is uniform and meets production requirements.

[0067] According to some embodiments of this application, a pressure regulating valve 500 is provided between the temperature control component and the nitrogen mechanism. The pressure regulating valve 500 can ensure stable gas source pressure, avoid fluctuations in the mixing ratio, and ensure that the temperature of the nitrogen output from the mixing chamber meets production requirements.

[0068] Optionally, a pressure regulating valve 500 is also provided between the temperature control component and the liquid nitrogen cylinder 200.

[0069] According to some embodiments of this application, as shown in the figure, the cooling pipe 700 of the cold screen device is coiled and fixed to the outside of the cold screen 600, and the mixed gas flows in the cooling pipe 700 to increase the heat exchange area and improve the cooling rate.

[0070] Preferably, the cooling tube 700 is made of copper, which can efficiently transfer heat and achieve rapid cooling.

[0071] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0072] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A gas temperature-controlled mixing device, characterized in that, include: A gas mixing bottle (100) has a mixing chamber having a first inlet (111), a second inlet (112), and a mixed gas outlet (131). A nitrogen gas mechanism is connected to the first air inlet (111), and the nitrogen gas mechanism is used to deliver gaseous nitrogen into the mixing chamber; A liquid nitrogen cylinder (200) is connected to the second air inlet (112), and the liquid nitrogen cylinder (200) is used to deliver liquid nitrogen gas into the mixing chamber; A temperature control component is disposed between the nitrogen mechanism and the first air inlet (111); And / or, the temperature control component is disposed between the liquid nitrogen cylinder (200) and the second air inlet (112); The temperature control component includes a first valve (300) and a second valve (400) arranged sequentially along the gas flow direction. The first valve (300) is used to control the fluid supply flow rate of gaseous nitrogen or liquid nitrogen; the second valve (400) is used to control the maximum fluid supply flow rate of gaseous nitrogen or liquid nitrogen.

2. The gas temperature-controlled mixing device according to claim 1, characterized in that, The first valve (300) is a diaphragm valve.

3. The gas temperature-controlled mixing device according to claim 1, characterized in that, The second valve (400) is a speed control valve.

4. The gas temperature-controlled mixing device according to claim 1, characterized in that, A pressure regulating valve (500) is provided between the temperature control component and the nitrogen mechanism. And / or, a pressure regulating valve (500) is provided between the temperature control component and the liquid nitrogen bottle (200).

5. A gas temperature-controlled mixing device according to claim 1, characterized in that, The mixing chamber includes a primary mixing chamber (110), a uniform mixing chamber (120), and a final mixing chamber (130) that are connected sequentially along the fluid flow direction. The first air inlet (111) and the second air inlet (112) are both located on the primary mixing chamber (110), and the mixed gas outlet (131) is located on the final mixing chamber (130). Along the fluid flow direction, there are multiple uniform mixing chambers (120) that are connected sequentially.

6. The gas temperature-controlled mixing device according to claim 5, characterized in that, The gas mixing bottle (100) includes a bottle body, and a plurality of partition plates (140) are provided inside the bottle body. The mixing chamber is divided into the initial mixing chamber (110), the uniform mixing chamber (120) and the final mixing chamber (130) by the partition plates (140).

7. A gas temperature-controlled mixing device according to claim 6, characterized in that, The homogeneous mixing chamber (120) has an opening for fluid to enter, and the openings of two adjacent homogeneous mixing chambers (120) face opposite directions.

8. A gas temperature-controlled mixing device according to claim 7, characterized in that, Multiple partition plates (140) are staggered along the fluid flow direction, and the gap between the end of the partition plate (140) and the inner wall of the bottle forms an opening for the fluid to enter the uniform mixing chamber (120).

9. A cold shield device, comprising the gas temperature-controlled mixing device according to any one of claims 1 to 8, characterized in that, Also includes: The cooling screen device is located inside the vacuum chamber of the cooling screen equipment. The cooling screen equipment includes a cooling screen unit (600) and a cooling tube (700) fixed to the outside of the cooling screen unit (600). The cooling tube (700) is coiled around the outside of the cooling screen unit (600). The mixed gas outlet (131) is connected to the gas inlet end of the cooling tube (700) through a connecting pipe.

10. A cold screen device according to claim 9, characterized in that, It also includes a temperature monitoring component electrically connected to the temperature control component, the temperature monitoring component including a first detector (800) and a second detector (900), the first detector (800) being located on the mixed gas outlet (131) and the second detector (900) being located at the gas outlet end of the cooling tube (700).

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