Vacuum coating evaporation source cavity with multi-layer heat insulation design

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating evaporation source cavity with a multi-layer heat insulation design, which comprises an evaporation source cavity connecting main component. According to the vacuum coating evaporation source cavity with the multi-layer heat insulation design, double-effect heat insulation can be conducted on the interior of the source cavity connecting main component through the arranged source cavity connecting main component, the arranged heating cavity assembly fixedly connected with the interior of the source cavity connecting main component, the arranged heat preservation inner container body and the arranged thickened inner container body; according to the vacuum coating evaporation source cavity heat insulation device, the vacuum coating evaporation source cavity can be subjected to multi-layer heat insulation by a user, the upper sealing plate can be disassembled through the arranged threaded rod after the user takes down the threaded rod from the nut, so that the interior of the source cavity connecting main component can be conveniently maintained, and after a push handle is pushed, the vacuum coating evaporation source cavity can be used for heat insulation. And after the plug plate is taken down, efficient air inlet and outlet can be carried out on the interior of the source cavity connecting main component.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a vacuum coating evaporation source cavity with a multi-layer heat insulation design. Background Technology

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions, causing them to evaporate and condense on the surface of the workpiece to form a thin film. Examples include vacuum aluminum plating and vacuum chromium plating. Vacuum coating requires the use of a vacuum coating evaporation source chamber.

[0003] In summary, traditional vacuum coating evaporation source chambers suffer from rapid heat dissipation during use, which affects heat preservation and makes disassembly and maintenance inconvenient. Therefore, a vacuum coating evaporation source chamber with multi-layer heat insulation design is needed. Utility Model Content

[0004] The purpose of this utility model is to provide a vacuum coating evaporation source cavity with a multi-layer heat insulation design, so as to solve the problem mentioned in the background art that the traditional vacuum coating evaporation source cavity has the problem of heat dissipation too quickly when the user uses it, which will affect the user's heat preservation and is not convenient when the user needs to disassemble and maintain the inside of the cavity.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum coating evaporation source cavity with a multi-layer heat insulation design, comprising a source cavity connecting main component, a stainless steel inner liner fixedly connected to the inner ring surface of the source cavity connecting main component, a snap-fit ​​plate limited and inserted into the side surface of the source cavity connecting main component, a heating cavity assembly fixedly connected to the inner ring surface of the source cavity connecting main component, a heat-insulating inner liner body fixedly connected to the inner ring surface of the stainless steel inner liner, a thickened inner liner body fixedly connected to the upper surface of the stainless steel inner liner, a sealing inlet / outlet mechanism installed on the upper surface of the source cavity connecting main component, and a mounting flange fixedly connected to the bottom surface of the stainless steel inner liner;

[0006] The sealing inlet / outlet mechanism includes an upper sealing plate, which is installed on the inner ring surface of the main component connecting the source cavity. A pull ring is fixedly connected to the upper surface of the upper sealing plate, and an outlet pipe is fixedly connected to the upper surface of the upper sealing plate. A stopper plate is locked to the upper surface of the outlet pipe, a limit shaft is fixedly connected to the side surface of the outlet pipe, and a cylindrical guide rod is movably connected to the side surface of the outlet pipe. A push handle is installed on the upper surface of the cylindrical guide rod, and a limit baffle is fixedly connected to the side surface of the cylindrical guide rod. A fixing block is fixedly connected to the upper surface of the main component connecting the source cavity, and a nut is locked to the side surface of the fixing block. A connecting plate is installed on the side surface of the upper sealing plate.

[0007] Preferably, the side surface of the plug plate has an insertion opening, and the size of the insertion opening and the limiting baffle are matched.

[0008] Preferably, a threaded rod is inserted into the inner ring surface of the nut, and the threaded rod is connected between the nut, the fixing block, and the main component connecting the source cavity.

[0009] Preferably, the fixing block connects the nut and the main component connecting the source cavity, and the fixing block is symmetrically arranged with the vertical center line of the nut as the axis of symmetry.

[0010] Preferably, the bottom surface of the mounting flange has a mounting opening, and the number of mounting openings is multiple.

[0011] Preferably, a pull handle is installed on the side surface of the snap-fit ​​plate, and the pull handle is connected between the snap-fit ​​plate and the main component connecting the source cavity.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. The vacuum coating evaporation source cavity with multi-layer heat insulation design, through the main component connected to the source cavity and the heating cavity assembly fixedly connected inside it, as well as the heat-insulating inner liner body and the thickened inner liner body, can provide double heat insulation for the inside of the main component connected to the source cavity, so that the user can use the vacuum coating evaporation source cavity with multi-layer heat insulation.

[0014] 2. This vacuum coating evaporator cavity with multi-layer heat insulation design allows for easy removal of the upper sealing plate via a threaded rod. After the user removes the threaded rod from the nut, the cavity's main connecting component can be easily inspected. Pushing the handle removes the limiting baffle from the stopper plate, enabling efficient air intake and exhaust within the cavity's main connecting component, thus meeting the user's need for efficient air intake and exhaust. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a top view of the structure of this utility model;

[0017] Figure 3 This is a bottom view of the structure of this utility model;

[0018] Figure 4 For the present utility model Figure 1 Enlarged view of the structure at point A in the middle;

[0019] Figure 5 For the present utility model Figure 1 Enlarged view of the structure at point A in the middle;

[0020] Figure 6 This is a side sectional view of the present invention.

[0021] In the diagram: 1. Main component connecting the source cavity; 2. Stainless steel inner liner; 3. Sealed inlet / outlet mechanism; 301. Top sealing plate; 302. Pull ring; 303. Air outlet pipe; 304. Plug plate; 305. Fixing block; 306. Nut; 307. Connecting plate; 308. Threaded rod; 309. Cylindrical guide rod; 310. Limiting baffle; 311. Insertion opening; 312. Push handle; 313. Limiting shaft; 4. Installation opening; 5. Snap-fit ​​plate; 6. Pull handle; 7. Installation flange; 8. Heating chamber assembly; 9. Insulated inner liner body; 10. Thickened inner liner body. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-6 This utility model provides a technical solution: a vacuum coating evaporation source cavity with multi-layer heat insulation design, including a source cavity connecting main component 1, a stainless steel inner liner 2 fixedly connected to the inner ring surface of the source cavity connecting main component 1, a snap-fit ​​plate 5 limited and inserted to the side surface of the source cavity connecting main component 1, a heating cavity assembly 8 fixedly connected to the inner ring surface of the source cavity connecting main component 1, a heat-insulating inner liner body 9 fixedly connected to the inner ring surface of the stainless steel inner liner 2, a thickened inner liner body 10 fixedly connected to the upper surface of the stainless steel inner liner 2, a sealing inlet and outlet mechanism 3 installed on the upper surface of the source cavity connecting main component 1, and an installation flange 7 fixedly connected to the bottom surface of the stainless steel inner liner 2.

[0024] The sealed infeed / outfeed mechanism 3 includes an upper sealing plate 301, which is installed on the inner ring surface of the main component 1 connecting the source cavity. A pull ring 302 is fixedly connected to the upper surface of the upper sealing plate 301, and an exhaust pipe 303 is fixedly connected to the upper surface of the upper sealing plate 301. A stopper plate 304 is locked onto the upper surface of the exhaust pipe 303. A limit shaft 313 is fixedly connected to the side surface of the exhaust pipe 303, and a cylindrical guide rod 309 is movably connected to the side surface of the exhaust pipe 303. A push handle 312 is installed on the upper surface of the cylindrical guide rod 309, and a limit baffle 310 is fixedly connected to the side surface of the cylindrical guide rod 309. A fixing block 305 is fixedly connected to the upper surface of the main component 1 connecting the source cavity, and a nut 306 is locked onto the side surface of the fixing block 305. A connecting plate 307 is installed on the side surface of the upper sealing plate 301. When the user needs to adjust the vacuum coating steam... When the evaporation source chamber is in use, the three-layer protection of the stainless steel inner liner 2, the heat-insulating inner liner body 9, and the thickened inner liner body 10 provides efficient heat insulation for the vacuum coating evaporation source chamber. After the user unscrews the threaded rod 308 and removes it from the nut 306, the upper sealing plate 301 can be removed from the main connecting component 1 of the evaporation source chamber, allowing for internal inspection and maintenance. After pushing the push handle 312, the limiting baffle 310 can be removed from the plug plate 304, allowing the plug plate 304 to be removed from the vent pipe 303. After removing the plug plate 304, the gas inside the main connecting component 1 of the evaporation source chamber can be discharged. Then, the bolts are inserted into the installation opening 4 and tightened, allowing for the overall installation of the mounting flange 7 and the stainless steel inner liner 2.

[0025] Furthermore, the side surface of the plug plate 304 is provided with an insertion opening 311, and the size of the insertion opening 311 and the limiting baffle 310 are matched. The insertion opening 311, which is matched with the size of the limiting baffle 310, can facilitate the user to use the limiting baffle 310 for limiting.

[0026] Furthermore, a threaded rod 308 is inserted into the inner ring surface of the nut 306 for limiting, and the threaded rod 308 is connected to the main component 1 of the source cavity through the nut 306, the fixing block 305, and the main component 1 of the source cavity. The threaded rod 308, which is connected to the main component 1 of the source cavity through the nut 306, the fixing block 305, and the main component 1 of the source cavity, makes it easy for the user to connect the threaded rod 308 to the main component 1 of the source cavity.

[0027] Furthermore, the fixing block 305 connects the nut 306 and the main component 1 connecting the source cavity, and the fixing block 305 is symmetrically arranged with the vertical center line of the nut 306 as the axis of symmetry. The fixing block 305, which is symmetrically arranged with the vertical center line of the nut 306 as the axis of symmetry, makes it easy for the user to stably install the nut 306 on the main component 1 connecting the source cavity.

[0028] Furthermore, the bottom surface of the mounting flange 7 is provided with multiple mounting openings 4, which facilitates the user's use and installation of the mounting flange 7.

[0029] Furthermore, a handle 6 is installed on the side surface of the snap-fit ​​plate 5, and the handle 6 is connected between the snap-fit ​​plate 5 and the main component 1 connecting the source cavity. The handle 6, which connects the snap-fit ​​plate 5 and the main component 1 connecting the source cavity, makes it convenient for the user to connect the snap-fit ​​plate 5 and the main component 1 connecting the source cavity.

[0030] Working principle: When the user needs to use the vacuum coating evaporation source cavity, the three-layer protection of the stainless steel inner liner 2, the heat-insulating inner liner body 9, and the thickened inner liner body 10 provides efficient heat insulation for the vacuum coating evaporation source cavity. After the user unscrews the threaded rod 308 and removes it from the nut 306, the upper sealing plate 301 can be removed from the main component connecting the source cavity 1, allowing for internal inspection and maintenance. After pushing the push handle 312, the limiting baffle 310 can be removed from the plug plate 304, allowing the plug plate 304 to be removed from the air outlet pipe 303. After removing the plug plate 304, the gas inside the main component connecting the source cavity 1 can be discharged. Then, the bolts are inserted into the installation opening 4 and tightened, allowing for the overall installation of the mounting flange 7 and the stainless steel inner liner 2.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating evaporation source cavity with multi-layer heat insulation design, comprising a main component (1) connecting the source cavity, characterized in that: A stainless steel inner liner (2) is fixedly connected to the inner ring surface of the main component (1) of the source cavity connecting body. A snap-fit ​​plate (5) is inserted into the side surface of the main component (1) of the source cavity connecting body. A heating chamber assembly (8) is fixedly connected to the inner ring surface of the main component (1) of the source cavity connecting body. A heat-insulating inner liner body (9) is fixedly connected to the inner ring surface of the stainless steel inner liner (2). A thickened inner liner body (10) is fixedly connected to the upper surface of the stainless steel inner liner (2). A sealing inlet and outlet mechanism (3) is installed on the upper surface of the main component (1) of the source cavity connecting body. A mounting flange (7) is fixedly connected to the bottom surface of the stainless steel inner liner (2). The sealed infeed / outfeed mechanism (3) includes an upper sealing plate (301), which is installed on the inner ring surface of the main component (1) connecting the source cavity. A pull ring (302) is fixedly connected to the upper surface of the upper sealing plate (301), and an air outlet pipe (303) is fixedly connected to the upper surface of the upper sealing plate (301). A stopper plate (304) is limited and engaged on the upper surface of the air outlet pipe (303), and a limiting shaft (313) is fixedly connected to the side surface of the air outlet pipe (303). A cylindrical guide rod (309) is movably connected to the side surface of the 303. A push handle (312) is installed on the upper surface of the cylindrical guide rod (309). A limit baffle (310) is fixedly connected to the side surface of the cylindrical guide rod (309). A fixing block (305) is fixedly connected to the upper surface of the main component (1) of the source cavity. A nut (306) is limited and snapped onto the side surface of the fixing block (305). A connecting plate (307) is installed on the side surface of the upper sealing plate (301).

2. The vacuum coating evaporation source cavity with multi-layer heat insulation design according to claim 1, characterized in that: The side surface of the plug plate (304) is provided with an insertion opening (311), and the size of the insertion opening (311) and the limiting baffle (310) are matched.

3. The vacuum coating evaporation source cavity with multi-layer heat insulation design according to claim 1, characterized in that: The inner ring surface of the nut (306) is fitted with a threaded rod (308), and the threaded rod (308) is connected to the main component (1) of the source cavity through the nut (306), the fixing block (305), and the main component (1).

4. The vacuum coating evaporation source cavity with multi-layer heat insulation design according to claim 1, characterized in that: The fixing block (305) connects the nut (306) and the main component (1) connecting the source cavity, and the fixing block (305) is symmetrically arranged with the vertical center line of the nut (306) as the axis of symmetry.

5. A vacuum coating evaporation source cavity with multi-layer heat insulation design according to claim 1, characterized in that: The bottom surface of the mounting flange (7) is provided with mounting openings (4), and there are multiple mounting openings (4).

6. The vacuum coating evaporation source cavity with multi-layer heat insulation design according to claim 1, characterized in that: A handle (6) is installed on the side surface of the snap-fit ​​plate (5), and the handle (6) is connected to the main component (1) of the source cavity through the snap-fit ​​plate (5).

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