Mask storage device and photoetching exposure equipment

Abstract

The utility model discloses a mask storage device and photoetching exposure equipment, and relates to the technical field of photoetching equipment. The mask storage device comprises a shell and a frame body arranged in the shell, and the frame body is provided with a plurality of layers of containing areas used for containing masks in a layered mode; pick-and-place openings matched with the placing areas in number are formed in the side wall of the shell, and each pick-and-place opening correspondingly communicates with one layer of placing area; the placement area is provided with a position detection unit and an output display unit which are in signal connection; the position detection unit is fixed on one side of the placement area and is used for detecting the position state of the mask plate relative to the preset area and converting the position state into a position state signal; the output display unit can be turned on or turned off according to the position state signal. The device can simplify the step of taking and placing the mask plate, realize the miniaturization of the device, and reduce the manufacturing and maintenance cost.

Description

Technical Field

[0001] This utility model relates to the field of photolithography equipment technology, and more specifically, to a photomask storage device and a photolithography exposure device. Background Technology

[0002] In semiconductor lithography, the photomask serves as the core master for pattern transfer. It needs to be used frequently and requires extremely high cleanliness. Therefore, photomasks are stored in a special photomask box and are only taken out of the photomask box and placed on the photomask stage for exposure during the exposure process.

[0003] Existing photomask cassettes require an opening mechanism to open the lid before the photomask can be retrieved, and a scanning mechanism is needed to detect the photomask's position, making the retrieval process cumbersome. Furthermore, the opening and scanning mechanisms occupy a significant amount of space in the photolithography equipment, reducing space utilization and increasing manufacturing and maintenance costs. Utility Model Content

[0004] The purpose of this invention is to provide a mask storage device and a photolithography exposure device, which can simplify the mask handling steps, while miniaturizing the device and reducing the manufacturing and maintenance costs.

[0005] The embodiments of this utility model are implemented as follows:

[0006] In one aspect, this utility model provides a mask storage device, including a housing and a frame disposed within the housing. The frame has multiple placement areas for layered placement of masks. The side wall of the housing has retrieval openings matching the number of placement areas, with each retrieval opening corresponding to a layer of placement areas. Each placement area is provided with a position detection unit and an output display unit connected by signals. The position detection unit is fixed to one side of the placement area and is used to detect the position state of the mask relative to a preset area and convert it into a position state signal. The output display unit can be turned on or off according to the position state signal.

[0007] Optionally, the mask storage device also includes an electrical adapter board, through which the position detection unit is signal connected to the output display unit; the electrical adapter board extends along the stacking direction of the placement area; multiple output display units are spaced apart on the electrical adapter board, and the position of each output display unit corresponds to one layer of the placement area; the housing is provided with through holes corresponding to the positions of each output display unit.

[0008] Optionally, the placement area is provided with a support member, which includes a carrier plate and a first support block disposed on the top surface of the carrier plate. The first support block is used to support the mask. A bracket is provided on the side of the carrier plate away from the pick-up and drop-out port. The position detection unit is fixedly disposed on the bracket, and the detection end faces the mask on the carrier plate.

[0009] Optionally, a buffer pad is provided on the top surface of the first support block, and the buffer pad is located between the first support block and the mask.

[0010] Optionally, a second support block is provided on the bottom surface of the support plate, and the second support block is supported between the bottom surface of the placement area and the support plate.

[0011] Optionally, the first support block and the buffer pad are respectively provided with coaxially arranged through holes along the stacking direction; the bearing plate is provided with a docking hole communicating with the through hole, and the docking hole is connected to a pipe joint; the pipe joint is used to connect an external air extraction device so that the mask is adsorbed and fixed on the buffer pad.

[0012] Optionally, a ventilation hole is provided on the side of the housing away from the loading and unloading port. A fan sleeve passes through the ventilation hole and is fixedly connected to the housing. The fan sleeve is used to connect an external air extraction device to extract air from inside the housing.

[0013] Optionally, the frame includes a first side panel, a second side panel, multiple partitions, a back panel, a top panel, and a bottom panel; the first side panel and the second side panel are arranged parallel to each other and spaced apart; the back panel is vertically connected between the first side panel and the second side panel; the top panel and the bottom panel are arranged opposite each other on both sides of the back panel and are perpendicular to the first side panel, the second side panel, and the back panel, respectively; multiple partitions are arranged at intervals along the stacking direction between the first side panel and the second side panel and are vertically fixedly connected to the back panel; placement areas are formed between adjacent partitions, between the uppermost partition and the top panel, and between the lowermost partition and the bottom panel.

[0014] Optionally, the inner sidewall of the first side plate and / or the second side plate is provided with a plurality of guide grooves, which are spaced apart along the stacking direction; the sidewall of the partition is embedded in the guide grooves.

[0015] In another aspect, this utility model provides a photolithography exposure apparatus, including a gripping mechanism and a mask storage device, wherein the gripping mechanism is used to pick up and put down a mask from the pick-up and put-down port of the mask storage device.

[0016] The beneficial effects of this utility model include:

[0017] This application provides a photomask storage device, including a housing and a frame disposed within the housing. The frame has multiple placement areas for layered placement of photomasks. The side wall of the housing has retrieval and placement openings matching the number of placement areas, with each opening corresponding to a placement area. This correspondence between the retrieval and placement openings and the placement areas enables independent retrieval and placement of each photomask, improving efficiency. Each placement area is equipped with a position detection unit and an output display unit connected by signals. The position detection unit is fixed to one side of the placement area and detects the position of the photomask relative to a preset area, converting it into a position status signal. The output display unit can be turned on or off based on the position status signal. Through the cooperation of the output display unit and the position detection unit, the position status of the photomasks in each placement area can be intuitively understood, such as whether the photomask is in place, making the photomask retrieval and placement process simpler and more efficient. Compared to existing photomask storage devices, this design eliminates the need for an opening mechanism and a scanning mechanism, saving the opening process and scanning the photomask's position status, simplifying the photomask retrieval and placement steps, and achieving device miniaturization. The aforementioned mask storage device simplifies the mask placement and removal process, while also miniaturizing the device and reducing its manufacturing and maintenance costs. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A schematic diagram of the structure of the mask storage device provided in this embodiment of the utility model;

[0020] Figure 2 One of the structural schematic diagrams of the housing of the mask storage device provided in the embodiments of this utility model;

[0021] Figure 3 A second schematic diagram of the structure of the housing of the mask storage device provided in this embodiment of the utility model;

[0022] Figure 4 One of the structural schematic diagrams of the frame of the mask storage device provided in the embodiments of this utility model;

[0023] Figure 5 A second schematic diagram of the frame of the mask storage device provided in this embodiment of the present invention;

[0024] Figure 6 A third schematic diagram of the frame of the mask storage device provided in this embodiment of the present invention;

[0025] Figure 7 One of the structural schematic diagrams of the support member of the mask storage device provided in the embodiments of this utility model;

[0026] Figure 8 A second schematic diagram of the structure of the support member of the mask storage device provided in this embodiment of the utility model;

[0027] Figure 9 The third schematic diagram of the structure of the support member of the mask storage device provided in the embodiment of this utility model.

[0028] Icons: 100-Mask storage device; 110-Housing; 111-Inlet / outlet; 112-Air duct; 113-Protective plate; 114-Top cover; 120-Frame; 121-Placement area; 122-First side plate; 123-Second side plate; 124-Back plate; 125-Top plate; 126-Bottom plate; 127-Guide groove; 128-Partition; 130-Position detection unit; 140-Electrical adapter board; 150-Supporting component; 151-Bearing plate; 152-First support block; 153-Bracket; 154-Buffer pad; 155-Second support block; 156-Through hole; 157-Pipe connector; 200-Mask. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0030] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0031] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0032] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0033] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] Please refer to Figure 1 , Figure 4 and Figure 7 This embodiment provides a mask storage device 100, including a housing 110 and a frame 120 disposed within the housing 110. The frame 120 has multi-layer placement areas 121 for layered placement of mask 200. The side wall of the housing 110 has retrieval ports 111 matching the number of placement areas 121, and each retrieval port 111 is connected to one layer of placement area 121. The placement area 121 is provided with a position detection unit 130 and an output display unit connected by signals. The position detection unit 130 is fixed to one side of the placement area 121 and is used to detect the position state of the mask 200 relative to a preset area and convert it into a position state signal. The output display unit can be turned on or off according to the position state signal.

[0035] Specifically, such as Figure 1 and Figure 4As shown, the mask storage device 100 includes a frame 120 and a housing 110. The frame 120 supports the mask 200, and the housing 110 is disposed outside the frame 120 to protect the frame 120 and the mask 200, ensuring the cleanliness of the mask 200 surface. The housing 110 is made of metal and includes a top cover 114 and four protective plates 113, which enclose a rectangular frame. The top cover 114 is disposed at one end of the rectangular frame. To facilitate maintenance of the interior of the housing 110, such as... Figure 2 As shown, the three protective plates 113 of the housing 110 can be integrated into one piece. The protective plate 113 located on the back of the housing 110 can be screwed together with the other three protective plates 113 to form a rectangular frame.

[0036] like Figure 4 As shown, the frame 120 has multiple placement areas 121, each of which can hold one mask 200; correspondingly, as Figure 1 and Figure 2 As shown, the side wall of the housing 110 has a pick-and-place port 111 corresponding to each placement area 121. The mask 200 can be removed from the frame 120 or placed back into the placement area 121 of the frame 120 through the pick-and-place port 111. This design improves operational accuracy and simplifies the pick-and-place process. The gripping mechanism of the photolithography exposure equipment does not require complex multi-station switching and positioning outside the device; it can directly complete the operation through the corresponding pick-and-place port 111, shortening the single pick-and-place time and improving transfer efficiency.

[0037] Optionally, such as Figure 5 and Figure 6 The frame 120 includes a first side plate 122, a second side plate 123, multiple partitions 128, a back plate 124, a top plate 125, and a bottom plate 126. The first side plate 122 and the second side plate 123 are arranged parallel to each other and spaced apart. The back plate 124 is vertically connected between the first side plate 122 and the second side plate 123 to enhance the lateral tensile strength between the side plates and prevent relative displacement of the two side plates under external force. The top plate 125 and the bottom plate 126 are arranged opposite to the back plate 124. Both sides are perpendicular to the first side plate 122, the second side plate 123 and the back plate 124 respectively, thereby improving the protection of the mask 200; multiple partitions 128 are arranged at intervals between the first side plate 122 and the second side plate 123 along the stacking direction, and are fixedly connected perpendicularly to the back plate 124; placement areas 121 are formed between adjacent partitions 128, between the uppermost partition 128 and the top plate 125, and between the lowermost partition 128 and the bottom plate 126.

[0038] It should be noted that this application does not impose any restrictions on the specific number of partitions 128. The number of partitions 128 can be increased or decreased according to the number of mask plates 200 to be placed.

[0039] Furthermore, such as Figure 6 As shown, to facilitate the assembly and disassembly of the partition 128, the inner walls of the first side plate 122 and / or the second side plate 123 are provided with multiple guide grooves 127, which are spaced apart along the stacking direction; the guide grooves 127 are arranged along the placement and removal direction of the mask 200. The sidewall of the partition 128 is embedded in the guide groove 127. When it is necessary to install or remove the partition 128, it is only necessary to drive the partition 128 to slide along the guide groove 127, which improves the convenience and reliability of the assembly and disassembly of the frame 120.

[0040] Preferably, in order to improve the stability of the partition 128, the inner sidewalls of the first side plate 122 and the second side plate 123 are provided with guide grooves 127.

[0041] like Figure 4 Each layer of the storage area 121 within the frame 120 is equipped with a position detection unit 130 and an output display unit (not shown in the figure). The position detection unit 130 and the output display unit are connected via an electrical adapter board 140. The position detection unit 130 can instantly sense whether the mask 200 is in place by detecting its position relative to a preset area and converting it into a position status signal. The electrical adapter board 140 receives the signal input from the position detection unit 130 and outputs control signals to the output display unit. The output display unit converts the input signals into visible visual signals, allowing operators or gripping mechanisms to quickly determine the storage status of each layer without opening the housing 110, reducing inspection time and improving the efficiency of mask 200 gripping. If a mask 200 in a certain layer is not detected, the corresponding output display unit will not be activated, allowing for quick location of areas that are not placed or are abnormally placed, reducing the difficulty of troubleshooting.

[0042] Preferably, in one specific embodiment of this application, the position detection unit 130 is a fiber optic sensor, and the output display unit is a sensor light. When the fiber optic sensor detects that the corresponding mask 200 is placed in a preset area of ​​the placement area 121, the sensor light illuminates; when the fiber optic sensor does not detect the corresponding mask 200 in the preset area of ​​the placement area 121, the sensor light turns off. Of course, besides a sensor light, other output display methods can also be used, such as a display screen. This application does not impose any restrictions on the specific configuration of the output display unit, as long as it can output the position status signal detected by the position detection unit 130 in a form visible to the naked eye.

[0043] In one possible implementation of this application, such as Figure 4As shown, the electrical adapter plate 140 extends along the stacking direction of the placement area 121; multiple output display units are arranged at intervals on the electrical adapter plate 140, and the position of each output display unit corresponds to the first layer of the placement area 121; the housing 110 is provided with through holes corresponding to the positions of each output display unit.

[0044] like Figure 4 As shown, the electrical adapter plate 140 extends vertically to cover the height range of all placement areas 121 and is arranged parallel to the multiple placement areas 121 on the frame 120. This facilitates visual and electrical connection with the position detection unit 130 of each placement area 121, improves wiring indirectness, and avoids messy and cross-shaped lines inside the housing 110. At the same time, the layout consistent with the stacking direction of the placement areas 121 allows the adapter plate to be installed tightly against the inside of the frame 120 or the housing 110 without occupying additional lateral space, which is conducive to further miniaturization of the device.

[0045] To avoid interference between the placement of the electrical adapter board 140 and the orientation of the mask 200, if the side of the placement area 121 facing the pick-up and drop-out port 111 is the front, preferably, the electrical adapter board 140 is placed on the left or right side of the placement area 121, so as to facilitate the observation of the display status of the output display unit.

[0046] The housing 110 has multiple through holes at the positions corresponding to the electrical adapter plate 140. These through holes correspond to the positions of each output display unit, so the operator can observe the display status of the output display unit through the through holes and thus better determine the position status of each layer of mask 200.

[0047] The aforementioned mask storage device 100 includes a housing 110 and a frame 120 disposed within the housing 110. The frame 120 has multi-layer placement areas 121 for layered placement of mask 200. The side wall of the housing 110 has retrieval ports 111 matching the number of placement areas 121. Each retrieval port 111 is connected to one layer of placement area 121. Through the corresponding arrangement of retrieval ports 111 and placement areas 121, independent retrieval and placement of each mask 200 can be achieved, improving the retrieval and placement efficiency of the mask 200. The placement area 121 is provided with a position detection unit 130 and an output display unit connected by a signal. The position detection unit 130 is fixed to one side of the placement area 121 and is used to detect the position state of the mask 200 relative to a preset area and convert it into a position state signal. The output display unit can be turned on or off according to the position state signal. By cooperating with the output display unit and the position detection unit 130, the position status of the mask 200 in each placement area 121 can be intuitively understood, such as whether the mask 200 is in place, making the process of picking up and placing the mask 200 simpler and more efficient. Compared with existing mask storage devices, the opening mechanism and scanning mechanism are eliminated, saving the process of opening the box and scanning the mask 200's position status, simplifying the mask 200 picking and placing steps, and realizing the miniaturization of the device. The above-mentioned mask storage device 100 can simplify the mask 200 picking and placing steps, while realizing the miniaturization of the device and reducing the manufacturing and maintenance costs of the device.

[0048] For example, such as Figure 4 , Figure 7 and Figure 8 The placement area 121 is provided with a support member 150, which includes a carrier plate 151 and a first support block 152 disposed on the top surface of the carrier plate 151. The first support block 152 is used to support the mask plate 200. A bracket 153 is provided on the side of the carrier plate 151 away from the pick-up and drop-out port 111. The position detection unit 130 is fixedly disposed on the bracket 153, and the detection end faces the mask plate 200 on the carrier plate 151.

[0049] Specifically, such as Figure 8 As shown, the support member 150 includes a support plate 151. The area of ​​the support surface of the support plate 151 is not less than the area of ​​the photomask 200 to ensure that the photomask 200 can be stably placed on the top surface of the support surface. Multiple first support blocks 152 are provided on the top surface of the support plate 151. These first support blocks 152 are evenly distributed on the top surface of the support plate 151. The first support blocks 152 are used to provide local support for the photomask 200, reducing the contact area between the support plate 151 and the photomask 200, and lowering the risk of contamination of the photomask 200 due to impurities or scratches on the surface of the support plate 151.

[0050] like Figure 8As shown, there are four first support blocks 152. The four first support blocks 152 are respectively set at the four corners of the top surface of the support plate 151 to improve the support stability of the mask plate 200. The mask plate 200 may shake or shift during placement and removal.

[0051] like Figure 7 As shown, a bracket 153 is provided on the side of the support plate 151 away from the pick-up / placement port 111 to avoid the pick-up / placement direction of the mask 200. The position detection unit 130 is rigidly fixed by the bracket 153 to ensure that the detection end is stably pointed to the mask 200 on the support plate 151, and the detection range covers the preset in-situ area of ​​the mask 200. By setting the bracket 153, the position detection unit 130 is prevented from shifting due to vibration or collision, ensuring that the detection end is always aligned with the target detection area of ​​the mask 200, reducing misjudgments caused by sensor displacement, and improving the reliability of the pick-up / placement of the mask 200.

[0052] Optionally, such as Figure 8 As shown, a buffer pad 154 is provided on the top surface of the first support block 152. The buffer pad 154 is located between the first support block 152 and the mask 200, that is, the buffer pad 154 is disposed at the contact section between the first support block 152 and the mask 200. Preferably, the buffer pad 154 is made of polyetheretherketone (PEEK), which has wear resistance, high temperature resistance, and low particulate release characteristics. Of course, in addition to PEEK, other materials with wear resistance, high temperature resistance, and low particulate release characteristics can also be used, and this application does not impose any restrictions on this. The buffer pad 154 can be attached to the top surface of the first support block 152 by adhesive.

[0053] By setting the buffer pad 154, edge chipping, surface scratches or internal stress damage caused by direct collision between the rigid carrier plate 151 and the mask 200 can be avoided; at the same time, since PEEK material has the characteristics of low dust and chemical corrosion resistance, it can reduce particulate contaminants generated by friction, and can more effectively maintain a low particle environment on the surface of the mask 200, meeting the cleanliness requirements of the photolithography process.

[0054] Furthermore, such as Figure 8 and Figure 9 As shown, the first support block 152 and the buffer pad 154 are respectively provided with coaxially arranged through holes 156 along the stacking direction; the bearing plate 151 is provided with a docking hole communicating with the through hole 156, and the docking hole is connected to the pipe joint 157; the pipe joint 157 is used to connect an external air extraction device so that the mask 200 is adsorbed and fixed on the buffer pad 154.

[0055] Specifically, the axis of the through hole 156 of the first support block 152 is completely coincident with the axis of the through hole 156 of the buffer pad 154, so as to form an airflow channel that runs vertically through the block. Correspondingly, the bearing plate 151 is provided with a docking hole that communicates with the airflow channel, and a pipe connector 157 is connected to the side of the docking hole away from the first support block 152.

[0056] The pipe connector 157 is connected to an external suction device, such as a vacuum pump, via an external pipeline. When the suction device is working, it draws air from between the mask 200 and the buffer pad 154 through the airflow channel formed by the through hole 156, the mating hole, and the pipe connector 157, creating a negative pressure environment. Under this negative pressure, the mask 200 is tightly adhered to the surface of the buffer pad 154, and is fixed to the first support block 152 by atmospheric pressure.

[0057] Vacuum adsorption uses a large-area, uniform force to stably fix the mask 200 onto the first support block 152. Even with slight vibrations in the device or during the momentary handling by the robotic arm, it prevents the mask 200 from shifting or slipping. This ensures the stability and reliability of the mask 200 handling process without causing physical compression to its edges or surface. Furthermore, adsorption fixation eliminates the need for complex mechanical locking mechanisms; the mask 200 can be fixed or released simply by starting and stopping the vacuum device, significantly reducing handling time and improving process efficiency.

[0058] Optionally, such as Figure 9 As shown, a second support block 155 is provided on the bottom surface of the support plate 151, and the second support block 155 is supported between the bottom surface of the placement area 121 and the support plate 151.

[0059] Specifically, the second support block 155 is used to support the bearing plate 151, and the bearing plate 151 can be placed on the partition 128 of the frame 120 through the second support block 155. Figure 9 As shown, there are four second support blocks 155, which are respectively located at the four corners of the support plate 151. With this arrangement, the weight of the support plate 151 and the mask plate 200 can be evenly transferred to the partition plate 128 of the placement area 121 by distributing the support, thereby improving the stability of the frame 120.

[0060] In one possible implementation of this application, such as Figure 3 As shown, the housing 110 has a ventilation hole on the side opposite to the take-out port 111. The air sleeve 112 passes through the ventilation hole and is fixedly connected to the housing 110. The air sleeve 112 is used to connect an external air extraction device to extract air from the inside of the housing 110.

[0061] Specifically, the air jacket 112 can be fixedly connected to the housing 110 via threaded connections, flange connections, or other methods, forming a closed airflow channel between the interior of the housing 110 and the external air extraction device. The number of air jackets 112 can be adjusted according to the air extraction requirements, such as... Figure 3 As shown, there are two air sleeves 112, which are spaced apart along the setting direction of the multi-layer placement area 121 to ensure air extraction from each area inside the housing 110.

[0062] The air jacket 112 is connected to an external extraction device, such as a vacuum pump or a fan, via an external pipeline. The air jacket 112 draws air outward from the interior of the housing 110 to control the particle concentration inside the housing 110 and create a clean airflow environment. Preferably, a through hole is provided in the middle of the support plate 151, providing a longitudinal through channel for airflow inside the housing 110 to further improve the overall air replacement efficiency.

[0063] Continuous extraction of internal air can promptly remove particles that may be generated during the storage of the photomask 200 from the housing 110. For example, micro-dust generated by friction of the buffer pad 154 and minor impurities that have seeped in from the outside can be discharged through the ventilation holes, effectively reducing the particle size inside the housing 110 and meeting the cleanliness requirements of the photolithography process for the storage environment of the photomask 200.

[0064] In another aspect, this utility model provides a photolithography exposure apparatus, including a gripping mechanism and a mask storage device 100, wherein the gripping mechanism is used to pick up and put in a mask 200 from the pick-up and put-out port 111 of the mask storage device 100.

[0065] The gripping mechanism can determine the position of the pick-and-place port 111 of the mask storage device 100 through visual positioning and mechanical guidance. When the output display unit corresponding to a certain placement area 121 shows that the mask 200 is in place, the gripping mechanism can quickly locate the pick-and-place port 111 corresponding to that placement area 121 and take out the mask 200 through the pick-and-place port 111, thereby simplifying the mask 200 pick-and-place steps. The specific structure and beneficial effects of the mask storage device 100 have been described in detail above and will not be repeated here.

[0066] The aforementioned photolithography exposure equipment, through the setting of the mask storage device 100, eliminates the setting of the unpacking mechanism and the scanning mechanism compared to the existing mask storage device, thus eliminating the unpacking process and the scanning process of the mask 200 in place, simplifying the mask 200 picking and placing steps, realizing the miniaturization of the device, and reducing the manufacturing and maintenance costs of the device.

[0067] The above description is merely an optional embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

[0068] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable way without contradiction. In order to avoid unnecessary repetition, this utility model will not describe the various possible combinations separately.

Claims

1. A mask storage device, characterized in that, The device includes a housing (110) and a frame (120) disposed within the housing (110). The frame (120) has multi-layer placement areas (121) for layered placement of mask plates (200). The sidewall of the housing (110) has pick-and-place openings (111) matching the number of placement areas (121), and each pick-and-place opening (111) is connected to one layer of the placement area (121). The placement area (121) is provided with a position detection unit (130) and an output display unit connected by a signal connection. The position detection unit (130) is fixed to one side of the placement area (121) and is used to detect the position state of the mask plate (200) relative to a preset area and convert it into a position state signal. The output display unit can be turned on or off according to the position state signal.

2. The mask storage device according to claim 1, characterized in that, The mask storage device (100) further includes an electrical adapter board (140), through which the position detection unit (130) is signal connected to the output display unit; the electrical adapter board (140) extends along the stacking direction of the placement area (121); a plurality of output display units are spaced apart on the electrical adapter board (140), and the position of each output display unit corresponds to one layer of the placement area (121); the housing (110) is provided with through holes corresponding to the positions of each output display unit.

3. The mask storage device according to claim 1, characterized in that, The placement area (121) is provided with a support member (150), the support member (150) includes a carrier plate (151) and a first support block (152) disposed on the top surface of the carrier plate (151), the first support block (152) is used to support the mask plate (200); a bracket (153) is provided on the side of the carrier plate (151) away from the pick-up and drop-out port (111), the position detection unit (130) is fixedly disposed on the bracket (153), and the detection end faces the mask plate (200) on the carrier plate (151).

4. The mask storage device according to claim 3, characterized in that, A buffer pad (154) is provided on the top surface of the first support block (152), and the buffer pad (154) is located between the first support block (152) and the mask plate (200).

5. The mask storage device according to claim 3, characterized in that, The bottom surface of the support plate (151) is provided with a second support block (155), which is supported between the bottom surface of the placement area (121) and the support plate (151).

6. The mask storage device according to claim 4, characterized in that, The first support block (152) and the buffer pad (154) are respectively provided with coaxially arranged through holes (156) along the stacking direction; the bearing plate (151) is provided with a docking hole communicating with the through hole (156), and the docking hole is connected to a pipe joint (157); the pipe joint (157) is used to connect an external air extraction device so that the mask plate (200) is adsorbed and fixed on the buffer pad (154).

7. The mask storage device according to claim 1, characterized in that, The housing (110) has a ventilation hole on the side away from the take-out port (111). The air sleeve (112) passes through the ventilation hole and is fixedly connected to the housing (110). The air sleeve (112) is used to connect an external air extraction device to extract air from the inside of the housing (110).

8. The mask storage device according to claim 1, characterized in that, The frame (120) includes a first side plate (122), a second side plate (123), multiple partitions (128), a back plate (124), a top plate (125), and a bottom plate (126); the first side plate (122) and the second side plate (123) are arranged parallel to each other and spaced apart; the back plate (124) is vertically connected between the first side plate (122) and the second side plate (123); the top plate (125) and the bottom plate (126) are arranged opposite to each other on both sides of the back plate (124), and are respectively connected to the first side plate (122) and the second side plate (123). A side panel (122), a second side panel (123), and a back panel (124) are vertically arranged; a plurality of partitions (128) are spaced apart between the first side panel (122) and the second side panel (123) along the stacking direction, and are vertically fixedly connected to the back panel (124); the placement area (121) is formed between adjacent partitions (128), between the uppermost partition (128) and the top panel (125), and between the lowermost partition (128) and the bottom panel (126).

9. The mask storage device according to claim 8, characterized in that, The inner sidewalls of the first side plate (122) and / or the second side plate (123) are provided with a plurality of guide grooves (127), and the plurality of guide grooves (127) are distributed at intervals along the stacking direction; the sidewall of the partition (128) is embedded in the guide grooves (127).

10. A photolithography exposure apparatus, characterized in that, Includes a gripping mechanism and a mask storage device (100) as described in any one of claims 1-9, wherein the gripping mechanism is used to pick up and put down a mask (200) from the pick-up and put-down port (111) of the mask storage device (100).

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