A carrier mechanism for a wafer robotic arm

Abstract

This utility model discloses a support mechanism for a wafer robotic arm, including a robotic arm assembly; a mounting base is fixedly connected to the bottom of the robotic arm assembly; a connecting mechanism is provided at the bottom of the mounting base; the connecting mechanism includes a linkage block, the top of which is fixedly connected to the bottom of the mounting base, mounting grooves are provided on both sides of the linkage block, a support box is provided at the bottom of the linkage block, a motor is inserted through the outer side of the support box, the output end of the motor extends into the inner cavity of the support box, a worm gear assembly is fixedly connected to the output end of the motor, and a worm wheel assembly is provided at the bottom of the worm gear assembly. This utility model, by setting a connecting mechanism, changes the traditional support mechanism's limitation of only being able to be fixedly connected to the robotic arm, which is inconvenient during disassembly operations. It allows for more convenient disassembly operations, saving users disassembly time.

Description

Technical Field

[0001] This utility model relates to the field of robotic arm technology, specifically a support mechanism for a wafer robotic arm. Background Technology

[0002] The load-bearing mechanism of a robotic arm is a key component for realizing load operations. It is responsible for supporting, transmitting and stabilizing the load, and directly affects the motion performance, accuracy and reliability of the robotic arm. It is the core guarantee of the robotic arm's performance, and its design needs to balance load capacity, motion accuracy, dynamic performance and cost.

[0003] According to a patent published on the China Patent Network, the patent title is "A Support Mechanism for a Wafer Robotic Arm," and the patent application number is 202322504451.6. This utility model relates to the technical field of wafer processing, and in particular to a support mechanism for a wafer robotic arm. It improves stability during movement, prevents collisions that could cause wafers to fall off, enhances applicability, protects the wafer, and prevents wear on the outer edge of the wafer caused by the clamping arm. It includes a C-shaped support frame and a connector. The connector is installed on the left side wall of the C-shaped support frame and has a keyway for connecting to the robotic arm. It also includes a protective mechanism, a rotating mechanism, a clamping mechanism, and a buffer assembly. The protective mechanism is installed at both ends of the C-shaped support frame and includes multiple damping rods, multiple buffer springs, and two protective plates. The rotating mechanism is installed on the inner wall of the C-shaped support frame and includes a servo motor, a rotating frame, and a rotating base. The clamping mechanism is installed on the rotating mechanism and includes multiple small electric telescopic rods and two clamping plates. A buffer assembly is installed on the clamping mechanism. The connection between the aforementioned robotic arm and the load-bearing mechanism is generally fixed with large screws, which is inconvenient when disassembly is required and affects the efficiency of disassembly and assembly in use.

[0004] Therefore, the load-bearing mechanism needs to be redesigned to effectively prevent it from being connected to the robotic arm only by screws. Utility Model Content

[0005] To address the problems mentioned in the background art, the purpose of this utility model is to provide a support mechanism for a wafer robotic arm, which has the advantage of a more flexible connection method and solves the problem of inconvenient disassembly.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a support mechanism for a wafer robotic arm, comprising a robotic arm assembly;

[0007] The bottom of the robotic arm assembly is fixedly connected to a mounting base;

[0008] A connecting mechanism is provided at the bottom of the mounting base;

[0009] The connecting mechanism includes a linkage block, the top of which is fixedly connected to the bottom of the mounting base. Mounting slots are provided on both sides of the linkage block. A bearing box is located at the bottom of the linkage block. A motor is installed through the outer side of the bearing box, and the output end of the motor extends into the inner cavity of the bearing box. A worm gear assembly is fixedly connected to the output end of the motor. A worm wheel assembly is located at the bottom of the worm gear assembly. The top of the worm wheel assembly is meshed with the bottom of the worm gear assembly. Threaded rods are fixedly connected to both sides of the worm wheel assembly. A transmission rod is threadedly connected to the surface of the threaded rod. A mounting clip is fixedly connected to the top of the transmission rod. A limit rail is slidably connected to the bottom of the transmission rod. The bottom of the limit rail is fixedly connected to the bottom of the inner wall of the bearing box. An auxiliary mechanism is fixedly connected to the bottom of the inner wall of the bearing box.

[0010] In a preferred embodiment of this utility model, the auxiliary mechanism includes a sliding column, the bottom of which is fixedly connected to the bottom of the inner wall of the bearing box. A pressing plate is slidably connected to the surface of the sliding column, and a return spring is sleeved on the surface of the sliding column. The top of the return spring is fixedly connected to the bottom of the pressing plate. An insert is fixedly connected to the top of the pressing plate, and a pressing rod is fixedly connected to the top of the pressing plate. The top of the pressing rod extends to the outside of the bearing box.

[0011] As a preferred embodiment of this invention, a limiting ring is fixedly connected to the top of the sliding column, and the limiting ring is used in conjunction with the sliding column.

[0012] As a preferred embodiment of this invention, a reinforcing ring is fitted onto the surface of the pressing rod, and the bottom of the reinforcing ring is fixedly connected to the top of the pressing plate.

[0013] As a preferred embodiment of this utility model, a triangular plate is fixedly connected to the front of the limiting slide rail, and the bottom of the triangular plate is fixedly connected to the bottom of the inner wall of the bearing box.

[0014] As a preferred embodiment of this utility model, a reinforcing block is fixedly connected to the top of the motor, and the inner side of the reinforcing block is fixedly connected to the outer side of the bearing box.

[0015] As a preferred embodiment of this invention, a support plate is sleeved on the surface of the threaded rod, and the bottom of the support plate is fixedly connected to the bottom of the inner wall of the bearing box.

[0016] As a preferred embodiment of this utility model, a connecting plate is fixedly connected to the outer side of the transmission rod, and the inner side of the connecting plate is fixedly connected to the outer side of the mounting strip.

[0017] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0018] 1. By setting up a connecting mechanism, this utility model changes the traditional bearing mechanism, which can only be connected to the robotic arm by a fixed connection, making disassembly operations inconvenient. It enables more convenient disassembly operations, ensuring that users save disassembly time.

[0019] 2. By setting up an auxiliary mechanism, this utility model can further limit the installation of the mounting strip, ensuring that the overall structure operates more stably.

[0020] 3. By setting a limiting ring, this utility model can assist the sliding column, prevent the pressing plate from derailing during movement, and ensure that the structure can operate more stably.

[0021] 4. By setting a reinforcing ring, this utility model can reinforce the pressing rod, strengthen the connection between the pressing rod and the pressing plate, and prevent the two from separating or breaking.

[0022] 5. By setting the triangular plate, this utility model can reinforce the limiting slide rail, strengthen the connection between the limiting slide rail and the load-bearing box, and enable the two to be connected more stably.

[0023] 6. By adding reinforcing blocks, this utility model can strengthen the motor and enhance the connection between the motor and the carrier box, making the connection more stable and preventing the motor from falling off.

[0024] 7. By setting up a support plate, this utility model can reinforce the threaded rod, strengthen its own strength, and prevent the threaded rod from shifting or tilting.

[0025] 8. The present invention, through the setting of the connecting plate, can reinforce the mounting strip and strengthen the connection between the mounting strip and the transmission rod. Attached Figure Description

[0026] Figure 1 This is a cross-sectional view of the structure of this utility model;

[0027] Figure 2 This is a structural diagram of the connection mechanism of this utility model;

[0028] Figure 3 This utility model Figure 2 Enlarged view of the structure at point A in the middle;

[0029] Figure 4 This is a structural diagram of the auxiliary mechanism of this utility model;

[0030] Figure 5 This is a bottom view of a partial structure of the present invention.

[0031] In the diagram: 1. Robotic arm assembly; 2. Mounting base; 3. Connecting mechanism; 31. Linkage block; 32. Mounting slot; 33. Bearing box; 34. Motor; 35. Worm gear assembly; 36. Worm wheel assembly; 37. Threaded rod; 38. Transmission rod; 39. Mounting clip; 310. Limiting slide rail; 4. Auxiliary mechanism; 41. Sliding column; 42. Pressing plate; 43. Return spring; 44. Insert; 45. Pressing rod; 5. Limiting ring; 6. Reinforcing ring; 7. Triangular plate; 8. Reinforcing block; 9. Support plate; 10. Connecting plate. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0033] like Figures 1 to 5 As shown, the present invention provides a support mechanism for a wafer robotic arm, including a robotic arm assembly 1;

[0034] The bottom of the robotic arm assembly 1 is fixedly connected to the mounting base 2;

[0035] The bottom of the mounting base 2 is provided with a connecting mechanism 3;

[0036] The connecting mechanism 3 includes a linkage block 31, the top of which is fixedly connected to the bottom of the mounting base 2. Mounting slots 32 are provided on both sides of the linkage block 31. A bearing box 33 is provided at the bottom of the linkage block 31. A motor 34 is installed through the outer side of the bearing box 33. The output end of the motor 34 extends into the inner cavity of the bearing box 33. A worm gear assembly 35 is fixedly connected to the output end of the motor 34. A worm wheel assembly 36 is provided at the bottom of the worm gear assembly 35. The top of the worm wheel assembly 36 is meshed with the bottom of the worm gear assembly 35. Threaded rods 37 are fixedly connected to both sides of the worm wheel assembly 36. A transmission rod 38 is threadedly connected to the surface of the threaded rod 37. A mounting clip 39 is fixedly connected to the top of the transmission rod 38. A limit rail 310 is slidably connected to the bottom of the transmission rod 38. The bottom of the limit rail 310 is fixedly connected to the bottom of the inner wall of the bearing box 33. An auxiliary mechanism 4 is fixedly connected to the bottom of the inner wall of the bearing box 33.

[0037] refer to Figure 4The auxiliary mechanism 4 includes a sliding column 41, the bottom of which is fixedly connected to the bottom of the inner wall of the bearing box 33. A pressing plate 42 is slidably connected to the surface of the sliding column 41. A return spring 43 is sleeved on the surface of the sliding column 41. The top of the return spring 43 is fixedly connected to the bottom of the pressing plate 42. An insert 44 is fixedly connected to the top of the pressing plate 42. A pressing rod 45 is fixedly connected to the top of the pressing plate 42. The top of the pressing rod 45 extends to the outside of the bearing box 33.

[0038] As a technical optimization of this utility model, the auxiliary mechanism 4 can further limit the installation of the mounting strip 39, ensuring that the overall structure operates more stably.

[0039] refer to Figure 4 A limit ring 5 is fixedly connected to the top of the slide column 41, and the limit ring 5 is used in conjunction with the slide column 41.

[0040] As a technical optimization of this utility model, the setting of the limiting ring 5 can play an auxiliary role in the sliding column 41, avoid the phenomenon of derailment of the pressing plate 42 when it moves, and ensure that the structure can operate more stably.

[0041] refer to Figure 4 A reinforcing ring 6 is fitted onto the surface of the pressing rod 45, and the bottom of the reinforcing ring 6 is fixedly connected to the top of the pressing plate 42.

[0042] As a technical optimization of this utility model, the reinforcing ring 6 can reinforce the pressing rod 45, strengthen the connection between the pressing rod 45 and the pressing plate 42, and prevent the two from separating and breaking.

[0043] refer to Figure 3 A triangular plate 7 is fixedly connected to the front of the limiting slide rail 310, and the bottom of the triangular plate 7 is fixedly connected to the bottom of the inner wall of the bearing box 33.

[0044] As a technical optimization of this utility model, the triangular plate 7 can reinforce the limiting slide rail 310, strengthen the connection between the limiting slide rail 310 and the bearing box 33, and enable the two to be connected more stably.

[0045] refer to Figure 1 A reinforcing block 8 is fixedly connected to the top of the motor 34, and the inner side of the reinforcing block 8 is fixedly connected to the outer side of the bearing box 33.

[0046] As a technical optimization of this utility model, the reinforcement block 8 can reinforce the motor 34, strengthen the connection between the motor 34 and the carrier box 33, and make the two more stably connected, thus preventing the motor 34 from falling off.

[0047] refer to Figure 2 A support plate 9 is sleeved on the surface of the threaded rod 37, and the bottom of the support plate 9 is fixedly connected to the bottom of the inner wall of the bearing box 33.

[0048] As a technical optimization of this utility model, the support plate 9 can reinforce the threaded rod 37, strengthen its own strength, and prevent the threaded rod 37 from shifting or tilting.

[0049] refer to Figure 2 A connecting plate 10 is fixedly connected to the outer side of the transmission rod 38, and the inner side of the connecting plate 10 is fixedly connected to the outer side of the mounting strip 39.

[0050] As a technical optimization of this utility model, the connection plate 10 can reinforce the mounting strip 39 and strengthen the connection between the mounting strip 39 and the transmission rod 38.

[0051] The working principle and usage process of this utility model are as follows: First, when the user needs to install the robotic arm, he / she only needs to start the motor 34. The output end of the motor 34 drives the worm gear assembly 35 to rotate, the worm gear assembly 35 drives the worm wheel assembly 36 to rotate, the worm wheel assembly 36 drives the threaded rod 37 to rotate, the threaded rod 37 drives the transmission rod 38 to move left and right, and the transmission rod 38 drives the mounting clip 39 to move left and right until it is in contact with the mounting groove 32. When the mounting clip 39 moves to the appropriate position, the return spring 43 pushes the pressing plate 42 to move upward, and the pressing plate 42 drives the insert 44 to move upward until it passes through the mounting clip 39, thus completing the positioning operation of the mounting clip 39. Through the above operation, the disassembly operation can be made more convenient.

[0052] In summary, this wafer robotic arm's support mechanism, through the addition of a connecting mechanism, overcomes the inconvenience of traditional support mechanisms that can only be fixedly connected to the robotic arm during disassembly, allowing for more convenient disassembly and saving users time.

[0053] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible without substantially departing from the novelty and advantages of the subject matter described in this application. For example, variations in the size, dimensions, structure, shape, and proportions of various elements, as well as parameter values ​​such as temperature, pressure, etc., installation arrangements, use of materials, color, orientation, etc. For instance, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structurally equivalent but also equivalent in structure. Other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments without departing from the scope of this utility model. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0054] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to implementing the present invention) may be omitted.

[0055] It should be understood that numerous specific implementation decisions can be made during the development of any actual implementation method, and in any engineering or design project. Such development efforts may be complex and time-consuming, but for those of ordinary skill in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0056] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A support mechanism for a wafer robotic arm, comprising a robotic arm assembly (1); The bottom of the robotic arm assembly (1) is fixedly connected to a mounting base (2); The bottom of the mounting base (2) is provided with a connecting mechanism (3); characterized in that: The connecting mechanism (3) includes a linkage block (31), the top of which is fixedly connected to the bottom of the mounting base (2). Mounting slots (32) are provided on both sides of the linkage block (31). A bearing box (33) is provided at the bottom of the linkage block (31). A motor (34) is installed through the outer side of the bearing box (33). The output end of the motor (34) extends into the inner cavity of the bearing box (33). A worm gear assembly (35) is fixedly connected to the output end of the motor (34). A worm wheel assembly (36) is provided at the bottom of the worm gear assembly (35). The top of the worm gear assembly (36) is engaged with the bottom of the worm gear assembly (35). Threaded rods (37) are fixedly connected to both sides of the worm gear assembly (36). A transmission rod (38) is threadedly connected to the surface of the threaded rod (37). An installation clip (39) is fixedly connected to the top of the transmission rod (38). A limit rail (310) is slidably connected to the bottom of the transmission rod (38). The bottom of the limit rail (310) is fixedly connected to the bottom of the inner wall of the bearing box (33). An auxiliary mechanism (4) is fixedly connected to the bottom of the inner wall of the bearing box (33).

2. The support mechanism for a wafer robotic arm according to claim 1, characterized in that: The auxiliary mechanism (4) includes a sliding column (41), the bottom of which is fixedly connected to the bottom of the inner wall of the bearing box (33). A pressing plate (42) is slidably connected to the surface of the sliding column (41). A return spring (43) is sleeved on the surface of the sliding column (41). The top of the return spring (43) is fixedly connected to the bottom of the pressing plate (42). An insert (44) is fixedly connected to the top of the pressing plate (42). A pressing rod (45) is fixedly connected to the top of the pressing plate (42). The top of the pressing rod (45) extends to the outside of the bearing box (33).

3. The support mechanism for a wafer robotic arm according to claim 2, characterized in that: A limiting ring (5) is fixedly connected to the top of the sliding column (41), and the limiting ring (5) is used in conjunction with the sliding column (41).

4. The support mechanism for a wafer robotic arm according to claim 2, characterized in that: The surface of the pressing rod (45) is fitted with a reinforcing ring (6), and the bottom of the reinforcing ring (6) is fixedly connected to the top of the pressing plate (42).

5. The support mechanism for a wafer robotic arm according to claim 1, characterized in that: A triangular plate (7) is fixedly connected to the front of the limiting slide rail (310), and the bottom of the triangular plate (7) is fixedly connected to the bottom of the inner wall of the bearing box (33).

6. The support mechanism for a wafer robotic arm according to claim 1, characterized in that: A reinforcing block (8) is fixedly connected to the top of the motor (34), and the inner side of the reinforcing block (8) is fixedly connected to the outer side of the bearing box (33).

7. The support mechanism for a wafer robotic arm according to claim 1, characterized in that: The surface of the threaded rod (37) is fitted with a support plate (9), and the bottom of the support plate (9) is fixedly connected to the bottom of the inner wall of the bearing box (33).

8. The support mechanism for a wafer robotic arm according to claim 1, characterized in that: A connecting plate (10) is fixedly connected to the outer side of the transmission rod (38), and the inner side of the connecting plate (10) is fixedly connected to the outer side of the mounting clip (39).

Images