Combined mask plate, coating equipment and solar cell module
By using a modular mask with interlocking separators on the frame, the adaptability problem of coating for products of different specifications is solved, achieving a highly efficient and precise coating process, reducing costs and errors, and improving product quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- KUNSHAN GCL OPTOELECTRONIC MATERIAL CO LTD
- Filing Date
- 2025-05-23
- Publication Date
- 2026-05-26
AI Technical Summary
Existing photomasks cannot meet the coating requirements of products of different specifications, resulting in the need for batch coating, repeated power-on and power-off cycles, increased workload and cost, and deviations in experimental results.
A modular photomask was designed, which forms a variety of different sized accommodating spaces by setting pluggable first and second separators on the frame, to accommodate sputtering or vapor deposition processes for products of different specifications.
It improved production efficiency, reduced production costs, decreased experimental errors, obtained more accurate experimental results, and enhanced product quality and market competitiveness.
Smart Images
Figure CN224280419U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vapor deposition technology, and in particular to a combined mask, deposition equipment and solar cell module. Background Technology
[0002] In the fabrication of perovskite solar cells, sputtering and vapor deposition processes are often required. These processes often require photomasks, which are used to support products of different structures or sizes so that sputtered or vapor-deposited materials can be deposited onto the products, thus completing the sputtering or vapor deposition process.
[0003] However, in actual experiments, the sizes of products vary, the number of products to be sputtered or vapor-deposited each time is not fixed, and the required coating masks are also different. However, the existing coating masks can only support a fixed product size and sample structure. This means that when coating products of different specifications, it is necessary to coat them in batches, and a coating mask of the corresponding size needs to be changed before each coating. This results in the need to repeatedly start and stop the machine for multiple coatings, which not only increases the workload and wastes a lot of time and material costs, but also, when conducting experiments under the same conditions, it is not possible to complete the process in one go using the same batch. This leads to differences in factors such as vacuum pressure, temperature, vapor deposition or sputtering rate and thickness when coating products in multiple batches, which are difficult to control precisely, resulting in deviations in experimental results.
[0004] Therefore, there is an urgent need for a modular mask to solve the above problems. Utility Model Content
[0005] The purpose of this invention is to provide a combined mask, coating equipment and solar cell module that can be adapted to products of different sizes in the same batch, and has strong versatility.
[0006] To achieve this objective, the present invention adopts the following technical solution:
[0007] On one hand, a combined photomask is provided, the combined photomask comprising:
[0008] Multiple first separators, the multiple first separators having different lengths;
[0009] Multiple second partitions, each having a different length, and each second partition having multiple through structures for connecting to the first partition;
[0010] The frame includes two first enclosure panels arranged opposite each other along a first direction and two second enclosure panels arranged opposite each other along a second direction. Each first enclosure panel has a plurality of first plug-in structures for connecting with the first partition, and each second enclosure panel has a plurality of second plug-in structures for connecting with the second partition. The first direction is perpendicular to the second direction.
[0011] Optionally, the plurality of first partitions and the plurality of second partitions each have a variety of different lengths formed by proportional division, and the first partitions and second partitions of different lengths can be freely combined within the frame to form an accommodating space of the same or different sizes.
[0012] Optionally, when the frame is provided with a plurality of first partitions having a first length and a plurality of second partitions having a second length, the frame is divided into a plurality of accommodating spaces of the same size.
[0013] Optionally, when the frame is provided with a plurality of first partitions having a third length, a fourth length, and a fifth length, and a plurality of second partitions having a sixth length, a seventh length, and an eighth length, the frame is divided into a plurality of accommodating spaces of different sizes.
[0014] Optionally, the second separator includes an insert plate and a support plate, the support plate being perpendicularly connected to the insert plate, the through structure being formed on the insert plate, and the insert plate being connected to the second insertion structure.
[0015] Optionally, the two ends of the insert plate extend beyond the support plate along the second direction and are connected to the second insertion structure.
[0016] Optionally, the insert plate is welded to the support plate to form an integral second partition. Optionally, the frame further includes an outer plate connected to the first enclosure plate or the second enclosure plate.
[0017] On the other hand, a coating apparatus is provided, the coating apparatus comprising a combined mask as described in any of the preceding claims.
[0018] On the other hand, a solar cell module is provided, which is made by means of a combined mask as described in any of the above.
[0019] The beneficial effects of this utility model are:
[0020] This utility model provides a modular photomask. The modular photomask has a first insertion structure on the first baffle of a frame, connected to a first partition; a second insertion structure on the second baffle of the frame, connected to a second partition; and a through structure on the second partition, connected to the first partition. This allows the frame to form various accommodating spaces of different sizes within the frame after assembly with multiple first partitions and multiple second partitions of different lengths. This accommodates products of different sizes within the same batch for sputtering or vapor deposition processes. Its versatility is strong, significantly reducing production costs and avoiding experimental errors during multi-batch testing, resulting in more accurate experimental results.
[0021] This invention also provides a coating equipment that, by applying the aforementioned combined mask, can complete sputtering or vapor deposition processes for products of different sizes in the same batch, thereby greatly improving production efficiency and shortening the production cycle.
[0022] This invention also provides a solar cell module, which is manufactured using the aforementioned combined mask plate, thereby improving product quality, reducing manufacturing costs, and enhancing market competitiveness. Attached Figure Description
[0023] Figure 1 This utility model provides a combined mask plate with multiple identical accommodating spaces;
[0024] Figure 2 This utility model provides a combined mask plate with multiple accommodating spaces of different sizes;
[0025] Figure 3 This utility model provides a combined mask plate with an accommodating space;
[0026] Figure 4 This is a schematic diagram of the structure of the first separator in the combined mask provided by this utility model;
[0027] Figure 5 This is a schematic diagram of the structure of the second separator in the combined mask provided by this utility model;
[0028] Figure 6 This is a schematic diagram of the structure of the first baffle plate in the combined mask plate provided by this utility model;
[0029] Figure 7 This is a schematic diagram of the structure of the second baffle in the combined mask plate provided by this utility model.
[0030] In the picture:
[0031] 1. First dividing element;
[0032] 2. Second partition; 21. Insert plate; 22. Support plate; 23. Through structure;
[0033] 3. Frame; 31. First enclosure panel; 311. First interlocking structure; 32. Second enclosure panel; 321. Second interlocking structure;
[0034] 4. External board. Detailed Implementation
[0035] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0036] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0037] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0038] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0039] In the fabrication of perovskite solar cells, sputtering and vapor deposition processes are often required. These processes often require photomasks, which are used to support products of different structures or sizes so that sputtered or vapor-deposited materials can be deposited onto the products, thus completing the sputtering or vapor deposition process.
[0040] However, in actual experiments, the sizes of products vary, the number of products to be sputtered or vapor-deposited each time is not fixed, and the required coating masks are also different. However, the existing coating masks can only support a fixed product size and sample structure. This means that when coating products of different specifications, it is necessary to coat them in batches, and a coating mask of the corresponding size needs to be changed before each coating. This results in the need to repeatedly start and stop the machine for multiple coatings, which not only increases the workload and wastes a lot of time and material costs, but also, when conducting experiments under the same conditions, it is not possible to complete the process in one go using the same batch. This leads to differences in factors such as vacuum pressure, temperature, vapor deposition or sputtering rate and thickness when coating products in multiple batches, which are difficult to control precisely, resulting in deviations in experimental results.
[0041] Therefore, in order to accommodate products of different sizes in the same batch, this embodiment provides a combined mask plate.
[0042] like Figures 1 to 7 As shown, the combined mask plate includes multiple first partitions 1, multiple second partitions 2, and a frame 3. The multiple first partitions 1 have different lengths, and the multiple second partitions 2 have different lengths. Multiple through structures 23 for connecting with the first partitions 1 are provided on the second partitions 2. The frame 3 includes two first baffles 31 arranged opposite to each other along a first direction and two second baffles 32 arranged opposite to each other along a second direction. Each first baffle 31 has multiple first insertion structures 311 for connecting with the first partitions 1, and each second baffle 32 has multiple second insertion structures 321 for connecting with the second partitions 2. The first direction is perpendicular to the second direction.
[0043] This modular photomask, by setting a first insertion structure 311 on the first enclosure plate 31 of the frame 3 to connect with the first partition 1, a second insertion structure 321 on the second enclosure plate 32 of the frame 3 to connect with the second partition 2, and a through structure 23 on the second partition 2 to connect with the first partition 1, allows the frame 3 to form a variety of different accommodating spaces inside the frame 3 after assembly with multiple first partitions 1 and multiple second partitions 2 of different lengths. This allows it to accommodate products of different sizes in the same batch for sputtering or vapor deposition processes, resulting in strong versatility. It not only greatly reduces production costs but also avoids experimental errors caused by conducting multiple batch tests, making the obtained experimental results more accurate.
[0044] Optionally, the multiple first partitions 1 and multiple second partitions 2 each have various lengths formed by proportional division. Different lengths of the first partitions 1 and second partitions 2 can be freely combined within the frame 3 to form accommodating spaces of the same or different sizes. By distributing the lengths of the multiple first partitions 1 and multiple second partitions 2 proportionally, it is easier to control the specific lengths of the first partitions 1 and second partitions 2, allowing for the selection of suitable lengths of the first partitions 1 and second partitions 2 to construct the required accommodating space for the product within the frame 3.
[0045] In this embodiment, the lengths of the first separator 1 and the plurality of second separators 2 are set according to the arithmetic sequence.
[0046] Optionally, such as Figure 1 As shown, when multiple first partitions 1 with a first length and multiple second partitions 2 with a second length are provided within the frame 3, the frame 3 is divided into multiple accommodating spaces of the same size. When processing products of the same batch and specifications, by providing multiple first partitions 1 with the first length within the frame 3, ensuring that the lengths of the multiple first partitions 1 within the frame 3 are all equal, and multiple second partitions 2 with the second length within the frame 3, ensuring that the lengths of the multiple second partitions 2 within the frame 3 are all equal, multiple accommodating spaces of the same size are formed. This allows for the simultaneous sputtering or vapor deposition processing of multiple products of the same specifications, improving production efficiency. The first length and the second length can be the same or different. When the frame 3 is square, the first length and the second length are equal; when the frame 3 is rectangular, the first length and the second length are not equal.
[0047] Optionally, such as Figure 2As shown, when multiple first partitions 1 with third, fourth, and fifth lengths and multiple second partitions 2 with sixth, seventh, and eighth lengths are provided within the frame 3, the frame 3 is divided into multiple accommodating spaces of different sizes. When processing products of different specifications within the same batch is required, by providing multiple first partitions 1 with third, fourth, and fifth lengths within the frame 3, the multiple first partitions 1 within the frame 3 have different lengths. By providing multiple second partitions 2 with sixth, seventh, and eighth lengths within the frame 3, the multiple second partitions 2 within the frame 3 have different lengths, thereby forming multiple accommodating spaces of different sizes within the frame 3. This accommodates products of different sizes within the same batch, eliminating the need to replace the mask due to different product specifications, thus demonstrating strong versatility.
[0048] The third, fourth, and fifth lengths are all different, but the third length can be the same as any one of the sixth, seventh, or eighth lengths, and the fourth and fifth lengths are the same as the third length.
[0049] In addition, such as Figure 3 As shown, when a product with a large area needs to be processed, the first partition 1 and the second partition 2 may not be set in the frame 3. In this case, the first enclosure 31 and the second enclosure 32 of the frame 3 constitute a storage space for accommodating the product.
[0050] Optionally, such as Figure 5 As shown, the second separator 2 includes an insert plate 21 and a support plate 22. The support plate 22 is vertically connected to the insert plate 21. A through structure 23 is formed on the insert plate 21. The insert plate 21 is connected to the second insertion structure 321.
[0051] By using the insert plate 21 and the support plate 22 to form the second partition 2, when the insert plate 21 is inserted into the second insertion structure 321, the multiple second partitions 2 located in the frame 3 can use their respective support plates 22 to support and fix the product.
[0052] Furthermore, such as Figure 5 As shown, the insert plate 21 is welded to the support plate 22 to form an integral second partition 2. By using welding to form an integral structure of the second partition 2, the connection strength between the insert plate 21 and the support plate 22 is increased, preventing the support plate 22 from falling off the insert plate 21 under stress when carrying the product. In other embodiments, the second partition 2 can also be manufactured by a casting process.
[0053] Optionally, such as Figure 5As shown, the two ends of the insert plate 21 extend beyond the support plate 22 along the second direction and are connected to the second insertion structure 321. By making the two ends of the insert plate 21 extend beyond the support plate 22 along the second direction, it is convenient for the insert plate 21 to be inserted into the second enclosure plate 32, thus avoiding interference between the support plate 22 and the second enclosure plate 32.
[0054] In this embodiment, the second insertion structure 321 is a groove for insertion into the insert plate 21. Since the second partition 2 is inserted into the second baffle 32 using the insert plate 21, the second insertion structure 321 is designed as a groove to facilitate the insertion of the flat plate 21 into the second insertion structure 321.
[0055] Optionally, such as Figure 4 As shown, the first partition 1 has a circular cross-section, and both the through structure 23 and the first insertion structure 311 are circular through holes. By making both the through structure 23 and the first insertion structure 311 circular through holes, it is convenient to connect the first partition 1 with the first enclosure plate 31 and the second partition 2, which have circular cross-sections.
[0056] Optionally, such as Figure 5 As shown, multiple through structures 23 are equally spaced on the second separator 2;
[0057] And / or, a plurality of first plug-in structures 311 disposed on the first enclosure plate 31 are equally spaced;
[0058] And / or, a plurality of second plug-in structures 321 disposed on the second enclosure 32 are equally spaced.
[0059] By arranging the multiple through structures 23 on the second partition 2 at equal intervals, the multiple first plug-in structures 311 on the first enclosure 31 at equal intervals, and the multiple second plug-in structures 321 on the second enclosure 32 at equal intervals, it is convenient to plan the formed accommodating space.
[0060] Optionally, such as Figure 1 As shown, frame 3 also includes an external plate 4, which is connected to the first enclosure plate 31 or the second enclosure plate 32. By providing the external plate 4 on frame 3, an external structure is provided for experimenters to handle the combined mask, so that experimenters can install and remove the combined mask.
[0061] This embodiment also provides a coating apparatus, which includes the aforementioned combined photomask. By applying the combined photomask, this coating apparatus can complete sputtering or vapor deposition processes for products of different sizes within the same batch, thereby significantly improving production efficiency and shortening the production cycle.
[0062] This embodiment also provides a solar cell module manufactured using the aforementioned combined photomask. This not only improves product quality but also reduces manufacturing costs and enhances market competitiveness.
[0063] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A composite mask, characterized in that, The combined mask includes: Multiple first separators, the multiple first separators having different lengths; Multiple second partitions, each having a different length, and each second partition having multiple through structures for connecting to the first partition; The frame includes two first enclosure panels arranged opposite each other along a first direction and two second enclosure panels arranged opposite each other along a second direction. Each first enclosure panel has a plurality of first plug-in structures for connecting with the first partition, and each second enclosure panel has a plurality of second plug-in structures for connecting with the second partition. The first direction is perpendicular to the second direction.
2. The combined mask plate according to claim 1, characterized in that, The first partition and the second partition each have a variety of different lengths formed by proportional division. The first partition and the second partition of different lengths can be freely combined within the frame to form an accommodating space of the same or different sizes.
3. The combined mask plate according to claim 2, characterized in that, When the frame is provided with a plurality of first partitions having a first length and a plurality of second partitions having a second length, the frame is divided into a plurality of accommodating spaces of the same size.
4. The combined mask plate according to claim 2, characterized in that, When the frame is provided with a plurality of first partitions having a third length, a fourth length, and a fifth length, and a plurality of second partitions having a sixth length, a seventh length, and an eighth length, the frame is divided into a plurality of accommodating spaces of different sizes.
5. The combined mask plate according to claim 1, characterized in that, The second separator includes an insert plate and a support plate, the support plate being perpendicularly connected to the insert plate, the through structure being formed on the insert plate, and the insert plate being connected to the second insertion structure.
6. The combined mask plate according to claim 5, characterized in that, The two ends of the insert plate extend beyond the support plate along the second direction and are connected to the second insertion structure.
7. The combined mask plate according to claim 5, characterized in that, The insert plate is welded to the support plate to form an integral second partition.
8. The combined mask plate according to claim 1, characterized in that, The frame also includes an outer plate, which is connected to the first enclosure plate or the second enclosure plate.
9. A coating apparatus, characterized in that, The coating equipment includes a combined mask as described in any one of claims 1-8.
10. A solar cell module, characterized in that, The solar cell module is made by means of a combined mask as described in any one of claims 1-8.