Vacuum coating equipment

Abstract

This utility model discloses a vacuum coating apparatus, comprising: a vacuum system including a vacuum chamber; a winding system disposed in the vacuum chamber for conveying a base film, comprising at least two cooling rollers arranged along a first horizontal direction, with an installation gap formed between adjacent cooling rollers; an evaporation source system disposed in the vacuum chamber, comprising evaporation sources located below the cooling rollers and corresponding to each cooling roller; and at least one baffle mechanism disposed in the installation gaps, corresponding to each installation gap, to prevent vapor crosstalk between adjacent evaporation sources; wherein the bottom height of the baffle mechanism is not higher than the top height of the evaporation source, and the top height of the baffle mechanism is not lower than the bottom height of the cooling rollers. This utility model, employing the above structure, can avoid mutual interference of vapors at adjacent cooling rollers, improving coating quality and subsequent cleaning of the vacuum chamber.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a vacuum coating equipment. Background Technology

[0002] In the preparation process of composite current collectors used in lithium batteries, roll-to-roll vacuum deposition equipment is typically used to deposit metal materials on both sides of a polymer base film, forming a "metal layer-base film-metal layer" sandwich structure composite current collector. The roll-to-roll vacuum deposition equipment includes a vacuum system, a winding system, and an evaporation source system. The vacuum system contains a vacuum chamber housing both the winding system and the evaporation source system, and the vacuum level is maintained by a vacuum pump. The winding system is suitable for pulling the base film, allowing it to flow continuously through the deposition stations. The winding system has two deposition stations, each equipped with a cooling roller. The evaporation source system includes an evaporation boat for heating metal wires. The evaporation boat is located below the cooling rollers and corresponds to each cooling roller. At one cooling roller, the base film surface A faces the evaporation boat, and at the other cooling roller, the base film surface B faces the evaporation boat, achieving double-sided deposition of the base film.

[0003] During vapor deposition, the evaporation boat heats the metal wires to melt them, forming metal vapor which is then deposited onto the corresponding base film. However, the metal vapor diffuses during the deposition process. Because the two cooling rollers are located in the same chamber and are close together, the metal vapors at the two cooling rollers interfere with each other, causing the metal layer thickness on surfaces A and B to not meet the preset thickness requirements. Furthermore, the diffusion of metal vapor easily leads to metal dispersion and deposition in various areas of the chamber, making cleaning difficult and affecting production efficiency.

[0004] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Utility Model Content

[0005] The purpose of this invention is to provide a vacuum coating equipment that avoids mutual interference of vapors at adjacent cooling rollers.

[0006] The purpose of this utility model is achieved through the following technical solution: a vacuum coating equipment, comprising:

[0007] Vacuum system, including vacuum chamber;

[0008] A winding system, disposed in the vacuum chamber, is used to transport a base film, and includes at least two cooling rollers arranged along a first horizontal direction, with an installation gap formed between each two adjacent cooling rollers;

[0009] An evaporation source system is disposed in the vacuum chamber and includes evaporation sources located below the cooling rollers and corresponding one-to-one with the cooling rollers;

[0010] At least one baffle mechanism is provided in the mounting gap in a one-to-one correspondence with the mounting gap to prevent the vapor from crossing between two adjacent evaporation sources;

[0011] The bottom height of the baffle mechanism is not higher than the top height of the evaporation source, and the top height of the baffle mechanism is not lower than the bottom height of the cooling roller.

[0012] Furthermore, the baffle mechanism includes:

[0013] The mounting base is fixed in the vacuum chamber;

[0014] The baffle is detachably connected to the mounting base;

[0015] The bottom height of the baffle is not higher than the top height of the evaporation source, and the top height of the baffle is not lower than the bottom height of the cooling roller.

[0016] Furthermore, the mounting base has an elongated structure, the length direction of the mounting base is parallel to the second horizontal direction and the axial direction of the cooling roller, and perpendicular to the first horizontal direction. The mounting base includes a first end connected to the side wall of the vacuum chamber and a second end near the free end of the cooling roller. The mounting base is provided with a slot, and the baffle is adapted to be inserted into the slot from the second end along the second horizontal direction.

[0017] Furthermore, the slot is recessed inward from the bottom of the mounting base, and the upper side of the baffle is formed with a plug-in portion for engaging with the slot, the plug-in portion being supported by the slot.

[0018] Furthermore, the cross-sectional width of the slot gradually narrows in the vertically downward direction, and the outer contour of the insertion part matches the inner contour of the slot.

[0019] Furthermore, the slot extends along the second horizontal direction and passes through both ends of the mounting base. When the baffle is inserted into place, the first side of the baffle in the second horizontal direction is flush with the first end, and the second side is adjacent to the second end.

[0020] Furthermore, the mounting base has a mounting hole recessed inward from the end face of the second end, and the baffle mechanism further includes a locking component, the locking component comprising:

[0021] A transmission rod is rotatably inserted through the mounting hole, and includes a rod body and a flange connected to one end of the rod body, the flange protruding relative to the periphery of the rod body;

[0022] A pressing member is located outside the mounting hole and is connected to the other end of the rod. The pressing member can be rotated to a locking position corresponding to the second side or an unlocking position not corresponding to the second side under the drive of the transmission rod.

[0023] Elastic components;

[0024] The mounting hole includes a first segment and a second segment connected sequentially along the recessed direction. The rod body is adapted to the first segment, and the flange is adapted to the second segment. A stepped surface is formed between the first segment and the second segment. The elastic element abuts between the flange and the stepped surface to provide a force that drives the pressing element to press against the second side.

[0025] Furthermore, the end faces of the second side and the second end are not flush. The pressing member includes a pressing surface facing the second side. The pressing surface is provided with a fitting part. When the pressing member is in the locked position, the pressing surface abuts against the end face of the second end, and the fitting part abuts against the second side and is adapted to prevent the rotation of the pressing member.

[0026] The transmission rod is adapted to move outward along the axial direction of the mounting hole to compress the elastic element and release the resistance of the fitting portion to the rotation of the pressing element.

[0027] Furthermore, when the pressing member is in the locked position, the projections of the outer contours of the pressing member and the second end in the second horizontal direction completely coincide.

[0028] Furthermore, the mounting base is provided with a heating structure adapted to heat the mounting base; and / or, the baffle is provided with a cooling structure adapted to cool the baffle.

[0029] Compared with the prior art, the present invention has the following beneficial effects: The present invention adopts the above-mentioned structure, where the baffle mechanism can block the cross-flow of vapor from two adjacent evaporation sources, ensuring the purity and uniformity of the composition of each metal layer on the base film, and that the metal layer thickness meets the preset thickness requirements. Simultaneously, the baffle mechanism can hinder the diffusion of metal vapor, allowing it to deposit on the baffle mechanism, reducing the probability of metal dispersion and deposition in various areas of the vacuum chamber, facilitating subsequent rapid cleaning, and improving production efficiency. The bottom height of the baffle mechanism is not higher than the top height of the evaporation source, effectively intercepting the vapor in the area near the top of the evaporation source where vapor generation and initial diffusion are strongest, preventing vapor from horizontally diffusing below the baffle mechanism and causing cross-flow. The top height of the baffle mechanism is not lower than the top height of the cooling roller, effectively intercepting the vapor diffusing from the base film surface at the cooling roller, allowing vapor from the evaporation source directly below to contact and deposit on the base film of the target cooling roller with minimal lateral interference, improving deposition efficiency and uniformity, while also preventing vapor from other evaporation sources from contaminating the base film surface or affecting the nearby airflow field. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the structure of the vacuum coating equipment of this utility model.

[0031] Figure 2 This is a schematic diagram of one embodiment of the baffle mechanism in this utility model.

[0032] Figure 3 This is a schematic diagram of another embodiment of the baffle mechanism in this utility model.

[0033] Figure 4 yes Figure 3 A schematic diagram of its decomposed structure.

[0034] Figure 5 yes Figure 3 A schematic diagram of the locking component in the unlocked position.

[0035] Figure 6 yes Figure 3 A cross-sectional schematic diagram.

[0036] Figure 7 yes Figure 6 A magnified view of a portion at point A.

[0037] Figure 8 This is a schematic diagram of the locking component in this utility model.

[0038] Figure 9 This is a schematic diagram of another embodiment of the baffle mechanism in this utility model.

[0039] Figure 10 yes Figure 9A schematic diagram of its decomposed structure.

[0040] Explanation of reference numerals in the attached figures:

[0041] 100. Vacuum chamber; 200. Base film; 310. Cooling roller; 320. Unwinding roller; 330. Rewinding roller; 340. Guide roller; 400. Evaporation source; 500. Baffle mechanism; 510. Mounting base; 511. First end; 512. Second end; 513. Flange; 514. Slot; 515. Mounting hole; 5151. First section; 5152. Second section; 5153. Stepped surface; 516. Sleeve; 520. Baffle; 521. First side; 522. Second side; 523. Insertion part; 530. Locking assembly; 531. Transmission rod; 5311. Rod body; 5312. Flange; 532. Pressing part; 5321. Pressing surface; 5322. Fitting part; 533. Elastic element; 540. Adjustment assembly; 541. Adjustment guide rail; 5411. Slide groove; 542. Slider. Detailed Implementation

[0042] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0043] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0044] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0045] Please see Figure 1As shown, a vacuum coating apparatus corresponding to a preferred embodiment of the present invention includes a vacuum system, a winding system, and an evaporation source system. A vacuum cavity 100 is formed inside the vacuum system, and both the winding system and the evaporation source system are disposed within the vacuum cavity 100. The winding system is used to transport a base film 200 and includes at least two cooling rollers 310 arranged along a first horizontal direction. Deposition stations for depositing metal onto the base film 200 are formed at the cooling rollers 310. It should be noted that the first horizontal direction is specifically a horizontal direction perpendicular to the axial direction of the cooling rollers 310. In this embodiment, there are two cooling rollers 310, resulting in two deposition stations in the winding system. These two deposition stations are used to deposit metal layers on side A and side B of the base film 200, respectively. Of course, in other embodiments, when multiple evaporation depositions are required on a single side of the base film 200, or when a composite metal layer structure needs to be formed, three, four, or more cooling rollers 310 can be provided as needed to achieve multiple evaporation depositions on side A and / or side B.

[0046] In addition, the winding system includes an unwinding roller 320, a take-up roller 330, and several guide rollers 340. The rolled base film 200 is placed on the unwinding roller 320, which is adapted to rotate to unwind the base film 200. The take-up roller 330 is adapted to rotate to take up the coated composite current collector. The cooling roller 310 and the guide rollers 340 are both arranged on the conveying path of the base film 200. The guide rollers 340 are adapted to guide and tension the base film 200 to change the orientation of the A and B sides of the base film 200 on the cooling roller 310. The axial directions of the cooling roller 310, unwinding roller 320, take-up roller 330, and guide rollers 340 are the same and parallel to the second horizontal direction.

[0047] The evaporation source system includes evaporation sources 400 located below and corresponding to the cooling rollers 310. The metal vapor generated by the evaporation source 400 heating the metal is suitable for rising and flowing to the deposition station to be deposited onto the surface of the base film 200. The cooling rollers 310 cool the metal vapor, allowing a metal layer to be rapidly deposited on the surface of the base film 200. In this embodiment, the evaporation source 400 can specifically be an evaporation boat; in other embodiments, it can be a crucible or other structure capable of heating the metal. Vacuum systems, winding systems, and evaporation source systems are all known structures and will not be described in detail here.

[0048] However, with the above structure, during the evaporation process, there is interference between the metal vapors at adjacent cooling rollers 310, affecting the quality of the subsequently deposited metal layer. As a preferred embodiment, the vacuum coating equipment also includes at least one baffle mechanism 500, with an installation gap formed between adjacent cooling rollers 310, and each baffle mechanism 500 is disposed within an installation gap. The baffle mechanism 500 can prevent cross-contamination of vapors from adjacent evaporation sources 400, ensuring the purity and uniformity of the composition of each metal layer on the base film 200, and that the metal layer thickness meets the preset thickness requirements. Simultaneously, the baffle mechanism 500 can hinder the diffusion of metal vapor, causing it to deposit within the baffle mechanism 500, reducing the probability of metal dispersion and deposition in various areas of the vacuum chamber 100, facilitating subsequent rapid cleaning, and improving production efficiency.

[0049] Preferably, the bottom height of the baffle mechanism 500 is not higher than the top height of the evaporation source 400, and the top height of the baffle mechanism 500 is not lower than the bottom height of the cooling roller 310. The bottom height of the baffle mechanism 500 being no higher than the top height of the evaporation source 400 allows the baffle mechanism 500 to effectively intercept the vapor in the area near the top of the evaporation source 400 where vapor generation and initial diffusion are strongest, preventing vapor from horizontally diffusing below the baffle mechanism 500 and crossing over its bottom. The top height of the baffle mechanism 500 being no lower than the top height of the cooling roller 310 allows the baffle mechanism 500 to effectively intercept the vapor diffusing from the surface of the base film 200 at the cooling roller 310, enabling vapor from the evaporation source 400 directly below to contact and deposit on the base film 200 of the target cooling roller 310 with minimal lateral interference, improving deposition efficiency and uniformity. It also prevents vapor from other evaporation sources 400 from contaminating the surface of the base film 200 or affecting the nearby airflow field.

[0050] Furthermore, referring to Figures 2 to 4 As shown, the baffle mechanism 500 includes a mounting base 510 and a baffle 520. The mounting base 510 is fixed in the vacuum chamber 100, and the baffle 520 is detachably connected to the mounting base 510. Since a large amount of metal will accumulate on the baffle 520 during long-term isolation, detachably connecting the baffle 520 to the mounting base 510 facilitates frequent subsequent cleaning operations. Specifically, the mounting base 510 can be fixed to the vacuum chamber 100 using a threaded fastening method, such as connecting bolts, screws, or other threaded components between the inner wall of the vacuum chamber 100 and the mounting base 510, ensuring a stable connection between the mounting base 510 and the vacuum chamber 100. The baffle 520 can be connected to the mounting base 510 using threaded fastening, snap-fit, or magnetic attraction. In this embodiment, snap-fit ​​is preferred, as it offers high reliability and convenient and quick assembly / disassembly, making it ideal for scenarios requiring frequent disassembly and assembly.

[0051] In one embodiment, the bottom height of the baffle 520 is not higher than the top height of the evaporation source 400, and the top height of the baffle 520 is not lower than the bottom height of the cooling roller 310. That is, the baffle mechanism 500 mainly relies on the baffle 520 to block the metal vapor. Since it is relatively inconvenient to disassemble and assemble the mounting base 510 and the vacuum chamber 100, this can minimize the probability of metal vapor depositing on the mounting base 510. Therefore, there is no need to frequently clean and disassemble the mounting base 510, and the cleaning process is more convenient.

[0052] Furthermore, the mounting base 510 is elongated, and its length direction is parallel to the second horizontal direction, that is, the length direction of the mounting base 510 is parallel to the axial direction of the cooling roller 310. The mounting base 510 includes a first end 511 that connects to the side wall of the vacuum chamber 100 and a second end 512 near the free end of the cooling roller 310, specifically the end of the cooling roller 310 away from the connecting end that connects to the side wall of the vacuum chamber 100. The outer periphery of the first end 511 is provided with a flange portion 513, which is adapted to fit against the side wall of the vacuum chamber 100 and is fastened by a connector. The mounting base 510 has a slot 514, and the baffle 520 is adapted to be inserted into the slot 514 from the second end 512. By adopting the above structure, the working side of the winding system and the disassembly side of the baffle 520 are located on the same side, which is convenient for operators and does not require modification of the existing winding system or vacuum system, effectively reducing costs.

[0053] Furthermore, the slot 514 extends along the second horizontal direction and passes through both ends of the mounting base 510, and the baffle 520 can be inserted into the slot 514 from the second end 512 along the second horizontal direction. When the baffle 520 is inserted into place, the first side 521 of the baffle 520 in the second horizontal direction is flush with the first end 511, and the second side 522 is adjacent to the second end 512, so that the cooling roller 310 can be effectively blocked by the baffle 520 at different positions in the first horizontal direction.

[0054] In one embodiment, each baffle mechanism 500 includes two mounting seats 510 arranged vertically opposite each other. The upper mounting seat 510 is recessed inward from its bottom to form a slot 514, and the lower mounting seat 510 is recessed inward from its top to form a slot 514. The upper side of the baffle 520 is inserted into the upper slot 514, and the lower side of the baffle 520 is inserted into the lower slot 514. However, with the above structure, the baffle 520 needs to be inserted into different slots 514 simultaneously, resulting in relatively poor smoothness during insertion and removal. Furthermore, the lower mounting seat 510 is more prone to metal deposition than the upper mounting seat 510, which can easily affect the insertion and removal of the baffle 520.

[0055] In a preferred embodiment, each baffle mechanism 500 has only one mounting base 510, and the slot 514 is recessed inward from the bottom of the mounting base 510. The upper side of the baffle 520 has a insertion portion 523 for engaging with the slot 514. The insertion portion 523 is supported by the slot 514, allowing the baffle 520 to be suspended. Specifically, the cross-sectional width of the slot 514 gradually narrows in the vertically downward direction, and the outer contour of the insertion portion 523 matches the cross-section of the slot 514. This design results in a tighter and more reliable connection between the baffle 520 and the mounting base 510, and eliminates the need for a mounting base 510 below the baffle 520, preventing condensed metal from falling onto the lower mounting base 510. This also makes the insertion and removal of the baffle 520 smoother, effectively simplifying the structure and reducing costs. The cross-section of the slot 514 can be trapezoidal, wedge-shaped, etc., so that the baffle 520 can be reliably supported by the slot 514. The side wall of the slot 514 is a continuous inclined surface. Since there is a small probability that vapor will enter the joint surface between the slot 514 and the baffle 520, the continuous inclined surface makes subsequent cleaning easier.

[0056] Furthermore, since the baffle 520 and the mounting base 510 are plugged into each other, the baffle 520 can move freely in the second horizontal direction, resulting in poor reliability after the baffle 520 is installed on the mounting base 510. As a preferred embodiment, refer to... Figure 3 and Figure 5 As shown, the baffle mechanism 500 includes a locking component 530 disposed at the second end 512. The locking component 530 can be switched to a locked position or an unlocked position. When the locking component 530 is in the locked position, the locking component 530 is adapted to block the second end 512 to prevent the baffle 520 installed in the slot 514 from dislodging from the second end 512 into the slot 514. When the locking component 530 is in the unlocked position, the locking component 530 is adapted to release the obstruction to the second end 512 to allow the baffle 520 to be inserted into or removed from the slot 514 from the second end 512.

[0057] Specifically, refer to Figure 4 , Figures 6 to 8As shown, the locking assembly 530 includes a transmission rod 531, a pressing member 532, and an elastic member 533. The mounting base 510 has a recessed mounting hole 515 extending inward from the end face of the second end 512. The axial direction of the mounting hole 515 is parallel to the second horizontal direction, and the transmission rod 531 rotatably passes through the mounting hole 515. The transmission rod 531 includes a rod body 5311 and a flange 5312 connected to one end of the rod body 5311. The flange 5312 protrudes from the circumference of the rod body 5311. In this embodiment, the flange 5312 and the rod body 5311 are integrally formed. Preferably, the outer contours of both the rod body 5311 and the flange 5312 are circular, and the flange 5312 is coaxial with the rod body 5311, facilitating the processing and installation of the transmission rod 531. The pressing member 532 is located outside the mounting hole 515 and is detachably connected to the other end of the rod 5311. The pressing member 532 can be rotated to a locked position corresponding to the second side 522 or an unlocked position not corresponding to the second side 522 under the drive of the transmission rod 531. The mounting hole 515 includes a first segment 5151 and a second segment 5152 connected sequentially along the recessed direction. The rod 5311 is adapted to the first segment 5151, and the flange 5312 is adapted to the second segment 5152. A stepped surface 5153 is formed between the first segment 5151 and the second segment 5152. The elastic member 533 abuts against the flange 5312 and the stepped surface 5153 to provide a force that drives the pressing member 532 to press against the second side 522. In this embodiment, the elastic member 533 can specifically be a spring, which is sleeved outside the rod 5311.

[0058] However, directly machining the mounting hole 515 on the mounting base 510 would prevent the flange 5312 and the elastic element 533 from being inserted into the second section 5152 due to the obstruction of the first section 5151. In this embodiment, an opening with the same inner diameter as the second section 5152 can be recessed from the end face of the second end 512. Then, a sleeve 516 is inserted into the opening, coaxially fixed to the opening. The outer edge of the sleeve 516 fits tightly with the inner edge of the opening, and the inner diameter of the sleeve 516 is the same as the inner diameter of the first section 5151, so that the sleeve 516 and the opening fit together to define the mounting hole 515. One end of the sleeve 516 forms a stepped surface 5153, and the other end is flush with the second end 512. The sleeve 516 can be interference-fitted with the opening to fix the sleeve 516 and the mounting base 510, or the outer edge of the sleeve 516 can be provided with a flange structure, and the flange structure and the mounting base 510 can be fastened by a threaded connection.

[0059] Furthermore, as a preferred embodiment, when the baffle 520 is inserted into place, the end face of the second side 522 is not flush with the end face of the second end 512. The pressing member 532 has a block structure, which includes a pressing surface 5321 facing the second side 522. The pressing surface 5321 is parallel to the end face of the second end 512. The pressing surface 5321 is provided with a fitting portion 5322. When the pressing member 532 is in the locked position, the pressing surface 5321 abuts against the end face of the second end 512, and the fitting portion 5322 abuts against the second side 522 and is adapted to prevent the rotation of the pressing member 532, so as to ensure that the pressing member 532 is reliably kept in the locked position. Furthermore, when subjected to external force, the transmission rod 531 is adapted to move outward along the axial direction of the mounting hole 515 to compress the elastic member 533 and release the fitting part 5322 from the rotational obstruction of the pressing member 532. At this time, the pressing member 532 can be rotated to the unlocked position to release the restriction on the baffle 520.

[0060] In one embodiment, after the baffle 520 is inserted into place, the end of the second side 522 relative to the slot 514 is recessed inward, and the fitting portion 5322 is a protrusion protruding from the pressing surface 5321. The protrusion is adapted to fit into the slot 514 and presses against the second side 522. Alternatively, in another embodiment, after the baffle 520 is inserted into place, the end of the second side 522 relative to the slot 514 protrudes outward, and the fitting portion 5322 is a recessed portion recessed from the pressing surface 5321. The recessed portion is adapted to fit into the insertion portion 523 of the baffle 520 and is adapted to fit over the insertion portion 523 and press against the second side 522.

[0061] Preferably, the size of the protrusion is slightly smaller than the size of the slot 514, or the size of the recess is slightly larger than the size of the insertion portion 523, so that the pressing member 532 in the locking position can rotate within a small angle. When there is metal deposit between the pressing member 532 and the mounting base 510, the pressing member 532 can break the deposited metal under the rotation action, so that the locking assembly 530 can work normally.

[0062] Preferably, when the pressing member 532 is in the locked position, the projections of the outer contours of the pressing member 532 and the second end 512 in the second horizontal direction completely overlap, avoiding the formation of an L-shaped corner between them, and preventing the movement of the pressing member 532 from being hindered by the concentrated deposition of metal at the corner.

[0063] Furthermore, in one embodiment, the mounting base 510 is provided with a heating structure, which may be a heating wire embedded in the mounting base 510. When the heating structure is working, it is suitable for heating the mounting base 510, thereby reducing the probability of metal deposition on the mounting base 510, making it less prone to metal deposition and reducing the cleaning frequency of the mounting base 510. Correspondingly, the joint surface between the mounting base 510 and the baffle 520 is also less prone to metal deposition, so as not to hinder the disassembly of the baffle 520 from the mounting base 510. In another embodiment, the baffle 520 is provided with a cooling structure, which may be a liquid cooling channel formed in the baffle 520. By circulating coolant into the liquid cooling channel, the temperature of the baffle 520 is reduced, so that the metal vapor diffused to the vicinity of the baffle 520 can be quickly cooled and deposited on the baffle 520. That is, while blocking metal vapor, the baffle 520 can efficiently capture metal vapor, reducing the amount of metal vapor dispersed to various parts of the vacuum chamber 100, resulting in a high cleanliness within the vacuum chamber 100. Preferably, the cooling range of the cooling structure does not cover the plug-in portion 523, so as to avoid mutual interference between the heating structure and the cooling structure.

[0064] Furthermore, referring to Figure 9 and Figure 10 As shown, in one embodiment, the baffle mechanism 500 further includes an adjustment component 540, which is supported between the mounting base 510 and the inner wall of the vacuum chamber 100. It can adjust the height of the mounting base 510 in the vertical direction, thereby adjusting the height of the baffle 520, so that the baffle 520 can be adjusted according to actual needs to ensure that it is in the optimal blocking position.

[0065] Specifically, the adjustment assembly 540 includes an adjustment guide rail 541 and a slider 542. The adjustment guide rail 541 is arranged vertically and fixed to the inner wall of the vacuum chamber 100. A groove 5411 is recessed on the side of the adjustment guide rail 541 facing the mounting base 510, extending vertically. The slider 542 is slidably embedded in the groove 5411. The mounting base 510 is fixed to the slider 542 so that it slides synchronously with the slider 542. An adjustment hole is recessed on the side of the adjustment guide rail 541 facing the mounting base 510, and several adjustment holes are spaced vertically. The flange portion 513 of the mounting base 510 fits against the adjustment guide rail 541 and has connection holes. During vertical adjustment of the mounting base 510, the connection holes are adapted to correspond to different adjustment holes. Threaded connectors can be connected between the adjustment holes and the connection holes to fix the mounting base 510. Admittedly, in other embodiments, a threaded connector may be provided between the slider 542 and the adjusting guide rail 541 to fix the mounting base 510 after it has been adjusted to the desired position. Preferably, the first side 521 of the baffle 520 may extend into the groove 5411 along the second horizontal direction to prevent a gap between the first side 521 and the adjusting guide rail 541 in the first horizontal direction, thereby improving the reliability of the baffle 520 in blocking.

[0066] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A vacuum coating equipment, characterized in that, include: A vacuum system, including a vacuum chamber (100); A winding system, disposed in the vacuum chamber (100), is used to transport a base film (200), comprising at least two cooling rollers (310) arranged along a first horizontal direction, wherein an installation gap is formed between adjacent cooling rollers (310); An evaporation source system is provided in the vacuum chamber (100), which includes evaporation sources (400) located below the cooling roller (310) and corresponding one-to-one with the cooling roller (310); At least one baffle mechanism (500) is provided in the mounting gap in a one-to-one correspondence with the mounting gap to prevent vapor crossover between two adjacent evaporation sources (400); The bottom height of the baffle mechanism (500) is not higher than the top height of the evaporation source (400), and the top height of the baffle mechanism (500) is not lower than the bottom height of the cooling roller (310).

2. The vacuum coating equipment as described in claim 1, characterized in that, The baffle mechanism (500) includes: Mounting base (510) is fixed in the vacuum chamber (100); The baffle (520) is detachably connected to the mounting base (510); The bottom height of the baffle (520) is not higher than the top height of the evaporation source (400), and the top height of the baffle (520) is not lower than the bottom height of the cooling roller (310).

3. The vacuum coating equipment as described in claim 2, characterized in that, The mounting base (510) has an elongated structure. The length direction of the mounting base (510) is parallel to the second horizontal direction and the axial direction of the cooling roller (310), and perpendicular to the first horizontal direction. The mounting base (510) includes a first end (511) connected to the side wall of the vacuum chamber (100) and a second end (512) near the free end of the cooling roller (310). A slot (514) is provided on the mounting base (510). The baffle (520) is adapted to be inserted into the slot (514) from the second end (512) along the second horizontal direction.

4. The vacuum coating equipment as described in claim 3, characterized in that, The slot (514) is recessed inward from the bottom of the mounting base (510), and the upper side of the baffle (520) is formed with a plug-in portion (523) for engaging with the slot (514), and the plug-in portion (523) is supported on the slot (514).

5. The vacuum coating equipment as described in claim 4, characterized in that, The cross-sectional width of the slot (514) gradually narrows in the vertically downward direction, and the outer contour of the insertion part (523) is adapted to the inner contour of the slot (514).

6. The vacuum coating equipment as described in claim 4, characterized in that, The slot (514) extends along the second horizontal direction and passes through both ends of the mounting base (510). When the baffle (520) is inserted into place, the baffle (520) is flush with the first end (511) on the first side (521) in the second horizontal direction, and the second side (522) is adjacent to the second end (512).

7. The vacuum coating equipment as described in claim 6, characterized in that, The mounting base (510) has a mounting hole (515) recessed inward from the end face of the second end (512). The baffle mechanism (500) further includes a locking assembly (530), which includes: A transmission rod (531) is rotatably inserted through the mounting hole (515), and includes a rod body (5311) and a flange (5312) connected to one end of the rod body (5311), wherein the flange (5312) protrudes from the circumference of the rod body (5311). The pressing member (532) is located outside the mounting hole (515) and is connected to the other end of the rod body (5311). The pressing member (532) can be rotated to the locking position corresponding to the second side (522) or the unlocking position not corresponding to the second side (522) under the drive of the transmission rod (531). Elastic element (533); The mounting hole (515) includes a first segment (5151) and a second segment (5152) connected sequentially along the recessed direction. The rod body (5311) is adapted to the first segment (5151), and the flange (5312) is adapted to the second segment (5152). A stepped surface (5153) is formed between the first segment (5151) and the second segment (5152). The elastic member (533) abuts against the flange (5312) and the stepped surface (5153) to provide a force that drives the pressing member (532) to press against the second side (522).

8. The vacuum coating equipment as described in claim 7, characterized in that, The end face of the second side (522) is not flush with the end face of the second end (512). The pressing member (532) includes a pressing surface (5321) facing the second side (522). The pressing surface (5321) is provided with a fitting part (5322). When the pressing member (532) is in the locked position, the pressing surface (5321) abuts against the end face of the second end (512), and the fitting part (5322) abuts against the second side (522) and is adapted to prevent the rotation of the pressing member (532). The transmission rod (531) is adapted to move outward along the axial direction of the mounting hole (515) to compress the elastic member (533) and release the resistance of the fitting part (5322) to the rotation of the pressing member (532).

9. The vacuum coating equipment as described in claim 7, characterized in that, When the pressing member (532) is in the locked position, the projections of the outer contours of the pressing member (532) and the second end (512) in the second horizontal direction completely coincide.

10. The vacuum coating equipment as described in claim 2, characterized in that, The mounting base (510) is provided with a heating structure, which is adapted to heat the mounting base (510); and / or, the baffle (520) is provided with a cooling structure, which is adapted to cool the baffle (520).

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