An electrode mounting device and a vapor deposition equipment

Abstract

This application relates to the field of vapor deposition coating and discloses an electrode mounting device and a vapor deposition equipment. The electrode mounting device includes a linear guide assembly, a driven frame, a cover plate, and an electrode rod. The linear guide assembly includes a driven member, the driven frame is rotatably mounted on the driven member, and the cover plate is fixedly mounted on the end of the driven frame away from the driven member. The cover plate is used to seal the vacuum chamber of the vapor deposition equipment, and the electrode rod is detachably mounted on the side of the cover plate opposite to the driven frame. This application guides the driven member to move along a linear trajectory by setting the linear guide assembly, thus guiding the movement of the electrode rod and ensuring accurate installation and removal of the electrode rod within the vacuum chamber. Combined with the rotation function of the driven frame relative to the driven member, the cover plate carrying the electrode rod can be rotated to a maintenance position, effectively avoiding the risk of collision with other objects during installation and replacement.

Description

Technical Field

[0001] This application relates to the field of vapor deposition coating, and more particularly to an electrode mounting device and a vapor deposition apparatus. Background Technology

[0002] Chemical vapor deposition (CVD) equipment directly transfers gaseous atoms to the surface of materials (such as granules, sheets, PCBs, or wafers) in a vacuum environment to form a film. During deposition, plasma is used to activate the reactive gases, thereby lowering the reaction temperature. Therefore, the design of the plasma electrode system directly affects the plasma generation quality and film deposition efficiency. In existing technologies, electrode assemblies typically employ rigid, fixed structures, such as bolting metal electrode plates to a chamber cover, allowing them to dangle into the vacuum reaction chamber. While this design achieves basic ionization, it reveals significant assembly and maintenance deficiencies in practical applications. During electrode replacement and maintenance, personnel must rely on manual visual calibration when disassembling or installing electrodes, with operational accuracy limited by the operator's experience. Especially within the narrow vacuum chamber, even slight mishaps between the electrode tip and the chamber wall can cause rigid contact collisions, resulting in mechanical deformation or microscopic damage to the electrode plate surface. Such deformation disrupts the flatness of the electrode discharge surface, reducing plasma distribution uniformity and directly affecting the thickness consistency and interface defect density of the deposited film. Utility Model Content

[0003] In view of this, the purpose of this application is to overcome the shortcomings of the prior art and provide an electrode mounting device and a vapor deposition apparatus.

[0004] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0005] This application provides:

[0006] An electrode mounting device, comprising:

[0007] A linear guide assembly, the linear guide assembly including a follower;

[0008] Driven frame, the driven frame being rotatably mounted on the driven member;

[0009] A cover plate, which is fixedly installed at the end of the driven frame away from the driven member, is used to seal the vacuum cylinder of the vapor deposition equipment;

[0010] An electrode rod is detachably mounted on the side of the cover plate opposite to the driven frame.

[0011] Furthermore, the linear guide assembly includes a first guide member and a second guide member. A first guide rod is slidably mounted on the first guide member, and a second guide rod is slidably mounted on the second guide member. A connecting member is installed at the ends of the first guide rod and the second guide rod on the same side. The driven member is fixedly disposed on the side of the connecting member opposite to the direction of the first guide member.

[0012] Furthermore, the first guide rod and / or the second guide rod are provided with a first conduit inside.

[0013] Furthermore, the driven frame includes a rotating rod rotatably mounted on the driven member, a connecting rod fixedly connected to the side of the rotating rod away from the driven member, a first flange provided on the side of the connecting rod facing the cover plate, the connecting rod being fixedly connected to the cover plate through the first flange, and an installation cavity being defined between the first flange and the cover plate.

[0014] Furthermore, the rotating rod has a second conduit, and the connecting rod has a third conduit, with the second conduit and the third conduit communicating to form a cable channel.

[0015] Furthermore, the cover plate has a clearance hole extending through it along the axial direction;

[0016] The electrode mounting device further includes a mounting assembly, which includes a second flange and a mounting head. The second flange is disposed in the mounting cavity, and the mounting head passes through the second flange and the clearance hole. A limiting plate is provided on the outer peripheral surface of the end of the mounting head away from the direction of the second flange. A screwing component is detachably mounted on the outer peripheral surface of the mounting head facing the end of the second flange. The second flange is limited between the limiting plate and the screwing component.

[0017] The electrode rod is mounted on the end of the mounting head away from the driven frame, and the electrode rod is detachably connected to the cover plate through the mounting assembly.

[0018] Furthermore, a first sealing structure is provided between the second flange and the cover plate. The first sealing structure includes a first sealing groove formed on the end face of the cover plate facing the second flange, and a first sealing element is provided in the first sealing groove.

[0019] Furthermore, a second sealing structure is provided between the second flange and the limiting plate. The second sealing structure includes a second sealing groove and a second sealing element. The second sealing groove is formed on the end face of the limiting plate facing the second flange, and the second sealing element is disposed in the second sealing groove.

[0020] Furthermore, the side of the cover plate facing away from the electrode rod is provided with a handle and an observation window.

[0021] This application also provides a vapor deposition apparatus, the vapor deposition apparatus comprising:

[0022] The electrode mounting device described in any of the above items;

[0023] A vacuum cylinder having a vacuum chamber and an opening communicating with the vacuum chamber, a cover plate being disposed on the opening, and the cover plate being detachably installed on the vacuum cylinder;

[0024] A reaction cylinder is disposed within the vacuum chamber, and the reaction cylinder has a vapor deposition chamber, with the electrode rod located within the vapor deposition chamber.

[0025] This application guides the follower to move along a straight trajectory by setting a linear guide component, which guides the movement of the electrode rod and ensures the precise installation and placement of the electrode rod in the vacuum cylinder. In conjunction with the rotation function of the follower frame relative to the follower, the cover plate carrying the electrode rod can be rotated to the maintenance position, effectively avoiding the risk of the electrode rod colliding with other objects during installation and replacement.

[0026] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 A schematic diagram of the overall structure of the electrode mounting device of this application is shown;

[0029] Figure 2 A schematic diagram of the electrode mounting device of this application in an exploded state is shown;

[0030] Figure 3 A cross-sectional structural schematic diagram of the electrode mounting device of this application is shown;

[0031] Figure 4 An exploded schematic diagram of the electrode mounting device of this application in cross-section is shown;

[0032] Figure 5 This paper presents an overall schematic diagram of the electrode mounting device, vacuum cylinder, and reaction cylinder in their assembled state.

[0033] Figure 6 The diagram shows the electrode mounting device, vacuum cylinder, and reaction cylinder in the explosion state of this application.

[0034] Explanation of key component symbols:

[0035] 100 - Linear guide assembly; 110 - First guide rod; 111 - First guide element; 112 - First pipeline; 120 - Second guide rod; 121 - Second guide element; 130 - Connector; 140 - Follower; 200 - Follower frame; 210 - Rotating rod; 211 - Second pipeline; 220 - Connecting rod; 221 - Third pipeline; 230 - First flange; 300 - Cover plate; 301 - Clearance hole; 310 - Handle; 320 - Observation window ; 400 - Electrode rod; 500 - Mounting assembly; 510 - Second flange; 520 - Mounting head; 530 - Limiting disc; 540 - Screw fastener; 541 - Gasket; 550 - First sealing structure; 551 - First sealing groove; 552 - First sealing element; 560 - Second sealing structure; 561 - Second sealing groove; 562 - Second sealing element; 600 - Vacuum cylinder; 610 - Vacuum chamber; 700 - Reaction cylinder; 710 - Vacuum deposition chamber. Detailed Implementation

[0036] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0037] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0039] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0040] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0041] This application provides an electrode mounting device, which includes a linear guide assembly 100, a driven frame 200, a cover plate 300, and an electrode rod 400.

[0042] In some embodiments, the linear guide assembly 100 includes a follower 140, a follower frame 200 rotatably mounted on the follower 140, a cover plate 300 fixedly mounted on the end of the follower frame 200 away from the follower 140, the cover plate 300 being used to seal the vacuum cylinder 600 of the vapor deposition apparatus, and an electrode rod 400 being detachably mounted on the side of the cover plate 300 opposite to the follower frame 200.

[0043] See Figure 1 and Figure 2As shown, when the electrode rod 400 needs to be replaced, the cover plate 300 can be removed from the opening of the vacuum cylinder 600. Next, under the guidance of the linear guide assembly 100, the cover plate 300 is moved away from the opening of the vacuum cylinder 600 by the driven frame 200 until the electrode rod 400 is completely separated from the vapor deposition chamber. At this time, the electrode rod 400 is located in the area between the cover plate 300 and the vacuum cylinder 600. This area is narrow and inconvenient for replacing the electrode rod 400. Since the driven frame 200 and the driven member 140 rotate together... Then, the driven frame 200 and the cover plate 300 can be rotated to make the electrode rod 400 face away from the vacuum cylinder 600, that is, the electrode rod 400 faces outward. At this time, there is more space to replace the electrode rod 400. After replacing the old electrode rod 400 with the new electrode rod 400, rotate it again to align the electrode rod 400 with the vapor deposition chamber. Then, under the linear guidance of the linear guide assembly 100, the electrode rod 400 is smoothly entered into the vapor deposition chamber. The cover plate 300 is fixedly connected to the opening of the vacuum cylinder 600, thus completing the replacement of the electrode rod 400.

[0044] It is understandable that during the process of the electrode rod 400 detaching from and re-entering the vapor deposition chamber, the linear guide component 100 will always provide guidance to make the movement of the electrode rod 400 more stable and prevent the electrode rod 400 from colliding with the inner wall of the vapor deposition chamber or other components during the movement, which would cause damage to the electrode rod 400.

[0045] Furthermore, since the driven frame 200 is rotatably connected to the driven member 140, when replacing the electrode rod 400, the cover plate 300 can be rotated through the driven frame 200 to change the orientation of the electrode rod 400, that is, the electrode rod 400 is oriented towards the outside away from the gas deposition chamber, which provides a larger replacement space, improves replacement efficiency, and prevents the electrode rod 400 from colliding with other components in a confined space.

[0046] In this embodiment, the electrode rod 400 is cylindrical. Compared with the existing rectangular electrodes, the cylindrical electrode can promote a more uniform electric field distribution and reduce edge effects, thereby achieving a more uniform plasma coverage during the deposition process. In contrast, the sharp edges of the rectangular electrode are prone to triggering tip discharge effects, resulting in local energy concentration and non-uniform material decomposition.

[0047] In some embodiments, the linear guide assembly 100 includes a first guide member 111 and a second guide member 121. A first guide rod 110 is slidably mounted on the first guide member 111, and a second guide rod 120 is slidably mounted on the second guide member 121. A connector 130 is mounted on the ends of the first guide rod 110 and the second guide rod 120 on the same side. A follower 140 is fixedly disposed on the side of the connector 130 facing away from the first guide member 111.

[0048] Please continue reading. Figure 1 and Figure 2 As shown, the first guide member 111 and the second guide member 121 are arranged side by side. Specifically, the first guide member 111 and the second guide member 121 are fixedly installed on the frame of the vapor deposition equipment. The first guide member 110 is slidably installed on the first guide member 111, and the second guide member 120 is slidably installed on the second guide member 121. A connector 130 is installed between the ends of the first guide member 110 and the second guide member 120 on the same side. That is to say, the first guide member 110 and the second guide member 120 can move synchronously under the connection of the connector 130, and the connector 130 cannot rotate in the vertical plane. That is, the driven frame 200, the cover plate 300 and the electrode rod 400 also cannot rotate in the vertical plane, so that the cover plate 300 and the electrode rod 400 are more stable during movement. Furthermore, the driven member 140 is fixedly installed on the side of the connector 130 away from the direction of the first guide member 110, and the driven frame 200 is rotatably installed on the driven member 140.

[0049] In this embodiment, both the first guide member 111 and the second guide member 121 are linear bearings.

[0050] In this embodiment, the driven frame 200 is rotatably connected to the driven member 140 through a bearing, that is, the driven frame 200, the cover plate 300 and the electrode rod 400 can rotate on the horizontal plane. It should be noted that in order to enable the bearing on the driven member 140 to withstand axial force, the bearing can be a thrust ball bearing, an angular contact ball bearing, etc. The specific bearing type is not limited here.

[0051] In some embodiments, the first guide rod 110 and / or the second guide rod 120 are provided with a first conduit 112.

[0052] Please continue reading. Figure 1 and Figure 2 As shown, in order to facilitate the smooth passage of the cable that provides power to the electrode rod 400, a first conduit 112 can be opened inside the first guide rod 110 or the second guide rod 120, or both the first guide rod 110 and the second guide rod 120 can be opened. This allows the cable to be used selectively during installation, facilitating cable routing and connecting the cable to the electrode rod 400 through the first conduit 112 and the cable channel of the driven frame 200.

[0053] It is understandable that if the first conduit 112 is located in the first guide rod 110, the first guide rod 110 can be selected as a hollow tube. Similarly, if the first conduit 112 is located on the second guide rod 120, the second guide rod 120 can also be selected as a hollow tube. Furthermore, if the first guide rod 110 and the second guide rod 120 both have the first conduit 112 located in them, then both the first guide rod 110 and the second guide rod 120 can be selected as hollow tubes. In practice, the selection can be made according to the needs, and no limitation is made here.

[0054] In some embodiments, the driven frame 200 includes a rotating rod 210 rotatably mounted on the driven member 140. A connecting rod 220 is fixedly connected to the side of the rotating rod 210 away from the driven member 140. A first flange 230 is provided on the side of the connecting rod 220 facing the cover plate 300. The connecting rod 220 is fixedly connected to the cover plate 300 through the first flange 230. An installation cavity is defined between the first flange 230 and the cover plate 300.

[0055] See Figure 1 and Figure 2 As shown, the rotating rod 210 is vertically rotated and mounted on the driven member 140. The connecting rod 220 is horizontally connected to the rotating rod 210. It can be understood that the central axes of the rotating rod 210 and the connecting rod 220 are perpendicular to each other. The connecting rod 220 is detachably connected to the cover plate 300 through the first flange 230. When the first guide rod 110 and the second guide rod 120 slide, the cover plate 300 and the electrode rod 400 can be moved horizontally through the rotation rod 210, the connecting rod 220 and the first flange 230, so that the electrode rod 400 extends into or detaches from the vapor deposition chamber.

[0056] In some embodiments, the rotating rod 210 has a second conduit 211, and the connecting rod 220 has a third conduit 221, with the second conduit 211 and the third conduit 221 communicating to form a cable channel.

[0057] Please see Figure 1 , Figure 2 、and 3 and Figure 4 As shown, in order to smoothly connect the cable to the electrode rod 400 and provide it with power, a second conduit 211 is provided in the rotating rod 210 and a third conduit 221 is provided in the connecting rod 220. The second conduit 211 and the third conduit 221 are connected to form a cable channel, and the terminal of the electrode rod 400 is located in the mounting cavity, so that the cable can directly reach the mounting cavity through the cable channel to provide power to the electrode rod 400.

[0058] It is understandable that if cables are exposed to the outside for wiring, they are prone to getting tangled with other components, and if the cable insulation is broken, it can easily cause eye injury to workers. To a certain extent, it plays a protective and safety function. In this embodiment, the channel formed by the first conduit 112, the second conduit 211 and the third conduit 221 facilitates the installation of cables, allowing the cables to be routed inside the equipment, thereby improving safety performance.

[0059] In some embodiments, the cover plate 300 is provided with a clearance hole 301 extending through it along the axial direction. The electrode mounting device further includes a mounting assembly 500, which includes a second flange 510 and a mounting head 520. The second flange 510 is disposed in the mounting cavity. The mounting head 520 passes through the second flange 510 and the clearance hole 301. A limiting plate 530 is provided on the outer peripheral surface of the end of the mounting head 520 facing away from the second flange 510. A screwing member 540 is detachably mounted on the outer peripheral surface of the mounting head 520 facing the end of the second flange 510. The second flange 510 is defined between the limiting plate 530 and the screwing member 540. An electrode rod 400 is mounted on the end of the mounting head 520 facing away from the driven frame 200. The electrode rod 400 is detachably connected to the cover plate 300 through the mounting assembly 500.

[0060] See Figure 2 and Figure 3 As shown, in order to enable the installation of the electrode rod 400 and to provide electrical energy to the electrode rod 400, a second flange 510 is provided in the mounting cavity formed between the first flange 230 and the cover plate 300. The mounting cavity has an abutment surface, which abuts against the edge of the end face of the second flange 510. After the first flange 230 is installed on the cover plate 300, it abuts and presses against the second flange 510 to fix the position of the second flange 510.

[0061] In this embodiment, a through hole is provided on the second flange 510. Specifically, the through hole is the center hole at the center position of the second flange 510. The mounting head 520 of the limiting plate 530 on the outer periphery passes through the center hole and the clearance hole 301. At this time, the limiting plate 530 abuts against the side of the second flange 510 away from the cover plate 300, and the other end of the mounting head 520 is located on the side of the second flange 510 away from the limiting plate 530. Then, in order to fix the position of the mounting head 520, a screwing member 540 is screwed on the end of the mounting head 520. At this time, the second flange 510 is located between the limiting plate 530 and the screwing member 540. As the screwing member 540 is screwed, the position of the mounting head 520 is fixed.

[0062] Furthermore, in order to prevent the screwing part 540 from becoming loose from the mounting head 520, a gasket 541 can be provided between the screwing part 540 and the second flange 510.

[0063] In this embodiment, the mounting head 520 has a mounting hole located on the end face of the mounting head 520 away from the limiting plate 530. The electrode rod 400 is detachably mounted in the mounting hole. It can be understood that the end part of the mounting head 520 away from the mounting hole is a cable connector. The connector is located in the mounting cavity and connected to the cable. The connector supplies power to the electrode rod 400 mounted in the mounting hole.

[0064] Understandably, in order for the screw-on component 540 to be screwed onto the mounting head 520, the outer surface of the mounting head 520 has external threads, and the screw-on component 540 has internal threads. The mounting head 520 and the screw-on component 540 are connected by threads to achieve a detachable connection. Specifically, the screw-on component 540 is a bolt.

[0065] In some embodiments, a first sealing structure 550 is provided between the second flange 510 and the cover plate 300. The first sealing structure 550 includes a first sealing groove 551 formed on the end face of the cover plate 300 facing the second flange 510, and a first sealing element 552 is provided in the first sealing groove 551.

[0066] See Figure 2 and Figure 3 as well as Figure 4 As shown, in order to prevent external air from entering the vacuum cylinder 600 from the connection between the second flange 510 and the cover plate 300, which would cause the vacuum level inside to fail to meet the working requirements, a first sealing structure 550 is provided at the connection between the second flange 510 and the cover plate 300. Specifically, the first sealing groove 551 can be provided on the side of the cover plate 300 facing the second flange 510, or it can be provided on the side of the second flange 510 facing the cover plate 300. In practice, it can be set as needed, and there is no limitation here.

[0067] In this embodiment, in order to avoid distinguishing between the front and back sides when installing the second flange 510, the first sealing groove 551 is set on the cover plate 300, and the first sealing element 552 is set in the first sealing groove 551. The first sealing element 552 deforms under force to make it fit the second flange 510 and the cover plate 300 more closely, thereby achieving a seal at the connection between the second flange 510 and the cover plate 300.

[0068] In some embodiments, a second sealing structure 560 is provided between the second flange 510 and the limiting plate 530. The second sealing structure 560 includes a second sealing groove 561 and a second sealing element 562. The second sealing groove 561 is formed on the end face of the limiting plate 530 facing the second flange 510, and the second sealing element 562 is disposed in the second sealing groove 561.

[0069] Please continue to participate. Figure 2 , Figure 3 as well as Figure 4As shown, in order to ensure the vacuum level inside the vacuum cylinder 600, a second sealing structure 560 is provided between the limiting plate 530 and the second flange 510. Specifically, the second sealing groove 561 can be provided on the limiting plate 530 or on the side of the second flange 510 facing the limiting plate 530. In practice, it can be set as needed.

[0070] In this embodiment, in order to prevent the distinction between the front and back sides when installing the second flange 510, the second sealing groove 561 is opened on the side of the limiting plate 530, and the second sealing element 562 is provided in the second sealing groove 561. The second sealing element 562 is deformed under force and makes full contact with the second flange 510 to achieve sealing.

[0071] In one embodiment, the first sealing element 552 and the second sealing element 562 mentioned above are both sealing rings. The sealing rings can be of the type such as O-rings, and the specific type of sealing ring is not limited here.

[0072] In some embodiments, the side of the cover plate 300 facing away from the electrode rod 400 is provided with a handle 310 and an observation window 320.

[0073] See Figure 1 and Figure 2 As shown, after the cover plate 300 and the vacuum cylinder 600 are disassembled, the operator can grasp the handle 310 and, under the guidance of the linear guide assembly 100, take the electrode rod 400 out of the vapor deposition chamber. Furthermore, when the vapor deposition equipment is working, the condition in the vapor deposition chamber can be observed through the observation window 320.

[0074] This application embodiment also provides a vapor deposition apparatus, which includes an electrode mounting device, a vacuum cylinder 600, and a reaction cylinder 700 as described above. Specifically, the vacuum cylinder 600 has a vacuum chamber 610 and an opening communicating with the vacuum chamber 610. A cover plate 300 is placed over the opening and is detachably installed in the vacuum cylinder 600. The reaction cylinder 700 is disposed inside the vacuum chamber 610 and has a vapor deposition chamber 710. The electrode rod 400 is located inside the vapor deposition chamber.

[0075] See Figure 5 and Figure 6 As shown, the cover plate 300 is installed at the opening of the vacuum chamber 610. Specifically, the cover plate 300 can be detachably connected by bolts. Furthermore, in order to prevent external gas from entering the vacuum chamber 610 from the connection between the cover plate 300 and the vacuum cylinder 600, which would cause pressure imbalance and fail to meet the working requirements, an annular groove is opened on the end face of the cover plate 300 facing the vacuum cylinder 600. A sealing ring is set in the annular groove. The deformation of the sealing ring makes it fit against the cover plate 300 and the vacuum cylinder 600 to complete the seal and prevent leakage.

[0076] like Figure 6 As shown, in this embodiment, the reaction cylinder 700 is located inside the vacuum chamber 610. The reaction cylinder 700 can be supported by two support rods installed on the inner wall of the vacuum chamber 610. Rollers can be provided on the outer circumferential surface of the support rods. The rollers contact the circumferential surface of the reaction cylinder 700. The support rods and rollers work together to support the reaction cylinder 700.

[0077] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0078] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. An electrode mounting device characterized by comprising: include: A linear guide assembly (100) includes a follower (140); A driven frame (200) is rotatably mounted on the driven member (140); A cover plate (300) is fixedly installed at the end of the driven frame (200) away from the driven member (140), and the cover plate (300) is used to seal the vacuum cylinder (600) of the vapor deposition equipment; Electrode rod (400), which is detachably mounted on the side of the cover plate (300) opposite to the driven frame (200).

2. The electrode mounting device of claim 1, wherein The linear guide assembly (100) includes a first guide member (111) and a second guide member (121). A first guide rod (110) is slidably mounted on the first guide member (111), and a second guide rod (120) is slidably mounted on the second guide member (121). A connector (130) is installed at the ends of the first guide rod (110) and the second guide rod (120) on the same side. The follower (140) is fixedly disposed on the side of the connector (130) facing away from the first guide member (111).

3. The electrode mounting device of claim 2, wherein The first guide rod (110) and / or the second guide rod (120) are provided with a first conduit (112).

4. The electrode mounting device according to claim 1, characterized in that, The driven frame (200) includes a rotating rod (210) rotatably mounted on the driven member (140). A connecting rod (220) is fixedly connected to the side of the rotating rod (210) away from the driven member (140). A first flange (230) is provided on the side of the connecting rod (220) facing the cover plate (300). The connecting rod (220) is fixedly connected to the cover plate (300) through the first flange (230). An installation cavity is defined between the first flange (230) and the cover plate (300).

5. The electrode mounting device according to claim 4, characterized in that, The rotating rod (210) has a second conduit (211), and the connecting rod (220) has a third conduit (221). The second conduit (211) and the third conduit (221) are connected to form a cable channel.

6. The electrode mounting device according to claim 4, characterized in that, The cover plate (300) has a clearance hole (301) extending through it along the axial direction; The electrode mounting device further includes a mounting assembly (500), which includes a second flange (510) and a mounting head (520). The second flange (510) is disposed in the mounting cavity. The mounting head (520) passes through the second flange (510) and the clearance hole (301). A limiting plate (530) is provided on the outer peripheral surface of the end of the mounting head (520) facing away from the second flange (510). A screwing component (540) is detachably mounted on the outer peripheral surface of the mounting head (520) facing the end of the second flange (510). The second flange (510) is defined between the limiting plate (530) and the screwing component (540). The electrode rod (400) is mounted on the end of the mounting head (520) away from the driven frame (200), and the electrode rod (400) is detachably connected to the cover plate (300) through the mounting assembly (500).

7. The electrode mounting device according to claim 6, characterized in that, A first sealing structure (550) is provided between the second flange (510) and the cover plate (300). The first sealing structure (550) includes a first sealing groove (551) formed on the end face of the cover plate (300) facing the second flange (510). A first sealing element (552) is provided in the first sealing groove (551).

8. The electrode mounting device according to claim 6, characterized in that, A second sealing structure (560) is provided between the second flange (510) and the limiting plate (530). The second sealing structure (560) includes a second sealing groove (561) and a second sealing element (562). The second sealing groove (561) is opened on the end face of the limiting plate (530) facing the second flange (510), and the second sealing element (562) is disposed in the second sealing groove (561).

9. The electrode mounting device according to claim 1, characterized in that, The cover plate (300) is provided with a handle (310) and an observation window (320) on the side opposite to the electrode rod (400).

10. A vapor deposition apparatus, characterized in that, include: The electrode mounting device according to any one of claims 1 to 9; A vacuum cylinder (600) having a vacuum chamber (610) and an opening communicating with the vacuum chamber (610), a cover plate (300) covering the opening, and the cover plate (300) being detachably installed on the vacuum cylinder (600); The reaction cylinder (700) is disposed in the vacuum chamber (610), the reaction cylinder (700) has a vapor deposition chamber (710), and the electrode rod (400) is located in the vapor deposition chamber (710).

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