A single crystal furnace chamber leveling mechanism

Abstract

This utility model relates to the field of single crystal furnace leveling technology, and in particular to a single crystal furnace chamber leveling mechanism, comprising a mounting base, multiple support rods, multiple support rings, a mounting plate, multiple nuts, and multiple adjusting components. The mounting base has first mounting holes at each of its four top corners and mounting cavities at each of its four side edges. Each support rod has a second threaded sleeve threadedly connected to its outer wall, and the second threaded sleeve is fixedly connected to the corresponding first mounting hole. This application fixes the mounting base within a concrete base. The adjusting components drive the support rods to rotate via worm gears and other components. The threaded connection between the support rods and the second threaded sleeves allows for the raising and lowering of the support rods, thereby adjusting the levelness of the mounting plate. This design is independent of the precision of the concrete base and allows for real-time adjustment of the mounting plate during installation, ensuring the levelness of the single crystal furnace chamber.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace leveling technology, and more specifically, to a single crystal furnace chamber leveling mechanism. Background Technology

[0002] In the field of monocrystalline silicon production, the horizontal state of the monocrystalline furnace chamber is a key factor in ensuring high-quality monocrystalline silicon growth. If the furnace chamber is not level, it will lead to uneven distribution of temperature and airflow fields, causing problems such as crystal rod bending, diameter deviation, and increased internal defects during monocrystalline growth, which seriously affects the quality and production efficiency of monocrystalline silicon.

[0003] The existing single crystal furnace base is mainly installed on a concrete base. After the concrete base solidifies, it shrinks, causing the internal positioning screws to tilt. When connected to the single crystal furnace base, this will affect the levelness of the single crystal furnace chamber installation. Utility Model Content

[0004] To address the aforementioned technical problems, this utility model provides a single crystal furnace chamber leveling mechanism, which aims to solve to some extent the technical problem in the prior art where the single crystal furnace base is mainly installed on a concrete base. After the concrete base solidifies, it shrinks, causing the internal positioning screws to tilt. This tilting affects the levelness of the single crystal furnace chamber installation when connected to the single crystal furnace base.

[0005] The technical solution of this utility model is: a single crystal furnace chamber leveling mechanism, including a mounting base, multiple support rods, multiple support rings, a mounting plate, multiple nuts, and multiple adjustment components;

[0006] The mounting base has a first mounting hole at each of the four corners of the top, and a mounting cavity at each of the four sides of the mounting base.

[0007] The outer wall of each support rod is threaded with a second threaded sleeve, and the second threaded sleeve is fixedly connected to the corresponding first mounting hole.

[0008] The support rings are respectively fixedly connected to the corresponding support rods;

[0009] The nuts are respectively threaded onto the threaded portion of the outer wall of the corresponding support rod;

[0010] The mounting plate is provided with leveling holes at all four corners, and the top of the support rod passes through the leveling holes and extends above them.

[0011] The adjustment components are respectively installed in the corresponding mounting cavities, and the adjustment components drive the corresponding support rods to rotate.

[0012] Preferably, the adjustment component includes an output shaft, a cross-shaped locking head is fixedly connected to the top of the output shaft, a cross-shaped locking groove is opened at the bottom of the support rod, the cross-shaped locking head engages with the cross-shaped locking groove, the top of the output shaft contacts the bottom of the support rod, and multiple limiting strips are fixedly connected to the outer wall of the output shaft.

[0013] Preferably, a screw is fixedly connected to the bottom of the output shaft, a second mounting hole is provided at the bottom of the inner wall of the mounting cavity, a first threaded sleeve is fixedly connected to the inner wall of the second mounting hole, and the screw is threadedly connected to the first threaded sleeve.

[0014] Preferably, the adjustment assembly further includes a drive sleeve, the limiting strip passes through the inner groove of the drive sleeve and is slidably connected thereto, the drive sleeve is sleeved on the output shaft, two support plates are rotatably connected to the outer wall of the drive sleeve, the ends of the support plates are respectively fixedly connected to the mounting base, and a worm gear is fixedly connected to the outer wall of the drive sleeve.

[0015] Preferably, the adjusting assembly further includes a worm gear, the ends of which are rotatably connected to the mounting base, and a rotating wheel is fixedly connected to the ends of the worm gear, and the worm gear meshes with the worm wheel.

[0016] Preferably, the leveling mechanism further includes a concrete base, the inner wall of which is fixedly connected with a plurality of positioning steel bars, the mounting seat is placed on top of the concrete base, and the positioning steel bars pass through the concrete base and extend to the top of the inner groove of the mounting seat.

[0017] Preferably, the inner groove of the mounting base is formed into a concrete connecting base by pouring concrete, and a steel mesh skeleton is installed inside the concrete connecting base.

[0018] The beneficial effects of this utility model, achieved through the above technical solution, are as follows:

[0019] 1. The mounting base is fixed within the concrete foundation. An adjusting assembly drives the support rod to rotate via a worm gear and worm wheel. The threaded connection between the support rod and the second threaded sleeve allows for the raising and lowering of the support rod, thereby adjusting the level of the mounting plate. This design is independent of the precision of the concrete foundation and allows for real-time adjustment of the mounting plate during installation, ensuring the levelness of the single crystal furnace chamber. Compared to traditional methods, this leveling mechanism improves the accuracy and reliability of single crystal furnace installation and effectively avoids installation problems caused by concrete foundation shrinkage.

[0020] 2. The concrete base provides basic support for the entire leveling mechanism. The positioning steel bars extend through the concrete base into the mounting base, enhancing the connection strength and stability between the concrete base and the mounting base, preventing displacement of the mounting base during use, and ensuring the reliability of the leveling mechanism.

[0021] 3. The concrete connector is formed by pouring concrete into the inner groove of the mounting base. The internal steel mesh skeleton further enhances its strength and rigidity, making the connection between the mounting base and the concrete base more secure and providing a stable support foundation for the support rod and adjustment components. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the mounting structure of the mounting base of this utility model;

[0024] Figure 3 This is a schematic diagram of the mounting structure of the mounting plate of this utility model;

[0025] Figure 4 This is a schematic diagram of the support rod of this utility model;

[0026] Figure 5 This is a schematic diagram of the output shaft of this utility model;

[0027] Figure 6 This is a schematic diagram of the structure of the drive sleeve of this utility model.

[0028] In the diagram: 1. Concrete base; 2. Positioning reinforcement; 3. Concrete connector; 4. Mounting base; 5. First mounting hole; 6. Mounting cavity; 7. Second mounting hole; 8. First threaded sleeve; 9. Output shaft; 10. Screw; 11. Limiting strip; 12. Cross head; 13. Support rod; 14. Cross groove; 15. Support ring; 16. Mounting plate; 17. Leveling hole; 18. Nut; 19. Second threaded sleeve; 20. Worm gear; 21. Support plate; 22. Drive sleeve; 23. Worm wheel; 24. Rotary wheel. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] like Figures 1-4 As shown, a single crystal furnace chamber leveling mechanism includes a mounting base 4, multiple support rods 13, multiple support rings 15, a mounting plate 16, multiple nuts 18, and multiple adjustment components.

[0031] The mounting base 4 has first mounting holes 5 at the four corners of the top, and mounting cavities 6 at the four sides of the mounting base 4.

[0032] The outer wall of the support rod 13 is threaded with a second threaded sleeve 19, and the second threaded sleeve 19 is fixedly connected to the corresponding first mounting hole 5.

[0033] The support rings 15 are fixedly connected to the corresponding support rods 13;

[0034] Nuts 18 are threaded onto the threaded portion of the outer wall of the corresponding support rod 13;

[0035] The mounting plate 16 has leveling holes 17 at each of its four corners, and the top of the support rod 13 passes through the leveling holes 17 and extends above them.

[0036] The adjustment components are installed in the corresponding mounting cavities 6, and the adjustment components drive the corresponding support rods 13 to rotate.

[0037] The first mounting hole 5 and the second screw sleeve 19 cooperate to provide a stable installation connection for the support rod 13, allowing the support rod 13 to move axially. The mounting plate 16 and the leveling hole 17 provide an installation platform for the single crystal furnace chamber. The adjustment component drives the support rod 13 to rotate, thereby adjusting the level of the mounting plate 16. This solves the problem of the installation level of the single crystal furnace chamber being affected by the shrinkage of the concrete base, and improves the installation accuracy of the single crystal furnace.

[0038] In this embodiment, as Figures 3-6 As shown, the adjustment assembly includes an output shaft 9, a cross-shaped locking head 12 is fixedly connected to the top of the output shaft 9, a cross-shaped locking groove 14 is opened at the bottom of the support rod 13, the cross-shaped locking head 12 and the cross-shaped locking groove 14 are engaged, the top of the output shaft 9 contacts the bottom of the support rod 13, and multiple limiting strips 11 are fixedly connected to the outer wall of the output shaft 9.

[0039] The bottom of the output shaft 9 is fixedly connected to a screw 10, and the bottom of the inner wall of the mounting cavity 6 is provided with a second mounting hole 7. The inner wall of the second mounting hole 7 is fixedly connected to a first threaded sleeve 8, and the screw 10 is threadedly connected to the first threaded sleeve 8.

[0040] The adjustment assembly also includes a drive sleeve 22, a limit bar 11 that passes through the inner groove of the drive sleeve 22 and is slidably connected to it, the drive sleeve 22 is fitted on the output shaft 9, and two support plates 21 are rotatably connected to the outer wall of the drive sleeve 22. The ends of the support plates 21 are respectively fixedly connected to the mounting base 4, and a worm gear 23 is fixedly connected to the outer wall of the drive sleeve 22.

[0041] The adjustment assembly also includes a worm gear 20, the ends of which are rotatably connected to the mounting base 4, and a rotating wheel 24 is fixedly connected to the ends of the worm gear 20, which meshes with the worm wheel 23.

[0042] In the adjustment assembly, the cross-shaped locking head 12 engages with the cross-shaped locking groove 14 to ensure that the rotation of the output shaft 9 can be reliably transmitted to the support rod 13 and prevent slippage. The limiting strip 11 is slidably connected to the drive sleeve 22 to restrict the axial movement of the drive sleeve 22 and ensure that it can only drive the output shaft 9 to rotate. The screw 10 is threadedly connected to the first screw sleeve 8 to provide guidance and support for the lifting and lowering of the output shaft 9. By rotating the rotating wheel 24, the rotation angle of the output shaft 9 and the support rod 13 can be precisely controlled, thereby achieving fine adjustment of the level of the mounting plate 16.

[0043] In this embodiment, as Figure 1 and Figure 2 As shown, the leveling mechanism also includes a concrete base 1, with multiple positioning steel bars 2 fixedly connected to the inner wall of the concrete base 1. The mounting seat 4 is placed on top of the concrete base 1, and the positioning steel bars 2 pass through the concrete base 1 and extend to the top of the inner groove of the mounting seat 4.

[0044] The inner groove of the mounting base 4 is formed by pouring concrete to create a concrete connecting base 3, and a steel mesh skeleton is installed inside the concrete connecting base 3.

[0045] The concrete base 1 provides foundational support for the entire leveling mechanism. Positioning reinforcing bars 2 extend through the concrete base 1 into the mounting base 4, enhancing the connection strength and stability between the concrete base 1 and the mounting base 4, preventing displacement of the mounting base 4 during use, and ensuring the reliability of the leveling mechanism. The concrete connecting seat 3 is formed by pouring concrete into the inner groove of the mounting base 4. The internal steel mesh further enhances its strength and rigidity, making the connection between the mounting base 4 and the concrete base 1 more secure, providing a stable support foundation for the support rod 13 and the adjustment components.

[0046] Working principle: When installing the leveling mechanism of the single crystal furnace chamber, first fix the positioning steel bar 2 to the inner wall of the concrete base 1, then place the mounting seat 4 on top of the concrete base 1, so that the positioning steel bar 2 passes through the concrete base 1 and extends to the top of the inner groove of the mounting seat 4. Then, pour concrete into the inner groove of the mounting seat 4 to form a concrete connecting seat 3, in which the steel mesh skeleton enhances the strength and stability of the concrete connecting seat 3.

[0047] When leveling the mounting plate 16 is required, rotate the rotating wheel 24. The rotating wheel 24 drives the worm gear 20 to rotate, and the worm gear 20 meshes with the worm wheel 23, causing the worm wheel 23 to drive the drive sleeve 22 to rotate. The drive sleeve 22 drives the output shaft 9 to rotate through the limiting strip 11. The cross-shaped clasp 12 at the top of the output shaft 9 engages with the cross-shaped clasp groove 14 at the bottom of the support rod 13, thereby driving the support rod 13 to rotate. Since the support rod 13 is threadedly connected to the second threaded sleeve 19, the support rod 13 will move up and down axially when it rotates, thereby driving the mounting plate 16 to rise and fall vertically. By adjusting the lifting height of multiple support rods 13, the levelness of the mounting plate 16 can be precisely adjusted. After adjustment, tighten the nut 18 so that it abuts against the mounting plate 16, fixing the position of the support rod 13 and ensuring the levelness of the mounting plate 16.

[0048] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this utility model, based on the technical solution and inventive concept of this utility model, should be included within the scope of protection of this utility model.

Claims

1. A leveling mechanism for a single crystal furnace chamber, characterized in that, include: Mounting base (4), each of the four corners of the top of the mounting base (4) is provided with a first mounting hole (5), and each of the four sides of the mounting base (4) is provided with a mounting cavity (6); Multiple support rods (13), each of which has a second threaded sleeve (19) threaded to its outer wall, and the second threaded sleeve (19) is fixedly connected to the corresponding first mounting hole (5); Multiple support rings (15), each of which is fixedly connected to a corresponding support rod (13); Multiple nuts (18) are threadedly connected to the threaded portion of the outer wall of the corresponding support rod (13); Mounting plate (16), with leveling holes (17) at each of the four corners of the mounting plate (16), and the top of the support rod (13) passing through the leveling holes (17) and extending above them; Multiple adjustment components are installed in corresponding mounting cavities (6), and the adjustment components drive the corresponding support rods (13) to rotate.

2. The single crystal furnace chamber leveling mechanism according to claim 1, characterized in that: The adjustment assembly includes an output shaft (9), a cross head (12) is fixedly connected to the top of the output shaft (9), a cross groove (14) is opened at the bottom of the support rod (13), the cross head (12) is engaged with the cross groove (14), the top of the output shaft (9) is in contact with the bottom of the support rod (13), and a plurality of limit strips (11) are fixedly connected to the outer wall of the output shaft (9).

3. The single crystal furnace chamber leveling mechanism according to claim 2, characterized in that: The output shaft (9) is fixedly connected to the bottom of a screw (10), and the bottom of the inner wall of the mounting cavity (6) is provided with a second mounting hole (7). The inner wall of the second mounting hole (7) is fixedly connected to a first threaded sleeve (8), and the screw (10) is threadedly connected to the first threaded sleeve (8).

4. The single crystal furnace chamber leveling mechanism according to claim 3, characterized in that: The adjustment assembly also includes a drive sleeve (22), the limiting strip (11) passes through the inner groove of the drive sleeve (22) and is slidably connected thereto, the drive sleeve (22) is sleeved on the output shaft (9), the outer wall of the drive sleeve (22) is rotatably connected to two support plates (21), the ends of the support plates (21) are respectively fixedly connected to the mounting base (4), and the outer wall of the drive sleeve (22) is fixedly connected to a worm gear (23).

5. The single crystal furnace chamber leveling mechanism according to claim 4, characterized in that: The adjustment assembly also includes a worm (20), the ends of which are rotatably connected to the mounting base (4), and a rotating wheel (24) is fixedly connected to the ends of the worm (20), and the worm (20) meshes with the worm wheel (23).

6. The single crystal furnace chamber leveling mechanism according to claim 5, characterized in that: It also includes a concrete base (1), the inner wall of which is fixedly connected with a plurality of positioning steel bars (2), the mounting seat (4) is placed on top of the concrete base (1), and the positioning steel bars (2) pass through the concrete base (1) and extend to the top of the inner groove of the mounting seat (4).

7. The single crystal furnace chamber leveling mechanism according to claim 6, characterized in that: The inner groove of the mounting base (4) is formed by pouring concrete to form a concrete connecting base (3), and a steel mesh skeleton is installed inside the concrete connecting base (3).

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