A horizontal centering fixture for a single crystal furnace

Abstract

This invention provides a horizontal centering fixture for a single crystal furnace, relating to the field of single crystal furnace technology. The invention includes a centering shaft, centering graduations at the top of the shaft, a tungsten wire rope, and a centering pin at the bottom of the wire rope. The centering shaft is coaxially and movably connected to the crucible shaft. The tungsten wire rope is connected to a lifting head, and the centering pin is coaxially connected to the wire rope, engaging with the centering graduations. This invention uses the crucible shaft as a reference for centering, improving centering accuracy and reliability compared to the traditional method of centering using the furnace bottom plate.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, specifically to a horizontal centering tooling for a single crystal furnace. Background Technology

[0002] In the single crystal pulling industry, the single crystal furnace is a typical piece of equipment for the Czochralski method of crystal growth. The rotational alignment of the lifting head, tungsten wire rope, and crucible shaft in the single crystal furnace is one of the necessary conditions for pulling high-quality and large-sized single crystal silicon. If the alignment of the rotational centers of the three is not good, it will cause the crystal rod to deviate from the center of the thermal field, resulting in the twisting and deformation of the crystal rod, or causing dislocations or poor crystal formation during crystal growth.

[0003] In existing technologies, the alignment method is basically based on the bottom plate of the single crystal furnace for horizontal alignment. However, after long-term operation, the flatness of the bottom plate of the single crystal furnace is deformed, which means that the horizontality of the bottom plate can no longer meet the horizontal requirements of the furnace platform when aligning the furnace platform. The accuracy needs to be adjusted repeatedly, and the alignment adjustment is slow. Utility Model Content

[0004] The purpose of this invention is to develop a horizontal centering fixture for single crystal furnaces that uses the crucible axis as a reference for centering, which improves the centering accuracy and reliability compared to the traditional method of centering using the furnace bottom plate as a reference.

[0005] This utility model is achieved through the following technical solution:

[0006] A horizontal centering fixture for a single crystal furnace, comprising:

[0007] For the central axis;

[0008] The centering scale is located at the top of the centering axis;

[0009] Tungsten wire rope;

[0010] The center needle is located at the bottom end of the tungsten wire rope;

[0011] The centering shaft is coaxially and movably connected to the crucible shaft, the tungsten wire rope is connected to the lifting head, the centering needle is coaxially connected to the tungsten wire rope, and the centering needle is matched with the centering scale.

[0012] Optionally, a coaxial frustum-shaped conical groove is provided at the top of the crucible shaft, and the bottom end of the centering needle is a conical part that mates with the conical groove.

[0013] Optionally, the centering scale includes multiple concentric circles of different diameters, all of which are coaxial with the centering axis.

[0014] Optionally, multiple concentric circles are equidistant from each other, and two mutually perpendicular straight lines are provided on the multiple concentric circles and arranged radially along the circles.

[0015] Optionally, the top of the centering axis on the side of the centering scale is provided with two horizontal rulers, and the two horizontal rulers are arranged with perpendicular trajectories.

[0016] Optionally, a support plate is provided at the top of the centering axis, the support plate is perpendicular to the centering axis, and the level and centering scale are provided on the support plate.

[0017] Optionally, the bottom end of the tungsten wire rope is provided with a graphite clamp, and the centering needle is provided on the graphite clamp.

[0018] Optionally, the graphite chuck is provided with a through-hole, which includes an upper section, a middle section, and a lower section from top to bottom. The inner diameter of the upper section is larger than that of the lower section, and the middle section is a frustum-shaped section with an inner diameter that gradually decreases from top to bottom. The shape of the upper part of the centering needle corresponds to the needle hole.

[0019] Optionally, a counterweight is provided between the tungsten wire rope and the graphite chuck.

[0020] Optionally, the cross-section of the counterweight and graphite chuck at any position is circular, and the tungsten wire rope, counterweight, graphite chuck, and centering pin are coaxially connected in sequence.

[0021] The beneficial effects of this utility model are:

[0022] This utility model has a simple structure, low cost, simple centering operation, and high work efficiency. It does not use the furnace bottom plate as a reference for centering, thus avoiding poor centering caused by furnace bottom plate deformation. Centering is performed using the crucible shaft as a reference, resulting in high centering accuracy and good reliability. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a structural diagram of the present utility model;

[0025] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0026] Figure 3 Diagram of the top structure of the support plate.

[0027] Attached reference numerals: 1. Tungsten wire rope; 2. Weight; 3. Graphite chuck; 4. Centering pin; 5. Support plate; 6. Centering shaft; 7. Crucible shaft; 8. Furnace bottom plate; 9. Level; 10. Centering scale. Detailed Implementation

[0028] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0029] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0030] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0031] like Figures 1-3 As shown, this utility model discloses a horizontal centering fixture for a single crystal furnace, including a centering shaft 6. The bottom end of the centering shaft 6 is a cone, which is a frustum or cone shape coaxial with the centering shaft 6. The top end of the centering shaft 6 is provided with a support plate 5, which is perpendicular to the centering shaft 6.

[0032] Figure 1 To ensure the working principle of the tooling, the inner side of the furnace bottom plate 8 of the single crystal furnace is provided with a liftable crucible shaft 7. The crucible shaft 7 is connected to the graphite support rod. The top of the crucible shaft 7 is provided with a coaxial frustum-shaped conical groove. The tapered part at the bottom of the centering shaft 6 matches the tapered groove. After the bottom of the centering shaft 6 is inserted into the top of the crucible shaft 7, the centering shaft 6 and the crucible shaft 7 are in a coaxial state.

[0033] The support plate 5 is provided with a centering scale 10, which includes multiple concentric circles of different diameters. The multiple concentric circles are equidistant from each other and are coaxial with the centering axis 6. Two mutually perpendicular straight lines are also provided on the multiple concentric circles and are arranged radially along the circles. Two horizontal rulers 9 are provided on the side of the support plate 5 of the centering scale 10, and the two horizontal rulers 9 are arranged with perpendicular trajectories.

[0034] The centering fixture also includes a tungsten wire rope 1 connected to the lifting head. A counterweight 2 is connected to the bottom end of the tungsten wire rope 1. A graphite chuck 3 is connected to the bottom end of the counterweight 2. A centering pin 4 is provided at the bottom of the graphite chuck 3. The cross-section of the counterweight 2 and the graphite chuck 3 at any position is circular. The tungsten wire rope 1, the counterweight 2, the graphite chuck 3, and the centering pin 4 are connected coaxially in sequence.

[0035] The graphite chuck 3 has a pinhole that runs through it and is coaxial with it. The pinhole consists of an upper section, a middle section, and a lower section from top to bottom. The inner diameter of the upper section is larger than that of the lower section, and the middle section is a frustum-shaped structure with the inner diameter gradually decreasing from top to bottom.

[0036] The shape of the upper part of the center needle 4 corresponds to the needle hole, that is, the shape of the upper part of the center needle 4 corresponds to the upper section, middle section and lower section of the needle hole in sequence. After the center needle 4 is inserted into the needle hole and the tapered part of the bottom end of the center needle 4 extends out of the needle hole, the outer wall of the center needle 4 contacts the inner wall of the needle hole to achieve the positioning of the center needle 4. The center needle 4 is coaxially connected with the graphite chuck 3.

[0037] During centering, the centering shaft 6 is coaxially connected to the crucible shaft 7. Using the level 9 as a reference, the support plate 5 is adjusted to be level until 0.02mm / 1000mm. The centering needle 4 is placed into the graphite chuck 3 and the two are made coaxial. The graphite chuck 3, the counterweight 2, and the tungsten wire rope 1 are connected coaxially in sequence. The centering needle 4 is above the support plate 5. By adjusting the level screw of the lifting head, the centering needle 4 is aligned with the centering scale 10 on the support plate 5, so that the centering needle 4 is at the center of the centering scale 10, and the centering operation is completed.

[0038] This utility model has a simple structure, low cost, simple centering operation, and high work efficiency. It does not use the furnace bottom plate 8 as a reference for centering, thus avoiding poor centering caused by deformation of the furnace bottom plate 8. Centering is performed using the crucible shaft 7 as a reference, resulting in high centering accuracy and good reliability.

[0039] The above embodiments are merely preferred embodiments of this utility model and are not intended to limit the technical solutions of this utility model. Any technical solution that can be implemented based on the above embodiments without creative effort should be considered to fall within the scope of protection of this utility model patent.

Claims

1. A horizontal centering tool for a single crystal furnace, characterized by comprising: include: For the central axis; The centering scale is located at the top of the centering axis; Tungsten wire rope; The center needle is located at the bottom end of the tungsten wire rope; The centering shaft is coaxially and movably connected to the crucible shaft, the tungsten wire rope is connected to the lifting head, the centering needle is coaxially connected to the tungsten wire rope, and the centering needle is matched with the centering scale.

2. The single crystal furnace level centering tool of claim 1, wherein, The crucible shaft has a coaxial frustum-shaped conical groove at the top, and the bottom of the centering needle is a conical part that mates with the conical groove.

3. The single crystal furnace level centering tool of claim 1, wherein, The centering scale includes multiple concentric circles of different diameters, all of which are coaxial with the centering axis.

4. The horizontal centering fixture for a single crystal furnace according to claim 3, characterized in that, Multiple concentric circles are equidistant from each other, and two mutually perpendicular straight lines are also provided on the multiple concentric circles and arranged radially along the circles.

5. The horizontal centering fixture for a single crystal furnace according to claim 4, characterized in that, The centering axis on the side of the centering scale is provided with two horizontal rulers, and the two horizontal rulers are arranged with perpendicular trajectories.

6. The horizontal centering fixture for a single crystal furnace according to claim 5, characterized in that, The centering axis is provided with a support plate at its top, the support plate is perpendicular to the centering axis, and the level and centering scale are provided on the support plate.

7. The horizontal centering fixture for a single crystal furnace according to claim 1, characterized in that, The bottom end of the tungsten wire rope is provided with a graphite clamp, and the centering needle is located on the graphite clamp.

8. The horizontal centering fixture for a single crystal furnace according to claim 7, characterized in that, The graphite clamp is provided with a through-hole, which consists of an upper section, a middle section, and a lower section from top to bottom. The inner diameter of the upper section is larger than that of the lower section. The middle section is a frustum-shaped structure with an inner diameter that gradually decreases from top to bottom. The shape of the upper part of the centering needle corresponds to the needle hole.

9. The horizontal centering fixture for a single crystal furnace according to claim 7, characterized in that, A counterweight is provided between the tungsten wire rope and the graphite clamp.

10. The horizontal centering fixture for a single crystal furnace according to claim 9, characterized in that, The cross-sections of the weight and graphite chuck at any position are circular, and the tungsten wire rope, weight, graphite chuck, and centering pin are coaxially connected in sequence.

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