Spin-drying sleeve frame

Abstract

The utility model discloses a spin-drying sleeve frame, which belongs to the technical field of wafer processing equipment and comprises a base, and a plurality of drainage grooves are arranged at the bottom of the base. The two first baffles are arranged at the two ends of the base in the length direction respectively and connected with the base; the limiting plate is arranged at the top of the base; the two ends of the limiting plate are connected with the two first baffles correspondingly so that the limiting plate and the base can form a main body for containing a clamping plug. The first baffle is provided with a first clamping plug groove. The first clamping plug groove is communicated with the cavity of the main body so that the clamping plug can enter the main body where the clamping plug is placed through the first clamping plug groove. The clamping plug can be placed in the middle, the dynamic balance is better, the spin-drying efficiency is improved through the hollowed-out design, the operation is simpler and more convenient, and the working efficiency is improved.

Description

Technical Field

[0001] This utility model belongs to the technical field of wafer processing equipment, and specifically relates to a spin dryer. Background Technology

[0002] Currently, during the spin-drying process after polishing small-sized wafers, due to the lack of spin-drying racks of the corresponding size, the cassette is usually placed on an existing spin-drying rack holder for spin-drying. The existing spin-drying rack holders are mainly made of PFA material, which has the problems of high material cost and heavy weight.

[0003] In addition, the plug is placed on the upper side of the spin dryer frame, which prevents the plug and the wafer from being centered during spin drying. This results in poor dynamic balance during the spin drying process, which not only affects the service life of the spin dryer, but also may damage the wafer due to the large vibration.

[0004] In addition, the existing spin dryer rack has many closed positions on both sides, making it difficult to remove moisture from the wafer surface during spin drying, which affects the spin drying efficiency. At the same time, the existing spin dryer rack needs to be removed from the spin dryer, the plug needs to be fixed on the spin dryer rack, and then the rack needs to be inserted into the spin dryer for spin drying. The operation steps are cumbersome and affect the work efficiency. Utility Model Content

[0005] To solve the above problems, the present invention adopts the following technical solution:

[0006] A spin dryer rack, comprising:

[0007] The base has multiple drainage grooves at its bottom;

[0008] Two first baffles are respectively disposed at both ends of the base along its length and connected to the base;

[0009] A limiting plate is disposed on the top of the base; both ends of the limiting plate are respectively connected to two first baffles to form a main body for placing the plug with the base;

[0010] The first baffle is provided with a first plug groove; the first plug groove is connected to the cavity of the main body so that the plug can be inserted into the main body where the plug is placed through the first plug groove.

[0011] Furthermore, the first baffle is provided with a first stop bar; the limiting plate is provided with a second stop bar corresponding to the first stop bar; the second stop bar cooperates with the first stop bar to limit the chip on the cassette.

[0012] Furthermore, it also includes a second baffle; the second baffle is disposed between the two first baffles; one end of the second baffle in the longitudinal extension direction is connected to the limiting plate, and the other end is connected to the base; the second baffle is provided with a second retainer groove; the second retainer groove communicates with the cavity of the main body; the second baffle is provided with a third stop bar to limit the wafer on the retainer.

[0013] Furthermore, the base, the first baffle, the second baffle, the first stop bar, and the second stop bar are all made of PP material.

[0014] Beneficial effects:

[0015] The present invention provides a spin dryer frame with the plug placed in the center, which improves the dynamic balance of the spin dryer frame, reduces vibration during spin drying, reduces the life loss of the spin dryer and the impact on wafer vibration, solves the drainage efficiency problem of the spin dryer frame, improves spin drying efficiency, solves the problem of cumbersome operation, and improves work efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the spin dryer frame of this utility model;

[0017] Figure 2 This is a bottom view of the overall structure of the spin dryer frame in this utility model;

[0018] Figure 3 This is a front view of the spin-drying frame in this utility model;

[0019] Figure 4 This is a side view of the spin dryer frame in this utility model;

[0020] Figure 5 This is a bottom view of the spin dryer frame in this utility model;

[0021] The components include: 1. base; 2. second baffle; 3. first baffle; 4. limiting plate; 5. first stop bar; 6. first locking groove; 7. second stop bar; and 8. drainage groove. Detailed Implementation

[0022] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "horizontal," "inner," "outer," and "one side," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] Example 1

[0025] like Figures 1 to 5 As shown, a spin dryer rack includes:

[0026] The base 1 has multiple drainage channels 8 at its bottom, through which moisture is drained from the chip in the cassette.

[0027] Two first baffles 3 are respectively disposed at both ends of the base 1 along its length and are connected to the base 1;

[0028] Limiting plate 4 is set on the top of base 1; both ends of limiting plate 4 are connected to two first baffles 3 respectively, so as to form a main body for placing the plug with base 1.

[0029] The first baffle 3 is provided with a first plug groove 6; the first plug groove 6 is connected to the cavity of the main body so that the plug can be inserted into the main body where the plug is placed through the first plug groove 6.

[0030] In this embodiment, a first baffle 3 is provided with a first baffle 5; a second baffle 7 corresponding to the first baffle 5 is provided on the limiting plate 4; the second baffle 7 cooperates with the first baffle 5 to limit the chip on the plug.

[0031] By using the above technical solution, the card is placed in the cavity inside the main body, and the first baffle 5 and the second baffle 7 limit the chip on the card, which can enhance the dynamic balance during the spin-drying process. The dynamic balance is better when the card is placed in the center. The hollow design of the drain groove 8, the first card groove 6 and the second card groove improves the spin-drying efficiency, makes the operation simpler, and improves the work efficiency.

[0032] In this embodiment, a second baffle 2 is also included; the second baffle 2 is disposed between two first baffles 3; one end of the second baffle 2 extending vertically is connected to the limiting plate 4, and the other end is connected to the base 1; a second plug groove is provided on the second baffle 2; the second plug groove communicates with the cavity of the main body; a third baffle is provided on the second baffle 2 to limit the wafer on the plug.

[0033] In this embodiment, the base 1, the first baffle 3, the second baffle 2, the first baffle 5, and the second baffle 7 are all made of PP material (a semi-crystalline material) and are connected together. The PP material is low in cost, has stable chemical properties, and is lightweight, which can reduce the load on the spin dryer.

[0034] Preferably, the base 1, the first baffle 3, the second baffle 2, the first baffle 5, and the second baffle 7 are welded together.

[0035] The present invention provides a spin dryer frame, comprising a base 1, a first baffle 3, a second baffle 2, a first baffle 5, and a second baffle 7. The base 1, the first baffle 3, the second baffle 2, the first baffle 5, and the second baffle 7 are welded together to form the main body of the spin dryer frame. During operation, a cassette containing a wafer is inserted into the main body, and then the spin dryer frame is placed in a spin dryer for spin drying.

[0036] The above are merely preferred embodiments of the present utility model and do not constitute any limitation on the technical scope of the present utility model. Therefore, any minor modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model shall still fall within the scope of the technical solution of the present utility model.

Claims

1. A spin-drying rack, characterized in that, include: The base has multiple drainage grooves at its bottom; Two first baffles are respectively disposed at both ends of the base along its length and connected to the base; A limiting plate is disposed on the top of the base; both ends of the limiting plate are respectively connected to two first baffles to form a main body for placing the plug with the base; The first baffle is provided with a first plug groove; the first plug groove is connected to the cavity of the main body so that the plug can be inserted into the main body where the plug is placed through the first plug groove.

2. The spin-drying rack according to claim 1, characterized in that, The first baffle is provided with a first stop bar; the limiting plate is provided with a second stop bar corresponding to the first stop bar; the second stop bar cooperates with the first stop bar to limit the chip on the cassette.

3. The spin-drying rack according to claim 2, characterized in that, It also includes a second baffle; the second baffle is disposed between the two first baffles; one end of the second baffle in the longitudinal extension direction is connected to the limiting plate, and the other end is connected to the base; the second baffle is provided with a second plug groove; the second plug groove communicates with the cavity of the main body; the second baffle is provided with a third stop bar to limit the wafer on the plug.

4. The spin-drying rack according to claim 3, characterized in that, The base, the first baffle, the second baffle, the first baffle strip, and the second baffle strip are all made of PP material.

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