Device for measuring boundary dimension of monocrystalline silicon round rod

Abstract

The utility model provides a monocrystalline silicon round rod boundary dimension measuring device, which relates to the technical field of measuring equipment, and comprises a machine body, one side of the machine body is provided with a main laser emission head and an auxiliary laser emission head, and the laser emission heads are used for irradiating and measuring an object; the adjusting device is arranged on the adjusting device, the adjusting device can freely adjust the installation height of the machine body so that laser rays generated by the main laser emitting head can effectively irradiate the surface of the monocrystalline silicon round rod, the adjusting device comprises a sliding rail, the sliding rail is detachably installed on the machine body through an assembling assembly, and the assembling assembly is arranged on the sliding rail. According to the utility model, the installation height of the machine body can be flexibly adjusted by arranging the adjusting device, so that the situation that the distance between the machine body and a measured object is relatively long after the machine body is installed, the object is separated from the irradiation range of laser rays, and the normal measurement of a monocrystalline silicon round rod is influenced is reduced, and the use flexibility and convenience of the machine body are improved.

Description

Technical Field

[0001] This utility model relates to the field of measuring equipment technology, and in particular to a device for measuring the external dimensions of a single crystal silicon round rod. Background Technology

[0002] Monocrystalline silicon rods are cylindrical crystal materials made from high-purity monocrystalline silicon through specific processes. They are one of the core basic materials in industries such as semiconductors and photovoltaics. Their atomic arrangement has a high degree of order and periodicity, and this crystal structure gives them excellent electrical and optical properties. During the production process of monocrystalline silicon rods, it is necessary to use measuring equipment to measure their external dimensions.

[0003] Existing single-crystal silicon rod dimensional measurement equipment involves mounting the main body on a transmission device, then placing the single-crystal silicon rod on the transmission device for transport to the measurement range of the main body. A main laser emitter or auxiliary laser emitter emits a laser beam at a fixed angle to irradiate the surface of the single-crystal silicon rod, forming a laser line or spot. Subsequently, due to height differences on the surface of the single-crystal silicon rod, the reflected light undergoes a positional shift. This reflected light is captured and imaged by an optical receiving system, simultaneously converted into an electrical signal, and the offset of the reflected light spot on the sensor is recorded. Then, based on the laser emission angle, the optical parameters of the receiving system, and the offset, the spatial height coordinates of the irradiated point are calculated using trigonometric relationships. Simultaneously, continuous scanning along the X-axis is achieved through the uniform movement of the single-crystal silicon rod or laser head, acquiring coordinate data of a large number of discrete points. Finally, data processing software fits and analyzes these points to generate a two-dimensional contour or three-dimensional shape of the single-crystal silicon rod surface, and outputs quantitative parameters such as dimensions and form and position errors, completing the dimensional measurement of the single-crystal silicon rod.

[0004] However, since the main body is mostly fixed directly to the transmission equipment with screws, it may be that the distance between the main body and the object being measured is too far after installation, causing the object to fall out of the laser line irradiation range of the laser emitter and affecting the normal measurement of single crystal silicon rods. Utility Model Content

[0005] The technical problem this invention aims to solve is that, since the main body is mostly fixed directly to the transmission equipment with screws, the distance between the main body and the object being measured may be too far after installation, causing the object to fall out of the laser beam irradiation range of the laser emitter and affecting the normal measurement of single-crystal silicon rods.

[0006] The technical solution adopted by this utility model to solve its technical problem is: a single crystal silicon rod external dimension measuring device, comprising: a body, wherein a main laser emitting head and an auxiliary laser emitting head are provided on one side of the body, wherein the laser emitting head is used to irradiate and measure the object; and an adjustment device, wherein the adjustment device is provided on the adjustment body, wherein the adjustment device can freely adjust the installation height of the body so that the laser line generated by the main laser emitting head can effectively irradiate the surface of the single crystal silicon rod.

[0007] Preferably, the adjusting device includes: a slide rail, which is detachably mounted on the machine body via an assembly assembly, wherein a screw is rotatably connected to the inner wall of the slide rail via a bearing; a perforated rod, the surface of which is slidably connected to the inner wall of the slide rail, wherein the inner wall of the perforated rod is threadedly connected to the surface of the screw, and a first bolt is threadedly connected to the inner wall of the perforated rod; and a mounting plate, which is rotatably mounted on the perforated rod via a bearing, wherein a circular hole plate is fixedly connected to one side of the mounting plate, and the first bolt is screwed into the perforated rod and the circular hole plate to fix the position of the mounting plate.

[0008] The effects achieved by the above components are as follows: By setting an adjustment device, the mounting plate is first manually rotated, causing it to rotate along the inside of the hole rod. This causes the mounting plate to rotate, and when the mounting plate rotates to a position parallel or perpendicular to the machine body, the inner wall of the hole plate coincides with the inner wall of any hole on the hole rod. At this point, the first bolt is screwed into the hole rod and the hole plate to fix the position of the mounting plate, completing the angle adjustment of the mounting plate. Then, the mounting plate is attached to the surface of the transmission equipment and fixed with screws, so that the machine body is fixedly installed on the designated position of the transmission equipment through the mounting plate. At this point, the screw is manually rotated, causing it to move up and down along the inside of the hole rod. As the screw moves, it drives the slide rail to move up and down, which in turn drives the machine body to move up and down. This causes the machine body to move the main laser emitter and the auxiliary laser emitter, thereby completing the height adjustment of the machine body. This reduces the distance between the machine body and the object being measured after installation, preventing the object from falling out of the laser beam's irradiation range and affecting the normal measurement of the single crystal silicon rod. This improves the installation flexibility and ease of use of the machine body.

[0009] Preferably, one end of the screw is fixedly connected to a screw block, wherein the surface of the screw block is provided with multiple anti-slip protrusions.

[0010] The effect achieved by the above components is that by setting the screw block, the contact area of ​​the screw can be increased, and the convenience of manually turning the screw can be improved.

[0011] Preferably, the interior of the perforated rod is provided with multiple reinforcing ribs, wherein the reinforcing ribs are made of nickel alloy.

[0012] The effect achieved by the above components is that by setting reinforcing ribs, the strength of the hole rod itself can be increased, reducing the possibility of deformation or breakage of the hole rod under stress.

[0013] Preferably, a magnetic strip is fixed to one side of the mounting plate.

[0014] The effect achieved by the above components is as follows: by setting up magnetic strips, personnel can use the magnetic strips to attach and fix the mounting plate to the adsorbable metal surface on the transmission equipment, so that the machine can be freely and flexibly fixed in a designated position on the transmission equipment, and can be easily moved, further improving the flexibility of the machine's use.

[0015] Preferably, a rubber block is fixed to the side of the mounting plate away from the magnet strip, wherein the surface of the rubber block is conical.

[0016] The effect achieved by the above components is that by setting up rubber blocks, the rubber blocks can separate the mounting plate from the surface of the machine body, reducing the possibility of the mounting plate colliding with the surface of the machine body and causing damage during the retraction and repositioning process.

[0017] Preferably, the assembly component includes: a rectangular tube fixed to the machine body, wherein a second bolt is threaded onto the inner wall of the rectangular tube; and an L-shaped rod fixed to the slide rail, wherein the L-shaped rod is placed inside the rectangular tube and fixed by the second bolt.

[0018] The effect achieved by the above components is as follows: by setting up the assembly components, the slide rail is first moved manually to drive the L-shaped rod to move. When the L-shaped rod moves to the position where it is fully inserted into the rectangular tube, the L-shaped rod is placed in the groove opened on the machine body, so that the inner wall of the hole on the L-shaped rod coincides with the inner wall of the hole on the rectangular tube. At this time, the second bolt is screwed into the rectangular tube and the L-shaped rod to fix the position of the L-shaped rod and the slide rail, thereby completing the assembly and fixation between the slide rail and the machine body. At the same time, the slide rail can be disassembled later, improving the flexibility of use and the convenience of maintenance of the adjustment device.

[0019] Preferably, a positioning rod is fixed to one side of the L-shaped rod, and a circular groove is formed in the inner wall of the groove of the machine body, wherein the positioning rod is placed inside the circular groove to assist in limiting the L-shaped rod.

[0020] The effect achieved by the above components is as follows: by setting the positioning rod, the positioning rod can be placed inside the circular groove to assist in limiting the L-shaped rod, reducing the wobbling of the side away from the rectangular cylinder after the L-shaped rod enters the groove on the machine body, which would affect the stability of the slide rail installation.

[0021] The beneficial effects of this utility model are:

[0022] The installation height of the machine can be flexibly adjusted by setting an adjustment device, which reduces the distance between the machine and the object being measured after installation, thus preventing the object from falling out of the laser beam's irradiation range and affecting the normal measurement of the single crystal silicon rod. This improves the flexibility and convenience of using the machine. Attached Figure Description

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0024] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0025] Figure 2 This is a three-dimensional structural diagram of the mounting plate of this utility model;

[0026] Figure 3 This is a three-dimensional structural diagram of the hole rod of this utility model;

[0027] Figure 4 This is a three-dimensional structural diagram of the slide rail of this utility model;

[0028] Figure 5 This is a three-dimensional structural diagram of the rectangular tube of this utility model.

[0029] Legend: 1. Body; 2. Main laser emitter; 3. Auxiliary laser emitter; 4. Adjustment device; 41. Slide rail; 42. Screw; 43. Tightening block; 44. Hole rod; 45. Mounting plate; 46. Circular hole plate; 47. First bolt; 48. Rubber block; 49. Reinforcing rib; 410. Magnet strip; 5. Assembly component; 51. Rectangular cylinder; 52. Second bolt; 53. Circular groove; 54. L-shaped rod; 55. Positioning rod. Detailed Implementation

[0030] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0031] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] Figure 1-5The device for measuring the external dimensions of a single-crystal silicon rod shown includes: a body 1, on one side of which a main laser emitter 2 and an auxiliary laser emitter 3 are provided, wherein the laser emitter is used to irradiate and measure the object; and an adjustment device 4, which is provided on the body and can freely adjust the installation height of the body 1 so that the laser line generated by the main laser emitter 2 can effectively irradiate the surface of the single-crystal silicon rod.

[0033] Figure 2 , Figure 3 and Figure 4 The adjustment device 4 shown includes: a slide rail 41, which is detachably mounted on the machine body 1 via an assembly assembly 5, wherein the inner wall of the slide rail 41 is rotatably connected to a screw 42 via a bearing; a perforated rod 44, the surface of which is slidably connected to the inner wall of the slide rail 41, wherein the inner wall of the perforated rod 44 is threadedly connected to the surface of the screw 42, and wherein a first bolt 47 is threadedly connected to the inner wall of the perforated rod 44; and a mounting plate 45, which is rotatably mounted on the perforated rod 44 via a bearing, wherein a circular hole plate 46 is fixedly connected to one side of the mounting plate 45, wherein the first bolt 47 is screwed into the perforated rod 44 and the circular hole plate 46 to fix the position of the mounting plate 45. By setting the adjustment device 4, the mounting plate 45 is first manually rotated, causing the mounting plate 45 to rotate along the inside of the perforated rod 44, thereby causing the mounting plate 45 to drive the circular hole plate 46 to rotate. When the mounting plate 45 rotates to a position parallel or perpendicular to the machine body 1, the inner wall of the circular hole plate 46 is connected to the hole. When the inner walls of any hole on the hole rod 44 overlap, the first bolt 47 is screwed into the hole rod 44 and the round hole plate 46 to fix the position of the mounting plate 45, thus completing the angle adjustment of the mounting plate 45. The mounting plate 45 is then attached to the surface of the transmission equipment and fixed with screws, so that the machine body 1 is fixedly installed in the designated position on the transmission equipment through the mounting plate 45. At this time, the screw 42 is manually rotated, so that the screw 42 moves up and down along the inside of the hole rod 44, so that the screw 42 moves up and down while driving the slide rail 41, so that the slide rail 41 drives the machine body 1 to move up and down, so that the machine body 1 drives the main laser emitter 2 and the auxiliary laser emitter 3 to move, thereby completing the height adjustment of the machine body 1. This reduces the distance between the machine body 1 and the object being measured after installation, which could cause the object to fall out of the laser beam's irradiation range and affect the normal measurement of the single crystal silicon rod. This improves the installation flexibility and ease of use of the machine body 1.

[0034] Figure 2 , Figure 3 and Figure 4One end of the screw 42 shown is fixed with a screw block 43. The surface of the screw block 43 is provided with multiple anti-slip protrusions. By setting the screw block 43, the contact area of ​​the screw 42 can be increased, and the convenience of manually turning the screw 42 can be improved. The interior of the hole rod 44 is provided with multiple reinforcing ribs 49. The reinforcing ribs 49 are made of nickel alloy. By setting the reinforcing ribs 49, the strength of the hole rod 44 can be increased, and the deformation or breakage of the hole rod 44 after being subjected to force can be reduced.

[0035] Figure 2 , Figure 3 and Figure 4 A magnetic strip 410 is fixed to one side of the mounting plate 45. By setting the magnetic strip 410, personnel can use the magnetic strip 410 to attach and fix the mounting plate 45 to the adsorbable metal surface of the transmission equipment. This allows the machine body 1 to be fixed freely and flexibly at a designated position on the transmission equipment, while also facilitating movement and further improving the usability of the machine body 1. A rubber block 48 is fixed to the side of the mounting plate 45 away from the magnetic strip 410. The surface of the rubber block 48 is conical. By setting the rubber block 48, the rubber block 48 can separate the mounting plate 45 from the surface of the machine body 1, reducing the possibility of the mounting plate 45 colliding with the surface of the machine body 1 and causing damage during retraction, reset, and movement.

[0036] Figure 4 and Figure 5 The assembly component 5 shown includes: a rectangular tube 51, which is fixed to the machine body 1, wherein the inner wall of the rectangular tube 51 is threaded with a second bolt 52; and an L-shaped rod 54, which is fixed to the slide rail 41. The L-shaped rod 54 is placed inside the rectangular tube 51 and fixed by the second bolt 52. By setting the assembly component 5, the slide rail 41 is first manually moved to move the L-shaped rod 54. When the L-shaped rod 54 moves to the position where it is fully inserted into the rectangular tube 51, the L-shaped rod 54 is placed in the groove opened on the machine body 1, so that the inner wall of the hole on the L-shaped rod 54 coincides with the inner wall of the hole on the rectangular tube 51. At this time, the second bolt 52 is screwed into the rectangular tube 51 and the L-shaped rod 54 with a tool to fix the position of the L-shaped rod 54 and the slide rail 41, thereby completing the assembly and fixation between the slide rail 41 and the machine body 1. At the same time, the slide rail 41 can be disassembled later, improving the flexibility of use and the convenience of maintenance of the adjustment device 4.

[0037] Figure 4 and Figure 5A positioning rod 55 is fixed to one side of the L-shaped rod 54 shown. A circular groove 53 is opened in the inner wall of the groove of the machine body 1. The positioning rod 55 is placed inside the circular groove 53 to assist in limiting the L-shaped rod 54. By setting the positioning rod 55, the positioning rod 55 can be placed inside the circular groove 53 to assist in limiting the L-shaped rod 54, reducing the wobbling of the side away from the rectangular tube 51 after the L-shaped rod 54 enters the groove on the machine body 1, which would affect the installation stability of the slide rail 41.

[0038] Working Principle: During measurement, the main body 1 is first installed on the transmission equipment, and then the monocrystalline silicon rod is placed on the transmission equipment for transport, so that it is transported to the measurement range of the main body 1. The main laser emitter 2 or the auxiliary laser emitter 3 emits a linear laser at a fixed angle to irradiate the surface of the monocrystalline silicon rod, forming a laser line or spot. Then, due to the height difference on the surface of the monocrystalline silicon rod, the reflected light is offset. This reflected light is captured and imaged by the optical receiving system, and is converted into an electrical signal, recording the offset of the reflected light spot on the sensor. Subsequently, based on the laser emission angle, the optical parameters of the receiving system, and the offset, the spatial height coordinates of the irradiated point are calculated through trigonometric relationships. At the same time, continuous scanning along the X-axis is achieved by the uniform movement of the monocrystalline silicon rod or the laser head, acquiring a large number of discrete point coordinate data. Finally, the data processing software fits and analyzes these points to generate a two-dimensional contour or three-dimensional shape of the surface of the monocrystalline silicon rod, and outputs quantitative parameters such as size and shape and position error, completing the measurement of the external dimensions of the monocrystalline silicon rod.

[0039] First, manually move the slide rail 41 to move the L-shaped rod 54. When the L-shaped rod 54 moves to the position where it is fully inserted into the rectangular tube 51, the L-shaped rod 54 is placed in the groove opened on the machine body 1, so that the inner wall of the hole on the L-shaped rod 54 coincides with the inner wall of the hole on the rectangular tube 51. At this time, use a tool to screw the second bolt 52 into the rectangular tube 51 and the L-shaped rod 54 to fix the L-shaped rod 54 and the slide rail 41 in position, thereby completing the assembly and fixation between the slide rail 41 and the machine body 1.

[0040] At this point, manually rotate the mounting plate 45 so that it rotates along the inside of the hole rod 44, causing the mounting plate 45 to drive the circular hole plate 46 to rotate. When the mounting plate 45 rotates to a position parallel or perpendicular to the body 1, the inner wall of the circular hole plate 46 coincides with the inner wall of any hole on the hole rod 44. At this point, use a tool to screw the first bolt 47 into the hole rod 44 and the circular hole plate 46 to fix the position of the mounting plate 45, completing the angle adjustment of the mounting plate 45. Then, attach the mounting plate 45 to the surface of the transmission equipment and fix it with screws, so that the body 1 is fixedly installed on the transmission equipment at the designated position through the mounting plate 45. At this point, manually rotate the screw 42 so that the screw 42 moves up and down along the inside of the hole rod 44, causing the screw 42 to drive the slide rail 41 to move up and down, causing the slide rail 41 to drive the body 1 to move up and down, causing the body 1 to drive the main laser emitter 2 and the auxiliary laser emitter 3 to move, thereby completing the height adjustment of the body 1.

[0041] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A device for measuring the external dimensions of a single-crystal silicon round rod, characterized in that it comprises: The machine body (1) is provided with a main laser emitter (2) and an auxiliary laser emitter (3) on one side, wherein the laser emitter is used to irradiate and measure objects; Adjustment device (4), the adjustment device (4) is set on the adjustment, wherein the adjustment device (4) can freely adjust the installation height of the body (1) so that the laser line generated by the main laser emitter (2) can effectively irradiate the surface of the single crystal silicon rod.

2. The single-crystal silicon round rod external dimension measuring device according to claim 1, characterized in that: The adjustment device (4) includes a slide rail (41), which is detachably mounted on the body (1) via an assembly assembly (5), wherein the inner wall of the slide rail (41) is rotatably connected to a screw (42) via a bearing. Hole rod (44), the surface of the hole rod (44) is slidably connected to the inner wall of the slide rail (41), wherein the inner wall of the hole rod (44) is threadedly connected to the surface of the screw (42), wherein the inner wall of the hole rod (44) is threadedly connected to the first bolt (47). Mounting plate (45), which is rotatably mounted on hole rod (44) by bearing, wherein a round hole plate (46) is fixedly connected to one side of mounting plate (45), wherein a first bolt (47) is screwed into the hole rod (44) and the round hole plate (46) to fix the position of mounting plate (45).

3. The single-crystal silicon rod external dimension measuring device according to claim 2, characterized in that: One end of the screw (42) is fixedly connected to a screw block (43), wherein the surface of the screw block (43) is provided with multiple anti-slip protrusions.

4. The single-crystal silicon rod external dimension measuring device according to claim 2, characterized in that: The perforated rod (44) has multiple reinforcing ribs (49) inside, and the reinforcing ribs (49) are made of nickel alloy.

5. The single-crystal silicon rod external dimension measuring device according to claim 2, characterized in that: A magnet strip (410) is fixed to one side of the mounting plate (45).

6. The single-crystal silicon rod external dimension measuring device according to claim 5, characterized in that: A rubber block (48) is fixed to the side of the mounting plate (45) away from the magnet strip (410), wherein the surface of the rubber block (48) is conical.

7. The single-crystal silicon round rod external dimension measuring device according to claim 2, characterized in that: The assembly component (5) includes: a rectangular tube (51), which is fixed to the body (1), wherein the inner wall of the rectangular tube (51) is threaded with a second bolt (52). L-shaped rod (54), which is fixedly connected to slide rail (41), wherein the L-shaped rod (54) is placed inside rectangular tube (51) and fixed by second bolt (52).

8. The single-crystal silicon rod external dimension measuring device according to claim 7, characterized in that: A positioning rod (55) is fixed to one side of the L-shaped rod (54), and a circular groove (53) is provided on the inner wall of the groove of the body (1), wherein the positioning rod (55) is placed inside the circular groove (53) to assist in limiting the L-shaped rod (54).

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