An X-ray non-destructive testing device

Abstract

This utility model belongs to the field of X-ray nondestructive testing technology, and discloses an X-ray nondestructive testing device. The X-ray nondestructive testing device includes a beam-limiting mechanism, a light tube mechanism, and a detector. The beam-limiting mechanism includes a fixed base, a drive assembly, and a beam beam plate. The drive assembly includes a drive component, a driving gear, and a driven gear. The drive component is fixed to the fixed base, and the driven gear is rotatably mounted on the fixed base and meshes with the driving gear. The fixed base has a clearance hole, and the driven gear has a mounting hole communicating with the clearance hole. The beam beam plate is detachably connected to the mounting hole and has a through hole. When the driven gear rotates, the position of the through hole relative to the fixed base changes. The light tube mechanism includes a radiation source. The emitting end of the radiation source is positioned opposite to the through hole and can be aligned with the workpiece to be inspected. The emitting end of the radiation source emits X-rays, and the through hole allows the X-rays to pass through. This utility model can shield sensitive electronic components from X-ray radiation and achieve multi-directional damage detection of the workpiece to be inspected.

Description

Technical Field

[0001] This utility model relates to the field of X-ray nondestructive testing technology, and in particular to an X-ray nondestructive testing device. Background Technology

[0002] Industrial CT (Computed Tomography) inspection uses computed tomography technology to scan the workpiece to obtain information about its internal structure and defects. X-rays are high-energy electromagnetic waves with strong penetrating power, high energy, and short wavelength, making them suitable for industrial CT inspection of workpieces.

[0003] like Figure 1 As shown, in existing X-ray nondestructive testing devices, when inspecting the workpiece 100, the X-ray source of the light tube mechanism 2 emits X-rays. The X-rays pass through the workpiece 100 and are absorbed or scattered by different materials inside the workpiece 100, and are then received by the detector 3 to obtain the damage status of the workpiece 100. However, because the beam field formed by the X-ray emitted by the X-ray source covers the entire area, the coverage range is... Figure 1 The area between the two first boundaries 300 is relatively large, causing continuous radiation damage to sensitive electronic components 200 other than the workpiece 100 being inspected. Specifically, X-rays can induce atomic ionization in sensitive electronic components 200 (such as semiconductor sensors, optical glass, and MOS devices), leading to phenomena such as lattice defects, material structure degradation, threshold voltage drift, and increased leakage current. This manifests as a combination of damage effects, including increased dark current noise in sensors, yellowing and embrittlement of optical components, and deterioration of transistor electrical performance. Utility Model Content

[0004] The purpose of this invention is to provide an X-ray non-destructive testing device that can shield the radiation of sensitive electronic components in the testing area and realize multi-directional damage detection of the workpiece to be tested.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] An X-ray nondestructive testing device, comprising:

[0007] A beam-limiting mechanism includes a fixed base, a drive assembly, and a beam-spotting plate. The drive assembly includes a drive member, a driving gear, and a driven gear. The drive member is fixed to the fixed base and drives the driving gear to rotate. The driven gear is rotatably mounted on the fixed base and meshes with the driving gear. The fixed base has a clearance hole, and the driven gear has a mounting hole communicating with the clearance hole. The beam-spotting plate is detachably connected to the mounting hole and has a through hole. When the driven gear rotates, the position of the through hole relative to the fixed base changes.

[0008] A light tube mechanism is fixed to the bottom of the mounting base. The light tube mechanism includes a radiation source. The emitting end of the radiation source is arranged opposite to the through hole and can be aligned with the workpiece to be inspected. The emitting end of the radiation source is used to emit X-rays, and the through hole is used to allow X-rays to pass through.

[0009] A detector is used to receive X-rays and convert them into electrical signals.

[0010] In some possible implementations, the rotation center of the beam beam coincides with the rotation center of the driven gear, and the through hole is a rectangular hole.

[0011] In some possible implementations, the X-ray nondestructive testing device further includes a moving mechanism comprising an X-axis assembly, a Y-axis assembly, and a Z-axis assembly. The X-axis assembly can drive the Y-axis assembly to move along a first direction, the Y-axis assembly can drive the Z-axis assembly to move along a second direction, and the Z-axis assembly can drive the optical tube mechanism to move along a third direction. The first direction, the second direction, and the third direction are perpendicular to each other.

[0012] In some possible implementations, the mounting hole is a stepped hole, the beam beam overlaps the stepped surface of the stepped hole, and the beam limiting mechanism further includes a first screw that passes through the beam beam and is threadedly connected to the driven gear.

[0013] In some possible implementations, a bearing is provided between the fixed base and the driven gear.

[0014] In some possible implementations, the mounting base is provided with a stepped groove, the bearing is sleeved in the stepped groove, and the drive assembly further includes a pressure plate, which is detachably connected to the top of the mounting base and can abut the bearing against the stepped groove.

[0015] In some possible implementations, the mounting hole has a recessed groove at one end near the bearing, through which the driven gear engages with the bearing.

[0016] In some possible implementations, the restraint mechanism further includes a proximity switch and a sensor. The proximity switch is disposed on the fixed base, and the sensor is disposed on the driven gear. The sensor can trigger the proximity switch so that the proximity switch can detect the rotation angle of the driven gear. The proximity switch is communicatively connected to the drive unit to control the start and stop of the drive unit.

[0017] In some possible implementations, the drive component is surrounded by a first protective cover, which is fixed to the mounting base.

[0018] In some possible implementations, the mounting base includes a base plate and at least two support columns, the at least two support columns being fixed to the light tube mechanism at intervals, and the base plate being fixed to the at least two support columns.

[0019] The beneficial effects of this utility model are:

[0020] The X-ray non-destructive testing device provided by this utility model includes a beam-limiting mechanism, a light tube mechanism, and a detector. By setting a beam-beam plate, radiation from sensitive electronic components within the detection area is shielded. Through holes are provided on the beam-beam plate, and the emitting end of the X-ray source is positioned opposite the through holes and aligned with the workpiece to be inspected. This allows X-rays to pass through the through holes and be emitted to the workpiece for damage detection. When X-rays are emitted from the emitting end of the X-ray source towards the workpiece, some of the X-rays are shielded by the beam-beam plate after passing through a clearance hole, thus shielding the radiation from sensitive electronic components within the detection area. The remaining portion passes through the through holes and is emitted to the workpiece, where it is received by the detector and converted into an electrical signal for damage detection. Furthermore, a driving component drives a drive gear to rotate, causing the position of the through holes relative to the fixed seat to change, enabling multi-directional damage detection of the workpiece. Additionally, the beam-beam plate is detachably connected to the mounting hole, facilitating maintenance and allowing for the replacement of beam-beam plates with through holes of different sizes to meet the inspection needs of workpieces of different sizes. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the detection principle of an existing X-ray non-destructive testing device;

[0022] Figure 2 This is a schematic diagram of the structure of the X-ray non-destructive testing device (detector not shown) provided by this utility model;

[0023] Figure 3 This is a schematic diagram of the beam-limiting mechanism involved in this utility model;

[0024] Figure 4 This is a cross-sectional view of the beam-limiting mechanism provided by this utility model;

[0025] Figure 5 This is a schematic diagram of the detection principle of the X-ray non-destructive testing device provided by this utility model.

[0026] In the picture:

[0027] 1. Beam limiting mechanism; 11. Fixing base; 111. Clearance hole; 112. Step groove; 113. Base plate; 114. Support column; 12. Drive assembly; 121. Drive component; 122. Drive gear; 123. Driven gear; 1231. Mounting hole; 1232. Groove; 1233. Fixing hole; 124. Bearing; 125. Pressure plate; 126. Mounting plate; 13. Beam beam plate; 131. Through hole; 14. Proximity switch; 15. Sensor; 16. First protective cover; 17. Second protective cover; 2. Optical tube mechanism; 3. Detector;

[0028] 100, Workpiece to be inspected; 200, Sensitive electronic component; 300, First boundary; 400, Second boundary. Detailed Implementation

[0029] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0030] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0033] like Figures 2 to 5 As shown, this utility model provides an X-ray non-destructive testing device, adaptable to various scenarios such as semiconductor packaging inspection and aerospace composite material analysis, which can reduce the radiation received by sensitive electronic components 200 by 90%. The X-ray non-destructive testing device includes a beam limiting mechanism 1, a light tube mechanism 2, and a detector 3. The beam limiting mechanism 1 includes a fixed base 11, a driving assembly 12, and a beam beam plate 13. The driving assembly 12 includes a driving member 121, a driving gear 122, and a driven gear 123. The driving member 121 is fixed to the fixed base 11. Specifically, the driving member 121 is fixed to the fixed base 11 through a mounting plate 126 and is used to drive the driving gear 122 to rotate. The driven gear 123 is rotatably disposed on the fixed base 11 and meshes with the driving gear 122. The fixed base 11 is provided with a clearance hole 111, and the driven gear 123 is provided with a clearance hole 111. A mounting hole 1231 communicating with the clearance hole 111 is provided. The beam beam 13 is detachably connected to the mounting hole 1231. The beam beam 13 has a through hole 131. When the driven gear 123 rotates, the position of the through hole 131 relative to the fixed base 11 changes. The light tube mechanism 2 is fixed to the bottom of the fixed base 11. The light tube mechanism 2 includes a radiation source. The emitting end of the radiation source is arranged opposite to the through hole 131 and can be aligned with the workpiece 100 to be inspected. The emitting end of the radiation source is used to emit X-rays, and the through hole 131 is used to allow X-rays to pass through. The detector 3 is used to receive X-rays and convert them into electrical signals. Optionally, the beam beam 13 is made of lead-antimony alloy.

[0034] By setting up a beam beam 13, the radiation from the sensitive electronic components 200 in the detection area is shielded. A through-hole 131 is provided on the beam beam 13, and the emitting end of the X-ray source is positioned opposite the through-hole 131 and aligned with the workpiece 100 to be inspected. This allows X-rays to pass through the through-hole 131 and be emitted to the workpiece 100 for damage detection. When the emitting end of the X-ray source emits X-rays towards the workpiece 100, part of the X-ray is shielded by the beam beam 13 after passing through the clearance hole 111, thus shielding the radiation from the sensitive electronic components 200 in the detection area. A portion passes through the through-hole 131 and is emitted to the workpiece 100, covering the area between the two second boundaries 400. The detector 3 receives the X-rays and converts them into electrical signals for damage detection of the workpiece 100. Furthermore, the drive gear 122 is driven by the drive component 121 to rotate the driven gear 123, causing the position of the through hole 131 relative to the fixed base 11 to change. This, in turn, changes the position of the through hole 131 relative to the workpiece 100 to be inspected, ensuring that the emitting end of the X-ray source is always positioned relative to and aligned with the through hole 131, thus enabling multi-directional damage detection of the workpiece 100. Additionally, the beam plate 13 is detachably connected to the mounting hole 1231, facilitating maintenance of the beam plate 13 and allowing for replacement with beam plates 13 of different sized through holes 131 to meet the inspection requirements of workpieces 100 of different sizes. Furthermore, the driven gear 123 is rotatably mounted on the fixed base 11, reducing the size of the device in the height direction and minimizing space occupation.

[0035] Optionally, the mounting base 11 includes a base plate 113 and at least two support columns 114, with the at least two support columns 114 fixed at intervals to the light tube mechanism 2, and the base plate 113 fixed to the at least two support columns 114. This configuration is simple and saves space. In this embodiment, four support columns 114 are provided, and the support columns 114 are vertically fixed to the light tube mechanism 2.

[0036] Optionally, in this embodiment, the rotation center of the beam slant 13 coincides with the rotation center of the driven gear 123. This arrangement simplifies the structure, facilitates manufacturing, and makes it easy to measure the rotation angle of the driven gear 123. In other embodiments, the rotation center of the beam slant 13 can be offset from the rotation center of the driven gear 123, ensuring that the position of the through hole 131 relative to the fixed seat 11 changes when the driven gear 123 rotates. Optionally, in this embodiment, the through hole 131 is a rectangular hole. By making the through hole 131 a rectangular hole, whether the centerline of the rectangular hole coincides with the rotation center of the driven gear 123 or not, the position of the through hole 131 relative to the fixed seat 11 will change when the driven gear 123 rotates. In other embodiments, the through hole 131 can also be a circular hole.

[0037] Optionally, in this embodiment, the X-ray nondestructive testing device further includes a moving mechanism, which comprises an X-axis assembly, a Y-axis assembly, and a Z-axis assembly. The X-axis assembly drives the Y-axis assembly to move along a first direction, i.e., the X-axis direction; the Y-axis assembly drives the Z-axis assembly to move along a second direction, i.e., the Y-axis direction; and the Z-axis assembly drives the optical tube mechanism 2 to move along a third direction, i.e., the Z-axis direction. The first, second, and third directions are perpendicular to each other. By setting the moving mechanism to drive the optical tube mechanism 2 to move, the damage detection range of the workpiece 100 under inspection is improved, so as to realize damage detection of the workpiece 100 in more directions. The X-axis assembly, Y-axis assembly, and Z-axis assembly in this embodiment are all mature technologies in related fields, and will not be described in detail in this embodiment.

[0038] Optionally, in this embodiment, the mounting hole 1231 is a stepped hole, and the beam-spotting plate 13 overlaps the stepped surface of the stepped hole. The beam-limiting mechanism 1 also includes a first screw, which passes through the beam-spotting plate 13 and is threadedly connected to the driven gear 123. Through the above arrangement, the size of the device in the height direction is reduced, the space occupied is reduced, and the beam-spotting plate 13 is firmly fixed and easy to disassemble.

[0039] Optionally, a bearing 124 is provided between the fixed base 11 and the driven gear 123. This arrangement reduces friction between the fixed base 11 and the driven gear 123, making the rotation of the driven gear 123 smoother. In this embodiment, the bearing 124 is a precision angular contact ball bearing, which can simultaneously withstand radial and axial loads and has high rotational accuracy. Optionally, the drive component 121 is a servo motor. By using a precision angular contact ball bearing to support the driven gear 123 and cooperating with a servo motor, the backlash of the drive assembly 12 is small, the positioning accuracy is high, and thus the detection accuracy can be improved.

[0040] Optionally, the fixed base 11 is provided with a stepped groove 112, and the bearing 124 is sleeved in the stepped groove 112. The drive assembly 12 also includes a pressure plate 125, which is detachably connected to the top of the fixed base 11 and can abut the bearing 124 against the stepped groove 112. The bearing 124 is limited and installed on the fixed base 11 by the stepped groove 112 and the pressure plate 125, realizing the axial positioning of the inner ring of the bearing 124. Optionally, the mounting hole 1231 is recessed with a groove 1232 at one end near the bearing 124, and the driven gear 123 is engaged with the bearing 124 through the groove 1232. By providing the groove 1232, the circumferential and axial positioning of the driven gear 123 is realized, which facilitates the installation of the driven gear 123. Furthermore, in order to ensure the stability of the driven gear 123 during rotation, the drive assembly 12 also includes a fixing member, which can fix the driven gear 123 to the bearing 124. The driven gear 123 is fixed to the bearing 124 by a fastener, thus locking the driven gear 123. Specifically, the fastener is a combination bolt with an anti-loosening washer. The combination bolt with anti-loosening washer in this embodiment is a mature technology in the relevant field, and will not be described in detail here. In addition, the drive assembly 12 also includes a flat key and a set screw, and the drive gear 122 is connected to the output shaft of the servo motor through the flat key and the set screw.

[0041] Optionally, a first protective cover 16 is provided around the drive component 121, and the first protective cover 16 is fixed to the mounting base 11. By providing the first protective cover 16, X-ray radiation to the drive component 121 is avoided, ensuring the reliability of the drive component 121. Specifically, the first protective cover 16 has a U-shaped structure, and the opening is oriented away from the driven gear 123. This arrangement avoids radiation while facilitating heat dissipation and installation of the drive component 121.

[0042] Optionally, the limiting mechanism 1 further includes a proximity switch 14 and a sensor 15. The proximity switch 14 is disposed on the fixed base 11, and the sensor 15 is disposed on the driven gear 123. The sensor 15 can trigger the proximity switch 14, enabling the proximity switch 14 to detect the rotation angle of the driven gear 123. The proximity switch 14 is communicatively connected to the drive member 121 to control the start and stop of the drive member 121. By setting the proximity switch 14 and the sensor 15, the rotation angle of the driven gear 123 can be controlled, thereby improving the detection accuracy. The drive member 121 drives the driven gear 123 to rotate. When the proximity switch 14 senses that the sensor 15 has rotated to a set angle, the proximity switch 14 controls the drive member 121 to stop running, causing the driven gear 123 to stop rotating, so that the workpiece 100 to be detected can be detected.

[0043] Specifically, the proximity switch 14 is a Hall effect proximity switch, and the sensing element 15 is a metal sheet. This configuration allows for precise control of the rotation angle of the beam-spotting plate 13. Optionally, the driven gear 123 has a fixing hole 1233, which is a stepped hole. The sensing element 15 is attached to the stepped surface of the stepped hole. The beam-limiting mechanism 1 also includes a second screw, which passes through the sensing element 15 and is threadedly connected to the driven gear 123. Furthermore, the top surface of the sensing element 15 is flush with the top surface of the driven gear 123. This configuration facilitates the installation of the sensing element 15, reduces space occupation, and ensures a secure fixation of the sensing element 15. In addition, a second protective cover 17 is provided around the proximity switch 14 to prevent X-ray radiation from reaching the proximity switch 14 and ensure the reliability of the proximity switch 14. Specifically, the second protective cover 17 has a U-shaped structure, and its opening faces away from the beam-spotting plate 13.

[0044] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. An X-ray non-destructive testing device, characterized in that, include: The beam limiting mechanism (1) includes a fixed base (11), a drive assembly (12), and a beam beam plate (13). The drive assembly (12) includes a drive member (121), a drive gear (122), and a driven gear (123). The drive member (121) is fixed to the fixed base (11) and is used to drive the drive gear (122) to rotate. The driven gear (123) is rotatably disposed on the fixed base (11) and meshes with the drive gear (122). The fixed base (11) is provided with a clearance hole (111). The driven gear (123) is provided with a mounting hole (1231) communicating with the clearance hole (111). The beam beam plate (13) is detachably connected to the mounting hole (1231). The beam beam plate (13) is provided with a through hole (131). When the driven gear (123) rotates, the position of the through hole (131) relative to the fixed base (11) changes. The light tube mechanism (2) is fixed to the bottom of the fixed base (11). The light tube mechanism (2) includes a radiation source. The emitting end of the radiation source is arranged opposite to the through hole (131) and can be aligned with the workpiece (100) to be inspected. The emitting end of the radiation source is used to emit X-rays, and the through hole (131) is used to allow X-rays to pass through. The detector (3) is used to receive X-rays and convert them into electrical signals.

2. The X-ray nondestructive testing device according to claim 1, characterized in that, The rotation center of the beam beam (13) coincides with the rotation center of the driven gear (123), and the through hole (131) is a rectangular hole.

3. The X-ray nondestructive testing device according to claim 1, characterized in that, The X-ray non-destructive testing device further includes a moving mechanism, which includes an X-axis assembly, a Y-axis assembly and a Z-axis assembly. The X-axis assembly can drive the Y-axis assembly to move along a first direction, the Y-axis assembly can drive the Z-axis assembly to move along a second direction, and the Z-axis assembly can drive the light tube mechanism (2) to move along a third direction. The first direction, the second direction and the third direction are perpendicular to each other.

4. The X-ray nondestructive testing device according to claim 1, characterized in that, The mounting hole (1231) is a stepped hole, and the beam beam (13) overlaps the stepped surface of the stepped hole. The beam limiting mechanism (1) also includes a first screw, which passes through the beam beam (13) and is threadedly connected to the driven gear (123).

5. The X-ray nondestructive testing device according to claim 1, characterized in that, A bearing (124) is provided between the fixed base (11) and the driven gear (123).

6. The X-ray nondestructive testing device according to claim 5, characterized in that, The fixed base (11) is provided with a stepped groove (112), the bearing (124) is sleeved in the stepped groove (112), and the drive assembly (12) further includes a pressure plate (125). The pressure plate (125) is detachably connected to the top of the fixed base (11) and can abut the bearing (124) against the stepped groove (112).

7. The X-ray nondestructive testing device according to claim 5, characterized in that, The mounting hole (1231) has a recessed groove (1232) at one end near the bearing (124), and the driven gear (123) is engaged with the bearing (124) through the groove (1232).

8. The X-ray nondestructive testing device according to claim 1, characterized in that, The limiting mechanism (1) further includes a proximity switch (14) and a sensor (15). The proximity switch (14) is disposed on the fixed base (11), and the sensor (15) is disposed on the driven gear (123). The sensor (15) can trigger the proximity switch (14) so ​​that the proximity switch (14) can detect the rotation angle of the driven gear (123). The proximity switch (14) is communicatively connected to the drive member (121) to control the start and stop of the drive member (121).

9. The X-ray nondestructive testing device according to claim 1, characterized in that, The drive component (121) is surrounded by a first protective cover (16), which is fixed to the fixing base (11).

10. The X-ray nondestructive testing device according to claim 1, characterized in that, The fixing base (11) includes a base plate (113) and at least two support columns (114), the at least two support columns (114) are fixed to the light tube mechanism (2) at intervals, and the base plate (113) is fixed to the at least two support columns (114).

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