Semiconductor chip processing and slitting apparatus with improved structure

Abstract

The utility model relates to the field of semiconductor chip processing discloses a semiconductor chip processing slitting device with improved structure, including frame body, the frame body outer wall right side is installed with controller, the frame body inside top fixedly connected with the baffle, with the baffle as the division the frame body is divided into processing area and the feeding area, the frame body bottom fixedly connected with the base, the base center position fixedly connected with the reversing motor, the reversing motor output shaft fixed sleeve has the connecting seat. This semiconductor chip processing slitting device with improved structure is by being provided with the chute, forms the cutting groove by the gap between mould position, according to the area different that chip needs slitting, the device can drive three groups of moulds formed by mould position to move left or right together, so as to realize symmetrical slitting or edge slitting, satisfy different slitting demand, need not to remove the cutter, greatly improved the flexibility of slitting, solved the problem that need to remove the cutter to satisfy the slitting demand.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor chip processing technology, specifically to a semiconductor chip processing and slitting device with an improved structure. Background Technology

[0002] In the semiconductor chip manufacturing process, the slitting process is one of the key steps. Slitting can cut a whole chip into multiple independent chip units, which facilitates subsequent packaging and testing.

[0003] Existing slitting equipment typically employs electrically adjustable cutter positions to align the cutter with the target slitting line when faced with asymmetrical or non-equivalent chip slitting requirements. However, this method has several drawbacks, such as: 1. Frequent machine stops are required for adjustment during cutter movement, which can easily lead to offset or misalignment, affecting slitting quality; 2. Frequent cutter movement can also cause cutter wobbling or offset due to structural wear, displacement errors, and other factors, affecting slitting consistency.

[0004] Therefore, there is an urgent need for a semiconductor chip processing and slitting device with an improved structure that can avoid the various inconveniences caused by moving the cutting tool and solve the above-mentioned technical defects. Utility Model Content

[0005] The purpose of this invention is to provide a semiconductor chip processing and slitting device with an improved structure to solve the problem mentioned in the background art that requires moving the cutting tool to meet the slitting requirements.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a semiconductor chip processing and slitting device with an improved structure, comprising a frame, a controller installed on the right side of the outer wall of the frame, a partition fixedly connected to the top of the inside of the frame, dividing the frame into a processing area and a loading / unloading area by the partition, a base fixedly connected to the bottom of the frame, a reversing motor fixedly connected to the center of the base, a connecting seat fixedly sleeved on the output shaft of the reversing motor, and a rotating table fixedly connected to the top of the connecting seat; two sets of parallel sliding grooves are respectively opened on the left and right sides of the rotating table, a slider is embedded in the sliding groove, a connecting rod is fixedly connected to the slider, and a mold position is fixedly connected to the top of the connecting rod, with each pair of mold positions forming a complete chip mold, three sets of molds are arranged on each of the left and right sides of the rotating table, a shifting motor is fixedly connected to both sides of the bottom of the rotating table, a ball screw is fixedly connected to the output shaft of the shifting motor, three sets of screw nut sleeves are equally spaced on the outside of the ball screw, and the screw nut sleeves are respectively fixedly connected to one end of the connecting rod.

[0007] As a further technical solution of this utility model, the connecting rod is fixed to the bottom end of the mold position, each set of connecting rods corresponds to a set of mold positions, and the length of the connecting rod is greater than that of the mold position.

[0008] As a further technical solution of this utility model, the ball screw is movably assembled at the bottom of the inside of the rotary table, and the screw nut is fitted into the bottom of the inside of the rotary table and moves.

[0009] As a further technical solution of this utility model, a lifting cylinder is fixedly connected to the top left side of the frame, and a cutting tool is fixedly connected to the piston end of the lifting cylinder downward. Four sets of guide columns are fixedly assembled on the inner wall of the frame, and the cutting tool slides and is nested outside the guide columns for lifting.

[0010] As a further technical solution of this utility model, the cutting tool is equipped with blades, and the blades are arranged in three sets, each corresponding to one of the three sets of molds.

[0011] As a further technical solution of this utility model, a fixed disk is installed at the center of the rotary table, and the rotary table is fixedly connected to the connecting seat through the fixed disk.

[0012] As a further technical solution of this utility model, two sets of clamping cylinders are fixed on both sides of the outer wall of the frame, and pressure plates are fixedly connected to the piston end of each clamping cylinder. Wall grooves are opened on both sides of the outer wall of the frame, and the pressure plates pass through the wall grooves into the frame body.

[0013] As a further technical solution of this utility model, the pressing tablets are staggered on the same side of the rotating table, with one set of pressing tablets clamped at the upper left corner of the rotating table and another set of pressing tablets clamped at the lower right corner of the rotating table.

[0014] Compared with the prior art, the beneficial effects of this utility model are: the semiconductor chip processing and slitting device with the improved structure not only realizes symmetrical slitting or edge slitting to meet different slitting requirements, realizes the integration of loading and unloading and slitting, and achieves high batch cutting efficiency, but also improves the flexibility of the rotary table while ensuring stability during slitting.

[0015] The device is equipped with a chute, slider, connecting rod, mold position, shifting motor, ball screw, and screw nut sleeve. The gap between the mold positions forms a cutting groove. Depending on the area that the chip needs to be cut, the device can drive three sets of molds formed by the mold positions to move left or right together to achieve symmetrical cutting or edge cutting, meet different cutting requirements, and greatly improve the flexibility of cutting without moving the cutting tool.

[0016] The slitting device is equipped with a rotary table and a reversing motor. The rotary table can rotate with the connecting seat. When the chips on the left side of the rotary table are slitting in batches, the right side can be used by workers or loading and unloading mechanisms for loading and unloading, realizing the integration of loading and unloading and slitting, and achieving high batch cutting efficiency.

[0017] By incorporating clamping cylinders and pressure plates, clamping cylinders are installed on both sides of the frame. When the rotary table is stationary, the clamping cylinders drive the pressure plates to move, thereby clamping them alternately at the four corners of the rotary table. This allows the rotary table to overcome cutting vibrations, improve its flexibility, and ensure stability during cutting. Attached Figure Description

[0018] Figure 1 This is a frontal cross-sectional view of the present invention.

[0019] Figure 2 This is a top view of the rotating platform structure of this utility model;

[0020] Figure 3 This is a top view schematic diagram of the ball screw structure of this utility model;

[0021] Figure 4 This is a front view schematic diagram of the tablet compression structure of this utility model.

[0022] In the diagram: 1. Frame; 2. Lifting cylinder; 3. Guide column; 4. Cutting tool; 5. Blade; 6. Clamping cylinder; 7. Pressing plate; 8. Wall groove; 9. Base; 10. Rotary table; 11. Connecting seat; 12. Reversing motor; 13. Partition plate; 14. Controller; 15. Slide groove; 16. Slider; 17. Connecting rod; 18. Mold position; 19. Fixed plate; 20. Shifting motor; 21. Ball screw; 22. Screw nut sleeve. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figure 1-4This utility model provides an embodiment of a semiconductor chip processing and slitting device with an improved structure, comprising a frame 1, a controller 14 mounted on the right side of the outer wall of the frame 1, a partition 13 fixedly connected to the top of the inside of the frame 1, dividing the frame 1 into a processing area and a loading / unloading area by the partition 13, a base 9 fixedly connected to the bottom of the frame 1, and two sets of parallel sliding grooves 15 respectively opened on the left and right sides of the rotary table 10, with sliders 16 embedded in the sliding grooves 15, connecting rods 17 fixedly connected to the sliders 16, and mold positions 18 fixedly connected to the top of the connecting rods 17, with each pair of mold positions 18 forming a complete core. The rotary table 10 has three sets of molds on each of its left and right sides. The bottom of the rotary table 10 is fixedly connected to two sides of the bottom. The output shaft of the shift motor 20 is fixedly connected to a ball screw 21. Three sets of screw nut sleeves 22 are evenly spaced around the ball screw 21. The screw nut sleeves 22 are fixedly connected to one end of a connecting rod 17. The connecting rod 17 is fixed to the bottom of the mold position 18. Each set of connecting rods 17 corresponds to one set of mold positions 18. The length of the connecting rod 17 is greater than that of the mold position 18. The ball screw 21 is movably assembled inside the bottom of the rotary table 10. The screw nut sleeves 22 are embedded in the bottom of the rotary table 10 and move.

[0025] Specifically, such as Figure 1 , Figure 2 and Figure 3 As shown, the slitting device is equipped with a horizontally rotatable rotary table 10. The chip to be slitted is placed on the mold position 18. Two sets of mold positions 18 together hold the chip. The gap between the mold positions 18 forms a cutting groove. Depending on the area to be slitted by the chip, the ball screw 21 can be driven to rotate by the shift motor 20. The three sets of screw nut sleeves 22 are synchronously and precisely displaced, so that the slider 16 is embedded in the slide groove 15 and moves horizontally. This drives the three sets of molds formed by the mold positions 18 to move to the left or right together, so as to achieve symmetrical slitting or edge slitting and meet different slitting requirements.

[0026] A lifting cylinder 2 is fixedly connected to the top left side of the frame 1. A cutting tool 4 is fixedly connected to the piston end of the lifting cylinder 2 downwards. Four sets of guide columns 3 are fixedly assembled on the inner wall of the frame 1. The cutting tool 4 slides and is nested outside the guide columns 3 to lift. Blades 5 are installed inside the cutting tool 4. There are three sets of blades 5, which correspond to three sets of molds respectively. A reversing motor 12 is fixedly connected to the center of the base 9. A connecting seat 11 is fixedly sleeved on the output shaft of the reversing motor 12. A rotating table 10 is fixedly connected to the top of the connecting seat 11. A fixed plate 19 is installed in the center of the rotating table 10. The rotating table 10 is fixedly connected to the connecting seat 11 through the fixed plate 19.

[0027] Specifically, such as Figure 1 and Figure 2As shown, the slitting device is equipped with a rotary table 10 that can rotate with the connecting seat 11. When chips in the left area of ​​the rotary table 10 are slitting in batches, the right side can be used for loading and unloading by workers or loading and unloading mechanisms. Since the mold and chip size match, no additional clamps are needed. When the chips on the left side are slitting, the reversing motor 12 drives the connecting seat 11 to rotate 180°, change direction, and continue to slitting the chips loaded on the right side. The slitting chips can then be unloaded from the right side.

[0028] Two sets of clamping cylinders 6 are fixed on both sides of the outer wall of the frame 1. The piston end of each clamping cylinder 6 is fixedly connected to a pressure plate 7. Wall grooves 8 are opened on both sides of the outer wall of the frame 1. The pressure plate 7 passes through the wall groove 8 into the frame 1. The pressure plates 7 are staggered on the same side of the rotating table 10. One set of pressure plates 7 clamps the upper left corner of the rotating table 10, and the other set of pressure plates 7 clamps the lower right corner of the rotating table 10.

[0029] Specifically, such as Figure 1 and Figure 4 As shown, clamping cylinders 6 are provided on both sides of the frame 1. When the rotary table 10 is stationary, the clamping cylinders 6 drive the pressure plates 7 to move, thereby clamping the rotary table 10 at the four corners in an alternating manner, so that the rotary table 10 can overcome cutting vibration, improve the flexibility of the rotary table 10, and ensure the stability during cutting. When the rotary table 10 needs to turn after cutting, the pressure plates 7 are released to facilitate the reversal of the rotary table 10.

[0030] The computer software involved in the controller 14 carrier in the technical solution is software technology known to those skilled in the art. It is merely applied to the aforementioned hardware carrier. In other words, the computer software involved is an essential technical feature for solving the aforementioned technical problem, that is, it constitutes a necessary technical feature for solving the technical problem in this application, but it is not a differentiating technical feature for solving the technical problem, nor is it a point of technical improvement. The applicant has not made any technical improvements to the computer software involved in the aforementioned related hardware carrier, nor is it a key technical point of the invention.

[0031] Therefore, it can be seen that the "lifting cylinder 2", "clamping cylinder 6", "tool 4", "reversing motor 12", "shifting motor 20" and other components involved in this application are all entity functional modules that combine computer software programs or protocols in the prior art with the hardware carrier of this application. The computer software programs involved in these entity functional modules are all technologies known to those skilled in the art and are not improvements of this application. The improvement of this application should be the interaction relationship between the various entity functional modules, that is, the improvement of the overall structure of this application, in order to solve the corresponding technical problems to be solved by this application.

[0032] Working principle: The operator or automatic loading and unloading mechanism places the chip to be cut on the three sets of mold positions 18 on the right side of the rotary table 10. Two sets of mold positions 18 form a mold for holding the chip. The bottom of the mold position 18 is fixed to the slider 16 by the connecting rod 17. The slider 16 is nested in the sliding groove 15 inside the rotary table 10. After loading, no additional clamps are needed. Positioning is achieved by matching the size of the mold position 18 with the chip. The controller 14 issues a start command, and the reversing motor 12 is powered on. The reversing motor 12 is a servo motor, which drives the connecting seat 11 and the fixed plate 19 to rotate through the output shaft. The rotary table 10 rotates 180° to move the loaded chips to the left slitting area. The reversing motor 12 achieves precise angle control through encoder feedback. After the rotary table 10 is in position, the controller 14 outputs a command to activate the clamping cylinder 6. The clamping cylinder 6 is a double-acting cylinder. After receiving air, the piston rod pushes the pressure plate 7 to extend into the frame 1 through the wall grooves 8 on both sides of the frame 1. It forms staggered clamping at the upper left and lower right corners of the rotary table 10, improving the overall stability of the rotary table 10 during operation and overcoming vibration interference during slitting. According to the chip slitting size requirements, the controller 14 controls... When the shift motor 20 is energized, it is a stepper motor that drives the ball screw 21 to rotate. Three sets of screw nut sleeves 22 are fitted around the ball screw 21, causing the slider 16 to move synchronously left or right within the slide groove 15. This achieves overall adjustment of the three mold positions 18, thereby changing the width and position of the cutting groove to meet various chip cutting requirements. The screw nut sleeves 22 are fixed to the slider 16, ensuring high synchronization during movement. After adjustment, the machine automatically stops. The controller 14 then instructs the lifting cylinder 2 to start. The lifting cylinder 2 is a pneumatic cylinder with a stroke sensor. The piston rod pushes the cutter 4 downwards along the guide post 3 vertically. The cutting tool 4 contains three sets of blades 5, which correspond to the chips on the three sets of mold positions 18, enabling simultaneous cutting. The blades 5 are designed with high hardness and wear-resistant material, which can accurately divide the chips. After cutting, the lifting cylinder 2 retracts and the cutting tool 4 returns to the standby position. After cutting, the clamping cylinder 6 releases the pressing plate 7, and the reversing motor 12 starts again, transferring the chips cut on the left to the unloading area on the right. The chips cut on the right mold position 18 can be directly removed by the operator or the loading and unloading mechanism without disassembling the clamps. At the same time, new chips are loaded on the right to enter the next cycle.

[0033] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A semiconductor chip processing and slitting apparatus with an improved structure, comprising a frame (1), characterized in that: A controller (14) is installed on the right side of the outer wall of the frame (1). A partition (13) is fixedly connected to the top of the inside of the frame (1). The partition (13) divides the inside of the frame (1) into a processing area and a loading and unloading area. A base (9) is fixedly connected to the bottom of the frame (1). A reversing motor (12) is fixedly connected to the center of the base (9). A connecting seat (11) is fixedly sleeved on the output shaft of the reversing motor (12). A rotating table (10) is fixedly connected to the top of the connecting seat (11). The rotary table (10) has two sets of parallel sliding grooves (15) on its left and right sides respectively. A slider (16) is embedded in the sliding groove (15). A connecting rod (17) is fixedly connected to the slider (16). A mold position (18) is fixedly connected to the top of the connecting rod (17). Every two sets of mold positions (18) form a complete chip mold. Three sets of molds are set on each of the left and right sides of the rotary table (10). A shift motor (20) is fixedly connected to both sides of the bottom of the rotary table (10). A ball screw (21) is fixedly connected to the output shaft of the shift motor (20). Three sets of screw nut sleeves (22) are evenly spaced on the outside of the ball screw (21). The screw nut sleeves (22) are fixedly connected to one end of the connecting rod (17) respectively.

2. The semiconductor chip processing and slitting apparatus with an improved structure according to claim 1, characterized in that: The connecting rod (17) is fixed to the bottom of the mold position (18). Each set of connecting rods (17) corresponds to a set of mold positions (18). The length of the connecting rod (17) is greater than that of the mold position (18).

3. The semiconductor chip processing and slitting apparatus with an improved structure according to claim 1, characterized in that: The ball screw (21) is movably mounted on the bottom of the rotary table (10), and the screw nut sleeve (22) is embedded in the bottom of the rotary table (10) and moves.

4. The semiconductor chip processing and slitting apparatus with an improved structure according to claim 1, characterized in that: A lifting cylinder (2) is fixedly connected to the top left side of the frame (1). A cutting tool (4) is fixedly connected to the piston end of the lifting cylinder (2) downwards. Four sets of guide columns (3) are fixedly assembled on the inner wall of the frame (1). The cutting tool (4) slides and is nested outside the guide columns (3) for lifting.

5. A semiconductor chip processing and slitting apparatus with an improved structure according to claim 4, characterized in that: The cutting tool (4) is equipped with a blade (5), and the blade (5) is provided in three sets, which correspond to three sets of molds respectively.

6. A semiconductor chip processing and slitting apparatus with an improved structure according to claim 1, characterized in that: The rotating platform (10) has a fixed plate (19) installed at its center, and the rotating platform (10) is fixedly connected to the connecting seat (11) through the fixed plate (19).

7. A semiconductor chip processing and slitting apparatus with an improved structure according to claim 1, characterized in that: Two sets of clamping cylinders (6) are fixed on both sides of the outer wall of the frame (1). Each piston end of the clamping cylinder (6) is fixedly connected to a pressure plate (7). Wall grooves (8) are opened on both sides of the outer wall of the frame (1). The pressure plate (7) passes through the wall groove (8) into the frame (1).

8. A semiconductor chip processing and slitting apparatus with an improved structure according to claim 7, characterized in that: The pressure plates (7) are staggered on the same side of the rotating table (10), with one set of pressure plates (7) clamped at the upper left corner of the rotating table (10) and another set of pressure plates (7) clamped at the lower right corner of the rotating table (10).

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