Nitrogen humidifier

Abstract

This application relates to a nitrogen humidifier, comprising a first housing, a connecting member, an air inlet pipe, a liquid inlet pipe, a second housing, a flow restrictor, and a connector. The connecting member is disposed at a first opening of the first housing and has a first air passage, an air inlet passage, and a liquid inlet passage, which are respectively connected to an external controlled air source and a liquid source. The air inlet pipe and the liquid inlet pipe respectively introduce gas and liquid into a first accommodating space for premixing. The first air passage connects to a second accommodating space of the second housing, where the flow restrictor is disposed. The flow restrictor agitates the ejected mixed airflow to achieve secondary mixing. The connector is disposed at a third opening of the second housing to exhaust the mixed gas. This nitrogen humidifier, through independent gas and liquid supply and a two-stage mixing design, effectively improves humidification efficiency and humidity stability, solving the problems of low mixing efficiency and poor humidity control in existing technologies, and is suitable for high-precision process requirements.

Description

Technical Field

[0001] This utility model relates to humidifiers, and more particularly to a nitrogen humidifier. Background Technology

[0002] In high-precision semiconductor manufacturing processes such as integrated circuit manufacturing, optoelectronic displays, and wafer polishing, polishing slurries are widely used in chemical mechanical polishing (CMP) to achieve surface planarization of wafers. Polishing slurries are typically stored in sealed tanks and transported to downstream processes via pressurization. In this process, nitrogen, as an inert gas, is used to pressurize the tank and drive the output. Due to its low susceptibility to chemical reactions and high stability, it is widely used as the system's gas source. However, directly using dry nitrogen can easily cause moisture to be carried away from the polishing slurry in the tank, leading to slurry concentration and even crystallization and agglomeration, severely affecting polishing quality and stability. Therefore, incorporating a nitrogen humidification device into the piping system to increase nitrogen humidity and prevent dry gas from causing polishing slurry failure has become a crucial aspect of related process control.

[0003] Existing nitrogen humidifiers typically increase humidity by introducing nitrogen gas into a humidification chamber, allowing it to come into contact with water or pass through a water vapor zone. Some designs incorporate a liquid storage chamber and a gas channel to allow the nitrogen gas and water to mix to a certain extent.

[0004] However, existing nitrogen humidifiers often employ physical spraying and bubble diffusion to ensure gas-liquid mixing. But these structures have a single airflow channel and a small gas-liquid mixing contact surface, resulting in limited humidification effects. Furthermore, traditional humidifiers struggle to effectively regulate and control gas flow rate, failing to meet the high-precision, high-humidity uniformity requirements of modern processes. Therefore, this paper proposes a new nitrogen humidifier to address these issues. Utility Model Content

[0005] The purpose of this invention is to provide a nitrogen humidifier that satisfies the requirements of independent control of gas and liquid paths, improved mixing efficiency, and optimized uniformity of output airflow.

[0006] The technical solution adopted by this utility model to solve the above problems is: a nitrogen humidifier, comprising:

[0007] The first housing includes a first accommodating space and a first opening communicating with the first accommodating space;

[0008] A connecting member is connected to the first housing and disposed at the first opening. The connecting member has a first air passage, an air inlet passage, and a liquid inlet passage. One end of the first air passage is connected to the first accommodating space, one end of the air inlet passage is connected to an external controlled air source, and one end of the liquid inlet passage is connected to an external controlled liquid source.

[0009] An air intake pipe, one end of which is connected to the other end of the air intake passage, and the other end of which is disposed within the first accommodating space;

[0010] A liquid inlet pipe, one end of which is connected to the other end of the liquid inlet channel, and the other end of which is disposed within the first accommodating space;

[0011] The second housing includes a second accommodating space, a second opening communicating with the second accommodating space, and a third opening communicating with the second accommodating space. The second housing is connected to the connecting member, and the second opening is communicating with the other end of the first airway.

[0012] A flow restrictor is disposed in the second accommodating space. The flow restrictor is subject to controlled movement. The flow restrictor includes a flow restricting surface. When the nitrogen humidifier is in working state, the flow restricting surface is arranged to contact the airflow ejected from the other end of the first air passage, thereby reducing the airflow velocity.

[0013] A connector is connected to the second housing and is disposed at the third opening. The connector has an air supply channel, one end of which is connected to the second accommodating space and the other end of which is connected to an external channel.

[0014] Preferably, the nitrogen humidifier further includes a liquid level sensor, which is disposed within the first accommodating space and is connected to an external control system.

[0015] Preferably, the first housing further includes a fourth opening communicating with the first accommodating space.

[0016] The nitrogen humidifier also includes an end cap, which is opened at the fourth opening.

[0017] The liquid level sensor is a float liquid level switch, which is located on the side of the end cap near the first accommodating space. The liquid level sensor is configured to be triggered when the liquid level in the first accommodating space rises to a preset height.

[0018] Preferably, the nitrogen humidifier further includes a hygrometer connected to an external control system, wherein the detection part of the hygrometer is disposed in the air supply channel to monitor the humidity of the gas flowing through the air supply channel.

[0019] Preferably, the connecting member has a first guide structure on the side away from the first housing.

[0020] The flow limiting component is provided with a second guide structure that slides in conjunction with the first guide structure. The second guide structure is configured to move the flow limiting component in a direction that is closer to or further away from the connecting component when the flow limiting component is in controlled motion.

[0021] Preferably, the first guide structure is a guide shaft that extends in a direction away from the first housing.

[0022] The connecting member further includes a second air passage, one end of which is connected to the first accommodating space, and the other end of which is located on the side of the guide shaft away from the first housing.

[0023] The flow limiting component has a guide groove on the side near the connecting component. The guide groove is the second guide structure, and the flow limiting component is movably sleeved on the guide shaft through the guide groove.

[0024] Preferably, the connector has a positioning structure on the side near the connecting member, and one end of the air supply channel is opened on the side of the positioning structure. The positioning structure is configured such that when the nitrogen humidifier is in working state, the flow limiting member moves a preset distance relative to the connecting member, so that the flow limiting member remains connected to the guide shaft.

[0025] Preferably, the number of the first airways is several.

[0026] Preferably, both the first housing and the second housing are tubular components. The first opening and the fourth opening are the two ends of the tubular component corresponding to the first housing, and the second opening and the third opening are the two ends of the tubular component corresponding to the second housing. The end cap is threaded to the fourth opening of the first housing, the connector is threaded to the first opening of the first housing, the end of the connector away from the first housing is threaded to the second opening of the second housing, and the connector is threaded to the third opening of the second housing.

[0027] Preferably, the connector further includes an overflow channel, one end of which is connected to the first accommodating space, and the other end of which is opened on the periphery of the connector and connected to an external pipeline, and the other end of which is located between the first housing and the second housing.

[0028] Beneficial effects of the embodiments of this utility model

[0029] 1. Due to the adoption of a primary mixing structure consisting of a connecting component and a first housing, nitrogen and deionized water are premixed in the first accommodating space. By setting separate independent air inlet channels and liquid inlet channels, the gas and liquid are ensured to be supplied on demand and initially mixed. At the same time, a secondary mixing structure consisting of a second housing and a flow restrictor is further set up, so that the gas after initial mixing is diffused and disturbed by the flow restrictor, thereby improving the mixing uniformity and humidification efficiency. Therefore, it effectively solves the problems of short gas-liquid mixing path, small contact area and poor airflow control capability in the prior art, and thus achieves the technical effect of stable output nitrogen humidity, high mixing efficiency and structure adapted to modern process environment.

[0030] 2. By employing a liquid level sensor installed in the first accommodating space, and by connecting the liquid level sensor to an external control system via a float liquid level switch installed on the end cap, the problem of not being able to monitor and automatically control the humidifying liquid level in real time in the existing technology is effectively solved. This achieves the technical effect of ensuring humidification effect while preventing system abnormalities caused by insufficient or excessive liquid, thereby improving the working stability and system safety of the humidifier. Attached Figure Description

[0031] Figure 1 This is a schematic structural view of a nitrogen humidifier proposed in a preferred embodiment of the present invention.

[0032] Figure 2 This is a schematic exploded view of a nitrogen humidifier according to a preferred embodiment of the present invention.

[0033] Figure 3 This is a schematic structural diagram of a connector proposed in a preferred embodiment of the present invention.

[0034] Figure 4 This is a schematic top view of a connecting member proposed in a preferred embodiment of the present invention.

[0035] Figure 5 This is a schematic bottom view of a connecting member proposed in a preferred embodiment of this utility model.

[0036] Figure 6 This is a schematic structural view of a current-limiting component proposed in a preferred embodiment of the present invention.

[0037] Figure 7 This is a schematic front view of a current-limiting component proposed in a preferred embodiment of the present invention.

[0038] Figure 8 This is a schematic structural view of the end cap proposed in a preferred embodiment of the present invention.

[0039] Wherein: 10, first housing; 110, first accommodating space; 120, first opening; 130, fourth opening; 20, connecting member; 210, first air passage; 220, second air passage; 230, air inlet passage; 240, liquid inlet passage; 250, first guide structure; 260, overflow passage; 30, second housing; 310, second accommodating space; 320, second opening; 330, third opening; 40, flow limiting member; 410, flow limiting surface; 420, second guide structure; 50, connecting member; 510, air supply passage; 520, positioning structure; 60, end cap. Detailed Implementation

[0040] The specific embodiments of this application will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this application, but are not intended to limit the scope of this application.

[0041] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the scope of protection of this application. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0042] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art will understand the specific meaning of the above terms in this application based on the specific circumstances.

[0043] Please see Figures 1 to 5A preferred embodiment of this application provides a nitrogen humidifier suitable for effectively humidifying nitrogen in a Slurry polishing slurry delivery system. This maintains stable humidity in the polishing slurry tank, preventing liquid crystallization or concentration caused by dry nitrogen, thereby ensuring the continuity and consistency of the polishing process. The humidifier is compact and highly integrated, suitable for various integrated circuit manufacturing and high-precision chemical mechanical polishing applications.

[0044] The nitrogen humidifier includes a first housing 10, a connecting member 20, an air inlet pipe, a liquid inlet pipe, a second housing 30, a flow restrictor 40, and a connector 50. The first housing 10 includes a first accommodating space 110 and a first opening 120 communicating with the first accommodating space 110; a connecting member 20 is connected to the first housing 10 and disposed at the first opening 120; the connecting member 20 has a first air passage 210, an air inlet passage 230, and a liquid inlet passage 240; one end of the first air passage 210 is connected to the first accommodating space 110, one end of the air inlet passage 230 is connected to an external controlled air source, and one end of the liquid inlet passage 240 is connected to an external controlled liquid source; one end of the air inlet pipe is connected to the other end of the air inlet passage 230, and the other end of the air inlet pipe is disposed within the first accommodating space 110; one end of the liquid inlet pipe is connected to the other end of the liquid inlet passage 240, and the other end of the liquid inlet pipe is disposed within the first accommodating space 110; the second housing 30 includes a second accommodating space 310 and a first opening 120 communicating with the first accommodating space 110. The second accommodating space 310 is connected to a second opening 320 and a third opening 330. The second housing 30 is connected to the connecting member 20, and the second opening 320 is connected to the other end of the first air passage 210. A flow restrictor 40 is disposed in the second accommodating space 310. The flow restrictor 40 is subject to controlled movement and includes a flow restrictor surface 410. When the nitrogen humidifier is in operation, the flow restrictor surface 410 contacts the airflow ejected from the other end of the first air passage 210, thereby reducing the airflow velocity. A connector 50 is connected to the second housing 30 and is disposed at the third opening 330. The connector 50 has an air supply channel 510. One end of the air supply channel 510 is connected to the second accommodating space 310, and the other end of the air supply channel 510 is connected to an external channel.

[0045] Specifically:

[0046] The nitrogen humidifier includes a first housing 10, a connecting member 20, an air inlet pipe, a liquid inlet pipe, a second housing 30, a flow restrictor 40, and a connector 50. The first housing 10 is a hollow structure, internally forming a first accommodating space 110 for preliminary gas-liquid mixing. The end of the first accommodating space 110 has a first opening 120 for docking with the connecting member 20. The connecting member 20 is fixedly disposed at the first opening 120, and a sealing structure ensures that gas and liquid do not leak out. The connecting member 20 internally has multiple independent flow channel structures, including a first air channel 210 communicating with the first accommodating space 110, an air inlet channel 230 for conveying gas, and a liquid inlet channel 240 for conveying liquid.

[0047] One end of the inlet flow channel 230 is connected to a controlled gas source (such as a nitrogen cylinder or nitrogen generator) via an external hose or flange structure, and the other end is connected to an inlet pipe. The inlet pipe extends and inserts into the first accommodating space 110 to ensure that the gas is released in the accommodating space and achieves preliminary mixing with the liquid. Similarly, one end of the liquid inlet flow channel 240 is connected to an external deionized water supply system, and the other end guides liquid into the first accommodating space 110 via an inlet pipe, ensuring that the water is distributed in a way that allows for sufficient contact with nitrogen gas within the accommodating space.

[0048] The gas-liquid mixture in the first accommodating space 110 enters the second housing 30 through the first air passage 210 in the connecting member 20 under gas pressure. The second housing 30 is the secondary mixing module of the humidifier, and its interior forms the second accommodating space 310. It has a second opening 320 connected to the first air passage 210 and a third opening 330 for gas output. A flow restrictor 40 is provided in the second accommodating space 310. The flow restrictor 40 is a hollow shell or baffle-like structure that can be controlled to slide or adjust up and down or left and right within a certain range. It has a flow restricting surface 410 for airflow disturbance. When the gas-liquid mixture is ejected at high speed from the first air passage 210, it comes into contact with the flow restricting surface 410 and the flow velocity is reduced and the airflow is disturbed, which helps to further enhance the completeness of gas-liquid mixing and improve the humidity uniformity of the final output gas.

[0049] The second housing 30 connects to the connector 50 via a third opening 330, and a sealing structure is provided between the two. The connector 50 has an internal air supply channel 510, one end of which communicates with the second accommodating space 310, and the other end connects to an external nitrogen output pipeline for stably outputting humidified nitrogen to the liquid tank system. The connector 50 can be connected to the external pipeline using a threaded connection or a quick-connect structure to accommodate different pipe diameters and flow requirements.

[0050] During the working process, the control system controls the synchronous supply of the gas source and the liquid source respectively. The gas and water are preliminarily mixed in the first accommodation space 110, and after being disturbed by the flow limiting member 40, enhanced mixing and decelerated diffusion are completed in the second accommodation space 310, and finally humidified nitrogen is output. This structure not only has a stable humidification efficiency, but also can adjust the degree of gas disturbance through the flow limiting member 40 to meet the control requirements for the humidification degree under different environments.

[0051] In this embodiment, due to the adoption of the primary gas-liquid premixing structure formed by the cooperation of the connecting member 20 and the first housing 10, and by setting the independent intake air flow channel 230 and the intake liquid flow channel 240 to achieve on-demand gas-liquid diversion, and then guiding the air flow to be fully mixed through the secondary mixing module composed of the second housing 30 and the flow limiting member 40 in the disturbance diffusion area, and finally导出 the nitrogen gas with uniform humidity through the connecting member 50. Therefore, the technical problems existing in the prior art such as low gas-liquid mixing efficiency, unstable humidification, and poor output humidity control are effectively solved, and thus the technical effects of efficient humidity adjustment, stable air flow output, and adaptation to various usage environments are achieved.

[0052] To realize the real-time monitoring and control of the liquid state inside the humidifier, in a further embodiment, please refer to Figure 2 and Figure 8 , this embodiment provides a nitrogen humidifier with an improved structure. The humidifier is provided with a liquid level sensor (not shown in the figure), a fourth opening 130 and an end cover 60 structure on the basis of the first housing 10, which are used to accurately sense the liquid level height in the first accommodation space 110 and realize the linkage response with the external control system. The liquid level sensor is arranged in the first accommodation space 110, and the liquid level sensor is connected to the external control system. The liquid level sensor is a float liquid level switch. The float liquid level switch is arranged on the side of the end cover 60 close to the first accommodation space 110, and the liquid level sensor is configured to be triggered when the liquid level in the first accommodation space 110 rises to a preset height.

[0053] Specifically:

[0054] In addition to including the first accommodation space 110 and the first opening 120 docked with the connecting member 20, the first housing 10 further forms a fourth opening 130 at its side wall or top wall position. This opening is used to install the end cover 60 and accommodate the liquid level sensor. The end cover 60 is a detachable structure, which is convenient for users to maintain, replace or calibrate the liquid level sensor later. The end cover 60 is fixed to the fourth opening 130 by means of threaded, snap or flange sealing connection to ensure that the liquid does not leak, and the end cover 60 body is made of corrosion-resistant material to adapt to the ionic impurities that may exist in the humidification medium.

[0055] The liquid level sensor is arranged on one side of the end cover 60 close to the first accommodating space 110, that is, its sensing structure can extend into the interior of the first accommodating space 110 to monitor the height state of the liquid in the container in real time. In this embodiment, the liquid level sensor preferably adopts a float type liquid level switch, which consists of a float, a guide rod and a switch mechanism. When the liquid level rises to a preset height as the liquid is injected, the float floats to the trigger position, triggering the switch to act and outputting a corresponding electrical signal to the external control system connected thereto. This control system can automatically close the liquid supply system, give an alarm prompt or perform linkage control on associated devices based on this signal, so as to achieve precise management of the liquid state in the first accommodating space 110.

[0056] The working principle of this structure is as follows: The external control system controls the deionized water to be injected into the first accommodating space 110 according to the operating state. When the liquid level has not reached the set upper limit, the float is in a non-trigger state and the liquid supply remains open; as the liquid gradually fills up and the liquid level rises to the preset height, the float displaces to the trigger position, and the liquid level sensor outputs a signal to the control system. The system controls to close the liquid supply solenoid valve or the pump body, thereby preventing liquid overflow or imbalance of the gas-liquid ratio caused by excessive liquid injection. At the same time, this sensor can also be combined with a low liquid level monitoring module to form a dual control system of upper and lower limits to ensure the continuous and stable operation of the device.

[0057] This embodiment is applicable to scenarios with precise requirements for the gas-liquid mixing ratio, especially applicable to high-precision and continuously operating humidification systems. In terms of material selection, the float type liquid level switch is usually made of polypropylene, polytetrafluoroethylene or stainless steel to ensure corrosion resistance and high temperature resistance; the connection between the liquid level sensor and the control system can be completed through a shielded cable to ensure stable signal transmission. This structure can be widely applied to semiconductor manufacturing processes, precision chemical polishing and other industrial fields that require humidity control.

[0058] In other alternative embodiments, the liquid level sensor can also be replaced with a capacitive liquid level sensor or an optoelectronic liquid level sensor to achieve a monitoring function with higher precision or stronger anti-pollution ability; the structure of the end cover 60 can also be designed with a quick disassembly and assembly mechanism to improve the maintenance convenience.

[0059] In this embodiment, due to the adoption of the float type liquid level sensor arranged in the first accommodating space 110, and the stable installation is achieved through the fourth opening 130 and the structure of the end cover 60, and the technical means that the liquid level sensor is electrically connected to the external control system, therefore, the problems in the prior art that the humidification liquid level cannot be monitored and the abnormal state cannot be responded to in time are effectively solved. Furthermore, the real-time monitoring and automatic control of the liquid level change are realized, and the operation stability, safety and use intelligent level of the humidifier are significantly improved.

[0060] To prevent an abnormal rise in the liquid level within the first accommodating space 110, which could lead to liquid overflow or an imbalance in the internal gas-liquid ratio, please refer to further embodiments. Figure 2 and Figures 4 to 5 The connector 50 further includes an overflow channel 260 for automatically draining excess liquid when the liquid level exceeds a preset height. One end of the overflow channel 260 is connected to the first accommodating space 110, and the other end of the overflow channel 260 is located on the periphery of the connector 20 and connected to an external pipeline. The other end of the overflow channel 260 is located between the first housing 10 and the second housing 30.

[0061] Specifically:

[0062] The connector 50 not only serves as the air supply channel 510 but also includes an independent overflow channel 260. One end of the overflow channel 260 communicates with the first accommodating space 110 and is preferably located in the upper part of the first housing 10 to ensure that overflow is only triggered when the liquid level reaches a dangerous height. The other end of the overflow channel 260 is located on the periphery of the connector 20 and is connected to an external drainage pipe. This location, between the first housing 10 and the second housing 30, allows the overflow path to operate independently without affecting the main gas-liquid channel structure, and the liquid can be directly discharged outside the system or introduced into a storage tank.

[0063] The overflow channel 260 should be designed to meet the instantaneous liquid discharge requirements under abnormal conditions of the humidifier. It can be equipped with a one-way valve or anti-backflow structure to prevent liquid backflow or cross-contamination caused by pressure fluctuations during system operation. External piping is preferably made of flexible or transparent materials to facilitate observation of liquid flow. It should also be designed in conjunction with the system's drainage module to ensure safe and rapid liquid discharge from the system.

[0064] The key role of this structure in the operation of the humidifier is reflected in the following aspects: On the one hand, in unexpected situations such as failure of the liquid level monitoring module, abnormality of the control system, or misoperation of the liquid supply, the overflow channel 260 can automatically function as a protection mechanism to discharge excess liquid and prevent liquid from overflowing and causing equipment damage or on-site pollution; on the other hand, this structure also facilitates system maintenance personnel to indirectly assess the liquid status in the first accommodating space 110, for example, by judging the functional status of the liquid level sensor through the presence or flow rate of liquid in the overflow pipe.

[0065] This humidifier is designed for use in liquid-gas mixing systems operating in highly enclosed, high-cleanliness environments. It is particularly suitable for scenarios with extremely high requirements for humidity, stability, and cleanliness, such as semiconductor, optoelectronic materials, and precision grinding fluid delivery. During installation, the overflow channel 260 can be connected to external pipelines via quick-connect couplings, supporting rapid disassembly and maintenance to meet the high demands for continuity and response speed in automated production environments.

[0066] In this embodiment, by employing an overflow channel 260 in the connector 50, with one end of the overflow channel 260 connected to the first accommodating space 110 and the other end located between the first housing 10 and the second housing 30 and connected to an external pipeline, the problem of humidifiers lacking a liquid level abnormality protection mechanism and liquid overflow potentially causing equipment contamination and system failure in the prior art is effectively solved. This achieves the technical effect of timely discharge of excess liquid when the liquid level is too high, ensuring the safe and stable operation of the system and improving the reliability of the device.

[0067] To achieve real-time monitoring and precise control of the output nitrogen humidity, in a further embodiment, the nitrogen humidifier also includes a hygrometer (not shown in the figure) connected to an external control system. This allows for real-time feedback of the gas humidity data at the humidifier's output, enabling dynamic adjustment of the liquid or gas supply strategy to ensure that the nitrogen humidification effect meets the requirements of downstream processes. The hygrometer's detection unit is located within the gas supply channel 510 to monitor the humidity of the gas flowing through the gas supply channel 510.

[0068] Specifically:

[0069] The detection unit of the hygrometer is located within the air supply channel 510 of the connector 50, preferably near the outlet of the air supply channel 510, i.e., before the humidifying nitrogen is discharged into the external liquid tank system, so that its detection result can reflect the humidity state of the final output gas of the humidifier to the greatest extent. The hygrometer body is fixedly installed on the connector 50 and sealed to the air supply channel 510 by means of threads, snaps, or welding to avoid leakage or detection errors; its detection head is directly exposed in the airflow channel and uses a high-sensitivity detection unit, such as a capacitive humidity sensor or a thermistor sensor, which has high response speed and excellent anti-contamination capability.

[0070] Structurally, the hygrometer's detection unit is compact and does not affect the gas flow cross-section, ensuring unobstructed output airflow. Externally, it is connected to the main control system via wires. The control system can determine whether the preset humidity target has been reached based on the real-time humidity value fed back by the hygrometer. If the target is not met, it can automatically adjust the liquid supply time or frequency; conversely, it can control the liquid supply to stop, thus forming a closed-loop control logic to ensure a constant and stable output gas humidity.

[0071] The working process of this structure is as follows: During device operation, controlled nitrogen gas and deionized water are injected into the first accommodating space 110 and mixed. After flowing into the second accommodating space 310 through the first gas channel 210, the mixing effect is enhanced by the disturbance of the flow limiting element 40, and finally the mixture is discharged through the gas supply channel 510. During this process, a hygrometer installed in the gas supply channel 510 collects the gas humidity value in real time and transmits the detection signal to the external control system for analysis and comparison. The control system then determines whether the liquid supply parameters need to be adjusted, forming an intelligent humidification control closed loop.

[0072] This humidifier is designed for industrial environments requiring precise nitrogen humidity control, such as semiconductor wafer cleaning, CMP polishing, and optoelectronic display manufacturing processes. The system has no special environmental limitations and is suitable for ambient to medium-temperature environments, operating stably even in cleanrooms or liquid transport areas. The hygrometer signal can be output via analog or digital signals, facilitating compatibility with various industrial automation controllers (such as PLCs and industrial PCs).

[0073] In this embodiment, by employing a hygrometer installed in the gas supply channel 510 and electrically connected to an external control system, the problems of real-time monitoring of humidifying gas humidity, unstable output, and inability to form closed-loop control in the prior art are effectively solved. This achieves the technical effects of precise and controllable output nitrogen humidity, rapid response, and high degree of intelligence, which helps to ensure the stability of atmosphere and product consistency in high-precision processes.

[0074] To achieve the adaptive turbulence function of the flow restrictor 40 without relying on an external driving structure, and to enhance the turbulence diffusion efficiency of the gas-liquid mixture, the nitrogen humidifier provides a guide structure between the connecting member 20 and the flow restrictor 40, and a second air passage 220 is provided in the guide structure to guide the gas-liquid mixture to act directly on the flow restrictor 40, causing it to move automatically under the impetus of the airflow. In some embodiments, please refer to... Figures 2 to 7The connecting member 20 has a first guide structure 250 on the side away from the first housing 10, and the flow limiting member 40 has a second guide structure 420 that slides with the first guide structure 250. The second guide structure 420 is configured to move the flow limiting member 40 in a direction close to or away from the connecting member 20 when the flow limiting member 40 is moved in a controlled manner. The first guide structure 250 is a guide shaft extending in a direction away from the first housing 10. The connecting member 20 also includes a second air passage 220, one end of which is connected to the first accommodating space 110, and the other end of which is located on the side of the guide shaft away from the first housing 10. The flow limiting member 40 has a guide groove on the side close to the connecting member 20. The guide groove is the second guide structure 420, and the flow limiting member 40 is movably sleeved on the guide shaft through the guide groove.

[0075] Specifically:

[0076] The connecting member 20 has a first guide structure 250 on the side away from the first housing 10. Preferably, it is a guide shaft extending in a direction away from the first housing 10. The guide shaft is hollow or has an internal cavity structure to accommodate airflow. The guide shaft is integrally formed or fixedly connected to the connecting member 20 and serves as a structural support component for guiding the sliding of the flow restrictor 40.

[0077] The flow restrictor 40 has a guide groove on the side near the connecting member 20. This guide groove serves as a second guide structure 420. The flow restrictor 40 is movably sleeved on the outside of the guide shaft through the guide groove, forming a sliding fit. Under the guidance of the guide shaft, the flow restrictor 40 can slide up and down along the axial direction. In the non-ventilated state, the flow restrictor 40 remains in contact with the outlet position of the connecting member 20 away from the first housing 10 under the action of gravity, sealing the gap at that location.

[0078] The connecting member 20 has a second air passage 220 inside. One end of the second air passage 220 is connected to the first accommodating space 110 to guide the gas-liquid mixture into the guide shaft, and the other end is located at the end of the guide shaft away from the first housing 10. When nitrogen and deionized water mix in the first accommodating space 110 to form a preliminary gas-liquid mixture, part of the mixture flows into the second accommodating space 310 through the first air passage 210, and the other part enters the guide shaft cavity through the second air passage 220 and is ejected from its end, directly acting on the inner wall of the guide groove of the flow restrictor 40. As the gas continues to be ejected, under pressure, the flow restrictor 40 is lifted and slides along the guide shaft away from the connecting member 20. At this time, a turbulence gap is formed between the flow restrictor surface 410 and the outlet of the first air passage 210. The high-speed gas ejected from the first air passage 210 impacts the flow restrictor surface 410 and undergoes multi-directional diffusion, forming a large-area turbulence region, thereby achieving enhanced mixing and uniform output of the humidifying gas.

[0079] This structure enables the flow restrictor 40 to have adaptive adjustment capabilities, passively responding to the airflow rise and forming a flow-limiting gap according to the airflow size. The system does not require an electric drive actuator, resulting in a simpler structure and more timely response. The sliding fit between the guide shaft and the guide groove provides a stable constraint path, preventing the flow restrictor 40 from shifting or rotating out of position. When the airflow stops or weakens, the flow restrictor 40 can automatically reset under gravity, ensuring the safe closure of the system.

[0080] In this embodiment, by using a guide shaft on the connecting member 20, the flow limiting member 40 slides with the guide shaft through the guide groove, and the flow limiting member 40 is driven by the gas-liquid mixture gas ejected from the second air passage 220 to the end of the guide shaft, the technical means of aerodynamic driving of the flow limiting member 40 are effectively solved. Therefore, the problems of system complexity, response lag and increased energy consumption caused by the flow limiting structure relying on external drive in the prior art are effectively solved. Thus, the technical effects of simple structure, adaptive turbulence, high mixing efficiency and reliable control are achieved.

[0081] To prevent the flow restrictor 40 from over-travel displacement under the push of airflow, which could cause it to detach from the guide shaft or disrupt flow control, please refer to a further embodiment. Figures 2 to 3 and Figures 6 to 7 The connector 50 has a positioning structure 520 on the side near the connecting member 20, which limits the maximum movement distance of the flow restrictor 40 relative to the connecting member 20, ensuring stable turbulence gap and reliable guiding fit. One end of the air supply channel 510 is located on the side of the positioning structure 520. The positioning structure 520 is configured such that when the nitrogen humidifier is in operation, the flow restrictor 40 moves a preset distance relative to the connecting member 20, keeping the flow restrictor 40 connected to the guide shaft.

[0082] Specifically:

[0083] The connector 50, which connects to the second housing 30, has an internal air supply channel 510 for outputting the mixed humidified nitrogen gas. A positioning structure 520 is provided on the side of the connector 50 near the connecting member 20. The positioning structure 520 can be a stepped platform, a boss stop, a limiting ring, an annular shoulder, or other solid blocking structure, and its shape and size precisely match the movement path of the flow restrictor 40. When the flow restrictor 40 moves away from the connecting member 20 under the guidance of the guide shaft and the airflow, once its side away from the connecting member 20 contacts the positioning structure 520, it is restricted from further movement, thereby preventing overtravel or detachment from the guide shaft.

[0084] One end of the air supply channel 510 is located on the side of the positioning structure 520, that is, when the flow restrictor 40 reaches the preset turbulence height, it is located on the upstream side of the air supply channel 510, forming a stable turbulent airflow inlet, ensuring sufficient turbulence effect and uniform output flow. This structural arrangement also ensures that the flow restrictor 40 is always in a sliding fit with the guide shaft during the turbulence process, and does not experience eccentricity, shaking, or jamming or other adverse operating problems.

[0085] During operation, after nitrogen and deionized water are initially mixed in the first accommodating space 110, a portion of the gas enters the guide shaft through the second air passage 220 and is ejected from the end, acting on the inner wall of the guide groove of the flow restrictor 40, lifting the flow restrictor 40 and causing it to slide along the guide shaft. As the airflow continues, the flow restrictor 40 gradually approaches the positioning structure 520. When the flow restrictor 40 moves to the preset turbulence height, its movement is restricted by the positioning structure 520, thereby forming a stable turbulence gap at that height. This allows the main airflow to be ejected from the first air passage 210 and then impact the flow restrictor surface 410, causing diffusion and achieving uniform mixing.

[0086] The positioning structure 520 can accurately control the movement of the flow restrictor 40 without the need for external control components. It has a compact structure and a rapid response, avoiding problems such as turbulence failure, airflow short circuit or device damage caused by the flow restrictor 40 detaching from the guide shaft, thus improving the overall operational stability and service life.

[0087] This structure is suitable for humidification systems requiring long-term continuous operation, especially for high-reliability applications such as integrated circuit cleaning and chemical mechanical polishing. The positioning structure 520 can be made of metal or engineering plastics, meeting the requirements for heat resistance, corrosion resistance, and stability under repeated impacts. The connection structure between the guide shaft and the flow restrictor 40 can also be equipped with a flexible retaining ring or an anti-detachment pin structure to further improve the retaining force of the guide component.

[0088] In this embodiment, by adopting the technical means of setting a positioning structure 520 on the side of the connector 50 near the connecting member 20 and placing the outlet of the air supply channel 510 on the side of the positioning structure 520, the problems of uncontrollable movement of the flow limiting member 40, easy detachment from the guide structure, and unstable turbulence state in the prior art are effectively solved. Thus, the technical effect of the flow limiting member 40 always being in a guiding and cooperating state, the turbulence height being accurately limited, and the output airflow being uniform and reliable is achieved.

[0089] To enhance the uniformity of gas distribution and the modularity of the nitrogen humidifier, while also improving the ease of assembly and disassembly and the reliability of its sealing, please refer to the following embodiments: Figures 1 to 8The humidifier's first air duct 210 can be configured in multiple ways, and both the first housing 10 and the second housing 30 adopt a tubular structure. All key connection points are reliably connected via threaded structures, adapting to the integration needs of various industrial systems. The first opening 120 and the fourth opening 130 are respectively the two ends of the tubular component corresponding to the first housing 10, and the second opening 320 and the third opening 330 are respectively the two ends of the tubular component corresponding to the second housing 30. The end cap 60 is threadedly connected to the fourth opening 130 of the first housing 10, the connector 50 is threadedly connected to the first opening 120 of the first housing 10, the end of the connector 50 away from the first housing 10 is threadedly connected to the second opening 320 of the second housing 30, and the connector 50 is threadedly connected to the third opening 330 of the second housing 30.

[0090] Specifically:

[0091] The first housing 10 is a hollow tubular structure, which forms a first accommodating space 110 for containing a preliminary mixture of gas and liquid. The first housing 10 has a first opening 120 and a fourth opening 130 at its two ends. The first opening 120 is used to connect with the connecting member 20, and the fourth opening 130 is used to connect with the end cap 60, thereby achieving structural closure. The outer walls at both ends of the first housing 10 have threaded structures for forming detachable sealed connections with other components. The end cap 60 is threadedly installed at the fourth opening 130. The end cap 60 is detachable and can be opened to facilitate the injection of liquid into the first accommodating space 110, the installation of a liquid level sensor, or maintenance and cleaning.

[0092] The connecting member 20 is located at the first opening 120 and is fixed to the end of the first housing 10 by a threaded connection to achieve a reliable seal. The connecting member 20 contains several first air passages 210, which are arranged in a distributed manner and connect the first accommodating space 110 and the second housing 30 respectively, allowing the initially mixed gas to be simultaneously discharged through multiple channels, enhancing the gas turbulence range and output uniformity. The arrangement of multiple first air passages 210 can also be modularly designed and replaced according to different humidification efficiency requirements.

[0093] The second housing 30 is also a hollow tubular structure, forming a second accommodating space 310 inside. The second housing 30 has two axial openings: a second opening 320 and a third opening 330. The second opening 320 is used to connect to the end of the connecting member 20 furthest from the first housing 10, and the third opening 330 is used to connect to the other end of the connecting member 50. The connection between the connecting member 20 and the second housing 30 is achieved through a threaded structure. The connecting member 50 is threaded to the distal end of the connecting member 20 and both ends of the second housing 30, forming a completely closed intermediate mixing module.

[0094] The working process of this structure is as follows: Nitrogen and deionized water are injected into the first accommodating space 110 through the air inlet pipe and liquid inlet pipe, respectively, to form a mixed gas. The mixed gas is simultaneously introduced into the second accommodating space 310 through multiple first gas channels 210. Under the turbulence diffusion effect of the flow restrictor 40, the mixing uniformity is enhanced. Finally, it is led out to the external gas supply system through the connector 50. Due to the parallel structure of multiple first gas channels 210, the gas distribution is more uniform, which is especially suitable for high flow rate and high stability output scenarios. The ends of each pipe are fixed by threaded connection, which not only facilitates on-site installation, disassembly and maintenance, but also ensures the airtightness and pressure resistance of the system.

[0095] In this embodiment, by employing multiple first air passages 210 to achieve parallel airflow output, and by using a tubular structure and threaded connection between the first housing 10 and the second housing 30 for assembly, the problems of uneven gas-liquid distribution, bulky device structure, and inconvenient maintenance in the prior art are effectively solved. This achieves the technical effects of modular assembly of the humidifier, uniform humidification output through multiple channels, reliable and sealed connection, and quick disassembly and assembly.

[0096] The above description in this specification is merely illustrative of the present invention. Those skilled in the art to which this invention pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, as long as they do not depart from the content of this specification or exceed the scope defined in the claims, all of which shall fall within the protection scope of this invention.

Claims

1. A nitrogen humidifier, characterized in that, include: The first housing includes a first accommodating space and a first opening communicating with the first accommodating space; A connecting member is connected to the first housing and disposed at the first opening. The connecting member has a first air passage, an air inlet passage, and a liquid inlet passage. One end of the first air passage is connected to the first accommodating space, one end of the air inlet passage is connected to an external controlled air source, and one end of the liquid inlet passage is connected to an external controlled liquid source. An air intake pipe, one end of which is connected to the other end of the air intake passage, and the other end of which is disposed within the first accommodating space; A liquid inlet pipe, one end of which is connected to the other end of the liquid inlet channel, and the other end of which is disposed within the first accommodating space; The second housing includes a second accommodating space, a second opening communicating with the second accommodating space, and a third opening communicating with the second accommodating space. The second housing is connected to the connecting member, and the second opening is communicating with the other end of the first airway. A flow restrictor is disposed in the second accommodating space. The flow restrictor is subject to controlled movement. The flow restrictor includes a flow restricting surface. When the nitrogen humidifier is in working state, the flow restricting surface is arranged to contact the airflow ejected from the other end of the first air passage, thereby reducing the airflow velocity. A connector is connected to the second housing and is disposed at the third opening. The connector has an air supply channel, one end of which is connected to the second accommodating space and the other end of which is connected to an external channel.

2. The nitrogen humidifier according to claim 1, characterized in that, The nitrogen humidifier also includes a liquid level sensor, which is disposed within the first accommodating space and is connected to an external control system.

3. The nitrogen humidifier according to claim 2, characterized in that: The first housing also includes a fourth opening communicating with the first accommodating space; The nitrogen humidifier also includes an end cap, which is opened at the fourth opening; The liquid level sensor is a float liquid level switch, which is located on the side of the end cap near the first accommodating space. The liquid level sensor is configured to be triggered when the liquid level in the first accommodating space rises to a preset height.

4. The nitrogen humidifier according to claim 1, characterized in that, It also includes a hygrometer connected to an external control system, wherein the detection part of the hygrometer is disposed in the air supply channel to monitor the humidity of the gas flowing through the air supply channel.

5. The nitrogen humidifier according to claim 1, characterized in that: The connecting member has a first guide structure on the side away from the first housing; The flow limiting component is provided with a second guide structure that slides in conjunction with the first guide structure. The second guide structure is configured to move the flow limiting component in a direction that is closer to or further away from the connecting component when the flow limiting component is in controlled motion.

6. The nitrogen humidifier according to claim 5, characterized in that: The first guide structure is a guide shaft that extends in a direction away from the first housing. The connecting member further includes a second air passage, one end of which is connected to the first accommodating space, and the other end of which is located on the side of the guide shaft away from the first housing. The flow limiting component has a guide groove on the side near the connecting component. The guide groove is the second guide structure, and the flow limiting component is movably sleeved on the guide shaft through the guide groove.

7. The nitrogen humidifier according to claim 6, characterized in that: The connector has a positioning structure on the side near the connecting member. One end of the air supply channel is opened on the side of the positioning structure. The positioning structure is configured such that when the nitrogen humidifier is in working state, the flow limiting member moves a preset distance relative to the connecting member, so that the flow limiting member remains connected to the guide shaft.

8. The nitrogen humidifier according to claim 1, characterized in that, The number of the first airways is several.

9. The nitrogen humidifier according to claim 3, characterized in that, Both the first housing and the second housing are tubular components. The first opening and the fourth opening are the two ends of the tubular component corresponding to the first housing, and the second opening and the third opening are the two ends of the tubular component corresponding to the second housing. The end cap is threaded to the fourth opening of the first housing, the connector is threaded to the first opening of the first housing, the end of the connector away from the first housing is threaded to the second opening of the second housing, and the connector is threaded to the third opening of the second housing.

10. The nitrogen humidifier according to claim 1, characterized in that, The connector also includes an overflow channel, one end of which is connected to the first accommodating space, and the other end of which is opened on the periphery of the connector and connected to an external pipeline. The other end of the overflow channel is located between the first housing and the second housing.

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