A silicon wafer on-line cutting waste collecting device

Abstract

The utility model discloses a kind of crystalline silicon online cutting waste collecting devices, including wire cutting machine body, the bottom of wire cutting machine body is fixedly arranged with collection box, the middle part of the inner wall of collection box is fixedly installed with filter assembly, one side of collection box is fixedly installed with pneumatic cylinder, the output end of pneumatic cylinder is fixedly arranged with pusher assembly, and one side of collection box is inserted with waste tank.The crystalline silicon online cutting waste collecting device, by the setting of filter assembly and pusher assembly, when cutting crystalline silicon, B water pump extracts cutting fluid in cutting fluid barrel and sprays on crystalline silicon by cutting fluid spray head, and then falls into collection box, microporous filter screen and activated carbon plate carry out secondary filtration to cutting fluid, reach the effect that crystalline silicon cutting waste solid-liquid separation, open pneumatic cylinder, drive pusher plate to push solid crystalline silicon waste from waste outlet into waste tank and be uniformly collected, convenient to discharge, facilitate subsequent processing and reuse.

Description

Technical Field

[0001] This utility model relates to the field of crystalline silicon cutting technology, specifically to an online crystalline silicon cutting waste collection device. Background Technology

[0002] Silicon slicing refers to the process of processing crystalline silicon material into thin sheets or other shapes, and it is widely used in the semiconductor, solar cell, and optoelectronic industries. Wire cutters are commonly used cutting equipment for silicon slicing. During operation, cutting fluid needs to be sprayed simultaneously while cutting the silicon, which generates a mixture of silicon fragments and cutting fluid waste, which needs to be collected and treated.

[0003] Traditional wire cutting machines are not suitable for solid-liquid separation of mixed waste materials such as silicon fragments and cutting fluid. Cutting fluid is difficult to purify and reuse in a timely manner, which is not conducive to cost saving. Moreover, extracting silicon fragments from mixed waste materials requires additional equipment steps, which is inefficient.

[0004] Therefore, an online silicon cutting waste collection device is proposed. Utility Model Content

[0005] The technical problem to be solved by this utility model is as follows: it is not convenient to separate the solid and liquid of the mixed waste of crystalline silicon fragments and cutting fluid, the cutting fluid is difficult to purify and reuse in time, which is not conducive to saving costs, and the extraction of crystalline silicon fragments from the mixed waste requires additional equipment steps, which is inefficient.

[0006] The objective of this utility model can be achieved through the following technical solutions:

[0007] A waste collection device for in-line silicon cutting includes a wire cutter body, a collection box fixedly installed at the bottom of the wire cutter body, a filter assembly fixedly installed in the middle of the inner wall of the collection box, a cylinder fixedly installed on one side of the collection box, a pusher assembly fixedly installed at the output end of the cylinder, a waste bin inserted into one side of the collection box, a cutting fluid tank fixedly installed on one side of the surface of the wire cutter body, a circulation assembly fixedly installed on the surface of the collection box, and a cooling fan fixedly installed on the surface of the collection box.

[0008] As a further embodiment of this utility model: the filter assembly includes an activated carbon plate and a microporous filter screen. The activated carbon plate is fixedly installed in the middle of the inner wall of the collection box, and the microporous filter screen is fixedly installed on the top surface of the activated carbon plate. The filter assembly is used to filter waste materials and waste liquid generated by silicon crystal cutting.

[0009] As a further embodiment of this utility model: the pushing assembly includes a pushing plate and a protective rubber strip. The pushing plate is fixedly disposed at the output end of the cylinder, and the protective rubber strip is fixedly disposed at the bottom of the pushing plate. The pushing assembly is used to clean the crystalline silicon waste at the filter section of the filter assembly.

[0010] As a further embodiment of this utility model: the circulation assembly includes a water pump A and a circulation pipe. The water pump A is fixedly installed on the surface of the collection tank, and the circulation pipe is fixedly installed at the output end of the water pump A. The circulation assembly is used to circulate and transport cutting fluid.

[0011] As a further embodiment of this utility model: one end of the circulation pipe is disposed inside the cutting fluid tank, and the input end of the A water pump is disposed inside the collection tank. The A water pump is used to circulate and transport the cutting fluid.

[0012] As a further embodiment of this utility model: a B water pump is provided through the top surface of the cutting fluid tank, a delivery pipe is provided through the output end of the B water pump, and a cutting fluid nozzle is provided through one end of the delivery pipe. The cutting fluid nozzle is used to spray cutting fluid onto the crystalline silicon.

[0013] As a further embodiment of this utility model: a waste outlet is provided on one side of the collection box, a sealing cover is snapped into the inside of the waste outlet, a rubber ring is fitted on the surface of the sealing cover, and handles are fixedly installed on both sides of the surface of the waste box. The material of the collection box is copper plate, and the waste outlet facilitates the discharge of crystalline silicon waste.

[0014] The beneficial effects of this utility model are:

[0015] 1. Through the setup of the filtration and pushing components, during silicon cutting, pump B extracts the cutting fluid from the cutting fluid tank and sprays it onto the silicon through the cutting fluid nozzle, which then falls into the collection box. The microporous filter and activated carbon plate perform secondary filtration of the cutting fluid, achieving the effect of solid-liquid separation of silicon cutting waste. Opening the cylinder drives the pushing plate to push the solid silicon waste from the waste outlet into the waste bin for unified collection. The discharge is convenient and facilitates subsequent processing and reuse.

[0016] 2. Through the setting of the circulation component, the cutting fluid filtered by the filter component falls to the bottom of the collection tank. The cooling fan is turned on to cool the cutting fluid. The filter component filters out the crystalline silicon waste mixed in the cutting fluid, making the cutting fluid pure again. The A water pump is turned on, and the cutting fluid is transported to the cutting fluid tank through the circulation pipe, achieving the effect of reusing waste cutting fluid and saving production costs. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings.

[0018] Figure 1This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the filter assembly structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the cutting fluid tank structure of this utility model;

[0021] Figure 4 This is a schematic diagram of the pusher assembly structure of this utility model;

[0022] Figure 5 This is a schematic diagram of the cross-sectional structure of the collection box of this utility model.

[0023] In the diagram: 1. Wire cutting machine body; 2. Collection box; 3. Filter assembly; 301. Activated carbon plate; 302. Microporous filter screen; 4. Cylinder; 5. Pushing assembly; 501. Pushing plate; 502. Protective rubber strip; 6. Waste bin; 7. Cutting fluid tank; 8. Circulation assembly; 801. Water pump A; 802. Circulation pipe; 9. Cooling fan; 10. Water pump B; 11. Delivery pipe; 12. Cutting fluid nozzle; 13. Sealing cover plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0025] like Figure 1-5 As shown, an online silicon cutting waste collection device includes a wire cutter body 1, a collection box 2 fixedly installed at the bottom of the wire cutter body 1, a filter assembly 3 fixedly installed in the middle of the inner wall of the collection box 2, a cylinder 4 fixedly installed on one side of the collection box 2, and a pusher assembly 5 fixedly installed at the output end of the cylinder 4. Through the setting of the filter assembly 3 and the pusher assembly 5, during silicon cutting, the B water pump 10 draws out the cutting fluid from the cutting fluid tank 7 and sprays it onto the silicon through the cutting fluid nozzle 12, and then it falls into the collection box 2. The microporous filter screen 302 and the activated carbon plate 301 perform secondary filtration of the cutting fluid, achieving the effect of solid-liquid separation of silicon cutting waste. Opening the cylinder 4 drives the pusher plate 501 to push the solid silicon waste from the waste outlet into the waste box 6 for unified collection. The discharge is convenient and facilitates subsequent processing and reuse.

[0026] A waste bin 6 is inserted into one side of the collection box 2. A cutting fluid tank 7 is fixedly installed on one side of the surface of the wire cutting machine body 1. A circulation component 8 is fixedly installed on the surface of the collection box 2. Through the setting of the circulation component 8, the cutting fluid filtered by the filter component 3 falls into the bottom of the collection box 2. The cooling fan 9 is turned on to cool the cutting fluid. The filter component 3 filters out the crystalline silicon solid waste mixed in the cutting fluid, making the cutting fluid pure again. The A water pump 801 is turned on, and the cutting fluid is transported to the cutting fluid tank 7 through the circulation pipe 802, achieving the effect of reusing the waste cutting fluid and saving production costs. A cooling fan 9 is fixedly installed on the surface of the collection box 2.

[0027] like Figure 2 As shown, the filter assembly 3 includes an activated carbon plate 301 and a microporous filter screen 302. The activated carbon plate 301 is fixedly installed in the middle of the inner wall of the collection box 2, and the microporous filter screen 302 is fixedly installed on the top surface of the activated carbon plate 301.

[0028] The filter component 3 is designed to separate the solid and liquid components of the waste generated during silicon cutting and to purify the cutting fluid for easy reuse.

[0029] like Figure 4 As shown, the pushing assembly 5 includes a pushing plate 501 and a protective rubber strip 502. The pushing plate 501 is fixedly disposed at the output end of the cylinder 4, and the protective rubber strip 502 is fixedly disposed at the bottom of the pushing plate 501.

[0030] The pusher component 5 is designed to push the solid crystalline silicon filtered out by the filter component 3 out of the waste outlet.

[0031] like Figure 2 As shown, the circulation component 8 includes a water pump 801 and a circulation pipe 802. The water pump 801 is fixedly installed on the surface of the collection tank 2, and the circulation pipe 802 is fixedly installed at the output end of the water pump 801.

[0032] The circulation component 8 is designed to circulate and deliver the cutting fluid.

[0033] like Figure 1 As shown, one end of the circulation pipe 802 is installed inside the cutting fluid tank 7, and the input end of the water pump 801 is installed inside the collection tank 2.

[0034] The A water pump 801 is designed to deliver the cutting fluid into the cutting fluid tank 7.

[0035] like Figure 3 As shown, a B water pump 10 is installed through the top surface of the cutting fluid tank 7, and a delivery pipe 11 is installed through the output end of the B water pump 10. A cutting fluid nozzle 12 is installed through one end of the delivery pipe 11.

[0036] With the B water pump 10 installed, the B water pump 10 draws out the cutting fluid from the cutting fluid tank 7 and delivers it to the cutting fluid nozzle 12 through the delivery pipe 11, and then sprays it onto the crystalline silicon.

[0037] like Figure 5 As shown, a waste outlet is provided on one side of the collection box 2. A sealing cover 13 is snapped into the inside of the waste outlet. A rubber ring is fitted on the surface of the sealing cover 13. Handles are fixedly installed on both sides of the surface of the waste box 6. The material of the collection box 2 is copper plate.

[0038] The sealing cover 13 serves to open and close the waste outlet.

[0039] The working principle of this utility model is as follows: During silicon cutting, water pump 10 draws out the cutting fluid from the cutting fluid tank 7 and sprays it onto the silicon through the cutting fluid nozzle 12, and then it falls into the collection tank 2.

[0040] The microporous filter screen 302 and the activated carbon plate 301 perform secondary filtration of the cutting fluid, separating the solid and liquid of the silicon cutting waste. The cylinder 4 is opened, which drives the pusher plate 501 to push the solid silicon waste from the waste outlet into the waste bin 6 for unified collection. The discharge is convenient and facilitates subsequent processing and reuse.

[0041] After being filtered by the filter assembly 3, the cutting fluid falls to the bottom of the collection tank 2. The cooling fan 9 is turned on to cool the cutting fluid. The filter assembly 3 filters out the crystalline silicon waste mixed in the cutting fluid, making the cutting fluid pure again. The A water pump 801 is turned on, and the cutting fluid is transported to the cutting fluid tank 7 through the circulation pipe 802, achieving the effect of reusing the waste cutting fluid and saving production costs.

[0042] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A waste collection device for in-line silicon cutting, comprising a wire cutter body (1), characterized in that: A collection box (2) is fixedly installed at the bottom of the wire cutting machine body (1). A filter assembly (3) is fixedly installed in the middle of the inner wall of the collection box (2). A cylinder (4) is fixedly installed on one side of the collection box (2). A pusher assembly (5) is fixedly installed at the output end of the cylinder (4). A waste bin (6) is inserted into one side of the collection box (2). A cutting fluid tank (7) is fixedly installed on one side of the surface of the wire cutting machine body (1). A circulation assembly (8) is fixedly installed on the surface of the collection box (2). A cooling fan (9) is fixedly installed on the surface of the collection box (2).

2. The online silicon cutting waste collection device according to claim 1, characterized in that, The filter assembly (3) includes an activated carbon plate (301) and a microporous filter screen (302). The activated carbon plate (301) is fixedly installed in the middle of the inner wall of the collection box (2), and the microporous filter screen (302) is fixedly installed on the top surface of the activated carbon plate (301).

3. The online silicon cutting waste collection device according to claim 1, characterized in that, The pushing assembly (5) includes a pushing plate (501) and a protective rubber strip (502). The pushing plate (501) is fixedly disposed at the output end of the cylinder (4), and the protective rubber strip (502) is fixedly disposed at the bottom of the pushing plate (501).

4. The online silicon cutting waste collection device according to claim 1, characterized in that, The circulation component (8) includes an A water pump (801) and a circulation pipe (802). The A water pump (801) is fixedly installed on the surface of the collection tank (2), and the circulation pipe (802) is fixedly installed at the output end of the A water pump (801).

5. The online silicon cutting waste collection device according to claim 4, characterized in that, One end of the circulation pipe (802) is inserted into the inside of the cutting fluid tank (7), and the input end of the A water pump (801) is inserted into the inside of the collection tank (2).

6. The online silicon cutting waste collection device according to claim 1, characterized in that, A B water pump (10) is provided through the top surface of the cutting fluid tank (7), and a delivery pipe (11) is provided through the output end of the B water pump (10). A cutting fluid nozzle (12) is provided through one end of the delivery pipe (11).

7. The online silicon cutting waste collection device according to claim 1, characterized in that, The collection box (2) has a waste outlet on one side, and a sealing cover (13) is snapped into the inside of the waste outlet. A rubber ring is fitted on the surface of the sealing cover (13). Handles are fixedly installed on both sides of the surface of the waste box (6). The material of the collection box (2) is copper plate.

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