A cavity cooling device for a vacuum coating machine

Abstract

The utility model relates to vacuum coating equipment technical field discloses a cavity cooling device for vacuum coating machine, include: machine cavity and with the door board of machine cavity rotary connection, the side of machine cavity is provided with cooling cavity mechanism, and the bottom surface of machine cavity still is provided with cooling medium circulation mechanism, cooling cavity mechanism includes fixed mounting in the inner layer casing of machine cavity surface. This cavity cooling device for vacuum coating machine, through setting up cooling cavity mechanism in machine cavity surface, utilize cooling cavity mechanism in cooling pipe and surround machine cavity, increased the flowing path of cooling medium in cooling cavity, make cooling medium and inner layer casing contact fully, can take away the heat of coating machine cavity fast, improve the cooling efficiency, and cooling cavity mechanism adopts double -deck shell structure, and the heat conduction performance of inner layer casing is good, and the strength of outer layer casing is high, and the sealing structure is reliable, and the cooling pipe is matched, can effectively prevent the leakage of cooling medium, improve the reliability of equipment.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, specifically a cavity cooling device for a vacuum coating machine. Background Technology

[0002] Vacuum coating machines mainly refer to coating processes that require high vacuum levels. They encompass many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE (molecular beam epitaxy), PLD (laser-dependent deposition), and ion beam sputtering. The main approaches are categorized into evaporation and sputtering.

[0003] During vacuum coating, the cavity of the vacuum coating machine generates a large amount of heat due to the coating process, causing the cavity temperature to rise. High temperatures not only affect coating quality, such as reducing film adhesion and causing uneven film thickness, but can also damage components within the cavity, shortening the equipment's lifespan. Existing cavity cooling devices suffer from low cooling efficiency and uneven cooling, failing to meet the requirements of vacuum coating. Therefore, we propose a cavity cooling device for vacuum coating machines to solve these problems. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a cavity cooling device for a vacuum coating machine, which solves the problems mentioned in the background.

[0005] This utility model provides the following technical solution: a cavity cooling device for a vacuum coating machine, comprising: a machine cavity and a door plate rotatably connected to the machine cavity; a cooling cavity mechanism is provided on the side of the machine cavity, and a cooling medium circulation mechanism is provided on the bottom surface of the machine cavity; the cooling cavity mechanism includes an inner shell fixedly installed on the surface of the machine cavity; screws are provided on the inner shell, and an outer shell is connected to the inner shell by the screws; a cooling pipe is provided between the outer shell and the inner shell; and a connecting elbow structure is provided at the end of the cooling pipe. The adjacent cooling pipes are connected by a connecting elbow structure; the cooling medium circulation mechanism includes a base plate, on the top surface of which a column is fixedly installed, and the upper end of the column is also fixedly connected to the machine cavity. A circulation pump, a cooling medium storage tank, a heat exchanger, and connecting pipes are arranged between the base plate and the machine cavity. The heat exchanger is connected to the drain outlet of the cooling pipe, and the heat exchanger is connected to the cooling medium storage tank through a connecting pipe. The inlet of the circulation pump is connected to the drain outlet of the cooling medium storage tank, and the drain outlet of the circulation pump is connected to the inlet of the cooling pipe.

[0006] Preferably, the connecting elbow structure consists of three right-angle elbow connecting pipes, and the three right-angle elbow connecting pipes are connected end to end in sequence.

[0007] Preferably, the inner shell and the outer shell are provided with positioning grooves on their adjacent sides, and the inner shell is secured with a sealing gasket through the positioning grooves. The sealing gasket is made of rubber.

[0008] Preferably, the thickness of the sealing gasket is greater than the depth of the positioning groove, and the side of the sealing gasket can contact the outer shell.

[0009] Preferably, the inner shell has a U-shaped structure design, and the notch of the inner shell faces the door panel.

[0010] Preferably, the connecting elbow structure is located below the bottom surface of the machine cavity, and a gap is provided between the connecting elbow structure and the column.

[0011] Preferably, the cooling medium circulation mechanism further includes a protective plate, which has ventilation grooves and can be connected to the base plate by bolts.

[0012] Preferably, the base plate has a groove that can be inserted into the protective plate, and the outer end of the groove is designed to be open.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. The cavity cooling device for this vacuum coating machine, by setting up a cooling cavity mechanism on the surface of the cavity, and using the cooling pipes in the cooling cavity mechanism to surround the cavity, increases the flow path of the cooling medium in the cooling cavity, so that the cooling medium can fully contact the inner shell, which can quickly remove the heat of the coating cavity and improve the cooling efficiency. In addition, the cooling cavity mechanism adopts a double shell structure. The inner shell has good thermal conductivity, the outer shell has high strength, and the sealing structure is reliable. Together with the cooling pipes, it can effectively prevent the leakage of cooling medium and improve the reliability of the equipment.

[0015] 2. The vacuum coating machine uses a cavity cooling device, which further adds a cooling medium circulation mechanism. The core function of this mechanism is to promote the formation of a circulating flow path for the cooling medium inside the cooling cavity. With the help of this circulating cooling mechanism, the cooling medium can continuously absorb and remove heat, thereby effectively ensuring that the entire device structure maintains high cooling efficiency during operation. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is an exploded view of the outer shell structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the connecting elbow structure of this utility model;

[0019] Figure 4This is a schematic diagram of the base plate structure of this utility model.

[0020] In the diagram: 1. Machine cavity; 2. Door panel; 3. Cooling cavity mechanism; 31. Inner shell; 32. Outer shell; 33. Screw; 34. Positioning groove; 35. Sealing gasket; 36. Cooling pipe; 37. Connecting elbow structure; 4. Cooling medium circulation mechanism; 41. Base plate; 42. Protective plate; 43. Column; 44. Circulating pump; 45. Cooling medium storage tank; 46. Heat exchanger; 47. Connecting pipe. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-4A cavity cooling device for a vacuum coating machine includes: a cavity 1 and a door panel 2 rotatably connected to the cavity 1. A cooling cavity mechanism 3 is provided on the side of the cavity 1, and a cooling medium circulation mechanism 4 is provided on the bottom surface of the cavity 1. The cooling cavity mechanism 3 includes an inner shell 31 fixedly installed on the surface of the cavity 1. Screws 33 are provided on the inner shell 31, and the inner shell 31 is connected to an outer shell 32 by the screws 33. A cooling pipe 36 is provided between the outer shell 32 and the inner shell 31. A connecting elbow structure 37 is provided at the end of the cooling pipe 36, and adjacent cooling pipes 36 are connected through the connecting elbow structure 37. The connecting elbow structure 37 is composed of three right-angle elbow connecting pipes, and the three right-angle elbow connecting pipes are connected end to end in sequence. The inner shell 31 and the outer shell 32 are connected by the connecting elbow structure 37. The adjacent sides of the body 32 are provided with positioning grooves 34, and the inner shell 31 is engaged with the sealing gasket 35 through the positioning grooves 34. During the assembly process, the operator can quickly and accurately install the sealing gasket 35 into the designated position according to the positioning grooves 34, which improves the assembly efficiency and accuracy and avoids problems such as poor sealing caused by the deviation of the sealing gasket installation position. The sealing gasket 35 is made of rubber, which has good elasticity and flexibility. It can undergo large deformation when subjected to pressure and return to its original shape after the pressure is removed. The thickness of the sealing gasket 35 is greater than the depth of the positioning groove 34, and the side of the sealing gasket 35 can contact the outer shell 32. This design allows the sealing gasket 35 to be compressed and deformed after installation to fill the gap between the inner shell 31 and the outer shell 32. The elastic deformation of the sealing gasket 35 can effectively prevent the leakage of the cooling medium, improving the reliability and effectiveness of the seal. The inner shell 31 has a U-shaped structure design, and the notch of the inner shell 31 faces the door panel 2. The connecting elbow structure 37 is located below the bottom surface of the cavity 1, and a gap is provided between the connecting elbow structure 37 and the column 43.

[0023] The cooling medium circulation mechanism 4 includes a base plate 41, with a column 43 fixedly mounted on the top surface of the base plate 41. The upper end of the column 43 is also fixedly connected to the machine cavity 1. A circulation pump 44, a cooling medium storage tank 45, a heat exchanger 46, and a connecting pipe 47 are arranged between the base plate 41 and the machine cavity 1. The heat exchanger 46 is connected to the drain outlet of the cooling pipe 36, and the heat exchanger 46 is connected to the cooling medium storage tank 45 via the connecting pipe 47. The inlet of the circulation pump 44 is connected to the drain outlet of the cooling medium storage tank 45. The drain outlet of the circulating pump 44 is connected to the inlet of the cooling pipe 36. The cooling medium circulation mechanism 4 also includes a protective plate 42. The protective plate 42 has a venting groove and can be connected to the base plate 41 with bolts. The base plate 41 has a sliding groove that can be inserted into the protective plate 42, and the outer end of the sliding groove is open, so that the protective plate 42 can be easily inserted into the sliding groove from the opening to achieve initial positioning. Then, the protective plate 42 and the base plate 41 are further fixed with bolts to ensure the connection is firm. This combination connection method not only ensures the convenience of installation, but also improves the reliability of the connection. The venting groove can play a role in ventilation and heat dissipation, which helps to reduce the internal temperature of the cooling medium circulation mechanism 4 and prevent overheating from affecting the normal operation of the equipment.

[0024] Working principle: The inner shell 31 is a U-shaped structure that covers and is fixed to the surface of the cavity 1. The outer shell 32 clamps and fixes the cooling pipe 36 to the inner shell 31. The ends of the cooling pipes 36 on adjacent sides of the cavity 1 are connected by a connecting elbow structure 37 to connect them to each other. Then, the circulation pump 44 is started to circulate the coolant and other media in the cooling medium storage tank 45, so that the cooling medium circulates in the cooling pipe 36. After absorbing the heat conducted from the coating cavity 1, the temperature of the cooling medium rises. The high-temperature cooling medium flows out from the outlet of the cooling pipe 36 and enters the heat exchanger 46. In the heat exchanger 46, it exchanges heat with the cooling water, transferring heat to the cooling water and lowering its own temperature. The cooled cooling medium returns to the cooling medium storage tank 45, completing one cycle.

[0025] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A chamber cooling device for a vacuum coater, characterized by, include: The machine cavity (1) and the door panel (2) rotatably connected to the machine cavity (1) are provided with a cooling cavity mechanism (3) on the side of the machine cavity (1) and a cooling medium circulation mechanism (4) on the bottom surface of the machine cavity (1). The cooling cavity mechanism (3) includes an inner shell (31) fixedly installed on the surface of the machine cavity (1). The inner shell (31) is provided with screws (33), and the inner shell (31) is connected to an outer shell (32) by screws (33). A cooling pipe (36) is provided between the outer shell (32) and the inner shell (31). The end of the cooling pipe (36) is provided with a connecting elbow structure (37), and adjacent cooling pipes (36) are connected by the connecting elbow structure (37). The cooling medium circulation mechanism (4) includes a base plate (41), on which a column (43) is fixedly installed. The upper end of the column (43) is also fixedly connected to the machine cavity (1). A circulation pump (44), a cooling medium storage tank (45), a heat exchanger (46), and a connecting pipe (47) are provided between the base plate (41) and the machine cavity (1). The heat exchanger (46) is connected to the drain outlet of the cooling pipe (36). The heat exchanger (46) is connected to the cooling medium storage tank (45) through the connecting pipe (47). The inlet of the circulation pump (44) is connected to the drain outlet of the cooling medium storage tank (45), and the drain outlet of the circulation pump (44) is connected to the inlet of the cooling pipe (36).

2. The cavity cooling device for vacuum coating machine according to claim 1, characterized in that, The connecting elbow structure (37) consists of three right-angle elbow connecting pipes, and the three right-angle elbow connecting pipes are connected end to end in sequence.

3. The cavity cooling device for vacuum coating machine according to claim 1, wherein, The inner shell (31) and the outer shell (32) are provided with a positioning groove (34) on their adjacent sides, and the inner shell (31) is fitted with a sealing gasket (35) through the positioning groove (34). The sealing gasket (35) is made of rubber.

4. The cavity cooling device for vacuum coating machine according to claim 3, characterized in that, The thickness of the sealing gasket (35) is greater than the depth of the positioning groove (34), and the side of the sealing gasket (35) can contact the outer shell (32).

5. The cavity cooling device for vacuum coating machine according to claim 1, wherein, The inner shell (31) has a U-shaped structure design, and the notch of the inner shell (31) faces the door panel (2).

6. The cavity cooling device for vacuum coating machine according to claim 1, wherein, The connecting elbow structure (37) is located below the bottom surface of the machine cavity (1), and there is a gap between the connecting elbow structure (37) and the column (43).

7. The cavity cooling device for vacuum coating machine according to claim 1, wherein, The cooling medium circulation mechanism (4) also includes a protective plate (42), on which a ventilation groove is provided, and the protective plate (42) can be connected to the base plate (41) by bolts.

8. The cavity cooling device for a vacuum coating machine according to claim 7, characterized in that The base plate (41) has a groove that can be inserted into the protective plate (42), and the outer end of the groove is designed to be open.

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