probe head

Abstract

The utility model discloses an embodiment provides a kind of measuring head, the measuring head includes main body, main body includes at least one spring parallelogram assembly, spring parallelogram assembly includes the plate body that is arranged in parallel along first direction, the connecting plate being arranged between plate body and the spring leaf of connecting adjacent plate body and connecting plate, and spring parallelogram assembly further includes the displacement sensor being arranged along first direction, displacement sensor includes the coil with inner hole and the magnet bar being inserted in inner hole, this structure is not sensitive to dust, oil stain, cutting fluid etc. due to coil and magnet bar, expand the environmental adaptability of three coordinate measuring machine, simultaneously, relatively insensitive to mechanical vibration, and coil and magnet bar between it can be set larger gap, reduce the control difficulty of three coordinate measuring machine and improve detection precision, in addition, the temperature coefficient of magnet and coil material is relatively stable, and there is no physical contact between magnet bar and coil, precision will not be reduced due to mechanical wear.

Description

Technical Field

[0001] This utility model relates to a probe, and more particularly to a probe used in a coordinate measuring machine. Background Technology

[0002] A coordinate measuring machine (CMM) is an instrument capable of measuring geometric shapes, lengths, and circumferential divisions within a six-sided spatial range. Its measurement functions include dimensional accuracy, positioning accuracy, geometric accuracy, and contour accuracy, and it is widely used in industries such as mold making, aerospace, automotive, and electronics.

[0003] Typically, coordinate measuring machines (CMMs) require a probe to accurately provide a trigger signal. To achieve higher precision, such as 1 micrometer or higher, current probes often employ components known as spring parallelogram structures, as shown in documents such as US3869799A and JP3857334B2. These spring parallelogram structures include a pair of opposing structural plates, a connecting plate between the pair of structural plates, and leaf springs between adjacent structural plates and the connecting plate. This structure restricts the pair of structural plates to elastic movement only in a single direction. Position detection elements and actuation units are placed between the spring parallelogram structures to achieve position detection and zeroing in a single direction, thus enabling high-precision detection.

[0004] Typically, a linear encoder is used to accurately detect the positional changes of a spring parallelogram structure, thereby providing an actuation signal to the actuator. However, the reading head and scale bar of the linear encoder need to be kept very clean, as contaminants can severely affect accuracy or even cause failure. This poses a significant challenge in the working environment of a coordinate measuring machine or certain machining sites. In addition, the gap between the reading head and the scale bar of the linear encoder is extremely small, and even slight vibrations can lead to reduced accuracy, require additional compensation calculations, or even damage, posing challenges to the motion control of the coordinate measuring machine. Therefore, further structural optimization is needed to provide a new technical solution to address the aforementioned technical problems. Utility Model Content

[0005] Therefore, this utility model provides a probe to solve the above-mentioned technical problems.

[0006] The probe includes a main body, which includes at least one spring parallelogram assembly. The spring parallelogram assembly includes plates arranged parallel to each other along a first direction, a connecting plate disposed between the plates, and a spring plate connecting adjacent plates and the connecting plate. The spring parallelogram assembly also includes a displacement sensor arranged along the first direction. The displacement sensor includes a coil with an inner hole and a magnetic rod inserted into the inner hole.

[0007] The main body includes an X-axis spring parallelogram assembly, a Y-axis spring parallelogram assembly, and a Z-axis spring parallelogram assembly. The X-axis spring parallelogram assembly is configured to move elastically along the X-axis direction, the Y-axis spring parallelogram assembly is configured to move elastically along the Y-axis direction, and the Z-axis spring parallelogram assembly is configured to move elastically along the Z-axis direction.

[0008] The X-axis spring parallelogram assembly includes a probe base plate and a main connecting plate arranged in parallel intervals, a pair of X-axis connecting plates disposed between the probe base plate and the main connecting plate, and X-axis springs disposed between adjacent probe base plates and the left X-axis connecting plate, the left X-axis connecting plate and the main connecting plate, the main connecting plate and the right X-axis connecting plate, and the right X-axis connecting plate and the probe base plate. The Y-axis spring parallelogram assembly is disposed on the upper side of the X-axis parallelogram assembly, including a main connecting plate and an upper structural plate arranged in parallel intervals, a pair of Y-axis connecting plates disposed between the main connecting plate and the upper structural plate, and the main connecting plate and the probe base plate. Y-axis springs are provided between the plate and the front Y-axis connecting plate, the front Y-axis connecting plate and the upper structural plate, the upper structural plate and the rear Y-axis connecting plate, and the rear Y-axis connecting plate and the main connecting plate. The Z-axis spring parallelogram assembly is located outside the X-axis spring parallelogram assembly and the Y-axis spring parallelogram assembly. The Z-axis spring parallelogram assembly includes a right structural plate and a left structural plate arranged in parallel intervals, a lower connecting plate and an upper connecting plate arranged between the right structural plate and the left structural plate, and Z-axis springs are provided between the left structural plate and the lower connecting plate, the lower connecting plate and the right structural plate, the right structural plate and the upper connecting plate, and the upper connecting plate and the left structural plate.

[0009] The probe includes a main frame, and the right structural plate and the upper structural plate are both part of the main frame.

[0010] The main frame includes a left extension plate extending to the left structural plate, and the displacement sensor includes a Z-axis displacement sensor. The coil of the Z-axis displacement sensor is disposed on the left structural plate, and the magnetic rod of the Z-axis displacement sensor is disposed on the left extension plate.

[0011] The main frame also includes a right extension plate. The upper structural plate, right structural plate, left extension plate and right extension plate are arranged to form an accommodating space. The X-axis spring parallelogram assembly and the Y-axis spring parallelogram assembly are located within the accommodating space.

[0012] The upper structural plate, right structural plate, left extension plate, and right extension plate are integrally formed.

[0013] The left extension plate includes a mounting hole that extends through the thickness direction of the left extension plate. The axis of the mounting hole is parallel to the Y-axis. The displacement sensor includes a Y-axis displacement sensor, and the coil of the Y-axis displacement sensor is disposed in the mounting hole.

[0014] Within the accommodating space, the main frame also includes a covering body that covers the mounting hole, wherein the extension length of the covering body along the Y-axis direction is greater than 50% of the length of the Y-axis displacement sensor coil.

[0015] The left extension plate and the left structural plate are separated by a space, and the Z-axis displacement sensor is disposed in the space. The left extension plate includes an edge portion, and the distance between the Z-axis displacement sensor and the edge portion is 4-8 mm.

[0016] Beneficial Effects: This utility model embodiment provides a probe, which includes a main body. The main body includes at least one spring parallelogram assembly. The spring parallelogram assembly includes plates arranged parallel to each other along a first direction, a connecting plate disposed between the plates, and a spring connecting adjacent plates and the connecting plate. The spring parallelogram assembly also includes a displacement sensor arranged along the first direction. The displacement sensor includes a coil with an inner hole and a magnetic rod inserted into the inner hole. This structure, on the one hand, expands the environmental adaptability of the coordinate measuring machine because the coil and magnetic rod are insensitive to dust, oil, cutting fluid, etc. On the other hand, this structure is relatively insensitive to mechanical vibration. At the same time, a larger gap can be set between the coil and the magnetic rod, reducing the control difficulty of the coordinate measuring machine and improving the detection accuracy. In addition, the temperature coefficients of the magnet and coil materials are relatively stable and are usually less affected by temperature than optical systems. Furthermore, there is no physical contact between the magnetic rod and the coil, which is a frictionless measurement and will not cause a decrease in accuracy due to mechanical wear. Attached Figure Description

[0017] Figure 1 A schematic diagram of the probe according to an embodiment of this utility model;

[0018] Figure 2 for Figure 1 Enlarged schematic diagram of the main body;

[0019] Figure 3 for Figure 1 A simplified structural diagram;

[0020] Figure 4 for Figure 1 A 3D view of the displacement sensor in the image;

[0021] Figure 5 for Figure 1 A three-dimensional schematic diagram of the main framework;

[0022] Figure 6 for Figure 5 Left-facing upward view diagram;

[0023] Figure 7 for Figure 2 The right view.

[0024] Component descriptions in the diagram:

[0025] Main body 10; Probe substrate 11; X-axis connecting plate 111; X-axis spring 112; Main connecting plate 12; Y-axis connecting plate 121; Y-axis spring 122; Main frame 13; Accommodation space 1300; Right structural plate 1301; Upper structural plate 1302; Left extension plate 1303; Right extension plate 1304; Mounting hole 1305; Cover body 1306; Lower connecting plate 131; Upper connecting plate 132; Z-axis spring 133; Left structural plate 14; Spacing space 140; Z-axis displacement sensor 15; Coil 151; Magnetic rod 152; Y-axis displacement sensor 16; Probe assembly 20. Detailed Implementation

[0026] To make the objectives, technical solutions, and effects of this application clearer and more explicit, the embodiments of the technical solutions of this application will be described in detail below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of this application, and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0027] Please refer to the attached document. Figure 1-7 This utility model provides a probe, which includes a body 10. The body 10 includes at least one spring parallelogram assembly. The spring parallelogram assembly is configured to move elastically along a first direction. The elastic movement refers to the movement of a part of the spring parallelogram assembly returning to its original shape under the action of an external force. In this embodiment, the body 10 includes three spring parallelogram assemblies, which are configured to move elastically along mutually perpendicular X-axis, Y-axis and Z-axis directions, respectively. For ease of understanding, the spring parallelogram assemblies in the X-axis direction, Y-axis direction and Z-axis direction are referred to as the X-axis spring parallelogram assembly, Y-axis spring parallelogram assembly and Z-axis spring parallelogram assembly, respectively. The X-axis spring parallelogram assembly, Y-axis spring parallelogram assembly and Z-axis spring parallelogram assembly will be described in detail below.

[0028] In this embodiment, the X-axis spring parallelogram assembly includes a probe base plate 11 and a main connecting plate 12 arranged vertically at intervals, and a pair of X-axis connecting plates 111 disposed between the probe base plate 11 and the main connecting plate 12. The pair of X-axis connecting plates 111 are arranged vertically, and the probe base plate 11 is adjacent to the left X-axis connecting plate 111, the left X-axis connecting plate 111 is adjacent to the main connecting plate 12, the main connecting plate 12 is adjacent to the right X-axis connecting plate 111, and the right X-axis connecting plate 111 is adjacent to the probe base plate 11. X-axis springs 112 are disposed between the adjacent probe base plate 11 and the left X-axis connecting plate 111, the left X-axis connecting plate 111 is adjacent to the main connecting plate 12, the main connecting plate 12 is adjacent to the right X-axis connecting plate 111, and the right X-axis connecting plate 111 is adjacent to the probe base plate 11. The X-axis springs 112 are arranged vertically so that the X-axis spring parallelogram assembly is limited to elastic movement along the X-axis direction.

[0029] The X-axis spring 112 is a thin sheet with a first base surface. The X-axis spring 112 is configured to elastically deform in a direction perpendicular to the first base surface. The vertical arrangement of the X-axis spring 112 means that the first base surface of the X-axis spring 112 is in a vertical direction and perpendicular to the X-axis direction, so that the X-axis spring 112 can elastically deform in the X-axis direction perpendicular to the first base surface. The X-axis spring parallelogram assembly is constrained to elastically move in the X-axis direction by connecting the X-axis springs 112 of each component.

[0030] The Y-axis spring parallelogram assembly is disposed above the X-axis parallelogram assembly and is constrained to move elastically along the Y-axis direction. In this embodiment, the Y-axis spring parallelogram assembly includes a main connecting plate 12 and an upper structural plate 1302 arranged in parallel intervals. A pair of Y-axis connecting plates 121 are disposed between the main connecting plate 12 and the upper structural plate 1302. The pair of Y-axis connecting plates 121 are arranged in a vertical direction. Similarly, Y-axis springs 122 are disposed between the main connecting plate 12 and the front Y-axis connecting plate 121, between the front Y-axis connecting plate 121 and the upper structural plate 1302, between the upper structural plate 1302 and the rear Y-axis connecting plate 121, and between the rear Y-axis connecting plate 121 and the main connecting plate 12. These Y-axis springs 122 are configured to be able to elastically deform along the Y-axis direction.

[0031] The Z-axis spring parallelogram assembly is defined to move elastically along the Z-axis direction. In this embodiment, the Z-axis spring parallelogram assembly is disposed outside the X-axis spring parallelogram assembly and the Y-axis spring parallelogram assembly. The Z-axis spring parallelogram assembly includes a right structural plate 1301 and a left structural plate 14 arranged in parallel intervals, and a lower connecting plate 131 and an upper connecting plate 132 disposed between the right structural plate 1301 and the left structural plate 14. The pair of Z-axis connecting plates are arranged in a horizontal direction. Similarly, Z-axis springs 133 are disposed between the left structural plate 14 and the lower connecting plate 131, the lower connecting plate 131 and the right structural plate 1301, the right structural plate 1301 and the upper connecting plate 132, and the upper connecting plate 132 and the left structural plate 14. These Z-axis springs 133 are configured to be able to elastically deform along the Z-axis direction.

[0032] Understandably, each spring parallelogram assembly also includes a displacement sensor disposed along a first direction. The displacement sensor includes a coil 151 with an inner hole and a magnetic rod 152 inserted into the inner hole. The first direction means that the coil 151 includes an axis, and the axis of the coil 151 is parallel to the first direction. Specifically, the first direction of the displacement sensor disposed in the X-axis spring parallelogram assembly is the X-axis direction, the first direction of the displacement sensor disposed in the Y-axis spring parallelogram assembly is the Y-axis direction, and the first direction of the displacement sensor disposed in the Z-axis spring parallelogram assembly is the Z-axis direction.

[0033] The displacement sensor includes a coil 151 with an inner hole and a magnetic rod 152 inserted into the inner hole. It is understood that when the magnetic rod 152 moves relative to the coil 151 along a first direction, the magnetic flux of the coil 151 changes, causing a change in the induced current or voltage generated in the coil 151. By measuring the change in current or voltage in the coil 151, the position change of the magnetic rod 152 is obtained. It is also understood that the probe may include a detection device connected to the coil 151 to obtain the changing voltage or current signal. Simultaneously, using the coil 151 and magnetic rod 152 arranged along the first direction, on the one hand, because the coil 151... Firstly, the magnetic rod 152 is insensitive to dust, oil, cutting fluid, etc., thus expanding the environmental adaptability of the coordinate measuring machine and avoiding the cleaning problems of the reading head and grating strip of the existing grating ruler. Secondly, the electromagnetic induction principle itself is relatively insensitive to mechanical vibration. At the same time, a larger gap can be set between the coil 151 and the magnetic rod 152, reducing the control difficulty of the coordinate measuring machine and improving the detection accuracy. In addition, the temperature coefficients of the magnet and coil 151 materials are relatively stable and are usually less affected by temperature than optical systems. Furthermore, there is no physical contact between the magnetic rod 152 and the coil 151, which is a frictionless measurement and will not cause a decrease in accuracy due to mechanical wear.

[0034] Furthermore, the main body 10 includes a main frame 13, the right structural plate 1301 is part of the main frame 13, and the main frame 13 includes a left extension plate 1303 extending towards the left structural plate 14. The displacement sensor includes a Z-axis displacement sensor 15, the coil 151 of the Z-axis displacement sensor 15 is disposed on the left structural plate 14, and the magnetic rod 152 of the Z-axis displacement sensor 15 is disposed on the left extension plate 1303.

[0035] Furthermore, a space 140 is provided between the left extension plate 1303 and the left structural plate 14, and the Z-axis displacement sensor 15 is disposed in the space 140. At the same time, the left extension plate includes an edge portion, and the distance between the Z-axis displacement sensor 15 and the edge portion is 4-8mm.

[0036] Furthermore, the upper structural plate 1302 is also part of the main frame 13, which also includes a right extension plate 1304. The upper structural plate 1302, right structural plate 1301, left extension plate 1303, and right extension plate 1304 form an accommodating space 1300. The X-axis spring parallelogram assembly and the Y-axis spring parallelogram assembly are located within the accommodating space 1300, making the entire probe structure compact. At the same time, this structure can also protect the X-axis spring parallelogram assembly, the Y-axis spring parallelogram assembly, and the internal components.

[0037] Furthermore, the upper structural plate 1302, the right structural plate 1301, the left extension plate 1303, and the right extension plate 1304 are integrally formed.

[0038] Furthermore, the left extension plate 1303 includes a mounting hole 1305 that passes through the thickness direction of the left extension plate 1303. The axis of the mounting hole 1305 is parallel to the Y-axis direction. The displacement sensor includes a Y-axis displacement sensor 16, and the coil 151 of the Y-axis displacement sensor 16 is disposed in the mounting hole 1305.

[0039] Furthermore, within the accommodating space 1300, the main frame 13 also includes a covering body 1306 covering the mounting hole 1305. The extension length of the covering body 1306 along the Y-axis direction is greater than 50% of the length of the coil 151 of the Y-axis displacement sensor 16, so that the Y-axis displacement sensor 16 remains stable.

[0040] Furthermore, the magnetic rod 152 of the Y-axis displacement sensor 16 is mounted on the main connecting plate 12.

[0041] Understandably, the probe also includes a probe assembly 20, which is connected to the probe substrate 11.

[0042] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A probe head comprising a body, said body comprising at least one spring parallelogram assembly, characterised in that, The spring parallelogram assembly includes plates arranged parallel to each other along a first direction, a connecting plate disposed between the plates, and a spring sheet connecting adjacent plates and the connecting plate. The spring parallelogram assembly also includes a displacement sensor disposed along the first direction, the displacement sensor including a coil with an inner hole and a magnetic rod inserted into the inner hole.

2. The probe head of claim 1, wherein The main body includes an X-axis spring parallelogram assembly, a Y-axis spring parallelogram assembly, and a Z-axis spring parallelogram assembly. The X-axis spring parallelogram assembly is configured to move elastically along the X-axis direction, the Y-axis spring parallelogram assembly is configured to move elastically along the Y-axis direction, and the Z-axis spring parallelogram assembly is configured to move elastically along the Z-axis direction.

3. The probe head of claim 2, wherein, The X-axis spring parallelogram assembly includes a probe base plate and a main connecting plate arranged in parallel intervals, a pair of X-axis connecting plates disposed between the probe base plate and the main connecting plate, and X-axis spring sheets disposed between adjacent probe base plates and the left X-axis connecting plate, the left X-axis connecting plate and the main connecting plate, the main connecting plate and the right X-axis connecting plate, and the right X-axis connecting plate and the probe base plate. The Y-axis spring parallelogram assembly is disposed on the upper side of the X-axis spring parallelogram assembly, including a main connecting plate and an upper structural plate arranged in parallel intervals, a pair of Y-axis connecting plates disposed between the main connecting plate and the upper structural plate, and the main connecting plate and the probe base plate. Y-axis springs are provided between the plate and the front Y-axis connecting plate, the front Y-axis connecting plate and the upper structural plate, the upper structural plate and the rear Y-axis connecting plate, and the rear Y-axis connecting plate and the main connecting plate. The Z-axis spring parallelogram assembly is located outside the X-axis spring parallelogram assembly and the Y-axis spring parallelogram assembly. The Z-axis spring parallelogram assembly includes a right structural plate and a left structural plate arranged in parallel intervals, a lower connecting plate and an upper connecting plate arranged between the right structural plate and the left structural plate, and Z-axis springs are provided between the left structural plate and the lower connecting plate, the lower connecting plate and the right structural plate, the right structural plate and the upper connecting plate, and the upper connecting plate and the left structural plate.

4. The probe head of claim 3, wherein The probe includes a main frame, and the right structural plate and the upper structural plate are both part of the main frame.

5. The probe head of claim 4, wherein, The main frame includes a left extension plate extending to the left structural plate, and the displacement sensor includes a Z-axis displacement sensor. The coil of the Z-axis displacement sensor is disposed on the left structural plate, and the magnetic rod of the Z-axis displacement sensor is disposed on the left extension plate.

6. The probe head of claim 5, wherein, The main frame also includes a right extension plate. The upper structural plate, right structural plate, left extension plate and right extension plate are arranged to form an accommodating space. The X-axis spring parallelogram assembly and the Y-axis spring parallelogram assembly are located within the accommodating space.

7. The probe as described in claim 6, characterized in that, The upper structural plate, right structural plate, left extension plate, and right extension plate are integrally formed.

8. The probe as described in claim 6, characterized in that, The left extension plate includes a mounting hole that extends through the thickness direction of the left extension plate. The axis of the mounting hole is parallel to the Y-axis direction. The displacement sensor includes a Y-axis displacement sensor, and the coil of the Y-axis displacement sensor is disposed in the mounting hole.

9. The probe as described in claim 8, characterized in that, Within the accommodating space, the main frame also includes a covering body that covers the mounting hole, wherein the extension length of the covering body along the Y-axis direction is greater than 50% of the length of the Y-axis displacement sensor coil.

10. The probe as described in claim 6, characterized in that, The left extension plate and the left structural plate are separated by a space, and the Z-axis displacement sensor is disposed in the space. The left extension plate includes an edge portion, and the distance between the Z-axis displacement sensor and the edge portion is 4-8 mm.

Images