Adjustable convenient clamp for cleaning parts of semiconductor equipment

Abstract

The utility model discloses a kind of adjustable semiconductor equipment spare parts washing convenient clamps, including bottom plate, the bottom plate top side fixed installation has support, the upper end of the support is provided with placing plate, the inside of the support is equipped with cavity, the center of the support top is movably connected with support column, the center in the support is provided with second gear, the side of the second gear is engaged with first gear. The adjustable semiconductor equipment spare parts washing convenient clamp, by the design of telescopic groove, electric cylinder, telescopic plate, support plate and clamping seat, the spray gun is fixed in clamping seat, cooperate electric cylinder drive telescopic plate lifting, completely replace artificial holding, greatly reduce operating intensity, avoid the deviation of flushing or equipment knock risk caused by hand-held shaking simultaneously, electric cylinder can drive spray gun in vertical direction accurate fine adjustment, match the cleaning demand of different height spare parts.

Description

Technical Field

[0001] This utility model relates to the field of clamping technology, specifically to an adjustable convenient clamp for cleaning semiconductor equipment components. Background Technology

[0002] Semiconductor equipment components come into contact with various chemical reagents and particles during manufacturing. Residual contaminants can directly affect chip yield and equipment stability, thus requiring regular cleaning. During cleaning, components must be secured with specialized clamps to prevent displacement or surface damage during high-pressure spraying. The clamps are precisely positioned to ensure the rinsing water flow covers all critical areas, effectively removing chemical residues, particulate matter, and other impurities. The high-pressure spraying of cleaning fluid, combined with the stable support of the clamps, enables efficient and non-destructive cleaning, ensuring the operational accuracy and lifespan of the semiconductor equipment.

[0003] Existing convenient clamps for cleaning semiconductor equipment components have significant design flaws. Their clamping method often relies on workers manually holding a spray gun for rinsing, which not only greatly increases the labor intensity but also easily leads to fatigue from prolonged hand-held operation, thus affecting cleaning quality and safety. Furthermore, after fixing the components, they generally lack a flexible rotation mechanism, resulting in numerous blind spots during cleaning and failing to achieve thorough, all-around cleaning. To achieve the desired cleaning effect, workers have to repeatedly adjust the clamp position or the angle of the components, further reducing work efficiency. Therefore, we propose an adjustable convenient clamp for cleaning semiconductor equipment components. Utility Model Content

[0004] The purpose of this invention is to provide an adjustable, convenient clamp for cleaning semiconductor equipment components, addressing the significant design flaws of existing convenient clamps for cleaning semiconductor equipment components mentioned in the background art. These clamps often rely on workers holding a spray gun for rinsing, which not only significantly increases the labor intensity but also leads to fatigue from prolonged hand-held operation, thus affecting cleaning quality and safety. Furthermore, after fixing the components, there is generally a lack of flexible rotation mechanisms, resulting in numerous blind spots during cleaning and preventing thorough, all-around cleaning. To achieve the desired cleaning effect, workers must repeatedly adjust the clamp position or component angle, further reducing work efficiency.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an adjustable convenient clamp for cleaning semiconductor equipment components, comprising a base plate, a support fixedly mounted on one side of the top of the base plate, a placement plate provided at the upper end of the support, a cavity inside the support, a support column movably connected to the center of the top of the support, a second gear disposed at the center inside the support, a first gear meshing with one side of the second gear, a transmission rod movably connected to the bottom position of one side of the support, a vertical plate fixedly mounted on one side of the top of the base plate, a protective box fixedly connected to one side of the vertical plate, and the vertical plate... A motor is fixedly installed inside the protective box on one side. A fourth gear is provided at the lower end of the motor. A third gear is meshed with one side of the fourth gear. A telescopic groove is opened at the center of the top of the vertical plate. An electric cylinder is fixedly installed at the bottom of the telescopic groove. A telescopic plate is provided at the upper end of the electric cylinder. The top of the telescopic plate extends through to the outside of the telescopic groove and is fixedly connected to a support plate. A clamp is fixedly installed on one side of the top of the support plate. Side plates are fixedly connected to both sides of the support. Clamping blocks are provided on both sides of the upper end of the support. Adjusting screws are threadedly connected to the top of the opposite sides of the two side plates.

[0006] Compared with the prior art, the beneficial effects of this utility model are:

[0007] This adjustable fixture for cleaning semiconductor equipment components utilizes a design incorporating a telescopic groove, electric cylinder, telescopic plate, support plate, and clamp. The spray gun is fixed within the clamp, and the electric cylinder drives the telescopic plate to rise and fall, completely replacing manual handling and significantly reducing workload. It also avoids the risk of rinsing deviations or equipment collisions caused by hand tremors. The electric cylinder allows for precise vertical adjustments of the spray gun to match the cleaning needs of components at different heights. The design includes a placement plate, support column, transmission rod, first gear, second gear, motor, third gear, and fourth gear. The motor drives the fourth gear, which in turn transmits power through the third gear, transmission rod, and first gear to the second gear, ultimately rotating the support column and placement plate. This allows for dynamic angle adjustment of the components, facilitating spray rinsing and completely eliminating cleaning blind spots inherent in traditional fixtures, significantly improving cleaning coverage. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of the structure of this utility model;

[0009] Figure 2 This is a three-dimensional structural view of the telescopic plate of this utility model;

[0010] Figure 3 This is a three-dimensional view of the clamping base of this utility model;

[0011] Figure 4 This is the main view of the structure of this utility model.

[0012] In the diagram: 1. Base plate; 2. Support; 3. Placement plate; 4. Support column; 5. Transmission rod; 6. First gear; 7. Second gear; 8. Vertical plate; 9. Protective box; 10. Motor; 11. Third gear; 12. Fourth gear; 13. Telescopic groove; 14. Electric cylinder; 15. Telescopic plate; 16. Slide groove; 17. Sliding block; 18. Support plate; 19. Clamp; 20. Adjusting bolt; 21. Pressure plate; 22. Side plate; 23. Adjusting screw; 24. Clamping block. Detailed Implementation

[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0014] Please see Figure 1-4 This utility model provides a technical solution: an adjustable convenient clamp for cleaning semiconductor equipment components, including a base plate 1, a support 2 fixedly installed on one side of the top of the base plate 1, a placement plate 3 provided at the upper end of the support 2, a cavity inside the support 2, a support column 4 movably connected to the center of the top of the support 2, a second gear 7 provided at the center inside the support 2, a first gear 6 meshing with one side of the second gear 7, a transmission rod 5 movably connected to the bottom position of one side of the support 2, a vertical plate 8 fixedly installed on one side of the top of the base plate 1, a protective box 9 fixedly connected to one side of the vertical plate 8, and a corresponding fixed installation inside the protective box 9 on one side of the vertical plate 8. There is a motor 10, and a fourth gear 12 is provided at the lower end of the motor 10. A third gear 11 is meshed with one side of the fourth gear 12. A telescopic groove 13 is provided at the center of the top of the vertical plate 8. An electric cylinder 14 is fixedly installed at the bottom of the telescopic groove 13. A telescopic plate 15 is provided at the upper end of the electric cylinder 14. The top of the telescopic plate 15 extends through to the outside of the telescopic groove 13 and is fixedly connected to a support plate 18. A clamp 19 is fixedly installed on one side of the top of the support plate 18. Side plates 22 are fixedly connected to both sides of the support 2. Clamping blocks 24 are provided on both sides of the upper end of the support 2. Adjusting screws 23 are threadedly connected to the top of the opposite side of the two side plates 22.

[0015] The top of the support column 4 is fixedly connected to the center of the bottom of the placement plate 3, and the lower end of the support column 4 extends into the interior of the support 2 and is fixedly connected to the center of the top of the second gear 7. The placement plate 3 and the second gear 7 are rigidly connected by the support column 4 to ensure that the rotational power can be efficiently transmitted to the placement plate 3 and realize the synchronous rotation of the parts.

[0016] One end of the transmission rod 5 passes through the interior of the support 2 and is fixedly connected to the center of one side of the first gear 6. The other end of the transmission rod 5 passes through the interior of the vertical plate 8 and the protective box 9 in sequence and is fixedly connected to the center of one side of the third gear 11. The motor 10 is fixedly connected to the main shaft through its bottom output end. The bottom of the main shaft is fixedly connected to the center of the top of the fourth gear 12. The transmission rod 5 acts as a power transmission link, transmitting the driving force of the motor 10 through the fourth gear 12 and the third gear 11 to the first gear 6 inside the support 2, and finally driving the second gear 7 to rotate.

[0017] The bottom of the protective box 9 is fixedly connected to the top of the base plate 1. The electric cylinder 14 is fixedly connected to the piston rod through its top output end. The top of the piston rod is fixedly connected to the bottom of the telescopic plate 15. Slider 17 is fixedly connected to the bottom of both sides of the telescopic plate 15. Slide grooves 16 are opened on the top of both sides of the inner wall of the telescopic groove 13. The opposite sides of the two sliders 17 extend into the interior of the two slide grooves 16 and slide in a sliding connection with the inner wall of the slide grooves 16. The protective box 9 provides physical protection for the motor 10 and the transmission system to prevent the cleaning fluid from splashing and causing short circuits or corrosion. The electric cylinder 14 drives the telescopic plate 15 to rise and fall through the piston rod. With the guide structure of the slider 17 and the slide groove 16, the accuracy and stability of the spray gun height adjustment are ensured to meet the cleaning needs of parts of different sizes.

[0018] A slot is provided in the center of one side of the clamp 19. An adjusting bolt 20 is threaded to the center of the top of the clamp 19. The lower end of the adjusting bolt 20 passes through the inside of the slot and is fixedly connected to the pressure plate 21. The slot and the adjusting bolt 20 form a quick clamping mechanism. The spray gun is inserted into the clamping slot, and the pressure plate 21 is pressed down by rotating the adjusting bolt 20. Spray guns of different diameters can be firmly fixed to prevent the spray gun from falling off during rinsing.

[0019] The two adjusting screws 23 are respectively inserted into the interior of the two side plates 22 on opposite sides and are fixedly connected to the center of the opposite side of the two clamping blocks 24. By rotating the adjusting screws 23, the clamping blocks 24 are pushed to clamp and fix the semiconductor equipment components.

[0020] First, place the semiconductor equipment components to be cleaned on the placement plate 3 at the upper end of the support 2. By rotating the adjusting screws 23 on both sides of the support 2, push the clamping block 24 to move towards the center to clamp and fix the components, ensuring that they remain stable during the cleaning process.

[0021] Next, insert the spray gun into the slot on one side of the clamp 19, rotate the adjusting bolt 20 on the top of the clamp 19 to press down the pressure plate 21, and firmly fix the spray gun on the clamp 19 to prevent it from falling off during rinsing. Then, according to the height of the parts, start the electric cylinder 14. The electric cylinder 14 drives the telescopic plate 15 to rise and fall within the telescopic groove 13 through the piston rod. The sliders 17 on both sides of the telescopic plate 15 slide along the slide groove 16 to ensure the accuracy and stability of the spray gun height adjustment, so that the spray gun is aligned with the appropriate position of the parts. Finally, start the motor 10. The motor 10 drives the fourth gear 12 to rotate through the main shaft. The fourth gear 12 drives the third gear 11 to rotate. The third gear 11 transmits power to the first gear 6 inside the support 2 through the transmission rod 5. The first gear 6 drives the second gear 7 to rotate. The second gear 7 drives the placement plate 3 to rotate through the support column 4, thereby causing the parts fixed on the placement plate 3 to rotate. At this time, the spray gun rinses the rotating parts. Through the rotation of the parts and the fixation of the spray gun, or in conjunction with the raising and lowering of the spray gun, all-round cleaning of the parts is achieved.

[0022] In summary, this adjustable convenient clamp for cleaning semiconductor equipment components, through the design of the telescopic groove 13, electric cylinder 14, telescopic plate 15, support plate 18, and clamp 19, fixes the spray gun in the clamp 19. The electric cylinder 14 drives the telescopic plate 15 to rise and fall, completely replacing manual handling, significantly reducing workload, and avoiding the risk of rinsing deviations or equipment collisions caused by hand shaking. The electric cylinder 14 can drive the spray gun for precise vertical adjustment to match the cleaning needs of components of different heights. The design of the placement plate 3, support column 4, transmission rod 5, first gear 6, second gear 7, motor 10, third gear 11, and fourth gear 12, with the motor 10 driving the fourth gear 12, which in turn transmits power through the third gear 11, transmission rod 5, and first gear 6 to the second gear 7, ultimately rotating the support column 4 and placement plate 3, allows for dynamic adjustment of the component's angle. Combined with the spray gun rinsing, this completely solves the cleaning dead zone problem of traditional fixed clamps, significantly improving cleaning coverage.

[0023] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0024] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An adjustable convenient clamp for cleaning semiconductor device components, comprising a base plate (1), characterized in that: A support (2) is fixedly installed on one side of the top of the base plate (1). A placement plate (3) is provided at the upper end of the support (2). A cavity is opened inside the support (2). A support column (4) is movably connected to the center of the top of the support (2). A second gear (7) is provided at the center inside the support (2). A first gear (6) is meshed with one side of the second gear (7). A transmission rod (5) is movably connected to the bottom side of one side of the support (2). A vertical plate (8) is fixedly installed on one side of the top of the base plate (1). A protective box (9) is fixedly connected to one side of the vertical plate (8). A motor (10) is fixedly installed inside the protective box (9) on one side of the vertical plate (8). A first gear (6) is provided at the lower end of the motor (10). Four gears (12), one side of the fourth gear (12) is meshed with a third gear (11), the top center of the vertical plate (8) is provided with a telescopic groove (13), the bottom of the telescopic groove (13) is fixedly installed with an electric cylinder (14), the upper end of the electric cylinder (14) is provided with a telescopic plate (15), the top of the telescopic plate (15) extends through to the outside of the telescopic groove (13) and is fixedly connected with a support plate (18), one side of the top of the support plate (18) is fixedly installed with a clamp (19), both sides of the support (2) are fixedly connected with side plates (22), the upper end of the support (2) is provided with clamps (24) on both sides, and the two side plates (22) are threadedly connected with adjusting screws (23) on the opposite sides near the top.

2. The adjustable semiconductor device component cleaning fixture of claim 1, wherein: The top of the support column (4) is fixedly connected to the center of the bottom of the placement plate (3), and the lower end of the support column (4) extends into the interior of the support (2) and is fixedly connected to the center of the top of the second gear (7).

3. The adjustable convenient clamp for cleaning semiconductor device components according to claim 1, characterized in that: One end of the transmission rod (5) passes through the interior of the support (2) and is fixedly connected to the center of one side of the first gear (6). The other end of the transmission rod (5) passes through the interior of the vertical plate (8) and the protective box (9) in sequence and is fixedly connected to the center of one side of the third gear (11). The motor (10) is fixedly connected to the main shaft through the output end at its bottom. The bottom of the main shaft is fixedly connected to the center of the top of the fourth gear (12).

4. The adjustable convenient clamp for cleaning semiconductor device components according to claim 1, characterized in that: The bottom of the protective box (9) is fixedly connected to the top of the base plate (1). The electric cylinder (14) is fixedly connected to the piston rod through its top output end. The top of the piston rod is fixedly connected to the bottom of the telescopic plate (15). Slider (17) is fixedly connected to the bottom of both sides of the telescopic plate (15). Slide grooves (16) are opened on the top of both sides of the inner wall of the telescopic groove (13). The opposite sides of the two sliders (17) extend into the interior of the two slide grooves (16) and slide in connection with the inner wall of the slide grooves (16).

5. The adjustable convenient clamp for cleaning semiconductor device components according to claim 1, characterized in that: A slot is provided at the center of one side of the clamp (19), and an adjusting bolt (20) is threadedly connected to the center of the top of the clamp (19). The lower end of the adjusting bolt (20) passes through the interior of the slot and is fixedly connected to a pressure plate (21).

6. The adjustable convenient clamp for cleaning semiconductor device components according to claim 1, characterized in that: The two adjusting screws (23) pass through the interior of the two side plates (22) on opposite sides and are fixedly connected to the center of the opposite side of the two clamping blocks (24).

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