Wafer cleaning apparatus guard tray with convenient drainage

Abstract

A wafer cleaning equipment protection cover bottom disc convenient for drainage comprises a wafer protection cover bottom disc, six bottom disc bolt mounting holes are arranged on the wafer protection cover bottom disc, a positioning pin is arranged on the side of the bottom disc bolt mounting hole at the upper right of the wafer protection cover bottom disc, a welding positioning line is arranged in the middle of the wafer protection cover bottom disc, a waist groove drainage port is arranged in the middle of the two bottom disc bolt mounting holes at the upper left of the wafer protection cover bottom disc, and a flange interface is arranged on the periphery of the waist groove drainage port. The welding positioning line arranged on the protection cover bottom disc replaces the deepened welding notch, the processing process is more convenient, the processing time and cost are saved, and the auxiliary welding function can be achieved. The processing technology is improved, the inclined waist groove drainage port replaces the traditional straight drainage port, the hole of the drainage port does not need to pass through the top of the protection cover, the efficiency of drainage is improved, and the protection cover is more beautiful and integral.

Description

Technical Field

[0001] This invention relates to a chassis, specifically to a wafer cleaning equipment protective cover chassis with chassis bolt mounting holes, positioning pins, welding positioning lines, waist groove drainage outlets, and flange interfaces, which simplifies the processing procedure, improves processing efficiency, makes drainage more efficient, and is more aesthetically pleasing. Background Technology

[0002] The protective cover chassis of wafer cleaning equipment needs to be welded to the top during normal use. Traditional processes require opening welding slots on the chassis, which increases processing time and is more cumbersome. Moreover, the drain outlet of the chassis is usually vertical. After the protective cover top is welded to the chassis, the drain outlet must pass through the top of the cover, which requires openings in the top of the cover. This is not only unsightly, but also affects the drainage efficiency. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a wafer cleaning equipment protective cover chassis with chassis bolt mounting holes, positioning pins, welding positioning lines, waist groove drainage outlets and flange interfaces, which can simplify the processing procedure, improve processing efficiency, make drainage more efficient, and make the whole structure more aesthetically pleasing.

[0004] The technical solution adopted by the present invention to solve its technical problem is: a protective cover chassis for a wafer cleaning equipment that facilitates drainage, comprising a wafer protective cover chassis, on which six chassis bolt mounting holes are provided, located at the upper left, lower left, upper right, and lower right of the wafer protective cover chassis, respectively, with two holes each at the upper left and lower right, and one hole each at the upper right and lower left. A positioning pin is provided next to the chassis bolt mounting hole at the upper right of the wafer protective cover chassis, a welding positioning line is provided in the middle of the wafer protective cover chassis, and a waist groove drain outlet is provided between the two chassis bolt mounting holes at the upper left of the wafer protective cover chassis, with a flange interface provided around the waist groove drain outlet.

[0005] The beneficial effects of this invention are that it provides a protective cover chassis for a wafer cleaning equipment that facilitates drainage. The chassis features welding positioning lines instead of deepened welding grooves, making the manufacturing process more convenient, saving time and costs, and also assisting in welding. This invention improves the manufacturing process by using inclined waist-groove drainage outlets instead of traditional straight outlets. The drainage holes do not need to pass through the top of the protective cover, improving drainage efficiency while also making the protective cover more aesthetically pleasing and structurally sound. Attached Figure Description

[0006] In the diagram: 1. Wafer protective cover chassis, 2. Chassis bolt mounting holes, 3. Locating pin, 4. Welding positioning line, 5. Waist groove drain outlet, 6. Flange interface.

[0007] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0008] Figure 1 This is a bottom view of Embodiment 1 of the present invention.

[0009] Figure 2 This is a side view of Embodiment 1 of the present invention.

[0010] Figure 3 This is a top view of Embodiment 1 of the present invention.

[0011] Figure 4 This is a cross-sectional view of the wafer protective shield chassis and waist groove drainage outlet of Embodiment 1 of the present invention.

[0012] Figure 5 This is an enlarged cross-sectional view of the waist groove drainage outlet of Embodiment 1 of the present invention.

[0013] Figure 6 This is an enlarged bottom view of the waist groove drainage outlet of Embodiment 1 of the present invention. Detailed Implementation

[0014] In the embodiment shown in the figure, a wafer protective cover chassis (1), chassis bolt mounting holes (2), positioning pins (3), welding positioning lines (4), waist groove drain outlet (5), and flange interface (6) are provided.

[0015] The present invention provides a wafer cleaning equipment protective cover chassis for convenient drainage, comprising a wafer protective cover chassis (1), on which six chassis bolt mounting holes (2) are provided, located at the upper left, lower left, upper right, and lower right of the wafer protective cover chassis (1), with two holes each at the upper left and lower right, and one hole each at the upper right and lower left. A positioning pin (3) is provided on the side of the chassis bolt mounting hole (2) at the upper right of the wafer protective cover chassis (1), a welding positioning line (4) is provided in the middle of the wafer protective cover chassis (1), and a waist groove drain outlet (5) is provided between the two chassis bolt mounting holes (2) at the upper left of the wafer protective cover chassis (1), with a flange interface (6) provided around the waist groove drain outlet (5).

[0016] The present invention provides a protective cover chassis for a wafer cleaning equipment with convenient drainage. The wafer protective cover chassis (1) is an axisymmetric shape. The waist groove drain outlet (5) should be inclined. There is at least one locating pin (3) and at most four.

[0017] The process of using the protective cover chassis for a wafer cleaning equipment with convenient drainage according to the present invention is as follows: Workers determine the position of the welding positioning line, weld the top of the protective cover to the chassis body, determine the specific installation position of the chassis and cleaning equipment using positioning pins, and after calibrating the position, install the flange through the flange interface. The installation of the protective cover and cleaning equipment is then complete. During the cleaning process, cleaning wastewater will be generated, which can be discharged through the waist groove drain outlet.

[0018] This invention provides a protective cover chassis for wafer cleaning equipment that facilitates drainage. It overcomes the drawbacks of traditional processes that require welding slots on the chassis, increasing processing time and making the process more cumbersome. It also solves the problem that in general chassis, the drainage outlet is vertical, and after welding the protective cover top to the chassis, the drainage outlet must pass through the cover top, requiring an opening in the cover top for drainage. This is not only unsightly but also affects drainage efficiency.

[0019] The present invention provides a protective cover chassis for a wafer cleaning equipment that facilitates drainage. The protective cover chassis has welding positioning lines that replace the original welding slots, making the process more convenient, saving processing time and costs, and also achieving the function of assisting welding.

[0020] The present invention provides a protective cover chassis for a wafer cleaning equipment that facilitates drainage. The manufacturing process has been improved by replacing the traditional straight drainage outlet with an inclined waist groove drainage outlet. The hole of the drainage outlet does not need to pass through the top of the protective cover, which improves drainage efficiency while making the protective cover more aesthetically pleasing and integrated.

[0021] The invention has proven to be very effective.

Claims

1. A wafer cleaning equipment protective cover chassis for convenient drainage, comprising a wafer protective cover chassis (1), characterized in that, There are 6 mounting holes (2) on the wafer protective cover chassis (1), located at the upper left, lower left, upper right and lower right of the wafer protective cover chassis (1), with 2 holes at the upper left and lower right, and 1 hole at the upper right and lower left. A positioning pin (3) is placed on the side of the mounting hole (2) at the upper right of the wafer protective cover chassis (1). A welding positioning line (4) is placed in the middle of the wafer protective cover chassis (1). A waist groove drain outlet (5) is placed between the two mounting holes (2) at the upper left of the wafer protective cover chassis (1). A flange interface (6) is placed around the waist groove drain outlet (5).

2. The wafer cleaning equipment protective cover chassis for convenient drainage according to claim 1, characterized in that, The wafer protective shield chassis (1) is an axisymmetric figure.

3. The wafer cleaning equipment protective cover chassis for convenient drainage according to claim 1, characterized in that, The waist groove drain outlet (5) should be inclined.

4. The wafer cleaning equipment protective cover chassis for convenient drainage according to claim 1, characterized in that, There is at least one locating pin (3) and at most four locating pins.

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