A spray plate cleaning device

Abstract

This utility model discloses a spray tray cleaning device, including a base plate, multiple support columns disposed on the upper side of the base plate, a working plate disposed on the upper side of the support columns, a bracket disposed on the upper side of the working plate, a top plate disposed on the bracket, a downward driving device with a piston rod disposed on the upper side of the top plate, a connecting plate disposed on the lower end of the piston rod, a clamping sleeve disposed on the lower side of the connecting plate, a lower sleeve disposed on the upper side of the working plate for mounting the spray tray, and a water circulation assembly disposed on the upper side of the base plate. The water circulation assembly is connected to the clamping sleeve and the lower sleeve. The cleaning device of this utility model uses the downward driving device to drive the clamping sleeve to descend, which cooperates with the lower sleeve to limit the spray tray. The water circulation assembly cleans the spray tray, preventing water from splashing onto the work area, reducing pollution, improving production safety, and reducing the labor intensity of workers.

Description

Technical Field

[0001] This utility model relates to the field of spray plate cleaning, and specifically to a spray plate cleaning device. Background Technology

[0002] The spray plate is a core component in semiconductor manufacturing equipment. It is usually made of high-purity aluminum substrate and coated with a ceramic film. It is characterized by high temperature resistance and corrosion resistance. It is widely used in etching, PVD and other processes in semiconductor integrated circuit manufacturing. Its function is to uniformly distribute gas in the plasma etching process. As the passage for gas to enter the cavity, the spray plate has the characteristics of small aperture and large aspect ratio. It is an essential core component in the wafer manufacturing etching process. The spray plate is equipped with multiple small holes. After the metal shavings on the spray plate are initially cleaned, the residue in the small holes needs to be cleaned.

[0003] In existing technologies, the spray pipes are mainly cleaned by workers holding water hoses. This is physically demanding, and water is prone to splashing during cleaning. Residue in the water not only contaminates the work area but also poses a potential danger to workers. Furthermore, the spray plates are placed directly inside the bucket, resulting in poor stability and easy displacement during cleaning. Therefore, a spray plate cleaning device that solves the above problems is needed. Thus, a new technical solution is urgently required to address at least one of the aforementioned technical issues. Summary of the Invention

[0004] The purpose of this invention is to provide a spray plate cleaning device. The device uses a downward driving device to drive the clamping sleeve to descend, which works in conjunction with the lower sleeve to limit the spray plate. The spray plate is then cleaned by a water circulation component. Water will not splash onto the work area, reducing pollution, improving production safety, and reducing the labor intensity of workers.

[0005] To achieve the above-mentioned technical objectives and requirements, the technical solution adopted by this utility model is as follows: a spray plate cleaning device, characterized in that it includes a base plate, a plurality of support columns disposed on the upper side of the base plate, a working plate disposed on the upper side of the support columns, a bracket disposed on the upper side of the working plate, a top plate disposed on the bracket, a downward pressing drive device with a piston rod disposed on the upper side of the top plate, a connecting plate disposed at the lower end of the piston rod, a pressing sleeve disposed on the lower side of the connecting plate, a lower sleeve disposed on the upper side of the working plate for mounting the spray plate, and a water circulation assembly disposed on the upper side of the base plate, wherein the water circulation assembly is connected to the pressing sleeve and the lower sleeve.

[0006] As a preferred technical solution, the water circulation assembly includes a circulation pump detachably mounted on the upper side of the base plate, an inlet pipe and an outlet pipe mounted on the circulation pump, a filter, and an outlet branch pipe mounted on the outlet pipe. The inlet of the filter is connected to the lower sleeve, the outlet of the filter is connected to the inlet pipe, the inlet of the outlet branch pipe is connected to the outlet pipe, and the outlet of the outlet branch pipe is connected to the compression sleeve.

[0007] As a preferred technical solution, the spray plate includes a spray plate body and a skirt disposed on the outer edge of the spray plate, and a pressing groove is provided on the lower side of the pressing sleeve, the pressing groove matching the skirt.

[0008] As a preferred technical solution, a limiting edge is provided on the lower outer edge of the skirt, and a limiting groove is provided on the upper side of the lower sleeve, with the limiting edge matching the limiting groove.

[0009] As a preferred technical solution, the bracket includes two symmetrically arranged guide columns, and the connecting plate is provided with two guide holes that pass through it vertically, with the guide columns passing through the guide holes.

[0010] The beneficial effects of this utility model are:

[0011] 1) The pressing sleeve is driven to descend by the downward driving device, and the lower sleeve cooperates with the lower sleeve to limit the spray plate. The spray plate is cleaned by the water circulation component. Water will not splash onto the work site, reducing pollution, improving production safety, and reducing the labor intensity of workers.

[0012] 2) The lower pressure groove and the skirt cooperate to limit the spray plate, and the limiting edge cooperates with the limiting groove to limit the spray plate, with a good limiting effect;

[0013] 3) The guide post and guide hole work together to guide the connecting plate and ensure that the clamping sleeve is pressed down stably and accurately. Attached Figure Description

[0014] Figure 1 This is a three-dimensional view of a cleaning device provided in one embodiment of the present invention;

[0015] Figure 2 yes Figure 1 A view from another direction;

[0016] Figure 3 This is a cross-sectional view of a cleaning device provided in one embodiment of the present invention.

[0017] exist Figures 1-3In the middle, 1. base plate; 2. support column; 3. working plate; 4. guide column; 5. top plate; 6. downward pressure drive device; 601. piston rod; 7. connecting plate; 8. clamping sleeve; 801. first inner cavity; 9. lower sleeve; 901. second inner cavity; 902. limiting groove; 10. circulating pump; 11. water inlet pipe; 12. water outlet pipe; 13. filter; 14. water outlet branch pipe; 15. first connecting pipe; 16. second connecting pipe; 17. water inlet solenoid valve; 18. water outlet solenoid valve; 19. button box; 20. spray plate body; 21. skirt; 22. limiting edge. Detailed Implementation

[0018] The present invention will now be further described with reference to the accompanying drawings.

[0019] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "head," "tail," "top," "bottom," "left," "right," "front," "rear," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0020] Please see Figures 1-3 This utility model provides a spray tray cleaning device, including a base plate 1, multiple support columns 2 disposed on the upper side of the base plate 1, a working plate 3 disposed on the upper side of the support columns 2, a bracket disposed on the upper side of the working plate 3, a top plate 5 disposed on the bracket, a downward driving device 6 with a piston rod 601 disposed on the upper side of the top plate 5, a connecting plate 7 disposed at the lower end of the piston rod 601, a clamping sleeve 8 disposed on the lower side of the connecting plate 7, a lower sleeve 9 disposed on the upper side of the working plate 3 for mounting the spray tray, and a water circulation assembly disposed on the upper side of the base plate 1. The water circulation assembly is connected to the clamping sleeve 8 and the lower sleeve 9. The downward driving device 6 drives the clamping sleeve 8 to descend, which cooperates with the lower sleeve 9 to limit the spray tray. The water circulation assembly cleans the spray tray, preventing water from splashing onto the work site, reducing pollution, improving production safety, and reducing the labor intensity of workers.

[0021] like Figures 1-3As shown, the water circulation assembly includes a circulation pump 10 detachably mounted on the upper side of the base plate 1, an inlet pipe 11 and an outlet pipe 12 mounted on the circulation pump 10, a filter 13, and an outlet branch pipe 14 mounted on the outlet pipe 12. The inlet of the filter 13 is connected to the lower sleeve 9, and the outlet of the filter 13 is connected to the inlet pipe 11. The inlet of the outlet branch pipe 14 is connected to the outlet pipe 12, and the outlet of the outlet branch pipe 14 is connected to the clamping sleeve 8. The clamping sleeve 8 defines a first inner cavity 801, and the outlet branch pipe 14 is connected to the first inner cavity 801. The lower sleeve 9 defines a second inner cavity 901. The filter 13 is connected to the second inner cavity 901 through a first connecting pipe 15, and the filter 13 is connected to the inlet pipe 11 through a second connecting pipe 16. The inlet pipe 11 and outlet pipe 12 are connected to the water tank. The circulating pump 10 draws water from the water tank into the inlet pipe 11, and then into the lower sleeve 9 through the filter 13 to clean the spray plate. The water then overflows the spray plate and enters the first inner cavity 801, and then enters the outlet pipe 12 through the outlet branch pipe 14, and then flows back to the water tank. The spray plate is cleaned by the flow of water. The filter 13 can filter impurities in the water. The first connecting pipe 15 and the second connecting pipe 16 are detachably connected to the filter 13. When the filter 13 needs to be replaced, it can be removed. The inlet pipe 11 is equipped with an inlet solenoid valve 17 to control the water inlet, and the outlet pipe 12 is equipped with an outlet solenoid valve 18 to control the water outlet. In order to improve the cleaning effect, the outlet of the first connecting pipe 15 can be set to face the spray plate directly, which will not be described in detail.

[0022] Specifically, the downward drive device 6 is a pneumatic or hydraulic cylinder, there are 4 support columns 2, arranged symmetrically in pairs, and the work plate 3 is equipped with a button box 19, which can be fitted with buttons to control the downward drive device 6 to descend and ascend.

[0023] like Figures 1-3 As shown, the spray plate includes a spray plate body 20 and a skirt 21 disposed on the outer edge of the spray plate. The lower side of the clamping sleeve 8 is provided with a pressing groove (not shown). The pressing groove matches the skirt 21 and can limit the spray plate to prevent the spray plate from shifting during the cleaning process. The limiting effect is good.

[0024] like Figures 1-3 As shown, a limiting edge 22 is provided on the lower outer edge of the skirt 21, and a limiting groove 902 is provided on the upper side of the lower sleeve 9. The limiting edge 22 and the limiting groove 902 are matched to limit the spray plate and prevent the spray plate from shifting during the cleaning process. The limiting effect is good.

[0025] like Figures 1-3 As shown, a sealing groove (not shown) is provided on the upper side of the lower sleeve 9, and a sealing ring (not shown) is embedded in the sealing groove. This ensures good sealing between the compression sleeve 8 and the lower sleeve 9 and prevents water from overflowing.

[0026] like Figures 1-3 As shown, the bracket includes two symmetrically arranged guide columns 4, and the connecting plate 7 is provided with two guide holes that pass through it vertically. The guide columns 4 are inserted into the guide holes, and the guide columns 4 and the guide holes cooperate to guide the connecting plate 7, so that the pressing sleeve 8 can be pressed down stably and accurately.

[0027] The above embodiments are merely descriptions for clearly illustrating the present utility model, and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all implementations here, and the obvious variations or modifications derived therefrom are still within the protection scope of the present utility model.

Claims

1. A spray pan cleaning apparatus, characterized by, The device includes a base plate, multiple support columns disposed on the upper side of the base plate, a working plate disposed on the upper side of the support columns, a bracket disposed on the upper side of the working plate, a top plate disposed on the bracket, a downward pressing drive device with a piston rod disposed on the upper side of the top plate, a connecting plate disposed at the lower end of the piston rod, a clamping sleeve disposed on the lower side of the connecting plate, a lower sleeve disposed on the upper side of the working plate for mounting a spray plate, and a water circulation assembly disposed on the upper side of the base plate, wherein the water circulation assembly is connected to the clamping sleeve and the lower sleeve.

2. The spray plate cleaning device according to claim 1, characterized in that, The water circulation assembly includes a circulation pump detachably mounted on the upper side of the base plate, an inlet pipe and an outlet pipe mounted on the circulation pump, a filter, and an outlet branch pipe mounted on the outlet pipe. The inlet of the filter is connected to the lower sleeve, the outlet of the filter is connected to the inlet pipe, the inlet of the outlet branch pipe is connected to the outlet pipe, and the outlet of the outlet branch pipe is connected to the compression sleeve.

3. The spray plate cleaning device according to claim 1, characterized in that, The spray plate includes a spray plate body and a skirt disposed on the outer edge of the spray plate. A pressing groove is provided on the lower side of the pressing sleeve, and the pressing groove matches the skirt.

4. The spray plate cleaning device according to claim 3, characterized in that, The lower outer edge of the skirt is provided with a limiting edge, and the upper side of the lower sleeve is provided with a limiting groove, and the limiting edge matches the limiting groove.

5. The spray plate cleaning device according to claim 1, characterized in that, The bracket includes two symmetrically arranged guide columns, and the connecting plate is provided with two guide holes that pass through it vertically, with the guide columns passing through the guide holes.

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