A multi-module based vacuum sintering furnace

Abstract

This utility model relates to the field of vacuum sintering furnace technology, and discloses a multi-module vacuum sintering furnace, including a first slide gate valve, a second slide gate valve, a third slide gate valve, a fourth slide gate valve, multiple module components, multiple fixture frames, multiple sealing plates, a preheating zone, a welding zone, and a first cooling zone. The inlet end of the preheating zone is equipped with a first slide gate valve via a sealing plate, and the outlet end of the preheating zone is equipped with a second slide gate valve via a sealing plate. The inlet end of the welding zone is equipped with a second slide gate valve via a sealing plate, and the outlet end of the welding zone is equipped with a third slide gate valve via a sealing plate. The inlet end of the first cooling zone is equipped with a third slide gate valve via a sealing plate, and the outlet end of the first cooling zone is equipped with a fourth slide gate valve via a sealing plate. Fixture frames are arranged inside the preheating zone, welding zone, and first cooling zone, and multiple module components are arranged on the fixture frames. The arrangement of multiple module components on the fixture frames limits the welding range and improves welding quality and efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vacuum sintering furnace technology, and in particular to a vacuum sintering furnace based on multiple modules. Background Technology

[0002] Vacuum gate valves are used to isolate vacuum pipelines and block airflow; they are important vacuum components. Semiconductor chip packaging requires a vacuum environment, typically achieved using a vacuum reflow oven. Existing vacuum reflow ovens have multiple temperature zones: a preheating zone, a soldering zone, and a cooling zone. The preheating zone uses nitrogen protection, but is not a completely oxygen-free environment; the soldering zone is a vacuum environment. After chip soldering, the door connecting the soldering and cooling zones opens, allowing the chip to move from the soldering zone to the cooling zone. Simultaneously, the door connecting the soldering and preheating zones opens, sending the preheated chip into the soldering zone for soldering. This means that the doors of the soldering zone must open simultaneously between the completion of one soldering cycle and the start of the next, disrupting the vacuum environment of the soldering zone. When soldering multiple modules, this results in poor soldering quality and low efficiency. Summary of the Invention

[0003] This invention provides a multi-module vacuum sintering furnace to solve the problems of poor welding quality and low welding efficiency in the prior art when welding multiple modules.

[0004] This utility model provides a multi-module vacuum sintering furnace, including a first slide gate valve, a second slide gate valve, a third slide gate valve, a fourth slide gate valve, multiple module components, multiple fixture frames, multiple sealing plates, a preheating zone, a welding zone, and a first cooling zone. The inlet end of the preheating zone is provided with a first slide gate valve through the sealing plate, the outlet end of the preheating zone is provided with a second slide gate valve through the sealing plate, the inlet end of the welding zone is provided with a second slide gate valve through the sealing plate, the outlet end of the welding zone is provided with a third slide gate valve through the sealing plate, the inlet end of the first cooling zone is provided with a third slide gate valve through the sealing plate, and the outlet end of the first cooling zone is provided with a fourth slide gate valve through the sealing plate. The fixture frames are arranged inside the preheating zone, the welding zone, and the first cooling zone, and multiple module components are arranged on the fixture frames.

[0005] The multi-module vacuum sintering furnace according to this utility model also includes a lifting mechanism, which is provided below the preheating zone, the welding zone and the first cooling zone.

[0006] The multi-module vacuum sintering furnace according to this utility model further includes a second cooling zone and a fifth gate valve. The second cooling zone is located in the next working area of ​​the first cooling zone. The inlet end of the second cooling zone is connected to the fourth gate valve, and the outlet end of the second cooling zone is connected to the fifth gate valve.

[0007] According to the multi-module vacuum sintering furnace of this utility model, the preheating zone, the welding zone and the first cooling zone are provided with power wheels and guide wheels on both sides inside.

[0008] According to the multi-module vacuum sintering furnace of this utility model, a transmission mechanism is provided on both sides of the preheating zone, the welding zone and the first cooling zone, and the transmission mechanism drives the power wheel.

[0009] According to the present invention, the multi-module vacuum sintering furnace has a transmission mechanism consisting of rollers, belts, or chains.

[0010] According to the multi-module vacuum sintering furnace of this utility model, the preheating zone is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece preheating stage.

[0011] The welding zone is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece welding stage;

[0012] The first cooling zone is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece cooling stage.

[0013] According to the present invention, a multi-module vacuum sintering furnace includes a first limiting plate, a second limiting plate, and a support plate. The support plate has stepped sides. The first limiting plate and the second limiting plate are fixedly disposed above the support plate. The first limiting plate and the second limiting plate have stepped sides corresponding to the support plate. The first limiting plate and the second limiting plate are comb-shaped and have grooves formed at the comb-shaped areas.

[0014] According to the present invention, a multi-module vacuum sintering furnace has a protrusion provided below the support plate.

[0015] According to the multi-module vacuum sintering furnace of this utility model, through-hole grooves are provided on both sides of the fixture frame.

[0016] By setting up a fixture frame inside the preheating zone, welding zone, first cooling zone, and second cooling zone, and setting up multiple modular components in the fixture frame, the welding range is limited, thereby improving welding quality and welding efficiency. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the main structure of a multi-module vacuum sintering furnace;

[0019] Figure 2 This is a three-dimensional structural diagram of the preheating zone;

[0020] Figure 3 This is a three-dimensional structural diagram of the preheating zone cavity;

[0021] Figure 4 A three-dimensional structural diagram of the fixture frame;

[0022] Figure 5 A 3D diagram of the modular components. Figure 1 ;

[0023] Figure 6 A 3D diagram of the modular components. Figure 2 ;

[0024] Reference numerals: 1. First gate valve; 2. Second gate valve; 3. Third gate valve; 4. Fourth gate valve; 5. Fourth gate valve; 6. Preheating zone; 7. Welding zone; 8. First cooling zone; 9. Second cooling zone; 11. Fixture frame; 12. Module assembly; 121. First limiting plate; 122. Second limiting plate; 123. Bearing plate; 124. Protrusion; 61. Position sensor mounting base; 62. First sealing plate; 63. Sealing cavity cover; 64. Cavity; 65. Lifting mechanism; 66. Power wheel; 67. Guide wheel; 68. Heating plate; 69. Second sealing plate; 70. Cooling water tank. Detailed Implementation

[0025] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0026] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0028] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0029] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0030] The following is combined Figure 1-6This invention describes a multi-module vacuum sintering furnace, comprising a first gate valve 1, a second gate valve 2, a third gate valve 3, a fourth gate valve 4, multiple position sensor mounting bases 61, multiple position sensors, multiple module components 12, multiple fixture frames 11, multiple sealing plates, a preheating zone 6, a welding zone 7, and a first cooling zone 8. The inlet end of the preheating zone 6 is connected to the first gate valve 1 via a sealing plate, and the outlet end of the preheating zone 6 is connected to the second gate valve 2 via a sealing plate. The inlet end of the welding zone 7 is connected to the second gate valve 2 via a sealing plate, and the outlet end of the welding zone 6 is connected to the third gate valve 3 via a sealing plate. The inlet end of the first cooling zone 8 is connected to the third gate valve 3 via a sealing plate, and the outlet end of the first cooling zone 8 is connected to the fourth gate valve 4 via a sealing plate. The position sensor mounting bases 61 are mounted on the sealing plates, and the position sensors are mounted on the position sensor mounting bases 61, located below the upper covers of the preheating zone 6, the welding zone 7, and the first cooling zone 8. Specifically, the sealing plates are the first sealing plate 62 and the second sealing plate 69 located below the upper cover 63 of the sealing cavity.

[0031] A fixture frame 11 is provided inside the preheating zone 6, the welding zone 7 and the first cooling zone 8, and multiple modular components 12 are provided on the fixture frame 11.

[0032] Preheating zone 6 and welding zone 7 have the same structure, both using a heating plate 68. The first cooling zone 8 and the second cooling zone 9 also have the same structure, enabling temperature-controlled cooling; they can both heat and cool. Unlike preheating zone 6 and welding zone 7, the heating plate 68 is a cooling plate.

[0033] Specifically, module component 12 includes a first limiting plate 121, a second limiting plate 122, and a support plate 123. The support plate 123 has stepped sides. The first limiting plate 121 and the second limiting plate 122 are fixedly disposed above the support plate 123. The stepped sides of the first limiting plate 121 and the second limiting plate 122, corresponding to the support plate 123, serve to prevent loosening. The first limiting plate 121 and the second limiting plate 122 are comb-shaped with grooves formed at the comb teeth. The first limiting plate 121 and the second limiting plate 122 are fixed to the support plate 123 by fixing pins.

[0034] To improve welding quality during the welding process, a protrusion 124 is provided below the support plate 123. The protrusion 124 serves a heat dissipation function.

[0035] During the transfer of the fixture frame 11, through-hole slots are provided on both sides of the fixture frame 11 to ensure that the fixture frame 11 is detected by the sensor. A stopping mechanism is provided to stop the fixture frame 11.

[0036] A fixture frame 11 is provided inside the preheating zone 6, the welding zone 7 and the first cooling zone 8, and multiple modular components 12 are provided on the fixture frame 11.

[0037] Preheating zone 6 is used to provide a vacuum environment, inert gas environment, or reducing gas environment during the workpiece preheating stage;

[0038] Welding zone 7 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece welding stage;

[0039] The first cooling zone 8 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece cooling stage.

[0040] Power wheels 66 and guide wheels 67 are installed on both sides of the interior of the preheating zone 6, welding zone 7, and first cooling zone 8. A heating plate 68 is installed inside the cavity 64 of the preheating zone 6, welding zone 7, and first cooling zone 8, with power wheels 66 installed on both sides of the heating plate 68. A first sealing plate 62 and a second sealing plate 69 are installed on both sides of the cavity 64, and a heat dissipation water tank 70 is installed on the outside of the cavity 64 for heat dissipation. This prevents program flow disruption caused by opening the top cover.

[0041] A transmission mechanism is provided on both sides of the preheating zone 6, welding zone 7, and first cooling zone 8, and the transmission mechanism drives the power wheel 66. The transmission mechanism is a motor-driven belt, roller, or chain.

[0042] In the first embodiment, a lifting mechanism 65 is also included, which is disposed below the preheating zone 6, the welding zone 7, and the first cooling zone 8. In this embodiment, the lifting mechanism 65 is used to lift the workpiece to be processed.

[0043] In the second embodiment, a second cooling zone 9 and a fifth gate valve 5 are also included. The second cooling zone 9 is located in the next working station area after the first cooling zone 8. The inlet end of the second cooling zone 9 is connected to the fourth gate valve 4, and the outlet end of the second cooling zone 9 is connected to the fifth gate valve 5. In this embodiment, the workpiece to be processed undergoes secondary cooling, resulting in less drastic temperature changes and providing a longer cooling period, thus improving product quality. The second cooling zone 9 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece cooling stage.

[0044] It also includes an alarm device connected to a position sensor. When the position sensor detects that the top cover is loose or not in place, it issues an alarm, ensuring a vacuum environment in the preheating zone, welding zone, first cooling zone, and second cooling zone.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A multi-module based vacuum sintering furnace, characterized in that, The system includes a first gate valve, a second gate valve, a third gate valve, a fourth gate valve, multiple modular components, multiple fixture frames, multiple sealing plates, a preheating zone, a welding zone, and a first cooling zone. The inlet end of the preheating zone is connected to the first gate valve via the sealing plate, and the outlet end of the preheating zone is connected to the second gate valve via the sealing plate. The inlet end of the welding zone is connected to the second gate valve via the sealing plate, and the outlet end of the welding zone is connected to the third gate valve via the sealing plate. The inlet end of the first cooling zone is connected to the third gate valve via the sealing plate, and the outlet end of the first cooling zone is connected to the fourth gate valve via the sealing plate. The fixture frames are located inside the preheating zone, the welding zone, and the first cooling zone, and multiple modular components are mounted on the fixture frames.

2. The multi-module-based vacuum sintering furnace according to claim 1, characterized in that, It also includes a lifting mechanism, which is provided below the preheating zone, the welding zone and the first cooling zone.

3. The multi-module vacuum sintering furnace according to claim 1, characterized in that, It also includes a second cooling zone and a fifth gate valve. The second cooling zone is located in the next working area of ​​the first cooling zone. The inlet end of the second cooling zone is connected to the fourth gate valve, and the outlet end of the second cooling zone is connected to the fifth gate valve.

4. The multi-module vacuum sintering furnace according to claim 1, characterized in that, The preheating zone, the welding zone, and the first cooling zone are equipped with power wheels and guide wheels on both sides inside.

5. The multi-module vacuum sintering furnace according to claim 4, characterized in that, A transmission mechanism is provided on both sides of the preheating zone, the welding zone, and the first cooling zone, and the transmission mechanism drives the power wheel.

6. The multi-module vacuum sintering furnace according to claim 5, characterized in that, The transmission mechanism is a roller, belt, or chain.

7. The multi-module vacuum sintering furnace according to claim 1, characterized in that, The preheating zone is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece preheating stage; The welding zone is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece welding stage; The first cooling zone is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece cooling stage.

8. The multi-module vacuum sintering furnace according to claim 1, characterized in that, The module component includes a first limiting plate, a second limiting plate, and a support plate; the two sides of the support plate are stepped, the first limiting plate and the second limiting plate are fixedly disposed above the support plate, the two sides of the first limiting plate and the second limiting plate are stepped corresponding to the support plate, the first limiting plate and the second limiting plate are comb-shaped and have grooves formed at the comb-shaped parts.

9. The multi-module-based vacuum sintering furnace according to claim 8, characterized in that, A protrusion is provided below the support plate.

10. The multi-module vacuum sintering furnace according to claim 1, characterized in that, Through-hole slots are provided on both sides of the fixture frame.

Images