Carbon-carbon composite bearing plate for PECVD coating
By employing carbon-based composite materials reinforced with carbon nanotubes and carbon-carbon composite support plates with porous graphite structures during the PECVD coating process, the problems of insufficient thermal management and surface contamination were solved, achieving high temperature resistance, corrosion resistance, low coefficient of thermal expansion and surface uniformity, thus extending service life.
CN224478142UActive Publication Date: 2026-07-10JIANGYOU TIANLI XINTAO CARBON MATERIAL TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGYOU TIANLI XINTAO CARBON MATERIAL TECH CO LTD
- Filing Date
- 2025-08-13
- Publication Date
- 2026-07-10
Smart Images
Figure CN224478142U_ABST
Abstract
The application relates to the technical field of semiconductor equipment, and provides a carbon-carbon composite bearing plate for PECVD film coating, which comprises a surface layer, an intermediate layer and a supporting layer connected in sequence, the surface layer adopts a nano-carbon tube reinforced carbon-based composite material, the surface of the surface layer is subjected to chemical vapor deposition densification treatment, and the roughness Ra is less than or equal to 0.1 micrometers; the intermediate layer is a porous graphite structure with a porosity of 30-40%; and the supporting layer is a carbon fiber three-dimensional woven framework which is combined with the intermediate layer through interface diffusion. The application has the effect of improving the high-temperature resistance, corrosion resistance and low-thermal expansion coefficient of the bearing plate.
Need to check novelty before this filing date? Find Prior Art