A target assembly for brazing welding

Abstract

The utility model provides a target material assembly for brazing welding, target material assembly includes target blank and with target blank combination's backplate, the welding surface of backplate is provided with first recess and second recess, and second recess surrounds first recess and sets up, be provided with a plurality of convex in first recess, the depth of first recess is greater than the height of convex. Through the recess structure of improvement backplate welding surface, be provided with a plurality of convex in first recess, can reduce the solder usage, increase target blank welding area, combine control first recess's depth is greater than the height of convex, leave corresponding space for target blank brazing process deformation, can reduce target blank after brazing residual stress, and then improve target blank flatness after brazing.

Description

Technical Field

[0001] This utility model belongs to the field of target assembly technology, and relates to a target assembly for brazing welding. Background Technology

[0002] Currently, in the semiconductor industry, sputtering target assemblies consist of a sputtering target that meets sputtering performance requirements and a backplate bonded to the target. The backplate provides support and conducts heat within the target assembly. The sputtering target is a commonly used material for manufacturing wires in semiconductor chip manufacturing, and it typically requires soldering to a backplate during use.

[0003] In the welding process of target materials and backing plates, brazing is a process that uses a filler metal with a melting point lower than that of the base metal to simultaneously heat the base metal and the solder at a temperature lower than that of the base metal but higher than that of the filler metal. When the filler metal melts, it wets and fills the gaps in the connection between the base metal and the base metal, and finally forms a strong connection structure through mutual diffusion between the filler metal and the base metal.

[0004] In magnetron sputtering, target assemblies prepared by brazing offer significant advantages. The brazed layer connection structure ensures excellent thermal conductivity at the target-backplane interface, thereby significantly improving the heat dissipation efficiency of the target assembly. Furthermore, after magnetron sputtering, the solder layer between the target and backplane can be melted at an appropriate temperature, easily separating the target and backplane and enabling the reuse of the backplane, effectively reducing the target fabrication cost.

[0005] CN113210785A discloses a brazing method for aluminum-scandium alloy targets. The method involves heating the aluminum-scandium alloy target and a backing plate, then placing brazing filler metal on the welding surfaces of the target and backing plate. After the brazing filler metal melts, the welding surfaces are ultrasonically wetted. After wetting, a metal wire is placed on the welding surface of the backing plate, and the aluminum-scandium alloy target is then fastened to the backing plate. Pressure is continuously applied, heating is stopped, and cooling is performed to obtain the welded target assembly. This method utilizes sufficient filler metal and ensures the thickness of the brazing layer, thereby improving the welding bonding rate and welding strength of the target.

[0006] CN211999896U discloses a target assembly for easy brazing, comprising a target blank and a back plate combined with the target blank; the welding surface of the back plate is provided with a first groove and a second groove, the second groove surrounding the first groove; the sidewalls dividing the first groove and the second groove form a tenon structure; the welding surface of the target blank is provided with a groove matching the tenon structure. By providing the first groove and the second groove on the welding surface of the back plate, the sidewalls dividing the first groove and the second groove act as tenons to fix the target blank. During the brazing process, both the brazing effect can be guaranteed, and the thermal expansion and contraction effect at the tenon structure can be used to improve the brazing strength, thereby ensuring the stability of the obtained target assembly during magnetron sputtering.

[0007] Currently, existing brazing sputtering targets employ solder grooves or combinations of grooves and solder grooves, with the solder grooves and grooves excavated to a certain depth in a fixed shape to improve the welding rate. However, the groove structure increases the amount of brazing solder used, and the brazed sputtering target, solder, and backing plate will undergo significant deformation under thermal stress and residual stress.

[0008] Therefore, providing a novel backplate groove structure that can reduce the amount of brazing filler metal and improve the flatness of the target blank after brazing is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0009] To address the shortcomings of existing technologies, the present invention aims to provide a target assembly for brazing. By improving the groove structure of the welding surface of the back plate, and by providing several protrusions in the first groove, the amount of solder used can be reduced, the welding area of ​​the target blank can be increased, and the flatness of the target blank after brazing can be improved.

[0010] To achieve this objective, the present invention adopts the following technical solution:

[0011] This utility model provides a target assembly for brazing, the target assembly including a target blank and a back plate combined with the target blank;

[0012] The welding surface of the back plate is provided with a first groove and a second groove, with the second groove surrounding the first groove;

[0013] The first groove has a plurality of protrusions; the depth of the first groove is greater than the height of the protrusions.

[0014] The target assembly provided by this utility model improves the groove structure of the backplate welding surface by setting several protrusions in the first groove. This reduces the amount of solder used and increases the welding area of ​​the target blank. By controlling the depth of the first groove to be greater than the height of the protrusions, sufficient space is provided for deformation of the target blank during the brazing process, which reduces the residual stress of the target blank after brazing and thus improves the flatness of the brazed target blank. The groove structure of the backplate is versatile and suitable for rectangular and circular target blanks, as well as various metal target blanks such as aluminum, titanium, copper, and tantalum targets.

[0015] Preferably, the first groove is provided with at least 10 protrusions, for example, 11, 12, 13, 14, 15 or 18, but not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0016] In this invention, the number of protrusions is set according to the range of the diameter of the target blank.

[0017] Preferably, the protrusion is any one of a trapezoidal protrusion, a cylindrical protrusion, or a cuboid protrusion.

[0018] Preferably, the lower bottom surface of the trapezoidal body is connected to the first groove.

[0019] Preferably, the length of the upper base of the trapezoidal protrusion is greater than the length of the lower base.

[0020] In this invention, the stability of the target blank during welding is improved by controlling the length of the upper bottom surface of the trapezoidal protrusion to be greater than the length of the lower bottom surface.

[0021] Preferably, the structure and size of the plurality of protrusions are identical.

[0022] In this invention, the protrusions have the same structure and size, which can improve production efficiency and reduce the time wasted due to frequent adjustments of processing parameters.

[0023] Preferably, the distance between the central axes of adjacent protrusions is 15-30mm, for example, it can be 16mm, 18mm, 20mm, 22mm, 24mm, 25mm, 26mm, 28mm or 29mm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0024] It should be noted that by controlling the spacing between adjacent protrusions, stress distribution can be optimized, bonding strength enhanced, and thus the structural stability of the target blank improved. Furthermore, it ensures that the solder is evenly distributed across the entire bonding surface between the target blank and the backing plate, preventing solder accumulation or insufficiency.

[0025] Preferably, the depth of the second groove is greater than or equal to the depth of the first groove.

[0026] Preferably, the target blank is placed on the second groove.

[0027] It should be noted that placing the target blank on the second groove of the backplate welding surface can optimize the welding heat distribution, facilitate welding operations, and increase heat dissipation efficiency, thereby improving the reliability and overall performance of the product.

[0028] Preferably, the back plate includes a circular back plate or a rectangular back plate.

[0029] Preferably, the target blank includes a circular target blank or a rectangular target blank.

[0030] In this invention, if the target blank is a circular target blank and the back plate is a circular back plate, the first groove is a circular groove and several protrusions are distributed in a ring on the first groove.

[0031] Compared with the prior art, the present invention has the following beneficial effects:

[0032] The target assembly provided by this utility model improves the groove structure of the backplate welding surface by setting several protrusions in the first groove. This reduces the amount of solder used and increases the welding area of ​​the target blank. By controlling the depth of the first groove to be greater than the height of the protrusions, sufficient space is provided for deformation of the target blank during the brazing process, which reduces the residual stress of the target blank after brazing and thus improves the flatness of the target blank after brazing. The flatness of the target blank after brazing is as low as 0.5mm. In addition, the groove structure of the backplate is versatile and suitable for rectangular and circular target blanks, as well as various metal target blanks such as aluminum, titanium, copper, and tantalum targets. Attached Figure Description

[0033] Figure 1 This is an assembly diagram of the target assembly for brazing provided in Example 1;

[0034] Among them, 1-circular target blank, 2-circular back plate, 3-first groove, 4-second groove, 5-protrusion. Detailed Implementation

[0035] It should be understood that in the description of this utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0036] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0037] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0038] Example 1

[0039] This embodiment provides a target assembly for brazing, wherein the target assembly (such as...) Figure 1 (As shown) includes a circular target blank 1 and a circular back plate 2 combined with the target blank;

[0040] The welding surface of the circular back plate 2 is provided with a first groove 3 and a second groove 4, and the second groove 4 is arranged around the first groove 3.

[0041] The first groove 3 has 17 protrusions 5; the 17 protrusions 5 have the same structure and size; the depth of the first groove 3 is greater than the height of the protrusions 5; the distance between the central axes of adjacent protrusions 5 is 18mm.

[0042] The protrusion 5 is a trapezoidal protrusion; the lower base of the trapezoidal protrusion is connected to the first groove; the length of the upper base of the trapezoidal protrusion is greater than the length of the lower base;

[0043] The depth of the second groove 4 is greater than the depth of the first groove 3;

[0044] The circular target blank 1 is placed on the second groove 4.

[0045] The target assembly provided in this embodiment is brazed, specifically including: cleaning the circular target blank and circular back plate to be brazed, then heating the circular target blank and circular back plate, then placing the brazing filler metal on the welding surface of the circular target blank and circular back plate, and ultrasonically wetting the welding surface after the brazing filler metal melts; after wetting is completed, the circular target is fastened to the circular back plate, pressure is continuously applied, heating is stopped and cooling is performed to obtain the welded target assembly.

[0046] The target assembly provided in this embodiment can reduce the amount of brazing filler metal used, increase the contact area of ​​the circular target blank, and improve the flatness and welding strength of the circular target blank after brazing; wherein, the flatness of the circular target blank after brazing is 0.3mm.

[0047] Example 2

[0048] This embodiment provides a target assembly for brazing, the target assembly including a rectangular target blank and a rectangular back plate combined with the target blank;

[0049] The welding surface of the rectangular back plate is provided with a first groove and a second groove, with the second groove surrounding the first groove;

[0050] The first groove has 20 protrusions; all 20 protrusions have the same structure and size; the depth of the first groove is greater than the height of the protrusions; the distance between the central axes of adjacent protrusions is 15mm.

[0051] The protrusion is a cylindrical protrusion;

[0052] The depth of the second groove is equal to the depth of the first groove;

[0053] The rectangular target blank is placed on the second groove.

[0054] The target assembly provided in this embodiment is brazed, specifically including: cleaning the rectangular target blank and rectangular back plate to be brazed, then heating the rectangular target blank and rectangular back plate, then placing the brazing filler metal on the welding surface of the rectangular target blank and rectangular back plate, and ultrasonically wetting the welding surface after the brazing filler metal melts; after wetting is completed, the rectangular target is fastened to the rectangular back plate, pressure is continuously applied, heating is stopped and cooling is performed to obtain the welded target assembly.

[0055] The target assembly provided in this embodiment can reduce the amount of brazing filler metal used, increase the contact area of ​​the rectangular target blank, and improve the flatness and welding strength of the rectangular target blank after brazing; wherein, the flatness of the rectangular target blank after brazing is 0.4mm.

[0056] Example 3

[0057] This embodiment provides a target assembly for brazing, the target assembly including a circular target blank and a circular back plate combined with the target blank;

[0058] The welding surface of the circular back plate is provided with a first groove and a second groove, with the second groove surrounding the first groove;

[0059] The first groove has 12 protrusions; the 12 protrusions have the same structure and size; the depth of the first groove is greater than the height of the protrusions; the distance between the central axes of adjacent protrusions is 25mm.

[0060] The protrusion is a trapezoidal protrusion; the lower base of the trapezoidal protrusion is connected to the first groove; the length of the upper base of the trapezoidal protrusion is greater than the length of the lower base;

[0061] The depth of the second groove is greater than the depth of the first groove;

[0062] The circular target blank is placed on the second groove.

[0063] The brazing method for the target assembly in this embodiment is the same as that in Embodiment 1.

[0064] The target assembly provided in this embodiment can reduce the amount of brazing filler metal used, increase the contact area of ​​the circular target blank, and improve the flatness and welding strength of the circular target blank after brazing; wherein, the flatness of the circular target blank after brazing is 0.5mm.

[0065] Comparative Example 1

[0066] This comparative example provides a target assembly for brazing, which is identical to that of Example 1 except that the depth of the first groove is equal to the height of the protrusion.

[0067] The brazing method for the target assembly in this comparative example is the same as that in Example 1.

[0068] In the target assembly provided in this comparative example, because the depth of the first groove is equal to the height of the protrusion, it is equivalent to the target blank having no protruding structure within the first groove. During the brazing process, excess solder will gradually diffuse from the welding area into the interior of the target blank, causing corresponding deformation within the target blank. After the solder cools and solidifies, because there is no supporting structure within the target blank groove, the target blank will cave inward under the action of residual stress, causing deformation and resulting in a decrease in the flatness of the target blank. Specifically, the flatness of the circular target blank after brazing is 9 mm.

[0069] Comparative Example 2

[0070] This comparative example provides a target assembly for brazing, which is identical to that in Example 1 except that no protrusion is provided in the first groove and no second groove is provided on the welding surface of the back plate.

[0071] The brazing method for the target assembly in this comparative example is the same as that in Example 1.

[0072] The target assembly provided in this comparative example increases the amount of brazing filler metal used. After brazing, the target blank, solder, and backplate undergo significant deformation under thermal and residual stress, leading to a decrease in the flatness of the target blank. Specifically, the flatness of the brazed circular target blank is 10 mm.

[0073] In summary, this utility model improves the groove structure of the backplate welding surface by setting several protrusions in the first groove, which can reduce the amount of solder used and increase the target blank welding area. Combined with controlling the depth of the first groove to be greater than the height of the protrusions, it leaves corresponding space for the deformation of the target blank during the brazing process, which can reduce the residual stress of the target blank after brazing and thus improve the flatness of the target blank after brazing.

[0074] The applicant declares that the above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.

Claims

1. A target assembly for brazing, characterized in that, The target assembly includes a target blank and a back plate combined with the target blank; The welding surface of the back plate is provided with a first groove and a second groove, with the second groove surrounding the first groove; The first groove has a plurality of protrusions; the depth of the first groove is greater than the height of the protrusions.

2. The target assembly for brazing welding according to claim 1, characterized in that, The first groove has at least 10 protrusions.

3. The target assembly for brazing welding according to claim 1, wherein, The protrusion can be any one of a trapezoidal protrusion, a cylindrical protrusion, or a cuboid protrusion.

4. The target assembly for brazing welding according to claim 3, characterized in that, The lower surface of the trapezoidal protrusion is connected to the first groove; The length of the upper base of the trapezoid is greater than the length of the lower base.

5. The target assembly for brazing welding according to claim 1, wherein, The structure and size of the various protrusions are all the same.

6. The target assembly for brazing welding according to claim 1, wherein, The distance between the central axes of adjacent protrusions is 15-30mm.

7. The target assembly for brazing welding according to claim 1, wherein, The depth of the second groove is greater than or equal to the depth of the first groove.

8. The target assembly for brazing welding according to claim 1, wherein, The target blank is placed on the second groove.

9. The target assembly for brazing welding according to claim 1, wherein, The back plate includes a circular back plate or a rectangular back plate.

10. The target assembly for brazing welding according to claim 1, wherein, The target blank includes a circular target blank or a rectangular target blank.

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