A graphite transition piece

Abstract

The utility model provides a graphite transition piece. Through the air inlet transition piece links quartz square tube, and sets up the air flow uniformity gradient for the secondary shunt of the gas source after quartz square tube shunt and makes the flow velocity of the gas source into the growth chamber even, and through the air outlet transition piece links the growth chamber.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, specifically a graphite transition component. Background Technology

[0002] During the operation of a horizontal epitaxial chemical vapor deposition (CVD) machine, the growth gas source is diverted into the growth chamber through a quartz square tube to achieve the distribution control of the growth gas source at the center and edge of the wafer. According to Bernoulli's theory, the cross-sectional area of ​​the central path of the quartz square tube is larger than that of the edge path, and the flow velocity in the central path of the quartz square tube is lower than that in the edge path. This results in uneven distribution of the growth gas source in the radial direction of the wafer, causing inconsistencies in the radial growth rate and doping efficiency of the wafer surface, thereby affecting the surface shape, thickness uniformity, surface morphology and defects of the epitaxial wafer. Utility Model Content

[0003] In view of this, this utility model provides a graphite transition component to solve the problem of inconsistent growth gas sources in different areas of the wafer caused by uneven distribution of the airflow velocity of the growth gas source entering the growth chamber during the operation of a horizontal epitaxial CVD machine.

[0004] To achieve the above objectives, the present invention provides the following technical solutions:

[0005] A graphite transition component is suitable for a CVD machine, the CVD machine including a quartz square tube and a growth chamber, the graphite transition component including: an inlet transition component and an outlet transition component;

[0006] The air inlet transition piece is used to connect the quartz square tube. The air inlet transition piece is equipped with an airflow uniform velocity ladder. The airflow uniform velocity ladder is used to perform secondary diversion of the air source after the quartz square tube is diverted and to make the flow rate of the air source entering the growth chamber uniform.

[0007] The vent transition piece is used to connect the growth chamber.

[0008] Preferably, the cross-section of the intake transition piece is rectangular;

[0009] The intake transition component has a lower pipe wall, and the lower pipe wall is provided with an airflow uniform velocity ladder;

[0010] The uniform airflow ladder includes: a central embankment, a first side embankment, and a second side embankment, wherein the central embankment is located between the first side embankment and the second side embankment.

[0011] Preferably, the first side road embankment and the second side road embankment are set symmetrically.

[0012] Preferably, the height of the central embankment is higher than the height of the first side embankment.

[0013] Preferably, the cross-section of the central embankment is an isosceles trapezoidal structure;

[0014] The cross-sections of the first and second side road embankments are right-angled trapezoidal structures.

[0015] Preferably, the inner wall of the air outlet transition piece is detachably provided with an upper baffle, a lower baffle, a first side plate, and a second side plate.

[0016] Preferably, the inner side of the upper baffle is provided with symmetrical first and second side diversion channels at a preset distance;

[0017] The inner side of the lower baffle is provided with symmetrical third and fourth side diversion channels at preset intervals.

[0018] Preferably, the first side diversion channel is located directly above the third side diversion channel.

[0019] Preferably, the edges of the first side diversion channel, the second side diversion channel, the third side diversion channel and the fourth side diversion channel are all provided with chamfers at a preset angle.

[0020] Preferably, the air outlet transition piece has a rectangular structure, and the four internal corners of the air outlet transition piece are respectively provided with a first slot, a second slot, a third slot and a fourth slot for the first side plate, the second side plate, the upper baffle and the lower baffle to be engaged.

[0021] Based on the graphite transition component provided by this utility model, an air inlet transition component connects to a quartz square tube, and an airflow uniform velocity ladder is provided in the air inlet transition component to perform secondary diversion of the gas source after diversion in the quartz square tube and to uniformly distribute the flow velocity of the gas source entering the growth chamber. An air outlet transition component connects to the growth chamber. Through the graphite transition component disclosed above, the airflow uniform velocity ladder in the air inlet transition component not only enables secondary diversion of the gas source after diversion in the quartz square tube to balance the uneven flow velocity caused by the different wall thicknesses and cross-sectional areas of the quartz square tube, but also uniformly distributes the flow velocity of the growth gas source entering the growth chamber. Furthermore, utilizing the increasing temperature gradient in the air outlet transition component connecting the growth chamber and the quartz square tube, the airflow uniform velocity ladder is located in the air inlet transition component near the end of the quartz square tube. This airflow uniform velocity ladder allows the faster flow velocity of the gas to be buffered and decelerated. Finally, the airflow uniform velocity ladder acts as a buffer... The airflow is diverted and then re-attached and accelerated, thus achieving uniform airflow into the growth chamber. The airflow that crosses the uniform airflow gradient flows over the inlet transition piece at a certain arc. Under the increasing temperature gradient of the outlet transition piece, the gas has an upward diffusion buoyancy. Under the combined action of gravity and buoyancy, the contact between the airflow and the surface of the outlet transition piece is reduced, thereby reducing the formation of coating on the surface of the outlet transition piece. At the same time, the airflow from the quartz square tube is prevented from directly impacting the outlet transition piece, thus preventing the loose coating particles on the lower surface of the outlet transition piece from being carried to the wafer surface. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0023] Figure 1 A front view of the air intake transition component provided in an embodiment of this utility model;

[0024] Figure 2 A top view of the air intake transition component provided in an embodiment of this utility model;

[0025] Figure 3 A front view of the air outlet transition member provided in an embodiment of this utility model;

[0026] Figure 4 A top view of the air outlet transition component provided in an embodiment of this utility model.

[0027] Among them, the air intake transition component 1 includes a central embankment 11, a first side embankment 12, and a second side embankment 13; the air outlet transition component 2 includes an upper baffle 21, a first side diversion channel 211, a second side diversion channel 212, a lower baffle 22, a third side diversion channel 221, a fourth side diversion channel 222, a first side plate 23, a second side plate 24, a first slot 25, a second slot 26, a third slot 27, and a fourth slot 28. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] In this application, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0030] This utility model embodiment provides a graphite transition piece, see [link to relevant documentation] Figure 1and combined Figures 2 to 4 , Figure 1 This is a schematic diagram of the graphite transition component, which is applicable to CVD equipment. The CVD equipment includes a quartz square tube and a growth chamber. The graphite transition component includes: an inlet transition component 1 and an outlet transition component 2.

[0031] The air inlet transition piece 1 is used to connect the quartz square tube. The air inlet transition piece 1 is equipped with an airflow uniform velocity ladder. The airflow uniform velocity ladder is used to perform secondary diversion of the air source after the quartz square tube is diverted and to make the flow rate of the air source entering the growth chamber uniform.

[0032] The gas outlet transition piece 2 is used to connect the growth chamber.

[0033] It should be noted that by setting an airflow uniform velocity ladder in the air inlet transition component 1 to perform secondary diversion of the air source after it is diverted by the quartz square tube and to make the flow velocity of the air source entering the growth chamber uniform, the airflow uniform velocity ladder can perform secondary diversion of the air source after it is diverted by the quartz square tube. This balances the effect of uneven flow velocity caused by the different wall thicknesses and cross-sectional areas of each quartz square tube, and uniforms the flow velocity of the growth air source entering the growth chamber, thereby reducing the negative impact of inconsistent air source flow velocity between the wafer center and the edge on the wafer coating quality.

[0034] Furthermore, the outlet transition piece 2 connecting the growth chamber and the quartz square tube has an increasing temperature gradient. The growth gas source is more likely to deposit a coating on the inlet transition piece 1, which is closer to the temperature of the growth chamber. Therefore, this invention sets the airflow uniform speed ladder in the inlet transition piece 1 near the end of the quartz square tube. At the same time, the airflow uniform speed ladder can buffer and decelerate the faster airflow, thereby achieving uniform airflow into the growth chamber. The airflow passing over the airflow uniform speed ladder flows over the inlet transition piece 1 at a certain arc. Under the increasing temperature gradient of the inlet transition piece 1, the gas has an upward diffusion buoyancy. Under the dual action of gravity and buoyancy, the contact between the airflow and the surface of the outlet transition piece 2 is reduced, thereby reducing the formation of the coating on the surface of the outlet transition piece 2. At the same time, it avoids the airflow from the quartz square tube from directly impacting the outlet transition piece 2 and avoids carrying loose coating particles from the lower surface of the outlet transition piece 2 to the wafer surface to form fatal defects.

[0035] This embodiment of the invention connects the quartz square tube via an inlet transition piece 1, and includes an airflow uniform velocity ladder in the inlet transition piece 1 to perform secondary diversion of the gas source after diversion in the quartz square tube and to ensure uniform flow velocity of the gas source entering the growth chamber. The growth chamber is connected via an outlet transition piece 2. Through the graphite transition piece disclosed above, the airflow uniform velocity ladder in the inlet transition piece 1 not only performs secondary diversion of the gas source after diversion in the quartz square tube to balance the uneven flow velocity caused by differences in the wall thickness and cross-sectional area of ​​each pipe in the quartz square tube, but also uniformly distributes the flow velocity of the growth gas source entering the growth chamber. Furthermore, utilizing the increasing temperature gradient in the outlet transition piece 2 connecting the growth chamber and the quartz square tube, the airflow uniform velocity ladder is positioned within the inlet transition piece 1 near the end of the quartz square tube. This airflow uniform velocity ladder allows for buffering and deceleration of faster airflow. Finally, the airflow uniform velocity ladder acts as a buffer. After being diverted, the airflow is re-attached and accelerated, thereby achieving uniform airflow into the growth chamber. The airflow that crosses the uniform airflow gradient flows over the inlet transition piece 1 at a certain arc. Under the increasing temperature gradient of the outlet transition piece 2, the gas has an upward diffusion buoyancy. Under the combined action of gravity and buoyancy, the contact between the airflow and the surface of the outlet transition piece 2 is reduced, thereby reducing the formation of coating on the surface of the outlet transition piece 2. At the same time, the airflow from the quartz square tube is prevented from directly impacting the outlet transition piece 2, thus preventing the loose coating particles on the lower surface of the outlet transition piece 2 from being carried to the wafer surface.

[0036] Specifically, the cross-section of the air intake transition piece 1 is a rectangular structure;

[0037] The air intake transition component 1 has a lower pipe wall, and the lower pipe wall is provided with an airflow uniform velocity ladder;

[0038] The uniform airflow ladder includes: a central embankment 11, a first side embankment 12, and a second side embankment 13, wherein the central embankment 11 is located between the first side embankment 12 and the second side embankment 13.

[0039] It should be noted that by setting a central dam 11, a first side dam 12, and a second side dam 13 on the lower pipe wall, and placing the central dam 11 between the first side dam 12 and the second side dam 13, the central dam 11, the first side dam 12, and the second side dam 13 can perform secondary diversion of the gas source after the quartz square tube is diverted. This balances the effect of uneven flow rate caused by the different wall thicknesses and cross-sectional areas of each pipe in the quartz square tube, and uniformly increases the flow rate of the growth gas source entering the growth chamber. This reduces the negative impact on wafer coating quality caused by the inconsistent gas source flow rate between the wafer center and the edge.

[0040] Furthermore, the central embankment 11, the first side embankment 12, and the second side embankment 13 are positioned within the air inlet transition piece 1 near the end of the quartz square tube. The uniform airflow gradient allows the faster airflow to be buffered and slowed down by the central embankment 11, the first side embankment 12, and the second side embankment 13. At the interval between the central embankment 11, the first side embankment 12, and the second side embankment 13, the airflow is diverted by these embankments and then re-attaches and accelerates, thus achieving uniform airflow into the growth chamber. Furthermore, the airflow that crosses the central road embankment 11, the first side road embankment 12, and the second side road embankment 13 flows through the end of the air inlet transition piece 1 near the air outlet transition piece 2 at a certain arc. Under the increasing temperature gradient of the transition piece, the gas has an upward diffusion buoyancy. Under the dual action of gravity and buoyancy, the contact between the airflow and the surface of the air outlet transition piece 2 is reduced, thereby reducing the formation of coating on the surface of the air outlet transition piece 2. At the same time, the airflow flowing out of the quartz square tube is prevented from directly impacting the air outlet transition piece 2, thereby preventing the loose coating particles on the lower surface of the air outlet transition piece 2 from being carried to the wafer surface.

[0041] Specifically, the first side road embankment 12 and the second side road embankment 13 are arranged symmetrically.

[0042] It should be noted that by symmetrically setting the first side road embankment 12 and the second side road embankment 13, the airflow after being diverted passes through the gap between the middle road embankment 11, the first side road embankment 12 and the second side road embankment 13. When the airflow on both sides is diverted by the middle road embankment 11, the first side road embankment 12 and the second side road embankment 13 and then reattaches and accelerates, the airflow velocity on both sides can be the same.

[0043] Specifically, the height of the central embankment 11 is higher than the height of the first side embankment 12.

[0044] It should be noted that setting the height of the central embankment 11 to be higher than the height of the first side embankment 12 can effectively increase the speed of the airflow in the middle of the air intake transition piece 1.

[0045] It should also be noted that the height of the central embankment 11 can be higher than or the same as the height of the first side embankment 12, and those skilled in the art can choose according to their needs.

[0046] Specifically, the cross-section of the central embankment 11 is an isosceles trapezoidal structure;

[0047] The cross-sections of the first side road embankment 12 and the second side road embankment 13 are right-angled trapezoidal structures.

[0048] It should be noted that the side of the first side road embankment 12 and the second side road embankment 13 closest to the middle road embankment 11 are sloped.

[0049] Furthermore, the inner wall of the air outlet transition piece 2 is detachably provided with an upper baffle 21, a lower baffle 22, a first side plate 23, and a second side plate 24.

[0050] It should be noted that by detachably providing an upper baffle 21, a lower baffle 22, a first side plate 23, and a second side plate 24 on the inner wall of the gas outlet transition component 2, when the gas outlet transition component 2 needs to be cleaned, the upper baffle 21, the lower baffle 22, the first side plate 23, and the second side plate 24 can be disassembled and replaced, which effectively reduces the cost of wafer epitaxy.

[0051] Specifically, the inner side of the upper baffle 21 is provided with a symmetrical first side diversion groove 211 and a second side diversion groove 212 at a preset distance;

[0052] The inner side of the lower baffle 22 is provided with a symmetrical third side diversion channel 221 and a fourth side diversion channel 222 at a preset distance.

[0053] It should be noted that by providing symmetrical first side diversion grooves 211 and second side diversion grooves 212 at a preset distance on the inner side of the upper baffle 21, and symmetrical third side diversion grooves 221 and fourth side diversion grooves 222 at the preset distance on the inner side of the lower baffle 22, coating deposition at areas with faster airflow velocity can be effectively reduced, thereby reducing the uneven airflow distribution caused by the uneven coating of the transition piece.

[0054] Furthermore, the first sideway diversion channel 211 is located directly above the third sideway diversion channel 221.

[0055] It should be noted that the first side channel diversion groove 211 is positioned directly above the third side channel diversion groove 221, so that the first side channel diversion groove 211 can cooperate with the third side channel diversion groove 221 to reduce coating deposition in areas with faster airflow velocity, thereby reducing the uneven airflow distribution caused by the uneven coating of the transition piece.

[0056] Since the first side channel diversion groove 211 is located directly above the third side channel diversion groove 221, and the first side channel diversion groove 211 and the second side channel diversion groove 212 are symmetrical, and the third side channel diversion groove 221 and the fourth side channel diversion groove 222 are symmetrical, the second side channel diversion groove 212 can cooperate with the fourth side channel diversion groove 222 to reduce coating deposition at areas with faster airflow velocity, thereby reducing the uneven airflow distribution caused by the uneven coating of the transition piece.

[0057] Specifically, the edges of the first side diversion channel 211, the second side diversion channel 212, the third side diversion channel 221, and the fourth side diversion channel 222 are all provided with chamfers at a preset angle.

[0058] It should be noted that the edges of the first side diversion channel 211, the second side diversion channel 212, the third side diversion channel 221, and the fourth side diversion channel 222 are all provided with chamfers at a preset angle, making the edges of the first side diversion channel 211, the second side diversion channel 212, the third side diversion channel 221, and the fourth side diversion channel 222 smoother.

[0059] Specifically, the air outlet transition piece 2 has a rectangular structure, and the four corners of the air outlet transition piece 2 are respectively provided with a first slot 25, a second slot 26, a third slot 27 and a fourth slot 28 for the first side plate 23, the second side plate 24, the upper baffle 21 and the lower baffle 22 to be inserted.

[0060] It should be noted that by providing first slots 25, second slots 26, third slots 27, and fourth slots 28 at the four internal corners of the air outlet transition piece 2 for engaging the first side plate 23, second side plate 24, upper baffle 21, and lower baffle 22, respectively, the workers can install and replace the first side plate 23, second side plate 24, upper baffle 21, and lower baffle 22 by engaging them in the first slots 25, second slots 26, third slots 27, and fourth slots 28. Therefore, providing first slots 25, second slots 26, third slots 27, and fourth slots 28 can further improve the assembly and disassembly efficiency of the upper baffle 21, lower baffle 22, first side plate 23, and second side plate 24.

[0061] Preferably, the intake transition part 1 has a length of 20mm-40mm, a width of 150mm-300mm, a height of 25mm-60mm, and a wall thickness of 2mm-10mm;

[0062] The quartz square tube joint has a length of 6mm-20mm, a width of 144mm-296mm, a height of 27mm-58mm, and a wall thickness of 2mm-8mm.

[0063] The length of the air outlet transition piece 2 is 6 mm - 20 mm, the width is 144 mm - 296 mm, the height is 27 mm - 58 mm, and the wall thickness is 2 mm - 8 mm.

[0064] The length of the central embankment 11 is 2 mm - 20 mm, the width is 60 mm - 144 mm, the height is 27 mm - 58 mm, and the edge chamfer is 5° - 60°;

[0065] The first side road embankment 12 (the second side road embankment 13) has a length of 2 mm - 20 mm, a width of 30 mm - 72 mm, a height of 27 mm - 58 mm, and an edge chamfer of 5° - 60°.

[0066] The total length of the air outlet transition piece 2 is 20 mm - 40 mm, the total width is 150 mm - 300 mm, the total height is 25 mm - 60 mm, and the total wall thickness is 2 mm - 10 mm.

[0067] The length of the air intake transition part 1 is 6-20mm, the width is 150-300mm, the height is 27-58mm, and the total wall thickness is 2mm-10mm.

[0068] The length of the growth chamber connection is 6 mm - 20 mm, the width is 144 mm - 296 mm, the height is 27 mm - 58 mm, and the wall thickness is 2 mm - 8 mm.

[0069] The first side plate 23 (second side plate 24) has a length of 14 mm - 34 mm, a height of 27 mm - 58 mm, and a wall thickness of 2 mm - 8 mm.

[0070] The upper baffle 21 (lower baffle 22) has a length of 14 mm - 34 mm, a width of 144 mm - 296 mm, and a wall thickness of 2 mm - 8 mm. The first slot 25 has a length of 14 mm - 34 mm and a depth of 2 mm - 6 mm.

[0071] The first side channel diversion groove 211 (the second side channel diversion groove 212, the third side channel diversion groove 221, and the fourth side channel diversion groove 222) has a length of 10 mm to 50 mm, a width of 10 mm to 50 mm, a groove depth of 1 mm to 6 mm, and an edge chamfer of 5° to 60°.

[0072] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A graphite transition component, characterized in that, Applicable to CVD equipment, the CVD equipment includes a quartz square tube and a growth chamber, and the graphite transition component includes: an inlet transition component and an outlet transition component; The air inlet transition piece is used to connect the quartz square tube. The air inlet transition piece is provided with an airflow uniform velocity ladder. The airflow uniform velocity ladder is used to perform secondary diversion of the air source after the quartz square tube is diverted and to make the flow rate of the air source entering the growth chamber uniform. The gas outlet transition piece is used to connect the growth chamber.

2. The graphite transition member according to claim 1, characterized in that, The cross-section of the intake transition component is rectangular; The air intake transition component has a lower pipe wall, and the lower pipe wall is provided with an airflow uniform velocity ladder; The uniform airflow ladder includes: a central embankment, a first side embankment, and a second side embankment, wherein the central embankment is located between the first side embankment and the second side embankment.

3. The graphite transition member according to claim 2, characterized in that, The first side road embankment and the second side road embankment are arranged symmetrically.

4. The graphite transition member according to claim 3, characterized in that, The height of the central embankment is higher than that of the first side embankment.

5. The graphite transition member according to claim 2, characterized in that, The cross-section of the central embankment is an isosceles trapezoidal structure; The cross-sections of the first and second side road embankments are right-angled trapezoidal structures.

6. The graphite transition member according to claim 1, characterized in that, The inner wall of the air outlet transition piece is detachably provided with an upper baffle, a lower baffle, a first side plate, and a second side plate.

7. The graphite transition member according to claim 6, characterized in that, The inner side of the upper baffle is provided with a symmetrical first side diversion channel and a second side diversion channel at a preset distance; The inner side of the lower baffle is provided with a symmetrical third side diversion channel and a fourth side diversion channel at a preset distance.

8. The graphite transition member according to claim 7, characterized in that, The first side diversion channel is located directly above the third side diversion channel.

9. The graphite transition member according to claim 7, characterized in that, The edges of the first side diversion channel, the second side diversion channel, the third side diversion channel, and the fourth side diversion channel are all provided with chamfers at a preset angle.

10. The graphite transition member according to claim 6, characterized in that, The air outlet transition piece has a rectangular structure, and the four corners inside the air outlet transition piece are respectively provided with a first slot, a second slot, a third slot and a fourth slot for the first side plate, the second side plate, the upper baffle and the lower baffle to be inserted.

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