Mask double-side appearance inspection device

Abstract

The utility model discloses a mask plate double -sided appearance inspection device relates to the technical field of auxiliary device for mask plate production, solves the technical problem that the traditional mask plate inspection exists the risk of falling breakage, and the inspection efficiency and the inspection accuracy are not high, including: main support frame, the main body frame is rotatively connected on the main support frame, the turnover device is rotatively connected in the main body frame inside, is used for fixing the light cover box in and drives the light cover box to turn over, the support structure is fixedly connected in the main body frame, is used for supporting the light cover box after turning over, the light inspection device is used for the mask plate illumination inspection in the light cover box, and the angle adjustable relative to the main body frame plane, adopts the device of the utility model when carrying out mask plate appearance inspection, has the advantages such as convenient operation, artificial contact little, high security, inspection is comprehensive, and the inspection efficiency is high, and the accuracy is high.

Description

Technical Field

[0001] This utility model relates to the technical field of auxiliary devices for mask production, specifically to a double-sided appearance inspection device for mask production. Background Technology

[0002] A photomask (also known as a photomask) is a critical material in the semiconductor industry, used for pattern transfer or calibration during the photolithography process. The substrate material of a photomask is typically quartz or soda glass, on which a chrome plating process is performed. Circuitry is then etched onto the photomask using laser direct writing equipment. If dust falls into the patterned area, it will affect downstream products. Therefore, the cleanliness requirements for the environment in which photomasks are used are extremely stringent. To ensure normal use by downstream customers, in addition to normal precision and defect control, photomask manufacturers need to conduct rigorous visual inspections before shipment. Dust or dirt on the photomask can seriously affect downstream products. Besides using professional defect detection equipment, visual inspection at the time of shipment is also crucial.

[0003] The traditional inspection method involves holding the photomask box (with the photomask inside) under a strong white light and then manually flipping it for visual inspection (double-sided). This method is quite cumbersome. Since the photomask needs to be inspected on both sides, there is a significant risk of it falling when flipping it. Furthermore, the photomask may move within the photomask box due to varying force applied by the operator, increasing the risk of scratches on the substrate. In addition, the angle at which the operator rotates the photomask varies depending on the operator, leading to different probabilities of dust detection. This affects the efficiency, accuracy, and consistency of inspection standards.

[0004] Based on this, a double-sided appearance inspection device for mask plates is designed to reduce the risks associated with manual handheld inspection, minimize personnel contact, improve the efficiency of outgoing inspection, and enhance the ability to detect surface dust. Utility Model Content

[0005] This invention aims to solve the technical problems of traditional mask inspection, such as the risk of drop and breakage, and low inspection efficiency and accuracy. The purpose is to provide a double-sided appearance inspection device for mask, which has the advantages of convenient operation, less manual contact, high safety, comprehensive inspection, high inspection efficiency, and high accuracy when performing mask appearance inspection.

[0006] This utility model is achieved through the following technical solution.

[0007] A double-sided visual inspection device for photomasks, comprising:

[0008] Main support frame;

[0009] The main frame is rotatably connected to the main support frame;

[0010] The flipping device is rotatably connected inside the main frame and is used to fix the photomask box inside and drive the photomask box to flip over.

[0011] The supporting structure is fixedly connected within the main frame and is used to support the photomask box after it has been flipped over.

[0012] The light inspection device is used to illuminate and inspect the mask plate inside the photomask box, and its angle relative to the plane of the main frame is adjustable.

[0013] When using the device of this invention for photomask visual inspection, the photomask box containing the photomask is placed inside the flipping device to fix it in place. To inspect the chrome side of the photomask, the chrome side is placed face up inside the photomask box. Then, the flipping device is opened to expose the photomask box, which is then opened. The main frame is rotated and adjusted to inspect the photomask box at different angles. Simultaneously, the light inspection device is rotated and adjusted to change its angle relative to the plane of the main frame, thereby achieving visual inspection of the chrome side of the photomask under illumination at different angles. When the glass side needs to be inspected, the device is closed. The flipping device secures the photomask box inside, preventing it from shaking during rotation. The photomask inside is then rotated so that the glass side faces upwards. The flipping device is then opened to expose the photomask box, and the same procedure is followed for inspection. The flipped photomask box and flipping device are supported by a support structure, which provides support for both, preventing shaking during inspection and ensuring the stability and accuracy of the test. After inspection, the flipping device is opened, and the photomask box can be removed.

[0014] Therefore, this invention allows for flexible inspection of the photomask from different angles by adjusting the angles of the main frame and the light inspection device. It eliminates the need for manual rotation of the photomask box, reducing contact between personnel and the box, simplifying the inspection process, improving overall safety and efficiency, and mitigating the risk of drops or damage caused by manual handling. Furthermore, adjusting the angles of the main frame and the light inspection device standardizes the inspection angles, enabling multi-directional testing and improving the comprehensiveness and accuracy of the inspection. Additionally, the flipping device secures the photomask box, preventing damage and scratches caused by shaking during flipping. The support structure further supports the photomask box during inspection, preventing wobbling and ensuring the stability and accuracy of the inspection.

[0015] In summary, the device of this invention has the advantages of convenient operation, minimal manual contact, high safety, comprehensive inspection, high inspection efficiency, and high accuracy when performing visual inspection of photomasks.

[0016] Furthermore, the flipping device consists of a first flipping box and a second flipping box, with the photomask fixed within the internal space formed by the first and second flipping boxes. The flipping device, composed of the first and second flipping boxes, secures the photomask inside during the flipping operation to prevent it from shaking. After flipping to the correct position, the upper box is opened to expose the photomask for easy inspection.

[0017] Furthermore, the first and second flip boxes are rotatably connected to a rotating shaft, which is fixed inside the main frame. To enable the rotation of the first and second flip boxes, both are fixed inside the main frame via a central rotating shaft. When the rotating shaft rotates, the photomask inside the photomask box can be flipped over to achieve double-sided inspection.

[0018] Furthermore, rotating handles are installed on the exterior of both the first and second flipping boxes. When flipping the boxes, the operator can hold the rotating handles to operate them, making the operation easier.

[0019] Furthermore, pads are installed at the four corners of the first and second flip-top boxes to secure the photomask box. The pads inside the flip structure can fix the photomask box vertically without directly contacting the flip-top box, thus preventing damage or scratches caused by movement of the internal photomask box.

[0020] Furthermore, the support structure is symmetrically arranged on both sides of the rotation axis. Since the first and second flip-up boxes can flip to the left and right, symmetrically arranging the support structure on both sides of the rotation axis can effectively support the photomask box after it has flipped left and right.

[0021] Furthermore, the main frame is fixed to the upper part of the main support frame by a main frame locking device. The angle of the main frame can be adjusted manually, and after adjustment, it is locked to the upper part of the main support frame by the main frame locking device to prevent shaking.

[0022] Furthermore, the main frame includes supporting beams and vertical support rods, which together form a T-shaped frame structure. Specifically, the T-shaped frame structure is installed at the bottom of the main frame and is symmetrically installed, providing good support for the main frame.

[0023] Furthermore, the light inspection device uses a strong white light.

[0024] Furthermore, the light inspection device is mounted on the main frame via a lamp holder, and the light inspection device and the lamp holder are rotatably connected and fixed by a locking component. Like the main frame, the light inspection device can be rotated to adjust its angle. After adjustment, it is locked to the lamp holder by the locking component to prevent shaking. This invention, by making the light inspection device adjustable in angle, improves the comprehensiveness and accuracy of the inspection.

[0025] Compared with the prior art, this utility model has the following advantages and beneficial effects:

[0026] 1. This utility model allows for flexible inspection of the photomask from different angles by adjusting the angle of the main frame and the angle of the light inspection device. It eliminates the need for manual rotation of the photomask box, reducing personnel contact with the photomask box, making the inspection operation more convenient, improving the overall safety and efficiency of the operation, and reducing the risk of dropping or breaking the photomask due to manual handling of the photomask box during inspection.

[0027] 2. This utility model unifies the inspection angle standard by adjusting the angle of the main frame and the angle of the light inspection device, enabling multi-directional detection and improving the comprehensiveness and accuracy of the inspection.

[0028] 3. This utility model uses a flipping device to fix the photomask box inside, avoiding the risk of damage and scratches caused by the shaking of the photomask box during the flipping process. During inspection, the photomask box is supported by a support structure to prevent shaking during the inspection process, thus ensuring the stability and accuracy of the test. Attached Figure Description

[0029] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:

[0030] Figure 1 This is a schematic diagram of the structure of this utility model;

[0031] Figure 2 This is a schematic diagram of the flipping device.

[0032] Figure 3 This is a schematic diagram of the structure after the photomask box is placed in the flipping device.

[0033] The attached diagram shows the markings and corresponding component names:

[0034] 1-Main support frame, 2-Main frame locking component, 3-Main frame, 4-Support structure, 5-Rotating shaft, 6-Flip handle, 7-Flipping device, 701-First flipping box, 702-Second flipping box, 8-Padded block, 9-Light cover box, 10-Light inspection device, 11-Light holder, 12-Light inspection device locking component. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0036] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to those skilled in the art that these specific details are not necessary to implement the present invention. In other embodiments, well-known structures, circuits, materials, or methods are not specifically described in order to avoid obscuring the present invention.

[0037] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0038] In the description of this utility model, the use of "first" and "second" is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features or the order of the technical features.

[0039] In the description of this utility model, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the product of this application is usually placed in when in use, or the orientation or positional relationship that is commonly understood by those skilled in the art. It is only for the convenience of describing this application and simplifying the description, and is not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application.

[0040] Meanwhile, the terms "set up," "assemble," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0041] Example 1

[0042] This embodiment provides a double-sided appearance inspection device for photomasks, such as... Figures 1-3 As shown, it includes:

[0043] Main support frame 1;

[0044] The main frame 3 is rotatably connected to the main support frame 1;

[0045] The flipping device 7 is rotatably connected inside the main frame 3, and is used to fix the photomask box 9 inside and drive the photomask box 9 to flip over.

[0046] The support structure 4 is fixedly connected inside the main frame 3 and is used to support the flipped photomask box 9;

[0047] The light inspection device 10 is used to illuminate and inspect the mask plate inside the photomask box 9, and its angle relative to the plane of the main frame 3 is adjustable.

[0048] When using the device of this invention for photomask appearance inspection, the photomask box 9 containing the photomask is placed inside the flipping device 7 to fix the photomask box 9. To inspect the chrome side of the photomask, the chrome side is placed face up inside the photomask box 9, then the flipping device 7 is opened to expose the photomask box 9. The photomask box 9 is then opened again, and the main frame 3 is rotated and adjusted to inspect the photomask box 9 at different angles. At the same time, the light inspection device 10 is rotated and adjusted to change its angle relative to the plane of the main frame 3, thereby achieving visual inspection of the chrome side of the photomask under illumination at different angles. When it is necessary to inspect the glass side, the flipping device is closed. The device 7 secures the photomask box 9 inside to prevent it from shaking during rotation. Then, the rotating flipping device 7 rotates the mask inside the photomask box 9 so that the glass side faces upwards. The flipping device 7 is then opened to expose the photomask box 9, and the same operation is performed for inspection. The flipped photomask box 9 and the flipping device 7 are supported by the support structure 4, which supports the flipping device 7 and the internal photomask box 9, preventing shaking during the inspection process from affecting the stability and accuracy of the inspection. After the inspection is completed, the flipping device 7 is opened, and the internal photomask box 9 can be removed.

[0049] Therefore, this utility model allows for flexible inspection of the photomask from different angles by adjusting the angles of the main frame 3 and the light inspection device 10. It eliminates the need for manual rotation of the photomask box 9, reducing contact between personnel and the box, facilitating inspection, improving overall safety and efficiency, and mitigating the risk of drops or damage caused by manual handling. Furthermore, adjusting the angles of the main frame 3 and the light inspection device 10 standardizes the inspection angles, enabling multi-directional testing and improving the comprehensiveness and accuracy of the inspection. Additionally, the flipping device 7 secures the photomask box 9 within the frame, preventing damage and scratches caused by shaking during flipping. The support structure 4 further supports the photomask box 9 during inspection, preventing shaking and ensuring the stability and accuracy of the inspection.

[0050] In summary, the device of this invention has the advantages of convenient operation, minimal manual contact, high safety, comprehensive inspection, high inspection efficiency, and high accuracy when performing visual inspection of photomasks.

[0051] See Figure 2 and 3 The flipping device 7 consists of a first flipping box 701 and a second flipping box 702, and the photomask box 9 is fixed within the internal space formed by the first flipping box 701 and the second flipping box 702. The flipping device 7 is formed by combining the first flipping box 701 and the second flipping box 702. During the flipping operation, the photomask box 9 is fixed inside to prevent it from shaking. After flipping to the correct position, the upper box is opened to expose the photomask box 9 inside for easy inspection.

[0052] The first flip box 701 and the second flip box 702 are rotatably connected to the rotating shaft 5, which is fixed inside the main frame 3. In order to realize the rotation function of the first flip box 701 and the second flip box 702, both are fixed inside the main frame 3 by the middle rotating shaft 5. When the rotating shaft 5 rotates, the photomask in the photomask box 9 can be flipped to achieve double-sided inspection.

[0053] In a preferred embodiment, the first flipping box 701 and the second flipping box 702 are equipped with rotating handles on their exteriors. When flipping the boxes, the operator can hold the rotating handles to operate the box, making the operation easier.

[0054] In a preferred embodiment, pads 8 are installed at the four corners inside the first flip box 701 and the second flip box 702 to fix the photomask box 9. The pads 8 provided inside the flip structure can fix the photomask box 9 vertically and vertically, and will not directly contact the flip box, thus avoiding damage or scratches caused by the internal movement of the photomask box 9.

[0055] See Figure 1 The support structure 4 is symmetrically arranged on both sides of the rotation axis 5. Since the first flip box 701 and the second flip box 702 can flip to the left and right, symmetrically arranging the support structure 4 on both sides of the rotation axis 5 can effectively support the photomask box 9 after it has flipped left and right.

[0056] See Figure 1 The main frame 3 is fixed to the upper part of the main support frame 1 by the main frame locking member 2. The angle of the main frame 3 can be adjusted manually. After adjustment, it is locked to the upper part of the main support frame 1 by the main frame locking member 2 to prevent shaking.

[0057] The main frame 3 includes supporting beams and vertical support rods, which together form a T-shaped frame structure. Specifically, the T-shaped frame structure is installed at the bottom of the main frame 3 and is symmetrically installed, providing good support for the main frame 3.

[0058] See Figure 1 The light inspection device 10 uses a strong white light; the light inspection device 10 is mounted on the main frame 3 via a lamp holder 11, and the light inspection device 10 and the lamp holder 11 are rotatably connected and fixed by a light inspection device locking member 12.

[0059] The light inspection device 10, like the main frame 3, can be rotated to adjust its angle. After adjustment, it is locked to the lamp holder 11 by the light inspection device locking part 12 to prevent shaking. By setting the light inspection device 10 to be adjustable in angle, this utility model can improve the comprehensiveness and accuracy of the inspection.

[0060] Finally, it should be noted that the above specific embodiments are only used to describe the purpose, technical solution, and beneficial effects of this utility model in detail. It should be understood that the above description is only a specific implementation of this utility model and is not intended to limit the protection scope of this utility model. Although this utility model has been described in detail with reference to the foregoing specific embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions or improvements can be made to some or all of the technical features. These modifications, equivalent substitutions, and improvements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model, and they should all be covered within the scope of the claims and specification of this utility model.

Claims

1. A double-sided appearance inspection device for photomasks, characterized in that, include: Main support frame (1); The main frame (3) is rotatably connected to the main support frame (1); The flipping device (7) is rotatably connected inside the main frame (3) and is used to fix the photomask box (9) inside and drive the photomask box (9) to flip over. The support structure (4) is fixedly connected inside the main frame (3) and is used to support the photomask box (9) after it is flipped over; The light inspection device (10) is used to illuminate and inspect the mask plate inside the photomask box (9), and its angle relative to the plane of the main frame (3) is adjustable.

2. The double-sided appearance inspection device for a photomask according to claim 1, characterized in that, The flipping device (7) consists of a first flipping box (701) and a second flipping box (702), and the photomask box (9) is fixed in the internal space formed by the first flipping box (701) and the second flipping box (702).

3. The double-sided appearance inspection device for a photomask according to claim 2, characterized in that, The first flip box (701) and the second flip box (702) are rotatably connected to the rotating shaft (5), which is fixed inside the main frame (3).

4. The double-sided appearance inspection device for a photomask according to claim 2, characterized in that, Rotating handles are installed on the outside of the first flip box (701) and the second flip box (702).

5. The double-sided appearance inspection device for a photomask according to claim 2, characterized in that, Pads (8) are installed at the four corners inside the first flip box (701) and the second flip box (702) to fix the photomask box (9).

6. The double-sided appearance inspection device for a photomask according to claim 3, characterized in that, The support structure (4) is symmetrically arranged on both sides of the rotation axis (5).

7. A double-sided appearance inspection device for a photomask according to any one of claims 1-6, characterized in that, The main frame (3) is fixed to the upper part of the main support frame (1) by the main frame locking member (2).

8. A mask double-sided appearance inspection device according to any one of claims 1-6, characterized in that, The main frame (3) includes a supporting beam and a vertical support rod, which together form a T-shaped frame structure.

9. A double-sided appearance inspection device for a photomask according to any one of claims 1-6, characterized in that, The light inspection device (10) uses a strong white light.

10. A double-sided appearance inspection device for a photomask according to claim 9, characterized in that, The light inspection device (10) is installed on the main frame (3) via the lamp holder (11), and the light inspection device (10) and the lamp holder (11) are rotatably connected and fixed by the light inspection device locking part (12).

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