A substrate table cooling device of an MPCVD apparatus

Abstract

This utility model provides a substrate stage cooling device for MPCVD equipment, belonging to the technical field of MPCVD equipment. It includes a base mounted on a support frame, with a cavity inside the base. A water-cooled stage is movable vertically within the cavity, containing a cooling chamber. A connecting pipe is located at the bottom of the water-cooled stage. An opening for the vertical movement of the connecting pipe is provided on the bearing surface of the support frame. A cooling pipe is installed inside the connecting pipe, and a sealing cylinder for enclosing the cooling pipe and the connecting pipe is located at the bottom of the connecting pipe. A water inlet is located at the bottom of the sealing cylinder, and a sliding platform is provided on the surface of the sealing cylinder. This utility model supplies liquid to the cooling pipe through the water inlet, allowing cold water to enter the water-cooled stage through the cooling chamber, thereby cooling the water-cooled stage. An electric cylinder causes an adjusting rod to push the sliding platform in the opposite direction, causing the sliding platform to move axially along the guide rod, thus allowing the water-cooled stage to move vertically. Temperature adjustment is achieved by controlling the range between the water-cooled stage and the movable cavity.

Description

Technical Field

[0001] This utility model relates to the field of MPCVD equipment technology, and specifically to a substrate stage cooling device for MPCVD equipment. Background Technology

[0002] In the field of diamond film preparation, MPCVD (microwave plasma chemical vapor deposition) technology has become a key technology for preparing high-quality diamond films due to its unique advantages.

[0003] In related technologies, the stage is an important platform for the growth of diamond films in MPCVD technology. Its principle is to form a high-density carbon-containing plasma precursor above the sample stage by coupling microwaves through a resonant cavity, and then deposit and grow diamond on the substrate surface that has been cooled to a certain temperature. The stage temperature control mechanism is the core component of MPCVD technology. Since the growth quality of diamond films is extremely sensitive to temperature conditions, the temperature control of the stage has become a key link in the preparation process.

[0004] Traditional MPCVD equipment stages often struggle to control the surface temperature, requiring the stage to maintain a uniform temperature. This is especially problematic on larger stages, where the rate of temperature change and the uniformity of temperature distribution can negatively impact diamond film growth and overall performance. To address these issues, a substrate cooling device for MPCVD equipment is proposed. Utility Model Content

[0005] In view of this, the present invention provides a substrate stage cooling device for MPCVD equipment. The present invention supplies liquid to the cooling pipe through the water inlet, so that the cold water enters the water-cooled stage through the cooling chamber, thereby cooling the water-cooled stage. When it is necessary to adjust the height of the water-cooled stage, the electric cylinder causes the adjusting rod to push the slide in the opposite direction, so that the slide moves along the guide rod axially, thereby causing the sealing cylinder connected to the slide to move up and down. Thus, the connecting pipe and the cooling pipe installed inside it can drive the water-cooled stage to move up and down. When temperature adjustment is required, the range of the water-cooled stage and the moving chamber can be controlled.

[0006] To solve the above-mentioned technical problems, this utility model provides a substrate stage cooling device for an MPCVD equipment, including a base set on the upper part of a support frame, a cavity set inside the base, a water-cooled stage set in the middle of the cavity that can move up and down, a cooling chamber set inside the water-cooled stage, a connecting pipe set at the lower part of the water-cooled stage, an opening set on the bearing surface of the support frame for the vertical movement of the connecting pipe, a cooling pipe set inside the connecting pipe, a sealing cylinder set at the bottom of the connecting pipe for wrapping the cooling pipe and the connecting pipe, a water inlet set at the bottom of the sealing cylinder, a slide set on the surface of the sealing cylinder, and the slide set movably in the middle of the support frame.

[0007] The cooling pipe is connected to the cooling chamber, and the top of the sealed cylinder is equipped with a water outlet for discharging the cold water from the cooling pipe.

[0008] The support frame includes a base that fits against the ground and supports the entire device. A guide rod is symmetrically arranged on the base to guide the slide table to move up and down along the axis of the guide rod. A support platform is provided at the upper end of the guide rod to install and support the base. The base is provided on the top of the support platform.

[0009] An opening is provided through the middle of the support platform to facilitate the up and down movement of the connecting pipe. A sealing ring is provided inside the opening to prevent the connecting pipe from rubbing against the support platform. The sealing ring slides and adapts to the outer wall of the connecting pipe.

[0010] A pair of slide blocks are fixedly installed on the slide table. The blocks are used to slide the slide table and the guide rod. The slide blocks are convex in shape, and each slide block corresponds to a guide rod axially. The slide blocks and guide rods are slidably matched.

[0011] An electric cylinder is also installed at the bottom of the slide block. The electric cylinder is used to drive the adjusting rod to move, thereby creating a counter-thrust between the slide block and the support platform, which in turn drives the slide platform to move up and down. This causes the sealing cylinder connected to the slide platform to move up and down, so that the connecting pipe and the cooling pipe installed inside it can drive the water cooling platform to move up and down. The moving end of the electric cylinder is equipped with an adjusting rod. The lower end of the adjusting rod is connected to the electric cylinder, and the upper end of the adjusting rod is connected to the support platform. The adjusting rod is used to connect the slide platform and the support platform. The adjusting rod passes through the slide platform, and the upper end of the adjusting rod is connected to the bottom of the support platform.

[0012] The electric cylinder and two guide rods form a triangular shape to stabilize the support platform. A movable cavity is set between the upper part of the water-cooled platform and the inner wall of the base, which is used to adjust the movement gap of the water-cooled platform.

[0013] In summary, compared with the prior art, this application includes at least one of the following beneficial technical effects: 1. Cooling water is supplied to the cooling pipes through the inlet, allowing cold water to enter the water-cooled platform through the cooling chamber, thereby cooling the water-cooled platform. When the height of the water-cooled platform needs to be adjusted, the electric cylinder pushes the adjusting rod in the opposite direction to push the slide, causing the slide to move axially along the guide rod. This causes the sealing cylinder connected to the slide to move up and down, allowing the connecting pipe and the cooling pipe installed inside it to move the water-cooled platform up and down. When temperature adjustment is needed, the range of the water-cooled platform and the moving chamber can be controlled.

[0014] 2. The base is used to support the entire device, the guide rod is used to guide the slide table to move up and down along the axis of the guide rod, the support platform is used to install and support the base, the opening facilitates the up and down movement of the connecting pipe, the sealing ring is used to prevent the connecting pipe from rubbing against the support platform, and the sealing ring is slidably adapted to the outer wall of the connecting pipe.

[0015] 3. The slide block is used to slide the slide table and the guide rod, so that the slide table can move along the axial direction of the guide rod. Attached Figure Description

[0016] Figure 1 This is a side sectional view of the present invention; Figure 2 This is a schematic diagram of the main structure of this utility model.

[0017] Explanation of reference numerals in the attached drawings: 1. Support frame; 2. Base; 3. Cavity; 4. Cooling chamber; 5. Movable chamber; 6. Cooling pipe; 7. Connecting pipe; 8. Water inlet; 9. Water outlet; 10. Opening; 11. Adjusting rod; 12. Electric cylinder; 13. Water-cooled platform; 101. Support platform; 102. Base; 103. Guide rod; 104. Slide table; 105. Sealing ring; 106. Sealing cylinder; 107. Slide seat. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the following will be described in conjunction with the appendices of the embodiments of this utility model. Figure 1-2 The technical solutions of the embodiments of this utility model are clearly and completely described below. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model are within the protection scope of this utility model.

[0019] like Figure 1-2 As shown: This embodiment provides a substrate stage cooling device for an MPCVD equipment, including a base 2 disposed on the upper part of a support frame 1, a cavity 3 disposed inside the base 2, a water-cooled stage 13 disposed vertically in the middle of the cavity 3, a cooling chamber 4 disposed inside the water-cooled stage 13, a connecting pipe 7 disposed at the lower part of the water-cooled stage 13, an opening 10 disposed on the bearing surface of the support frame 1 for the vertical movement of the connecting pipe 7, a cooling pipe 6 disposed inside the connecting pipe 7, a sealing cylinder 106 disposed at the bottom of the connecting pipe 7 for wrapping the cooling pipe 6 and the connecting pipe 7, a water inlet 8 disposed at the bottom of the sealing cylinder 106, a slide 104 disposed on the surface of the sealing cylinder 106, and the slide 104 movably disposed in the middle of the support frame 1.

[0020] In use, cooling water is supplied to the cooling pipe 6 through the water inlet 8, so that the cold water enters the water-cooled platform 13 through the cooling chamber 4, thereby cooling the water-cooled platform 13. When it is necessary to adjust the height of the water-cooled platform 13, the electric cylinder 12 causes the adjusting rod 11 to push the slide 104 in the opposite direction, so that the slide 104 moves axially along the guide rod 103, thereby causing the sealing cylinder 106 connected to the slide 104 to move up and down, so that the connecting pipe 7 and the cooling pipe 6 installed in it can drive the water-cooled platform 13 to move up and down. When it is necessary to adjust the temperature, the range between the water-cooled platform 13 and the moving chamber 5 can be controlled.

[0021] This embodiment provides a substrate stage cooling device for an MPCVD equipment. like Figure 1 , 2 As shown: Cooling pipe 6 is connected to cooling chamber 4, cavity 3 is connected to connecting pipe 7, and water outlet 9 is provided at the top of sealing cylinder 106. Water outlet 9 is connected to the top of sealing cylinder 106 and is used to discharge cold water from cooling pipe 6.

[0022] Its effect is as follows: the outlet 9 is used to drain the cold water from the cooling pipe 6 and prevent the cold water from accumulating.

[0023] like Figure 1 , 2 As shown: The support frame 1 includes a base 102 that is flush with the ground. The base 102 is fixed to the ground by bolts and supports the entire device. A guide rod 103 is symmetrically arranged on the base 102. The lower end of the guide rod 103 is embedded in the base 102, and the upper end of the guide rod 103 is embedded in the bottom of the support platform 101. The guide rod 103 guides the slide table 104 to move up and down along the axial direction of the guide rod 103. A support platform 101 is provided at the upper end of the guide rod 103, and the opening 10 also passes through the support platform 101. A sealing ring 105 is fixedly installed at the position where the opening 10 passes through the support platform 101. The sealing ring 105 is sealed and adapted to the support platform 101. The support platform 101 is used to install and support the base 2. The base 2 is provided on the top of the support platform 101. The opening 10 is provided through the middle of the support platform 101. The opening 10 facilitates the up and down movement of the connecting pipe 7. The sealing ring 105 is provided inside the opening 10. The sealing ring 105 is used to prevent the connecting pipe 7 from rubbing against the support platform 101. The sealing ring 105 is slidably adapted to the outer wall of the connecting pipe 7.

[0024] Its effects are as follows: the base 102 is used to support the entire device, the guide rod 103 is used to guide the slide table 104 to move up and down along the axial direction of the guide rod 103, the support platform 101 is used to install and support the base 2, the opening 10 facilitates the up and down movement of the connecting pipe 7, the sealing ring 105 is used to prevent the connecting pipe 7 from rubbing against the support platform 101, and the sealing ring 105 is slidably adapted to the outer wall of the connecting pipe 7.

[0025] like Figure 1 , 2 As shown: A pair of slide blocks 107 are fixedly installed on the slide table 104. The slide blocks 107 are fixed on the slide table 104 and are used to slide the slide table 104 and guide rod 103. The slide blocks 107 are convex in shape, and each slide block 107 corresponds axially to a guide rod 103. The slide blocks 107 and guide rod 103 are slidably adapted to each other.

[0026] Its effect is that the slide block 107 is used to slide the slide table 104 and the guide rod 103, so that the slide table 104 can move axially along the guide rod 103.

[0027] like Figure 1 , 2 As shown: An electric cylinder 12 is also provided at the bottom of the slide 107. The electric cylinder 12 is used to drive the adjusting rod 11 to move, so that the slide 107 and the support platform 101 form a counter-thrust force, thereby driving the slide 104 to move up and down, and then causing the sealing cylinder 106 connected to the slide 104 to move up and down, so that the connecting pipe 7 and the cooling pipe 6 installed inside it can drive the water-cooled platform 13 to move up and down. The moving end of the electric cylinder 12 is provided with an adjusting rod 11. The lower end of the adjusting rod 11 is connected to the electric cylinder 12, and the upper end of the adjusting rod 11 is connected to the support platform 101. The adjusting rod 11 is used to connect the slide 104 and the support platform 101. The adjusting rod 11 passes through the slide 104, and the upper end of the adjusting rod 11 is connected to the bottom of the support platform 101.

[0028] The effect is as follows: the adjusting rod 11 is used to connect the slide table 104 with the support table 101, and the electric cylinder 12 is used to drive the adjusting rod 11 to move, so that the slide 107 and the support table 101 form a counter-thrust force, thereby driving the slide table 104 to move up and down, and then causing the sealing cylinder 106 connected to the slide table 104 to move up and down, so that the connecting pipe 7 and the cooling pipe 6 installed inside it can drive the water-cooled platform 13 to move up and down.

[0029] like Figure 1 , 2 As shown: the electric cylinder 12 and the two guide rods 103 form a triangular shape to stabilize the support platform 101. The upper part of the water-cooled platform 13 and the inner wall of the base 2 are provided with a movable cavity 5, which is used to adjust the movable gap of the water-cooled platform 13.

[0030] Working principle: The cooling pipe 6 is supplied with liquid through the external water supply equipment connected to the water inlet 8, so that the cold water enters the water-cooled platform 13 through the cooling chamber 4, thereby cooling the water-cooled platform 13. When it is necessary to adjust the height of the water-cooled platform 13, the electric cylinder 12 causes the adjusting rod 11 to push the slide 104 in the opposite direction, so that the slide 104 moves axially along the guide rod 103, thereby causing the sealing cylinder 106 connected to the slide 104 to move up and down, so that the connecting pipe 7 and the cooling pipe 6 installed in it can drive the water-cooled platform 13 to move up and down. When temperature adjustment is required, the range between the water-cooled platform 13 and the moving chamber 5 can be controlled.

[0031] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A substrate stage cooling device for an MPCVD equipment, comprising a base stage (2) disposed on the upper part of a support frame (1), characterized in that: The base (2) is provided with a cavity (3), and a water-cooled platform (13) is provided in the middle of the cavity (3) and can move up and down. A cooling chamber (4) is provided in the water-cooled platform (13), and a connecting pipe (7) is provided at the bottom of the water-cooled platform (13). An opening (10) for the connecting pipe (7) to move up and down is provided on the bearing surface of the support frame (1). A cooling pipe (6) is provided in the connecting pipe (7). A sealing cylinder (106) for wrapping the cooling pipe (6) and the connecting pipe (7) is provided at the bottom of the connecting pipe (7). A water inlet (8) is provided at the bottom of the sealing cylinder (106). A slide (104) is provided on the surface of the sealing cylinder (106). The slide (104) is movably provided in the middle of the support frame (1).

2. The substrate stage cooling device for an MPCVD equipment as described in claim 1, characterized in that: The cooling pipe (6) is connected to the cooling chamber (4), and the top of the sealing cylinder (106) is provided with a water outlet (9).

3. The substrate stage cooling device for an MPCVD equipment as described in claim 2, characterized in that: The support frame (1) includes a base (102) that is in contact with the ground. A guide rod (103) is symmetrically arranged on the base (102). A support platform (101) is arranged on the upper end of the guide rod (103). The base (2) is arranged on the top of the support platform (101).

4. The substrate stage cooling device for an MPCVD equipment as described in claim 3, characterized in that: The support platform (101) has an opening (10) through the middle, and a sealing ring (105) is provided in the opening (10). The sealing ring (105) is slidably adapted to the outer wall of the connecting pipe (7).

5. The substrate stage cooling device for an MPCVD equipment as described in claim 4, characterized in that: A pair of slide blocks (107) are fixedly provided on the slide table (104). The slide blocks (107) are convex in shape. Each slide block (107) corresponds axially to a guide rod (103). The slide blocks (107) and the guide rods (103) are slidably adapted to each other.

6. The substrate stage cooling device for an MPCVD equipment as described in claim 5, characterized in that: An electric cylinder (12) is also provided at the bottom of the slide (107). An adjusting rod (11) is provided at the movable end of the electric cylinder (12). The adjusting rod (11) passes through the slide (104), and the upper end of the adjusting rod (11) is connected to the bottom of the support platform (101).

7. A substrate stage cooling device for an MPCVD equipment as described in claim 6, characterized in that: The electric cylinder (12) and the two guide rods (103) form a triangular shape to stabilize the support platform (101). The upper part of the water-cooled platform (13) and the inner wall of the base (2) are provided as a movable cavity (5).

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