A new type of displacement imaging mechanism with side-mounted short cantilever

Abstract

The utility model discloses a novel displacement imaging mechanism of side-mounted short cantilever belongs to machine vision detection technical field, including camera, lens, actuator, light source, V type fixed block and mounting plate, the camera with the lens passes through transition sheet and is installed on the actuator, and with the actuator realizes up and down movement, the actuator is motor, screw, guide rail slider integrated packaging structure, and the mounting direction of actuator is perpendicular with the mounting plate and is in vertical layout, the V type fixed block is locked on the mounting plate of actuator, and the linear contact is formed with the cylindrical surface of lens through V type surface to fix lens end, the light source is set up on the lower plate, and provides illumination for imaging. Solve the problem such as long cantilever, poor imaging stability, limited application scene in the prior art.

Description

Technical Field

[0001] This utility model belongs to the field of machine vision inspection technology, specifically relating to a novel side-mounted short cantilever displacement imaging mechanism applied to semiconductor quantity inspection scenarios. Background Technology

[0002] Machine vision inspection technology combines hardware components such as cameras, lenses, and light sources with computer algorithms to automatically acquire and analyze images, enabling the inspection, measurement, identification, and judgment of target objects. This technology boasts core advantages such as precision and speed exceeding the limits of the human eye, non-contact measurement avoiding damage, and data traceability, making it a key technological support in the field of semiconductor metrology.

[0003] As of 2023, my country relied on imports for 95% of its semiconductor quality inspection equipment, making the independent development of high-performance inspection equipment of great significance. The imaging unit, as the core of a machine vision system, directly determines the system's inspection accuracy and stability, making it a crucial element in technological development.

[0004] A typical structure of existing machine vision imaging units includes a Z-axis composed of a motor, lead screw, and guide rail slider, as well as imaging hardware such as an industrial camera, lens, and light source. The lens is fixed using a clamping method, such as... Figure 1 As shown, the entire motion assembly is arranged parallel to the mounting plate. However, this structure has the following drawbacks: 1. Excessive cantilever length causes structural resonance during high-speed movement, resulting in lens and camera shaking that deviates from the calibration position. The large amplitude of the shaking requires a long settling time, affecting the detection cycle. 2. The lens has a large axial dimension, and the clamp is only fixed by a flexible surface, which cannot effectively enhance rigidity. When moving at high speed, the end of the lens is prone to tailing, resulting in blurred images. 3. High-frequency vibrations caused by long cantilever arms can cause components to deviate from their calibrated positions, reduce the reliability of structural components, increase the number of calibrations, and shorten the effective working time of the equipment; 4. The moving parts are exposed, and the lubricating medium required for the lead screw and guide rail slider is prone to contaminating the environment and the tested object, making it unsuitable for use in cleanrooms. Utility Model Content

[0005] The purpose of this invention is to provide a novel side-mounted short cantilever displacement imaging mechanism, which aims to solve the problems of long cantilever, poor imaging stability, and limited applicable scenarios in the prior art.

[0006] The objective of this utility model is achieved through the following technical solution: A novel side-mounted short cantilever displacement imaging mechanism includes a camera, a lens, an actuator, a light source, a V-shaped fixing block, and a mounting plate. The camera and the lens are mounted on the actuator via a transition plate, and move up and down with the actuator. The actuator is an integrated structure of a motor, lead screw, and guide rail slider, and the mounting direction of the actuator is perpendicular to the mounting plate. The V-shaped fixing block is locked to the mounting plate of the actuator, and the V-shaped surface forms linear contact with the cylindrical surface of the lens to fix the end of the lens. The light source is located on the lower plate to provide illumination for imaging.

[0007] As a further improvement of one embodiment of the present invention, the inner wall of the V-groove of the V-shaped fixing block is provided with a wear-resistant buffer layer, which is made of rubber and is used to enhance the contact stability between the V-shaped fixing block and the cylindrical surface of the lens and to avoid damage to the lens surface.

[0008] As a further improvement of one embodiment of the present invention, the transition plate has an L-shaped structure, one side of the transition plate is connected to the slider bolt of the actuator, and the other side is fixed to the camera bolt, and the surface processing accuracy of the transition plate meets the coaxiality requirements of the camera and the lens.

[0009] As a further improvement of one embodiment of the present invention, the light source is a ring-shaped LED light source, and the position of the light source in the vertical direction is adjusted by a manual adjustment bracket.

[0010] As a further improvement of one embodiment of the present invention, the mounting plate has multiple sets of evenly distributed mounting holes on its surface, which are used to fix the imaging mechanism to the external transverse module.

[0011] As a further improvement of one embodiment of the present invention, the motor of the actuator is a servo motor using pulse control.

[0012] The above technical solution has the following beneficial effects: 1. The side-mounted layout shortens the cantilever length, significantly reduces the distance between the camera lens axis and the mounting plate, improves the overall structural rigidity, reduces the yaw amplitude, greatly shortens the settling time, and improves the detection cycle time; 2. The linear contact fixing method of the V-shaped fixing block enhances lens stability, reduces end-point shake, and improves image quality compared to the flexible contact of the traditional clamp. 3. The actuator adopts an integrated package, avoiding exposure of moving parts, requiring no additional lubrication medium, and can be used in clean environments such as Class 100 cleanroom semiconductor plants; 4. The compact structure reduces component position offset, extends the effective service life of components, reduces the number of calibrations, and improves the effective working time of the equipment. Attached Figure Description

[0013] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0014] The structures, proportions, sizes, etc. shown in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0015] Figure 1 This is a schematic diagram of the operating status of an existing displacement imaging mechanism.

[0016] Figure 2 A three-dimensional structural diagram of this utility model.

[0017] Figure 3 This is a top view of the structure provided for this utility model.

[0018] In the picture: 1. Camera; 2. Lens; 3. Actuator; 4. Light source; 5. V-shaped fixing block; 6. Mounting plate; 7. Transition plate; 8. Lower the board. Detailed Implementation

[0019] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0020] First embodiment, such as Figures 2-3As shown, a novel side-mounted short cantilever displacement imaging mechanism includes a camera 1, a lens 2, an actuator 3, a light source 4, a V-shaped fixing block 5, and a mounting plate 6. The camera 1 and lens 2 are mounted on the actuator 3 via a transition plate 7, and move up and down with the actuator 3.

[0021] Actuator 3 is an integrated package structure comprising the motor, lead screw, and guide rail slider, and its mounting direction is perpendicular to the mounting plate 6. This integrated package structure is common in industrial automation equipment and is a conventional technology in this field. To improve operational accuracy, the motor of actuator 3 is a servo motor using pulse control, capable of receiving commands from the control card. The housing of actuator 3 is made of aluminum alloy, combining lightweight design with rigidity.

[0022] Because the actuator is integrated into a single package, avoiding exposure of moving parts, it requires no additional lubrication medium and can be used in clean environments such as Class 100 cleanroom semiconductor plants.

[0023] The V-shaped fixing block 5 is locked onto the mounting plate 6 of the actuator 3, and the V-shaped surface forms a linear contact with the cylindrical surface of the lens 2 to fix the end of the lens 2.

[0024] Furthermore, the inner wall of the V-groove of the V-shaped fixing block 5 is provided with a wear-resistant buffer layer, which is made of rubber. This layer is used to enhance the contact stability between the V-shaped fixing block 5 and the cylindrical surface of the lens 2, and to avoid damage to the surface of the lens 2.

[0025] A lower plate 8 is provided at the lower end of the mounting plate 6, and the two are connected by a reinforcing plate. The surface of the mounting plate 6 has multiple sets of evenly distributed mounting holes, which are used to fix the imaging mechanism to the external transverse module. A light source 4 is provided on the lower plate 8 to provide illumination for imaging.

[0026] Specifically, the light source 4 is a ring-shaped LED light source 4, installed below the lens 2. The position of the light source 4 in the vertical direction is adjusted by a manually adjustable bracket. The aforementioned manually adjustable bracket is a hand-cranked lifting mechanism, which can be purchased directly from the market and is considered prior art in this field.

[0027] In this scheme, the transition plate 7 is an L-shaped structure. One side of the transition plate 7 is bolted to the slider of the actuator 3, and the other side is bolted to the camera 1. The surface machining accuracy of the transition plate 7 meets the coaxiality requirements of the camera 1 and the lens 2.

[0028] Furthermore, camera 1 is an industrial CMOS camera with a resolution of 5 million pixels, and lens 2 is a long-axis industrial lens with a focal length of 25mm. The two are fixed to the slider of actuator 3 by bolts through L-shaped transition plate 7. The surface of transition plate 7 is precision machined to ensure installation flatness.

[0029] The working process of the displacement imaging mechanism provided by this utility model is as follows: 1. After the equipment is started, the host computer sends a detection command to the control card, and the control card sends a motion signal to the actuator 3 according to the preset detection position parameters; 2. After receiving the signal, the actuator 3 starts the servo motor and drives the camera 1 and lens 2 to move in a direction perpendicular to the mounting plate 6 until the specified detection height is reached; 3. After actuator 3 is in position, it sends a feedback signal, light source 4 is activated and adjusted to the preset brightness, camera 1 is triggered to take a picture and acquire a high-definition image of the target object; 4. Camera 1 transmits the captured images back to the host computer, which uses image analysis algorithms to complete detection tasks such as size measurement and defect identification, and records the detection data; 5. After a single inspection is completed, the control card drives the actuator 3 to move according to the next inspection position instruction, repeating the above inspection process to achieve continuous automated inspection.

[0030] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0031] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0032] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A novel side-mounted short cantilever displacement imaging mechanism, characterized in that, The device includes a camera, lens, actuator, light source, V-shaped fixing block, and mounting plate. The camera and lens are mounted on the actuator via a transition plate, allowing them to move up and down with the actuator. The actuator is an integrated structure comprising a motor, lead screw, and guide rail slider, and its mounting direction is perpendicular to the mounting plate. The V-shaped fixing block is locked to the mounting plate of the actuator, and its V-shaped surface forms a linear contact with the cylindrical surface of the lens to fix the end of the lens. The light source is located on the lower plate to provide illumination for imaging.

2. The displacement imaging mechanism according to claim 1, characterized in that, The inner wall of the V-groove of the V-shaped fixing block is provided with a wear-resistant buffer layer, which is made of rubber. This layer is used to enhance the contact stability between the V-shaped fixing block and the cylindrical surface of the lens and to avoid damage to the lens surface.

3. The displacement imaging mechanism according to claim 1, characterized in that, The transition plate has an L-shaped structure. One side of the transition plate is connected to the slider bolt of the actuator, and the other side is fixed to the camera bolt. The surface machining accuracy of the transition plate meets the coaxiality requirements of the camera and lens.

4. The displacement imaging mechanism according to claim 1, characterized in that, The light source is a ring-shaped LED light source, and its position in the vertical direction is adjusted by manually adjusting the bracket.

5. The displacement imaging mechanism according to claim 1, characterized in that, The mounting plate has multiple sets of evenly distributed mounting holes on its surface, which are used to fix the imaging mechanism to the external transverse module.

6. The displacement imaging mechanism according to claim 1, characterized in that, The actuator's motor is a servo motor that uses pulse control.

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