A chemical agent spraying device of a gumming developing machine

Abstract

The utility model belongs to the technical field of glue spreading and developing machine accessory, and disclose a kind of chemical agent spraying device of glue spreading and developing machine, including two machine bases, the lower portion of machine base is equipped with distribution box, the left and right sides of distribution box top are fixedly installed with extension lug plate, the extension lug plate is movably connected between two machine bases, the extension lug plate rotates relative to machine base, the middle part of distribution box top is fixedly connected with water inlet, the utility model discloses by injecting chemical agent to the inside of water inlet, so that chemical agent enters the inside of distribution box, at this time, the solenoid valve inside pressurizing port is kept closed state, keep multiple spray opening state, at this time, chemical agent can be input to the inside of high pressure spray pipe by multiple spray opening, and be sprayed by multiple high pressure spray pipe under the support state of multiple adjusting rod, complete the multi-point spray process of chemical agent, realize the uniform spray process of chemical agent.

Description

Technical Field

[0001] This utility model belongs to the technical field of accessories for coating and developing machines, specifically a chemical spraying device for a coating and developing machine. Background Technology

[0002] The spray system of the photoresist coating and developing machine is a key component of the equipment. It is mainly used to uniformly spray chemical solutions onto the substrate surface during the developing process, thereby removing unexposed photoresist. The spray system typically consists of multiple nozzles and a precisely controlled liquid flow control device, ensuring that the solution evenly covers the entire substrate surface and avoiding problems such as localized over-development or incomplete development.

[0003] Conventional spraying devices mainly consist of high-pressure nozzles. During spraying, multiple high-pressure nozzles release chemical solutions to spray the substrate. The spraying range of this method mainly depends on the number and size of the nozzles. When spraying substrates of different sizes, it is usually necessary to change the nozzles of different sizes and numbers to meet the uniform spraying requirements of different substrate surfaces, which urgently needs to be improved. Utility Model Content

[0004] The purpose of this invention is to provide a chemical spraying device for a coating and developing machine to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a chemical spraying device for a coating and developing machine, comprising two machine bases, a distribution box provided below the machine bases, extension ear plates fixedly installed on the left and right sides of the top of the distribution box, the extension ear plates being movably connected to the two machine bases, the extension ear plates rotating relative to the machine bases, a water inlet fixedly connected to the middle of the top of the distribution box, a spray nozzle fixedly connected in a circular shape near the outer side of the bottom of the distribution box, a pressure port fixedly connected to the middle of the bottom of the distribution box, a solenoid valve installed inside the pressure port, and an adjustment component fixedly installed to the middle of the bottom of the distribution box, the top of the adjustment component being connected to the pressure port.

[0006] When spraying chemical agents, first connect the base to the external frame, and loosen the rotating shaft to allow the distribution box to rotate relative to the base. When the distribution box is adjusted to the appropriate angle, tighten the rotating shaft to complete the angle locking process. Then connect the water inlet to the external pipeline and maintain a certain pressure when the chemical agents are input.

[0007] As a further technical solution of this utility model, a locking seat is fixedly installed at the bottom of the distribution box in a circumferential shape, and the locking seat is located on the outer side of the spray nozzle.

[0008] As a further technical solution of this utility model, an adjusting rod is movably installed on the inner side of the locking seat. The adjusting rod rotates relative to the water inlet. A high-pressure spray pipe is fixedly connected to the end of the spray nozzle away from the distribution box. The end of the high-pressure spray pipe away from the spray nozzle passes through the bottom end of the adjusting rod and is located on the outer side of the adjusting rod.

[0009] By injecting the chemical agent into the inlet, the chemical agent enters the distribution tank. At this time, the solenoid valve inside the pressurization port is kept closed, while multiple spray nozzles are kept open. The chemical agent can then be input into the high-pressure spray pipe through multiple spray nozzles and sprayed out simultaneously through multiple high-pressure spray pipes under the support of multiple adjusting rods, completing the multi-point spraying process of the chemical agent and achieving a uniform spraying process.

[0010] As a further technical solution of this utility model, the adjustment component includes a movable plate, the outer side of which is provided with a groove in a circular shape, and a support rod is movably connected inside the groove. The end of the support rod away from the movable plate is movably connected to a fixed seat through a rotating shaft.

[0011] As a further technical solution of this utility model, the end of the fixed base away from the support rod is connected to the inner side of the adjusting rod, and the adjusting assembly also includes a water storage pipe, the bottom end of which is connected to the pressurization port.

[0012] As a further technical solution of this utility model, a piston plate is movably sleeved inside the water storage pipe, and a piston rod is fixedly connected to the bottom end of the piston plate. The bottom end of the piston rod passes through the bottom end of the water storage pipe and is connected to the movable plate.

[0013] As a further technical solution of this utility model, a limiting spring is movably sleeved on the outer side of the piston rod, and the upper and lower ends of the limiting spring are respectively connected to the inner bottom wall of the water storage pipe and the bottom end of the piston plate.

[0014] By opening the solenoid valve inside the pressurization port, high-pressure chemical agents can be injected into the water storage pipe, applying pressure to the piston plate. At this time, the piston plate and piston rod move downward, compressing the limit spring and causing the movable plate to move downward. This applies force to the support rods, causing multiple support rods to deflect outward. In other words, multiple support rods exert a pushing force on the adjusting rods, causing multiple adjusting rods to deflect in a relatively distant direction, which in turn drives the high-pressure nozzle to rotate accordingly. This expands the overall spraying range of the device. By adjusting the spraying range in a timely manner, it can adapt to the spraying needs of substrates of different sizes, thereby improving spraying efficiency.

[0015] The beneficial effects of this utility model are as follows: (1) This utility model injects chemical agents into the inside of the water inlet, so that the chemical agents enter the inside of the distribution box. At this time, the solenoid valve inside the pressurization port is kept closed, and multiple spray nozzles are kept open. At this time, the chemical agents can be input into the inside of the high-pressure spray pipe through multiple spray nozzles, and sprayed out through multiple high-pressure spray pipes simultaneously under the support of multiple adjusting rods, thus completing the multi-point spraying process of the chemical agents and realizing the uniform spraying process of the chemical agents.

[0016] (2) By opening the solenoid valve inside the pressurization port, the high-pressure chemical agent can be injected into the water storage pipe and pressure is applied to the piston plate. At this time, the piston plate and piston rod move down, the limit spring is compressed, and the movable plate moves down. At this time, the support rod is applied, and multiple support rods deflect outwards. That is, multiple support rods apply a thrust to the adjusting rod. At this time, multiple adjusting rods deflect in a relatively distant direction and drive the high-pressure nozzle to rotate accordingly. At this time, the overall spraying range of the device expands. By adjusting the spraying range in time, it can adapt to the spraying needs of substrates of different sizes and improve the spraying efficiency. Attached Figure Description

[0017] Figure 1 This is a front view of the overall structure of this utility model; Figure 2 This is a schematic diagram of the bottom of the overall structure of this utility model; Figure 3 This is a cross-sectional schematic diagram of the internal structure of the distribution box of this utility model; Figure 4 This is a cross-sectional schematic diagram of the internal structure of the adjusting rod and high-pressure nozzle of this utility model; Figure 5 This is a partial cross-sectional view of the structure of the adjustment component of this utility model.

[0018] In the diagram: 1. Base; 2. Extension ear plate; 3. Distribution box; 4. Spray nozzle; 5. Pressurization port; 6. Water inlet; 7. Adjustment assembly; 701. Movable plate; 702. Fixed seat; 703. Support rod; 704. Water storage pipe; 705. Piston plate; 706. Piston rod; 707. Limit spring; 8. Locking seat; 9. Adjustment rod; 10. High-pressure spray pipe. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] like Figures 1 to 5 As shown in the embodiment of this utility model, a chemical spraying device for a coating and developing machine includes two bases 1. A distribution box 3 is provided below the base 1. An extension ear plate 2 is fixedly installed on the left and right sides of the top of the distribution box 3. The extension ear plate 2 is movably connected to the two bases 1 and can rotate relative to the base 1. A water inlet 6 is fixedly connected to the middle of the top of the distribution box 3. A spray nozzle 4 is fixedly connected in a circular shape at the bottom of the distribution box 3 near the outer side. A pressure port 5 is fixedly connected to the middle of the bottom of the distribution box 3. A solenoid valve is installed inside the pressure port 5. An adjustment component 7 is fixedly installed in the middle of the bottom of the distribution box 3. The top of the adjustment component 7 is connected to the pressure port 5.

[0021] When spraying chemical agents, first connect the base 1 to the external frame, and the distribution box 3 can be rotated relative to the base 1 by loosening the rotating shaft. When the distribution box 3 is adjusted to a suitable angle, the rotating shaft can be tightened again to complete the angle locking process. Then connect the water inlet 6 to the external pipeline and maintain a certain pressure when the chemical agent is input.

[0022] like Figure 1 and Figure 3 as well as Figure 4 As shown, a locking seat 8 is fixedly installed in a circumferential shape at the bottom of the distribution box 3. The locking seat 8 is located on the outer side of the spray nozzle 4. An adjusting rod 9 is movably installed on the inner side of the locking seat 8. The adjusting rod 9 rotates relative to the water inlet 6. A high-pressure spray pipe 10 is fixedly connected to the end of the spray nozzle 4 away from the distribution box 3. The end of the high-pressure spray pipe 10 away from the spray nozzle 4 passes through the bottom of the adjusting rod 9 and is located on the outer side of the adjusting rod 9.

[0023] By injecting the chemical agent into the inlet 6, the chemical agent enters the distribution box 3. At this time, the solenoid valve inside the pressurization port 5 is kept closed, and the multiple spray nozzles 4 are kept open. The chemical agent can then be input into the high-pressure spray pipe 10 through the multiple spray nozzles 4 and sprayed out through the multiple high-pressure spray pipes 10 under the support of multiple adjusting rods 9, completing the multi-point spraying process of the chemical agent and realizing the uniform spraying process of the chemical agent.

[0024] like Figure 1 and Figure 2 as well as Figure 5As shown, the adjustment assembly 7 includes a movable plate 701. The outer side of the movable plate 701 has a circumferential groove, and a support rod 703 is movably connected inside the groove. The end of the support rod 703 away from the movable plate 701 is movably connected to a fixed seat 702 via a pivot. The end of the fixed seat 702 away from the support rod 703 is connected to the inner side of the adjustment rod 9. The adjustment assembly 7 also includes a water storage pipe 704. The bottom end of the water storage pipe 704 is connected to the pressurization port 5. A piston plate 705 is movably sleeved inside the water storage pipe 704. A piston rod 706 is fixedly connected to the bottom end of the piston plate 705. The bottom end of the piston rod 706 passes through the bottom end of the water storage pipe 704 and is connected to the movable plate 701. A limit spring 707 is movably sleeved on the outer side of the piston rod 706. The upper and lower ends of the limit spring 707 are respectively connected to the inner bottom wall of the water storage pipe 704 and the bottom end of the piston plate 705.

[0025] By opening the solenoid valve inside the pressurization port 5, high-pressure chemical agents can be injected into the water storage pipe 704, applying pressure to the piston plate 705. At this time, the piston plate 705 and piston rod 706 move downward, and the limit spring 707 is compressed, which in turn drives the movable plate 701 to move downward. This applies force to the support rods 703, causing multiple support rods 703 to deflect outward. In other words, multiple support rods 703 apply a pushing force to the adjusting rods 9, causing multiple adjusting rods 9 to deflect in a relatively distant direction, which in turn drives the high-pressure nozzle 10 to rotate accordingly. At this time, the overall spraying range of the device expands. By adjusting the spraying range in a timely manner, it can adapt to the spraying needs of substrates of different sizes, thereby improving spraying efficiency.

[0026] Working principle and usage process: When spraying chemical agents, first connect the base 1 to the external frame, and the distribution box 3 can be rotated relative to the base 1 by loosening the rotating shaft. When the distribution box 3 is adjusted to a suitable angle, the rotating shaft can be tightened again to complete the angle locking process. Then connect the water inlet 6 to the external pipeline and maintain a certain pressure when the chemical agent is input. The chemical agent is injected into the inlet 6, allowing it to enter the distribution box 3. At this time, the solenoid valve inside the pressurization port 5 is kept closed, while the multiple spray nozzles 4 are kept open. The chemical agent can then be input into the high-pressure nozzle 10 through the multiple spray nozzles 4 and sprayed out through the multiple high-pressure nozzles 10 simultaneously under the support of the multiple adjusting rods 9, thus completing the multi-point spraying process of the chemical agent. By opening the solenoid valve inside the pressurization port 5, high-pressure chemical agents can be injected into the water storage pipe 704, applying pressure to the piston plate 705. At this time, the piston plate 705 and piston rod 706 move downward, and the limit spring 707 is compressed, which in turn drives the movable plate 701 to move downward. This applies force to the support rod 703, causing multiple support rods 703 to deflect outward. In other words, multiple support rods 703 apply a pushing force to the adjusting rod 9, causing multiple adjusting rods 9 to deflect in a relatively distant direction, which in turn drives the high-pressure nozzle 10 to rotate accordingly. At this time, the overall spraying range of the device expands.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A chemical spraying device for a coating and developing machine, comprising two machine bases (1), characterized in that: A distribution box (3) is provided below the base (1). An extension ear plate (2) is fixedly installed on the left and right sides of the top of the distribution box (3). The extension ear plate (2) is movably connected to the two bases (1). The extension ear plate (2) rotates relative to the base (1). A water inlet (6) is fixedly connected to the middle of the top of the distribution box (3). A spray nozzle (4) is fixedly connected in a circular shape at the bottom of the distribution box (3) near the outer side. A pressurization port (5) is fixedly connected to the middle of the bottom of the distribution box (3). A solenoid valve is installed inside the pressurization port (5). An adjustment component (7) is fixedly installed in the middle of the bottom of the distribution box (3). The top of the adjustment component (7) is connected to the pressurization port (5).

2. The chemical spraying device for a coating and developing machine according to claim 1, characterized in that: The bottom of the distribution box (3) is fixedly equipped with a locking seat (8) in a circumferential shape, and the locking seat (8) is located on the outer side of the spray nozzle (4).

3. The chemical spraying device for a coating and developing machine according to claim 2, characterized in that: Adjusting rods (9) are movably installed on the inner side of the locking seat (8). The adjusting rods (9) rotate relative to the water inlet (6). The end of the spray nozzle (4) away from the distribution box (3) is fixedly connected to a high-pressure spray pipe (10). The end of the high-pressure spray pipe (10) away from the spray nozzle (4) passes through the bottom of the adjusting rod (9) and is located on the outer side of the adjusting rod (9).

4. The chemical spraying device for a coating and developing machine according to claim 3, characterized in that: The adjustment component (7) includes a movable plate (701). The outer side of the movable plate (701) is provided with a groove in a circular shape, and a support rod (703) is movably connected inside the groove. The end of the support rod (703) away from the movable plate (701) is movably connected to a fixed seat (702) through a rotating shaft.

5. The chemical spraying device for a coating and developing machine according to claim 4, characterized in that: The end of the fixed base (702) away from the support rod (703) is connected to the inner side of the adjusting rod (9). The adjusting assembly (7) also includes a water storage pipe (704), the bottom end of which is connected to the pressurizing port (5).

6. The chemical spraying device for a coating and developing machine according to claim 5, characterized in that: A piston plate (705) is movably sleeved inside the water storage pipe (704). A piston rod (706) is fixedly connected to the bottom end of the piston plate (705). The bottom end of the piston rod (706) passes through the bottom end of the water storage pipe (704) and is connected to the movable plate (701).

7. The chemical spraying device for a coating and developing machine according to claim 6, characterized in that: The piston rod (706) is movably sleeved with a limiting spring (707), and the upper and lower ends of the limiting spring (707) are respectively connected to the inner bottom wall of the water storage pipe (704) and the bottom end of the piston plate (705).

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