Valve plate fixing structure and vacuum chamber control valve

Abstract

The utility model discloses a valve plate fixed structure and vacuum cavity control valve relates to vacuum valve technical field, and fixed structure includes drive arrangement, valve plate and process cavity, the baffle of process cavity is equipped with valve port, the front surface of valve plate cooperates with valve port, the fixed structure of valve plate includes center part and a plurality of support end, the drive link of drive arrangement is fixed with center part, the back of valve plate is fixed with support end, the projection of center part on valve plate coincides with the geometric center of valve plate, and a plurality of support end is around center part center symmetry distribution, and a plurality of support end is at first plane, and center part deviates first plane, and the connection through rigid link between center part and a plurality of support end. Through the cooperation of fixed structure and drive arrangement, it is guaranteed that valve plate and valve port face keep parallel state in the opening and closing process.

Description

Technical Field

[0001] This utility model relates to the field of vacuum valve technology, specifically to a valve plate fixing structure and a vacuum chamber control valve. Background Technology

[0002] In semiconductor manufacturing, a process chamber with a vacuum environment is often required. During operation, the process chamber needs to be isolated from the outside world using control valves and the vacuum flow rate needs to be controlled to protect the wafer from foreign object contamination during the process process.

[0003] In common isolation valve designs, the valve plate and valve port surface remain parallel. A drive mechanism moves the valve plate perpendicular to the valve port surface, thus opening and closing the valve. This design prevents the valve plate and the partition plate that opens the valve port from sliding along the port surface, effectively reducing friction debris. To ensure that the valve plate and partition plate remain perfectly parallel during their mutual movement, precise assembly of the valve plate and drive mechanism is essential. This places higher technical demands on the machining and assembly of parts, significantly increases the difficulty of debugging and installation, and consequently leads to higher costs and more complex maintenance.

[0004] Therefore, providing a fixing mechanism that is easy to process and reduces the difficulty of installing and debugging the valve plate and the drive device, so as to ensure that the valve plate and the valve port surface remain parallel during the opening and closing process, and to avoid the valve plate and the partition plate from moving and rubbing against each other during the closing process due to non-parallelism, thereby generating debris that contaminates the process cavity, is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] In view of this, the purpose of this application is to overcome the shortcomings of the prior art and to propose a valve plate fixing structure and a vacuum chamber control valve.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: On one hand, a valve plate fixing structure includes a driving device, a valve plate, and a process cavity. The process cavity has a valve port on a partition plate, and the front of the valve plate mates with the valve port. The valve plate fixing structure includes a central portion and several supporting ends. The driving rod of the driving device is fixed to the central portion, and the supporting ends are fixed to the back of the valve plate. The projection of the central portion onto the valve plate coincides with the geometric center of the valve plate. The multiple supporting ends are equidistantly distributed circumferentially around the center of the central portion. The multiple supporting ends are located in a first plane, and the central portion deviates from the first plane. The central portion and the multiple supporting ends are connected by a rigid rod.

[0007] Preferably, the drive device includes a housing, a drive unit, a transmission chain, a drive gear, a driven gear, a screw, and a lifting base. The drive rod is fixed on the lifting base, the drive gear is fixed on the output shaft of the drive unit, the driven gear is fixed on the screw, the two ends of the transmission chain are respectively engaged with the drive gear and the driven gear, one end of the screw near the driven gear is rotatably connected to the bottom of the housing, and the other end of the screw passes through a threaded hole on the lifting base and is rotatably connected to the top of the housing.

[0008] Preferably, the driving device further includes a guide groove parallel to the screw, and a slider is fixed on the side of the lifting base near the guide groove, the slider reciprocating within the guide groove.

[0009] Preferably, the drive unit is either a pneumatic motor or an electric motor.

[0010] Preferably, a shaft seal is provided at the connection between the drive rod and the process cavity, and the shaft seal adopts a Glyd ring sealing structure.

[0011] Preferably, the orthographic projection of the valve plate on the first plane is one of a circle, an ellipse, or a rectangle, and the shape of the valve port is adapted to the shape of the valve plate.

[0012] On the other hand, a vacuum chamber control valve includes any of the valve plate fixing structures described above.

[0013] Due to the adoption of the above technical solution, the beneficial effects achieved by this utility model are as follows: the valve plate fixing structure distributes the force in the center evenly to each symmetrically distributed support end through the rigid rod. During the valve plate sealing process, the pressure of each support end of the valve plate edge on the partition with the valve port is the same. This avoids uneven force on the valve plate edge, ensures that the valve plate edge is subjected to the same force during the opening and closing process, avoids relative sliding between the valve plate and the partition, prevents debris caused by mutual grinding, and avoids contamination of the process cavity. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of a valve plate fixing structure according to the present invention; Figure 2 This is a schematic diagram of the front view of a valve plate fixing structure according to the present invention; Figure 3 This is a structural schematic diagram of a cross-sectional view of a driving device for a valve plate fixing structure according to the present invention. Figure 4 This is a schematic diagram of the overall structure of a driving device for a valve plate fixing structure according to the present invention. Figure 5 This is a bottom view of the drive device for fixing a valve plate according to the present invention.

[0015] The attached diagram lists the components represented by each number as follows: 1. Valve plate; 11. Valve port; 2. Process chamber; 3. Fixed structure; 31. Center part; 32. Support end; 33. Rigid rod; 4. Mounting flange; 5. Drive unit; 51. Housing; 52. Drive unit; 53. Transmission chain; 54. Drive gear; 55. Driven gear; 56. Screw; 57. Guide groove; 58. Drive rod; 59. Lifting base; 591. Slider; 6. Shaft seal. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] The core of this utility model is to provide a valve plate fixing structure and a vacuum chamber control valve to solve the problem in existing semiconductor manufacturing where the valve plate and the partition plate are not parallel, and they will move and rub against each other during the closing process, resulting in debris contaminating the process chamber.

[0018] The present invention will be described in detail with the following embodiments: Example

[0019] refer to Figure 1-5 A valve plate fixing structure includes a driving device 5, a valve plate 1 and a process chamber 2. A valve port 11 is provided on the partition of the process chamber 2, and the front side of the valve plate 1 cooperates with the valve port 11.

[0020] like Figure 1 and 2 As shown, the valve plate 1 has a fixing structure 3, which includes a central part 31 and several supporting ends 32. The driving rod 58 of the driving device 5 is fixed to the central part 31, and the supporting ends 32 are fixed to the back of the valve plate 1. The projection of the central part 31 on the valve plate 1 coincides with the geometric center of the valve plate 1. The multiple supporting ends 32 are equidistantly distributed around the center of the central part 31. The multiple supporting ends 32 are located in the first plane, and the central part 31 is offset from the first plane. The central part 31 and the multiple supporting ends 32 are connected by a rigid rod 33.

[0021] The front of the valve plate 1 faces the valve port 11, and the back of the valve plate 1 faces away from the valve port 11.

[0022] In the above structure, the fixing structure 3 of the valve plate 1 distributes the force of the central part 31 evenly to each symmetrically distributed support end 32 through the rigid rod 33. During the sealing process of the valve plate 1, the pressure of each support end 32 on the partition with the valve port 11 is the same, thus avoiding uneven force on the edge of the valve plate 1. This ensures that the edge of the valve plate 1 is subjected to the same force during the opening and closing process, avoids relative sliding between the valve plate 1 and the partition, and prevents debris caused by mutual grinding, thus avoiding contamination of the process cavity 2.

[0023] like Figure 1 , 3 As shown in Figures 4 and 5, the drive device 5 includes a housing 51, a drive unit 52, a transmission chain 53, a drive gear 54, a driven gear 55, a screw 56, and a lifting base 59. The drive rod 58 is fixed on the lifting base 59, the drive gear 54 is fixed on the output shaft of the drive unit 52, the driven gear 55 is fixed on the screw 56, the two ends of the transmission chain 53 are respectively meshed with the drive gear 54 and the driven gear 55, one end of the screw 56 near the driven gear 55 is rotatably connected to the bottom of the housing 51, and the other end of the screw 56 passes through the threaded hole on the lifting base 59 and is rotatably connected to the top of the housing 51.

[0024] To better ensure the lifting effect of the lifting base 59, the drive device 5 also includes a guide groove 57 parallel to the screw 56. A slider 591 is also fixed on the side of the lifting base 59 near the guide groove 57, and the slider 591 moves back and forth in the guide groove 57.

[0025] In the above structure, preferably, the drive unit 52, screw 56, guide groove 57, lifting base 59 and slider 591 are all located inside the housing 51, and the transmission chain 53, drive gear 54 and driven gear 55 are located outside the housing 51.

[0026] Specifically, the drive unit 52 is either a pneumatic motor or an electric motor, preferably a pneumatic motor.

[0027] Considering the sealing of the process cavity 2, a shaft seal 6 is provided at the connection between the drive rod 58 and the process cavity 2. The shaft seal 6 adopts a Glyd ring sealing structure, which can ensure both the smooth lifting and lowering of the drive rod 58 and the sealing of the process cavity 2.

[0028] Furthermore, depending on the requirements of different working conditions, the orthographic projection of the valve plate 1 on the first plane is one of a circle, an ellipse or a rectangle, and the shape of the valve port 11 is adapted to the shape of the valve plate 1.

[0029] Example 1 Based on the above embodiments, such as Figure 1 , 2As shown in Figure 4, the valve port 11 and the shaft seal 6 can also be set on the mounting flange 4, and the mounting flange 4 is then installed on the process chamber 2, which facilitates the maintenance of the process chamber 2.

[0030] Example 2 Based on the above embodiments, such as Figure 1 As shown, a vacuum chamber control valve is provided, including the valve plate fixing structure in the above embodiment.

[0031] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A valve plate fixing structure, comprising a driving device (5), a valve plate (1), and a process chamber (2), wherein a valve port (11) is provided on the partition of the process chamber (2), and the front side of the valve plate (1) cooperates with the valve port (11), characterized in that, The fixing structure (3) of the valve plate (1) includes a central part (31) and several supporting ends (32). The driving rod (58) of the driving device (5) is fixed to the central part (31). The supporting ends (32) are fixed to the back of the valve plate (1). The projection of the central part (31) on the valve plate (1) coincides with the geometric center of the valve plate (1). The multiple supporting ends (32) are equidistantly distributed around the center of the central part (31). The multiple supporting ends (32) are located in the first plane. The central part (31) is offset from the first plane. The central part (31) and the multiple supporting ends (32) are connected by a rigid rod (33).

2. The valve plate fixing structure according to claim 1, characterized in that, The drive device (5) includes a housing (51), a drive unit (52), a transmission chain (53), a drive gear (54), a driven gear (55), a screw (56), and a lifting base (59). The drive rod (58) is fixed on the lifting base (59). The drive gear (54) is fixed on the output shaft of the drive unit (52). The driven gear (55) is fixed on the screw (56). The two ends of the transmission chain (53) are respectively meshed with the drive gear (54) and the driven gear (55). One end of the screw (56) near the driven gear (55) is rotatably connected to the bottom of the housing (51). The other end of the screw (56) passes through the threaded hole on the lifting base (59) and is rotatably connected to the top of the housing (51).

3. The valve plate fixing structure according to claim 2, characterized in that, The drive device (5) also includes a guide groove (57) parallel to the screw (56), and a slider (591) is fixed on the side of the lifting base (59) near the guide groove (57), and the slider (591) moves back and forth in the guide groove (57).

4. The valve plate fixing structure according to claim 3, characterized in that, The drive unit (52) is either a pneumatic motor or an electric motor.

5. The valve plate fixing structure according to claim 1, characterized in that, A shaft seal (6) is provided at the connection between the drive rod (58) and the process cavity (2), and the shaft seal (6) adopts a Glyd ring sealing structure.

6. The valve plate fixing structure according to claim 1, characterized in that, The orthographic projection of the valve plate (1) on the first plane is one of a circle, an ellipse or a rectangle, and the shape of the valve port (11) is adapted to the shape of the valve plate (1).

7. A vacuum chamber control valve, characterized in that, Includes the valve plate fixing structure described in any one of claims 1-6.

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