An acceleration sensor

Abstract

The utility model relates to sensor technical field, more particularly, relate to a kind of acceleration sensor.The acceleration sensor includes shell, upper substrate and lower substrate;Upper substrate and lower substrate and parallel interval arrangement and all be located in shell;Upper substrate lower end surface has alternately arranged strip-shaped upper electrode layer and upper dielectric layer, and elastic member is equipped between upper substrate side and shell side wall, and upper electrode layer lower end surface and upper dielectric layer lower end surface are all covered with dielectric material layer;Lower substrate upper end surface has alternately arranged strip-shaped lower electrode layer and lower dielectric layer, and lower electrode layer is equipped with conductive droplet array, and the arrangement direction of conductive droplet array and lower electrode layer length direction are same direction;Upper electrode layer and lower electrode layer are diametrically opposite arrangement, and upper dielectric layer and lower dielectric layer are diametrically opposite arrangement.The acceleration sensor expands a kind of single-axis acceleration sensor based on reverse electric wettability principle, and enriches the kind of acceleration sensor.

Description

Technical Field

[0001] This utility model relates to the field of sensor technology, and more specifically, to an acceleration sensor. Background Technology

[0002] Accelerometers have wide applications in many fields, such as automotive safety, game control, pedometer functions, GPS navigation systems, and engineering inspection. Currently, the working principles of sensors on the market are mainly piezoelectric, piezoresistive, and capacitive, and accelerometers based on the reverse electrowetting principle have not yet been explored. Utility Model Content

[0003] The purpose of this invention is to provide an acceleration sensor based on the reverse electrowetting principle, which has the advantages of simple structure and low cost, and broadens the working principle and types of acceleration sensors.

[0004] This utility model provides an acceleration sensor, including a housing, an upper substrate, and a lower substrate; the upper substrate and the lower substrate are arranged in parallel and spaced apart, and are both located inside the housing; The lower end face of the upper substrate has alternating strip-shaped upper electrode layers and strip-shaped upper dielectric layers, and an elastic element is provided between the side edge of the upper substrate and the side wall of the housing; the lower end face of the upper electrode layer and the lower end face of the upper dielectric layer are both covered with a dielectric material layer. The upper surface of the lower substrate has alternating strip-shaped lower electrode layers and strip-shaped lower dielectric layers. The lower electrode layers are provided with a conductive droplet array, and the arrangement direction of the conductive droplet array is the same as the length direction of the lower electrode layers. The upper electrode layer and the lower electrode layer are positioned opposite each other, and the upper dielectric layer and the lower dielectric layer are positioned opposite each other.

[0005] Optionally, a mass block is provided on the upper end surface of the upper substrate.

[0006] Optionally, a bias voltage source is electrically connected to the input terminal between the upper electrode layer and the lower electrode layer.

[0007] Optionally, a current detection component or a voltage detection component is electrically connected to the output terminal between the upper electrode layer and the lower electrode layer. The current detection component is used to detect the output current between the upper electrode layer and the lower electrode layer, and the voltage detection component is used to detect the output voltage between the upper electrode layer and the lower electrode layer.

[0008] Optionally, there are multiple elastic elements, which are evenly distributed on two opposite sides of the upper substrate. The multiple elastic elements on each side are arranged at intervals, and the arrangement direction is the same as the length direction of the upper electrode layer or the upper dielectric layer.

[0009] Optionally, the elastic element is a spring, and there are four springs, which are evenly divided into two groups and respectively disposed on two opposite sides of the upper substrate.

[0010] Optionally, the material of the upper substrate is: plastic or inorganic non-metallic material; The material of the lower substrate is: plastic or inorganic non-metallic material; The material of the upper electrode layer is at least one of the following: a solid elemental metal with conductive properties, a solid alloy, a conductive oxide, a conductive inorganic material, and a conductive organic material. The material of the lower electrode layer is at least one of the following: a solid elemental metal with conductive properties, a solid alloy, a conductive oxide, a conductive inorganic material, and a conductive organic material.

[0011] Optionally, the conductive droplet array consists of multiple conductive droplets, which are evenly spaced along the length of the lower electrode layer.

[0012] Optionally, the material of the conductive droplet is at least one of the following: liquid metal, liquid alloy, organic salt solution, inorganic acid solution, organic acid solution, alkaline solution, and molten salt.

[0013] Optionally, the thickness of the upper substrate is 100μm-3000μm, and the thickness of the lower substrate is 100μm-3000μm. The distance between the upper substrate and the lower substrate is 100μm-2000μm.

[0014] The acceleration sensor provided in this embodiment of the present invention has the following beneficial effects: An upper electrode layer and an upper dielectric layer are alternately arranged, and a lower electrode layer and a lower dielectric layer are alternately arranged, forming several electrode pairs. The upper electrode layer, the lower electrode layer, the conductive droplet array, and the dielectric material layer together form a capacitor structure. When the upper substrate moves away from its equilibrium position under the action of acceleration force and has relative displacement with the lower substrate, the capacitance of the capacitor structure will change, causing the capacitor structure to discharge outward and generate current. The acceleration signal can be obtained by detecting the magnitude of the current, thus expanding a single-axis acceleration sensor based on the reverse electrowetting principle and enriching the types of acceleration sensors. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0016] Figure 1 This is a partial disassembled three-dimensional structural diagram of the accelerometer in an embodiment of the present invention; Figure 2 This is a partial front view schematic diagram of the acceleration sensor in an embodiment of the present invention.

[0017] Explanation of reference numerals in the attached figures: 100-upper base plate; 110 - Upper electrode layer; 120 - Upper dielectric layer; 130-mass block; 140 - Elastic element; 150 - Dielectric material layer; 200-lower base plate; 210 - Lower electrode layer; 220-lower dielectric layer; 230 - Conductive droplet array; 231 - Conductive droplet; 300-Bias Voltage Source. Detailed Implementation

[0018] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0019] The present invention will be further described in detail below through specific embodiments and in conjunction with the accompanying drawings.

[0020] This utility model embodiment provides an acceleration sensor, such as Figures 1-2 As shown, it includes a housing, an upper substrate 100, and a lower substrate 200; the upper substrate 100 and the lower substrate 200 are arranged in parallel and spaced apart, and are both located inside the housing (not shown in the figure). The lower end face of the upper substrate 100 has an alternately arranged strip-shaped upper electrode layer 110 and strip-shaped upper dielectric layer 120. An elastic member 140 is provided between the side of the upper substrate 100 and the side wall of the housing. The lower end face of the upper electrode layer 110 and the lower end face of the upper dielectric layer 120 are both covered with a dielectric material layer 150. The upper end surface of the lower substrate 200 has an alternately arranged strip-shaped lower electrode layer 210 and a strip-shaped lower dielectric layer 220. The lower electrode layer 210 is provided with a conductive droplet array 230, and the arrangement direction of the conductive droplet array 230 is in the same direction as the length direction of the lower electrode layer 210. The upper electrode layer 110 and the lower electrode layer 210 are positioned opposite each other, and the upper dielectric layer 120 and the lower dielectric layer 220 are positioned opposite each other.

[0021] In this embodiment of the invention, the upper electrode layer 110 and the upper dielectric layer 120 are alternately arranged in strip-shaped structures, and the lower electrode layer and the lower dielectric layer 220 are alternately arranged in strip-shaped structures. The upper electrode layer 110 and the lower electrode layer 210 are arranged parallel to each other, forming several pairs of electrodes. The lower end surfaces of the upper electrode layer 110 and the upper dielectric layer 120 are covered with a dielectric material layer 150, and the lower electrode layer 210 is provided with a conductive droplet array 230. This arrangement allows the upper electrode layer 110, the lower electrode layer 210, the conductive droplet array 230, and the dielectric material layer 150 to jointly form a capacitor structure. When the upper substrate 100 is moved away from the equilibrium position under the action of acceleration force and has relative displacement with the lower substrate 200 (e.g., when...), the capacitor structure is formed. Figure 1 , Figure 2 (In the direction indicated by the middle arrow), the capacitance of the capacitor structure will change, which will cause the capacitor structure to discharge and generate current. The magnitude of the current can be detected to obtain the acceleration signal, thus expanding a single-axis acceleration sensor based on the reverse electrowetting principle and enriching the types of acceleration sensors.

[0022] Since the weight of the upper substrate 100 determines the relative displacement between the upper substrate 100 and the lower substrate 200 after the upper substrate 100 leaves the equilibrium position under force, it determines the magnitude of the capacitance change and the magnitude of the current generated by external discharge. If the weight of the upper substrate 100 is too small, the current output by the sensor may be too small to be detected. To avoid this situation, in this embodiment, a mass block 130 is provided on the upper end surface of the upper substrate 100. Specifically, the mass block 130 is fixed to the upper substrate 100 to increase the overall weight of the upper substrate 100, so that the upper substrate 100 can have a significant relative displacement with the lower substrate 200 after being subjected to force, so that the sensor can output a significant current, thereby more clearly and easily detecting acceleration (force).

[0023] In this embodiment, a bias voltage source 300 is electrically connected to the input terminal between the upper electrode layer 110 and the lower electrode layer 210, such as... Figure 2 As shown U in Specifically, the bias voltage source 300 can be selected as an external battery, or other power sources can be selected; no restrictions are placed here.

[0024] In this embodiment, a current detection component or a voltage detection component is electrically connected to the output terminal between the upper electrode layer 110 and the lower electrode layer 210. The current detection component is used to detect the output current between the upper electrode layer 110 and the lower electrode layer 210, and the voltage detection component is used to detect the output voltage between the upper electrode layer 110 and the lower electrode layer 210. U out This indirectly detects the acceleration value. The relationship between current, voltage, and acceleration is actually the same as the relationship between sensor capacitance and acceleration, which is common knowledge and will not be elaborated upon here.

[0025] In this embodiment, there are multiple elastic elements 140, which are evenly distributed on two opposite sides of the upper substrate 100. The multiple elastic elements 140 on each side are arranged at intervals, and the arrangement direction is the same as the length direction of the upper electrode layer 110 or the upper dielectric layer 120. The elastic elements 140 are disposed between the side of the upper substrate 100 and the inner wall of the housing. This arrangement can constrain the movement of the upper substrate 100, allowing the upper substrate 100 to move (such as slide) on the conductive droplet array, without causing rigid collision between the upper substrate 100 and the housing. In addition, when the external force disappears, the elastic elements 140 can also restore the upper substrate 100 to its initial position.

[0026] In this embodiment, the elastic element 140 is a spring, and there are four springs, which are evenly divided into two groups and respectively disposed on two opposite sides of the upper substrate 100. Specifically, the elastic element 140 can be a lightweight spring to ensure the detection accuracy of the acceleration sensor.

[0027] In this embodiment, the materials of the upper substrate 100 and the lower substrate 200 are plastic or inorganic non-metallic materials. Specifically, the plastic (resin) can be: polypropylene (PP), polyethylene (PE), polycarbonate (PC), polymethyl methacrylate (PMMA), polyvinyl chloride (PVC), polystyrene (PS), phenolic resin (PF), polyphenylene sulfide (PPS), polyoxymethylene (POM), acrylonitrile-butadiene-styrene copolymer (ABS), polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF), etc. The inorganic non-metallic materials can be: dielectric solid materials such as silicon, quartz, mica, glass, silicon carbide, graphite, diamond, ceramics, carbon fiber, etc.

[0028] In this embodiment, the materials of the upper electrode layer 110 and the lower electrode 210 are at least one of the following: solid elemental metals, solid alloys, conductive oxides, conductive inorganic materials, and conductive organic materials with conductive properties. Specifically, the solid elemental metal material can be any conductive solid elemental metal such as gold, platinum, silver, copper, tin, zinc, and aluminum; the alloy material can be any conductive solid alloy such as magnesium-aluminum alloy, brass, bronze, stainless steel, and titanium alloy; the conductive oxide can be any conductive oxide such as ITO and Cu2O; and the conductive inorganic material can be any conductive inorganic material such as graphite.

[0029] In this embodiment, the conductive droplet array 230 includes a plurality of conductive droplets 231, which are evenly spaced along the length of the lower electrode layer.

[0030] In this embodiment, the material of the conductive droplet 231 is at least one of the following: liquid metal, liquid alloy, organic salt solution, inorganic acid solution, organic acid solution, alkaline solution, and molten salt.

[0031] Specifically, liquid metals can be: mercury, indium, gallium; liquid alloys can be: gallium-indium alloys, gallium-indium-tin alloys, gallium-indium-tin-zinc alloys, mercury-thallium alloys, and other metal alloys that are liquid at room temperature; inorganic salt solutions can be: sodium nitrate, sodium chloride, copper chloride, zinc chloride, and soluble inorganic salts such as potassium salts, sodium salts, nitrates, and ammonium salts; organic salt solutions can be: sodium acetate, potassium citrate, and other organic acid salts of sodium, potassium, and ammonium, as well as other soluble organic salts; inorganic acid solutions can be: sulfuric acid, nitric acid, hydrochloric acid, phosphoric acid, and other inorganic acids; organic acid solutions can be: acetic acid, oxalic acid, citric acid, acrylic acid, and other organic acids; alkaline solutions can be: sodium hydroxide, potassium hydroxide, calcium hydroxide, barium hydroxide, and other alkaline solutions; molten salts can be: 1-ethyl-3-methylimidazolium trifluoromethanesulfonate and 1-ethyl-3-methylimidazolium tetrafluoroborate.

[0032] In this embodiment, the thickness of the upper substrate 100 is 100μm-3000μm, the thickness of the lower substrate 200 is 100μm-3000μm, and the distance between the upper substrate 100 and the lower substrate 200 is 100μm-2000μm.

[0033] In the description of this utility model, it should be noted that the terms "upper", "lower", "front", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the term "installation" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through an intermediate medium; and it can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. An acceleration sensor, characterized in that, It includes a housing, an upper substrate (100), and a lower substrate (200); the upper substrate (100) and the lower substrate (200) are arranged in parallel and spaced apart, and are both located within the housing; The lower end face of the upper substrate (100) has alternating strip-shaped upper electrode layer (110) and strip-shaped upper dielectric layer (120), and an elastic element (140) is provided between the side of the upper substrate (100) and the side wall of the housing; the lower end face of the upper electrode layer (110) and the lower end face of the upper dielectric layer (120) are both covered with a dielectric material layer (150). The upper surface of the lower substrate (200) has an alternately arranged strip-shaped lower electrode layer (210) and a strip-shaped lower dielectric layer (220). The lower electrode layer (210) is provided with a conductive droplet array (230), and the arrangement direction of the conductive droplet array (230) is the same as the length direction of the lower electrode layer (210). The upper electrode layer (110) and the lower electrode layer (210) are positioned opposite each other, and the upper dielectric layer (120) and the lower dielectric layer (220) are positioned opposite each other.

2. The acceleration sensor according to claim 1, characterized in that, The upper surface of the upper substrate (100) is provided with a mass block (130).

3. The acceleration sensor according to claim 2, characterized in that, A bias voltage source (300) is electrically connected to the input terminal between the upper electrode layer (110) and the lower electrode layer (210).

4. The accelerometer according to claim 3, characterized in that, The output terminal between the upper electrode layer (110) and the lower electrode layer (210) is electrically connected to a current detection component or a voltage detection component. The current detection component is used to detect the output current between the upper electrode layer (110) and the lower electrode layer (210), and the voltage detection component is used to detect the output voltage between the upper electrode layer (110) and the lower electrode layer (210).

5. The acceleration sensor according to any one of claims 1-4, characterized in that, The elastic element (140) is multiple and is evenly distributed on two opposite sides of the upper substrate (100). The multiple elastic elements (140) on each side are arranged at intervals and the arrangement direction is the same as the length direction of the upper electrode layer (110) or the upper dielectric layer (120).

6. The acceleration sensor according to claim 5, characterized in that, The elastic element (140) is a spring, and there are 4 springs, which are evenly divided into two groups and respectively disposed on two opposite sides of the upper substrate (100).

7. The accelerometer according to claim 6, characterized in that, The material of the upper substrate (100) is: plastic or inorganic non-metallic material; The material of the lower substrate is: plastic or inorganic non-metallic material; The material of the upper electrode layer (110) is at least one of the following: a solid elemental metal with conductive properties, a solid alloy, a conductive oxide, a conductive inorganic material, and a conductive organic material. The material of the lower electrode layer (210) is at least one of the following: a solid elemental metal with conductive properties, a solid alloy, a conductive oxide, a conductive inorganic material, and a conductive organic material.

8. The accelerometer according to claim 6, characterized in that, The conductive droplet array (230) consists of multiple conductive droplets (231), which are evenly spaced along the length of the lower electrode layer.

9. The acceleration sensor according to claim 8, characterized in that, The material of the conductive droplet (231) is at least one of the following: liquid metal, liquid alloy, organic salt solution, inorganic acid solution, organic acid solution, alkaline solution, and molten salt.

10. The acceleration sensor according to claim 6, characterized in that, The thickness of the upper substrate (100) is 100μm-3000μm, and the thickness of the lower substrate (200) is 100μm-3000μm. The distance between the upper substrate (100) and the lower substrate (200) is 100μm-2000μm.

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