Etching machine guide rail bushing dismounting device

Abstract

The utility model discloses a kind of etching machine guide rail bushing dismounting devices.It relates to the technical field of semiconductor equipment, specifically includes driving assembly and clamping assembly.Driving assembly includes driving screw, one end of driving screw is rotating end, the other end is abutting end and is used for abutting with guide rail.Clamping assembly is located in driving screw and is threadedly engaged with driving screw, clamping assembly includes multiple clamping pieces, multiple clamping pieces are spaced apart and are enclosed to form the clamping portion of adjustable opening size on the side of driving screw away from rotating end, and clamping portion is used for clamping and fixing bushing.The utility model driving screw combines clamping assembly to form spiral lifting structure to realize the dismounting of bushing adhered on guide rail, without knocking or clamping and rotating, avoid damage to guide rail, and only one person is needed in whole process, dismounting efficiency is higher, reduce labor cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to an etching machine guide rail bushing disassembly device. Background Technology

[0002] Currently, etching equipment, such as metal etching equipment, is equipped with an etching chamber (process chamber) and a transfer chamber (transfer chamber / TM). The two chambers are connected and isolated by an "inner door" that can be raised and lowered.

[0003] The inner door mainly consists of a door panel, a sealing base plate, and a lifting mechanism. The door panel blocks the passage between the etching chamber and the conveying chamber, preventing byproducts from accumulating in the passage. The lifting mechanism mainly comprises two guide rails, a cylinder, and a connecting plate; its function is to control the opening and closing of the door panel. The door panel is typically mounted on the top of the guide rails with screws. To ensure stable lifting and lowering of the inner door guide rails, bushings are usually installed around the guide rails.

[0004] Due to prolonged operation, byproducts formed during the etching process inevitably seep into the gap between the guide rail and the bushing, eventually causing the inner door to jam and preventing operation. During equipment maintenance or repair, the bushing must be removed and replaced. Currently, foundries often loosen the bushings attached to the guide rail by tapping or clamping and rotating them, allowing for removal from the guide rail. However, these methods are prone to damaging the guide rail during removal, and are inefficient and labor-intensive. Utility Model Content

[0005] The purpose of this utility model is to provide an etching machine guide rail bushing disassembly device to alleviate the technical problems in the prior art where the disassembly of the bushing is prone to damage to the guide rail, and the disassembly efficiency is low and the labor cost is high.

[0006] This invention provides a device for removing the guide bushing of an etching machine, including a drive assembly and a clamping assembly.

[0007] A drive assembly includes a drive screw, one end of which is a rotating end and the other end is an abutting end for abutting against a guide rail; a clamping assembly is disposed on the drive screw and threadedly engaged with the drive screw, the clamping assembly including a plurality of clamping members, the plurality of clamping members being spaced apart on the side of the drive screw away from the rotating end and surrounding to form a clamping portion with an adjustable opening size, the clamping portion being used to clamp and fix a bushing, the bushing being sleeved on the outside of the guide rail.

[0008] Furthermore, the clamping assembly includes: a movable member having a threaded hole adapted to the drive screw, the threaded hole being threadedly engaged with the drive screw; and multiple adjusting links spaced apart circumferentially along the movable member, each adjusting link being connected to the movable member; wherein, the multiple clamping members are correspondingly disposed at the ends of the multiple adjusting links away from the movable member.

[0009] Furthermore, the adjusting linkage includes a first rotating arm, a second rotating arm, and a limiting member; one end of the first rotating arm is connected to the moving member; one end of the second rotating arm is rotatably connected to the other end of the first rotating arm; the clamping member is disposed at the end of the second rotating arm away from the first rotating arm; the limiting member is connected to the first rotating arm and the second rotating arm respectively to fix the relative positions of the first rotating arm and the second rotating arm.

[0010] Furthermore, the first rotating arm is provided with a plurality of snap-fit ​​components; the plurality of snap-fit ​​components are spaced apart along the length direction of the first rotating arm; the limiting component is provided on the second rotating arm and rotatably connected to the second rotating arm, and the end of the limiting component away from the second rotating arm is provided with a snap-fit ​​portion adapted to the snap-fit ​​component.

[0011] Furthermore, there are two adjusting links and two clamping members, which are arranged correspondingly; the two adjusting links are arranged opposite to each other at both ends of the moving member.

[0012] Furthermore, the clamping member includes a clamping portion and a supporting portion; the clamping portion is arranged along the axial direction of the drive screw and is used to abut against the side wall of the bushing; the supporting portion is arranged along the radial direction of the drive screw and is used to support the bushing.

[0013] Furthermore, the side of the clamping part that abuts against the bushing has a curved surface structure, which is adapted to the surface of the bushing.

[0014] Furthermore, the bottom end of the contact end has a curved surface structure.

[0015] Furthermore, the etching machine guide rail bushing disassembly device also includes an anti-slip pad; the anti-slip pad is used to be disposed between the abutting end of the drive screw and the guide rail.

[0016] Furthermore, the drive assembly also includes a force-applying component; the force-applying component is disposed at the rotating end of the drive screw and connected to the drive screw.

[0017] The etching machine guide rail bushing removal device provided by this utility model includes a clamping component mounted on and threadedly engaged with a drive screw. Multiple clamping components form a clamping section to hold and fix the bushing adhered to the guide rail. Then, by rotating the drive screw, the clamping section moves along its extension direction, pulling the bushing along the guide rail until it detaches, thus separating the bushing from the guide rail. During the movement of the clamping section, the abutting end of the drive screw abuts against the top of the guide rail, fixing the relative position of the drive screw and the guide rail and preventing relative movement between the clamping components and the guide rail during use. Therefore, the etching machine guide rail bushing removal device provided by this utility model, through a spiral lifting structure formed by the drive screw and clamping components, achieves the removal of the bushing adhered to the guide rail without the need for hammering or rotation after clamping, avoiding damage to the guide rail. Furthermore, the entire process can be completed by only one person, resulting in high removal efficiency and saving labor costs. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 A top axial view of the etching machine guide bushing disassembly device provided in this embodiment of the utility model; Figure 2 A bottom axial view of the etching machine guide bushing disassembly device provided in this embodiment of the utility model; Figure 3 A schematic diagram of the main structure of the etching machine guide rail bushing disassembly device provided in an embodiment of this utility model; Figure 4 This is a top view of the etching machine guide bushing disassembly device provided in an embodiment of the present invention.

[0020] Explanation of reference numerals in the attached figures: 100-Drive assembly; 110-Drive screw; 111-Abutting end; 120-Force-applying component; 200-Clamping assembly; 210-Clamping component; 220-Moving component; 230-First rotating arm; 231-Snap-fit ​​component; 240-Second rotating arm; 250-Limiting component. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Of course, the following detailed description of the embodiments is not intended to limit the scope of the claimed utility model, but merely represents selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0022] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0023] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0025] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] See Figures 1 to 4The etching machine guide rail bushing removal device provided in this embodiment includes a drive assembly 100 and a clamping assembly 200. The drive assembly 100 includes a drive screw 110, one end of which is a rotating end, and the other end is an abutment end 111 used to abut against the guide rail, which is fitted with a bushing. The clamping assembly 200 is disposed on the drive screw 110 and threadedly engaged with it. The clamping assembly 200 includes multiple clamping members 210, which are spaced apart on the side of the drive screw 110 away from the rotating end and surround to form a clamping portion with an adjustable clamping opening size. The clamping portion is used to clamp and fix the bushing.

[0027] Specifically, in this embodiment, the clamping component 200 is threadedly engaged with the drive screw 110. After the clamping component 200 stably clamps the bushing, rotating the drive screw 110 can cause the clamping component 200 to move in the opposite direction to the extension direction of the drive screw 110, i.e., the direction of spiral forward movement.

[0028] In this embodiment, multiple clamping members 210 surround to form a clamping part, which clamps and fixes the bushings adhered to the guide rail.

[0029] When disassembling the bushing, the operator can first fix the guide rail to prevent it from rotating along with the clamping member 210 and the drive screw 110 during bushing removal. Furthermore, the bushing is fitted onto the guide rail, and a horizontal limiting structure exists between the bushing and the guide rail, preventing the bushing from moving relative to the guide rail along its extension direction (i.e., the axial direction). Therefore, when the drive screw 110 is rotated, the clamping member 210 is in close contact with the bushing. The clamping assembly 200 cannot rotate under the constraint of the horizontal limiting structure between the bushing and the guide rail. The clamping part moves along the extension direction of the drive screw 110 with the clamping assembly 200, thereby pulling the bushing along the extension direction of the guide rail until the bushing is partially or completely separated from the guide rail, thus achieving separation of the bushing from the guide rail.

[0030] During the movement of the clamping part, the abutting end 111 of the drive screw 110 continuously abuts against the top of the guide rail to keep the relative position of the drive screw 110 and the guide rail fixed, so as to prevent the clamping assembly 200 and the drive screw 110 from moving relative to the guide rail during use.

[0031] The etching machine guide rail bushing removal device provided in this embodiment uses a drive screw 110 combined with a clamping assembly 200 to form a spiral lifting structure. By utilizing the lever principle and torque, the bushings adhered to the guide rail can be easily removed without knocking or using tools such as pliers to clamp and rotate, thus avoiding damage to the guide rail. Moreover, the entire process can be completed by only one person, resulting in high disassembly efficiency.

[0032] In this embodiment, the clamping assembly 200 includes a movable member 220 and an adjusting linkage. The movable member 220 can specifically be a plate-like structure, such as... Figure 1 and Figure 2 In the structure shown, the movable member 220 is a rectangular plate structure, and its central part is provided with a threaded hole adapted to the drive screw 110. The drive screw 110 is provided with threads on its outer periphery. There are multiple adjusting rods arranged at intervals along the circumference of the movable member 220. One end of each adjusting rod is connected to the movable member 220, and the other end of each adjusting rod is provided with the aforementioned clamping member 210.

[0033] The movable component 220 is threadedly engaged with the drive screw 110 through a threaded hole, and multiple adjusting rods are spaced apart along the circumference of the movable component 220. Specifically, in this embodiment, one end of each adjusting rod is fixedly connected to the movable component 220, and multiple clamping components 210, after being set one-to-one with the multiple adjusting rods, can form multi-point clamping in the circumference of the bushing, ensuring the stability of the bushing clamping.

[0034] After the bushing is clamped and fixed, when the drive screw 110 is rotated, the adjusting link and the clamping member 210 are constrained in the circumferential direction of the drive screw 110 under the limitation of the directional movement of the bushing, so that the clamping member 210 and the adjusting link cannot rotate. The moving member 220 moves along the length direction of the drive screw 110 under the constraint of the adjusting link, thereby driving the adjusting link and the clamping member 210 to move together, so that the bushing can move together under the action of multiple clamping members 210 and multiple adjusting links.

[0035] In this embodiment, the adjusting linkage includes a first rotating arm 230, a second rotating arm 240, and a limiting member 250. One end of the first rotating arm 230 is connected to the moving member 220, and the other end of the first rotating arm 230 is rotatably connected to one end of the second rotating arm 240, so that the angle between the first rotating arm 230 and the second rotating arm 240 is adjustable. The other end of the second rotating arm 240 is provided with the aforementioned clamping member 210, that is, the clamping member 210 is provided at the end of the second rotating arm 240 away from the first rotating arm 230.

[0036] The limiting member 250 is used to fix the relative position of the first rotating arm 230 and the second rotating arm 240. After the angle between the first rotating arm 230 and the second rotating arm 240 is adjusted, the limiting member 250 fixes the first rotating arm 230 and the second rotating arm 240 to keep the relative position of the first rotating arm 230 and the second rotating arm 240 fixed, thereby ensuring a stable clamping of the bushing.

[0037] Specifically, in this embodiment, the first rotating arm 230 is connected to the moving member 220 so that when the moving member 220 moves, it can drive the first rotating arm 230 and the second rotating arm 240 to move synchronously. At the same time, the first rotating arm 230, the second rotating arm 240 and the clamping member 210 can constrain the moving member 220, so that the moving member 220 moves along the extension direction of the drive screw 110.

[0038] like Figure 1 and Figure 2 As shown, the first rotating arm 230 and the second rotating arm 240 are hinged to form a linkage structure, thereby adjusting the size of the clamping opening of the clamping part. This allows the etching machine guide rail bushing disassembly device provided in this embodiment to adapt to bushings of different specifications and sizes. Furthermore, by adjusting the angle between the first rotating arm 230 and the second rotating arm 240, the optimal force angle can be adjusted when separating the guide rail and the bushing, facilitating operation by the operator.

[0039] Further reference Figure 1 and Figure 2 A limiting member 250 is disposed on the second rotating arm 240 and rotatably connected to the second rotating arm 240. A locking member 231 is provided on the first rotating arm 230. The end of the limiting member 250 away from the second rotating arm 240 is provided with a locking portion adapted to the locking member 231. In this embodiment, the locking member 231 is a locking block with an outwardly protruding structure on the first rotating arm 230, and the locking portion is a latch provided at the end of the limiting member 250. The latch can be locked with the locking block by rotating the limiting member 250, thereby fixing the relative position of the first rotating arm 230 and the second rotating arm 240.

[0040] In this embodiment, the first rotating arm 230 is provided with a plurality of snap-fit ​​pieces 231. The plurality of snap-fit ​​pieces 231 are spaced apart along the length direction of the first rotating arm 230. When it is necessary to adjust the opening size (opening angle) of the clamping part to accommodate bushings with different outer diameters, snap-fit ​​pieces 231 at different positions on the first rotating arm 230 can be selected to cooperate with the snap-fit ​​part of the limiting member 250. Different snap-fit ​​point positions correspond to different relative angles between the first rotating arm 230 and the second rotating arm 240, thereby realizing the adjustment of the final clamping radius of the clamping part.

[0041] In this embodiment, there are two adjusting rods and two corresponding clamping members 210. The two adjusting rods are arranged opposite each other at both ends of the moving member 220.

[0042] Specifically, in this embodiment, the two adjusting rods, the two clamping members 210, and the two limiting members 250 are connected one-to-one to form two clamping structures. The two clamping structures are symmetrically arranged at both ends of the moving member 220, thereby forming two clamping points at opposite ends of the bushing. This ensures that the bushing is subjected to uniform force on both sides when disassembling it.

[0043] In this embodiment, the clamping member 210 includes a clamping portion and a supporting portion. The clamping portion is arranged vertically and is used to abut against the side wall of the bushing. The supporting portion is arranged horizontally and is used to support the bushing. The aforementioned vertical direction refers to the axial direction of the drive screw 110, and the horizontal direction is the radial direction or near-radial direction of the drive screw 110.

[0044] The clamping part applies radial clamping force to the bushing, firmly fixing the sidewalls of the bushing and preventing it from rotating or sliding radially during disassembly. The supporting part provides vertical upward support and thrust, supporting the bushing from the bottom throughout the entire process of the bushing being pulled away from the guide rail, and cooperating with the drive screw 110 to push the bushing to move.

[0045] In this embodiment, the side of the clamping portion that is away from the second rotating arm 240 and is used to abut against the bushing has a curved surface structure. The curved surface structure is adapted to the bushing surface.

[0046] Specifically, in this embodiment, the surface of the clamping part that abuts against the bushing is a curved structure, and the curvature of the curved structure is adapted to the surface of the bushing so that the two clamping parts can fit and clamp the bushing surface on both sides of the bushing, thereby achieving a stable clamping of the bushing and avoiding slippage or loosening during disassembly.

[0047] As mentioned above, the drive screw 110 has an abutment end 111 for abutting against the guide rail. In this embodiment, as... Figure 2 As shown, the bottom of the abutment end 111 has a curved surface structure.

[0048] In this embodiment, the abutment end 111 is specifically a hemispherical structure. With this structure, the surface of the abutment end 111 has no sharp edges, which avoids damage to the top of the guide rail when it comes into contact with it. Furthermore, curved surface (especially spherical) contact has self-centering characteristics. When the drive screw 110 is subjected to operating torque or has a small angular deviation, the curved surface structure allows the abutment end 111 to undergo small, controllable rolling adjustments on the top surface of the guide rail, always tending to find the most stable contact point. This enhances the positional stability of the abutment end 111 under high loads and effectively prevents lateral sliding or sudden slippage of the abutment end 111 relative to the top of the guide rail during the continuous rotation of the drive screw 110 applying tension.

[0049] In this embodiment, the etching machine guide rail bushing disassembly device further includes an anti-slip pad, which is disposed between the abutment end 111 of the drive screw 110 and the guide rail. The bottom surface of the anti-slip pad is adapted to the top surface of the guide rail. The anti-slip pad can form a physical isolation between the guide rail and the abutment end 111, avoiding direct friction between the abutment end 111 and the top surface of the guide rail under high pressure or local stress concentration, which could lead to scratches, indentations, and other problems on the surface of the top surface of the guide rail.

[0050] In this embodiment, the drive assembly 100 further includes a force-applying member 120. The force-applying member 120 is disposed at the rotating end of the drive screw 110 and connected to the drive screw 110.

[0051] Specifically, in this embodiment, the force-applying component 120 is a turntable. The center of the turntable is connected to the rotating end of the drive screw 110. After the bushing is clamped by the clamping part, the drive screw 110 can be rotated by rotating the turntable, so that the clamping assembly 200 moves upward along the drive screw 110, thereby pulling the top of the bushing to move along the guide rail.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A device for disassembling guide bushings of an etching machine, characterized in that, include: The drive assembly (100) includes a drive screw (110), one end of which is a rotating end and the other end is an abutment end (111) for abutting against the guide rail; A clamping assembly (200) is disposed on the drive screw (110) and threadedly engaged with the drive screw (110). The clamping assembly (200) includes a plurality of clamping members (210). The plurality of clamping members (210) are spaced apart on the side of the drive screw (110) away from the rotating end and surround to form a clamping part with an adjustable opening size. The clamping part is used to clamp and fix the bushing, which is sleeved on the guide rail.

2. The etching machine guide rail bushing disassembly device according to claim 1, characterized in that, The clamping assembly (200) includes: The movable part (220) has a threaded hole adapted to the drive screw (110), the threaded hole being threadedly engaged with the drive screw (110); Multiple adjusting links are provided and spaced apart along the circumference of the moving member (220), and all of the multiple adjusting links are connected to the moving member (220); Among them, a plurality of clamping members (210) are respectively disposed at one end of a plurality of adjusting links away from the moving member (220).

3. The etching machine guide rail bushing disassembly device according to claim 2, characterized in that, The adjusting linkage includes a first rotating arm (230), a second rotating arm (240), and a limiting member (250); One end of the first rotating arm (230) is connected to the moving member (220); One end of the second rotating arm (240) is rotatably connected to the other end of the first rotating arm (230), and the clamping member (210) is provided at the end of the second rotating arm (240) away from the first rotating arm (230); The limiting member (250) is connected to the first rotating arm (230) and the second rotating arm (240) respectively to fix the relative positions of the first rotating arm (230) and the second rotating arm (240).

4. The etching machine guide rail bushing disassembly device according to claim 3, characterized in that, The first rotating arm (230) is provided with a plurality of snap-fit ​​pieces (231), and the plurality of snap-fit ​​pieces (231) are spaced apart along the length direction of the first rotating arm (230); The limiting member (250) is disposed on the second rotating arm (240) and rotatably connected to the second rotating arm (240). The end of the limiting member (250) away from the second rotating arm (240) is provided with a snap-fit ​​part that is adapted to the snap-fit ​​member (231).

5. The etching machine guide rail bushing disassembly device according to claim 2, characterized in that, There are two of each of the adjusting linkage and the clamping member (210), and they are provided accordingly. The two adjusting links are arranged opposite each other at both ends of the moving part (220).

6. The etching machine guide rail bushing disassembly device according to claim 1, characterized in that, The clamping member (210) includes a clamping part and a supporting part; The clamping part is arranged along the axial direction of the drive screw (110) and is used to abut against the side wall of the bushing; The support portion is arranged radially along the drive screw (110) and is used to support the bushing.

7. The etching machine guide rail bushing disassembly device according to claim 6, characterized in that, The side of the clamping part that abuts against the bushing has a curved surface structure, which is adapted to the surface of the bushing.

8. The etching machine guide rail bushing disassembly device according to claim 1, characterized in that, The bottom end of the abutment end (111) has a curved surface structure.

9. The etching machine guide rail bushing disassembly device according to claim 1, characterized in that, The etching machine guide rail bushing disassembly device also includes anti-slip pads; The anti-slip pad is used to be placed between the abutting end (111) of the drive screw (110) and the guide rail.

10. The etching machine guide rail bushing disassembly device according to any one of claims 1-9, characterized in that, The drive assembly (100) also includes a force-applying component (120); The force-applying component (120) is located at the rotating end of the drive screw (110) and is connected to the drive screw (110).

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