A vertical furnace body quartz holder

Abstract

The utility model discloses a vertical furnace body quartz support, including furnace body, the bottom of furnace body is provided with the air inlet, still include quartz support, quartz support set up in the bottom of furnace body, the top of quartz support is provided with recess. The utility model provides a vertical furnace body quartz support is placed in the L type groove of quartz support through the hook after the epitaxial operation is completed, slowly put into the vertical furnace body of quartz support, rotates quartz support and ensures that it is placed steadily, then places the graphite tool of waiting for the degassing in the recess of quartz support top, carries out high -temperature degassing operation through the air inlet of vertical furnace's ventilation, and the material powder on the surface of graphite tool falls into the recess when degassing, reduces the air inlet of material powder falling and blocking the bottom of furnace, guarantees the degassing effect of graphite tool simultaneously, to realize the purpose of prolonging the service life of equipment, need not to the quartz support structure limit. The device simple structure, the practicality is strong, and the applicability is high.

Description

Technical Field

[0001] This utility model relates to the technical field of auxiliary equipment for vertical furnaces, specifically to a quartz holder for a vertical furnace. Background Technology

[0002] High-purity graphite is a commonly used material in semiconductor material fabrication processes. Due to its ease of processing, high thermal conductivity, high temperature resistance, and good electrical conductivity, graphite is a frequently used material in epitaxial growth devices. Before reuse, graphite parts generally require high-temperature degassing to remove any residual mercury cadmium telluride adhering to them.

[0003] Currently, graphite tooling mainly uses suspended degassing. During high-temperature degassing, air is introduced from the bottom of the vertical furnace to degas the graphite tooling. This degassing process causes a lot of material powder to fall to the bottom of the vertical furnace opening, which blocks the air inlet of the vertical furnace, reduces the air volume of the vertical furnace, greatly reduces the degassing effect of the graphite tooling, and also reduces the service life of the equipment. Utility Model Content

[0004] The purpose of this invention is to provide a vertical furnace quartz holder to address the aforementioned shortcomings in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: it includes a furnace body, and an air inlet is provided at the bottom of the furnace body;

[0006] It also includes a quartz holder, which is disposed at the bottom of the furnace body, and the top of the quartz holder has a groove.

[0007] As a further description of the above technical solution:

[0008] The top of the side wall of the quartz holder is provided with an L-shaped groove.

[0009] As a further description of the above technical solution:

[0010] The quartz holder is fixedly connected to a limiting plate, which is in movable contact with the inner wall of the furnace.

[0011] As a further description of the above technical solution:

[0012] The quartz holder has multiple air holes on its side and on the limiting plate.

[0013] As a further description of the above technical solution:

[0014] The quartz holder is made of high-purity quartz.

[0015] In the above technical solution, the vertical furnace quartz holder provided by this utility model has the following beneficial effects:

[0016] This invention involves a method for degassing graphite fixtures. After the epitaxial growth process is completed, a hook is placed into the L-shaped groove of a quartz holder, which is then slowly lowered into the vertical furnace. The quartz holder is rotated to ensure stable placement. Next, the graphite fixture to be degassed is placed in the groove at the top of the quartz holder. High-temperature degassing is then performed by venting air into the furnace's air inlet. During degassing, the graphite powder on the fixture's surface falls into the groove, reducing the risk of powder clogging the air inlet at the bottom of the furnace and ensuring effective degassing. This extends the equipment's lifespan without requiring modifications to the quartz holder structure. This device is simple in structure, highly practical, and widely applicable.

[0017] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and are not intended to limit this disclosure.

[0018] This application provides an overview of various implementations or examples of the technology described in this disclosure, and is not a full disclosure of the entire scope or all features of the disclosed technology. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0020] Figure 1 This is a frontal longitudinal section structural diagram provided for an embodiment of the present utility model;

[0021] Figure 2 A three-dimensional structural diagram of a quartz holder provided for an embodiment of this utility model;

[0022] Figure 3 A three-dimensional structural diagram of a quartz holder provided for an embodiment of this utility model;

[0023] Figure 4 This is a longitudinal section diagram of the quartz holder provided in an embodiment of the present utility model.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Furnace body; 11. Air inlet; 2. Quartz support; 21. L-shaped groove; 22. Groove; 23. Air hole; 24. Limiting plate. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0027] Please see Figures 1-4 This embodiment provides a vertical furnace quartz holder, including a furnace body 1, with an air inlet at the bottom of the furnace body 1;

[0028] The system also includes a quartz holder 2, which is located at the bottom of the furnace body 1. The top of the quartz holder 2 has a groove 22 for supporting the degassing fixture and receiving the degassed powder. After the extension operation is completed, the fixture is placed into the L-shaped groove 21 of the quartz holder 2 using a hook. The quartz holder 2 is then slowly lowered into the vertical furnace body 1, and rotated to ensure stable placement. The graphite fixture to be degassed is then placed in the groove 22 at the top of the quartz holder 2. High-temperature degassing is performed by venting air through the air inlet 11 of the vertical furnace 1. During degassing, the powder on the surface of the graphite fixture falls into the groove 22, reducing the risk of powder clogging the air inlet 11 at the bottom of the furnace body 1, while ensuring the degassing effect of the graphite fixture, thus extending the service life of the equipment. No structural restrictions are placed on the quartz holder 2. This device has a simple structure, strong practicality, and high applicability.

[0029] In a further embodiment of this utility model, an L-shaped groove 21 is provided on the top of the side wall of the quartz holder 2, which is convenient for the operator to use a hook to take out or put the entire quartz holder 2 into the furnace body 1 as a traction point.

[0030] In a further embodiment of this utility model, a limiting plate 24 is fixedly connected to the outside of the quartz holder 2. The limiting plate 24 is in movable contact with the inner wall of the furnace body 1 and is used to limit the vertical degassing furnace body 1 when it is placed.

[0031] In the embodiments provided by this utility model, the side of the quartz holder 2 and the limiting plate 24 are provided with multiple air holes 23 to ensure smooth gas flow during degassing.

[0032] In a further embodiment of this invention, the quartz holder 2 is made of high-purity quartz.

[0033] The operator uses a hook placed in the L-shaped groove 21 of the quartz holder 2 to slowly lower the quartz holder 2 into the vertical furnace body 1. The quartz holder 2 is rotated to ensure that it is placed stably. Then, the graphite fixture to be degassed is placed on the groove 22 of the quartz holder 2. High-temperature degassed operation is completed by venting through the air inlet 11 of the furnace body 1. The powder generated during degassed operation will remain in the groove 22. The powder in the groove is cleaned regularly, which greatly improves the degassed effect of the graphite fixture and avoids the accumulation of powder affecting the service life of the furnace body 1. In addition, the quartz holder 2 is suitable for degassed use of other quartz, boron nitride crucibles and other fixtures, without limiting the structure of the degassed fixture.

[0034] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A vertical furnace body quartz support comprising a furnace body (1), characterized in that: An air inlet (11) is provided at the bottom of the furnace body (1). It also includes a quartz holder (2), which is located at the bottom of the furnace body (1), and a groove (22) is provided on the top of the quartz holder (2).

2. A vertical furnace quartz holder according to claim 1, characterized in that The top of the side wall of the quartz holder (2) is provided with an L-shaped groove (21).

3. A vertical furnace quartz holder according to claim 1, characterized in that The quartz holder (2) is fixedly connected to a limiting plate (24), and the limiting plate (24) is in movable contact with the inner wall of the furnace body (1).

4. A vertical furnace quartz holder according to claim 1, characterized in that, Multiple air holes (23) are provided on the side of the quartz holder (2) and on the limiting plate (24).

5. A vertical furnace quartz holder according to claim 1, characterized in that, The quartz holder (2) is made of high-purity quartz.

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