Rewarming device

Abstract

The application discloses a rewarming device applied to a refrigerator of a crystal pulling device, and the rewarming device comprises a supporting assembly, an air inlet assembly and an air outlet assembly. The supporting assembly comprises a supporting plate connected with the refrigerator and sealing a flange opening of the refrigerator. The air inlet assembly comprises at least two air inlet pipes which penetrate through the supporting plate and are fixedly connected with the supporting plate. The air inlet pipes are suitable for conveying hot air and comprise air inlet inner pipes which extend into the refrigerator. The lengths of the air inlet inner pipes of different air inlet pipes are different. The air outlet assembly comprises at least one air outlet pipe which penetrates through the supporting plate and is fixedly connected with the supporting plate. The air outlet pipe comprises an air outlet inner pipe which extends into the refrigerator, and the length of the air outlet inner pipe is smaller than the length of the shortest air inlet inner pipe. Through the above arrangement, the rewarming efficiency of the refrigerator is improved, the rewarming cost is reduced, the heating effect of the rewarming device on the interior of the refrigerator is more uniform, and the local components of the refrigerator are prevented from being damaged due to high temperature.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment, and more particularly to a rewarming device. Background Technology

[0002] The Czochralski (CZ) crystal growing furnace is the core equipment used to grow high-purity single-crystal silicon. It melts silicon material and slowly pulls a seed crystal to form a high-purity single-crystal silicon ingot after fusing it with the molten silicon. A superconducting magnet is encased in a ring structure around the CZ furnace. The superconducting magnet improves the quality of the single-crystal silicon and reduces energy consumption. The superconducting magnet needs to maintain its superconducting state at very low temperatures with a small temperature margin. Once the temperature exceeds the critical temperature, the superconducting magnet loses its superconducting state and may even suffer structural damage. Adding a cooler to the outside of the superconducting magnet allows for cooling, thus maintaining its superconducting state.

[0003] The cryostat requires regular maintenance. The cryostat and superconducting magnet can operate at temperatures as low as 4.2K, and maintenance requires warming the cryostat to 300K. If warming is achieved through passive heat conduction and nitrogen convection heating, the large size of the superconducting magnet used in the Czochralski furnace and the decreasing rate of temperature recovery result in slow heat transfer from the superconducting magnet to the cryostat. Warming the cryostat to 300K could take 10 to 20 days, leading to low warming efficiency. Nitrogen charging requires an external nitrogen supply device, posing a risk of leakage and increasing warming costs. Connecting an external heater to the bottom of the cryostat would require heat conduction to all parts of the cryostat, resulting in uneven temperature distribution and potential damage to internal components due to high temperatures. Utility Model Content

[0004] In order to overcome the shortcomings of the prior art, the purpose of this application is to provide a reheating device that can improve reheating efficiency, reduce maintenance costs, and prevent damage to the refrigeration unit due to reheating.

[0005] To achieve the above objectives, this application adopts the following technical solution:

[0006] A reheating device is applied to the refrigerator of a crystal pulling equipment. The reheating device includes a support assembly, an air inlet assembly, and an air outlet assembly. The support assembly includes a support plate connected to the refrigerator and sealing the flange of the refrigerator. The air inlet assembly includes at least two air inlet pipes that pass through the support plate and are fixedly connected to the support plate. The air inlet pipes are suitable for conveying hot air and include an inner air inlet pipe extending into the refrigerator. The inner air inlets of the different air inlet pipes have different lengths. The air outlet assembly includes at least one exhaust pipe that passes through the support plate and is fixedly connected to the support plate. The exhaust pipe includes an inner exhaust pipe extending into the refrigerator. The length of the inner exhaust pipe is shorter than the length of the shortest inner air inlet pipe.

[0007] In some embodiments, the reheating device includes a plurality of heat dissipation pipes, wherein a first heat dissipation pipe of the plurality of heat dissipation pipes is fitted over the entire air inlet pipe, wherein the end of the first heat dissipation pipe opposite to the support plate has an opening to receive hot air circulating in the refrigerator.

[0008] In some embodiments, the intake inner pipe includes an exhaust port located at one end of the intake inner pipe away from the support plate, and the opening of the first heat dissipation pipe is not lower than the position of the exhaust port of the shortest intake inner pipe.

[0009] In some embodiments, the second heat sink in a plurality of heat sinks includes an air intake inner tube with an exhaust port located at the end of the air intake inner tube away from the support plate, and the second heat sink is fitted with the exhaust port of the longest air intake inner tube.

[0010] In some embodiments, the refrigerator has two cooling cavities with different inner diameters and distributed along its own extension direction. The first heat dissipation pipe and the second heat dissipation pipe are located in different cooling cavities and form a gap with the inner wall of the cooling cavity. The inner diameter of the first heat dissipation pipe is larger than the inner diameter of the second heat dissipation pipe.

[0011] In some embodiments, the sidewalls of the heat sinks are provided with a plurality of vent holes, which are distributed at intervals along the circumference of the corresponding heat sinks.

[0012] In some embodiments, the support assembly further includes a connecting plate that houses the exhaust inner pipe and all the intake inner pipes, and is connected to the exhaust inner pipe and the intake inner pipe.

[0013] In some embodiments, the rewarming device further includes a heater capable of blowing out hot air, and the air inlet pipe includes an air inlet outer pipe connected to the air inlet inner pipe. The air inlet outer pipe is located on the side of the support plate opposite to the air inlet inner pipe and is adapted to house the heater.

[0014] In some embodiments, an adapter tube is connected to one end of the outer air intake pipe away from the inner air intake pipe. The adapter tube can adapt to the shape of the air outlet of the heater and limit the heater in the extending direction of the outer air intake pipe.

[0015] In some embodiments, the support plate is detachably connected to the flange.

[0016] The reheating device provided in this application connects the support plate to the flange of the refrigeration machine and introduces hot air into the refrigeration machine through the air inlet pipe. The hot air directly heats the interior of the refrigeration machine, which improves the reheating efficiency of the refrigeration machine and reduces the reheating cost. Moreover, the reheating device heats all parts inside the refrigeration machine, and the heating effect is uniform, avoiding damage to local parts of the refrigeration machine due to high temperature. Attached Figure Description

[0017] Figure 1This is a first schematic diagram of the rewarming device in an embodiment of this application;

[0018] Figure 2 This is a second schematic diagram of the rewarming device in an embodiment of this application;

[0019] Figure 3 This is a schematic diagram showing the connection between the rewarming device and the refrigeration unit in an embodiment of this application;

[0020] Figure 4 This is a schematic diagram of the airflow direction in the first heating method of this application embodiment;

[0021] Figure 5 This is a schematic diagram of the airflow direction in the second heating method in the embodiments of this application;

[0022] Figure 6 This is a schematic diagram of the airflow direction in the third heating method of this application embodiment. Detailed Implementation

[0023] To enable those skilled in the art to better understand the present application, the technical solutions in specific embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0024] It should be noted that the terms "first," "second," and similar terms used in this application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "a" or "one," etc., do not indicate a quantity limitation, but rather indicate the presence of at least one. "A plurality of," or "several," indicates at least two. Unless otherwise stated, terms such as "upper and lower" are for illustrative purposes only and are not limited to a single location or spatial orientation. The terms "connected" or "linked," etc., are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.

[0025] like Figure 1 and Figure 2 As shown, this application provides a rewarming device 100, which is applied to the chiller 200 of a crystal pulling equipment (see...). Figure 3 The crystal pulling equipment's chiller 200 includes several chambers. The bottom of the chiller 200 has a flange. At least a portion of the reheating device 100 can extend into the chambers of the chiller 200 and is fixedly connected to the flange. To clearly illustrate the technical solution of this application, the following are also defined: Figure 1 The up-down direction of the reheating device 100 shown.

[0026] In one implementation, the rewarming device 100 includes a support assembly 11, an air intake assembly 12, and an exhaust assembly 13. The support assembly 11 includes a support plate 111 connected to the refrigerator 200, which is connected to and seals the flange of the refrigerator 200. The air intake assembly 12 includes at least two air intake pipes 121 that pass through and are fixedly connected to the support plate 111. The air intake pipes 121 can receive and transport hot air. Each air intake pipe 121 includes an inner air intake pipe 1211 extending into the refrigerator 200. The inner air intake pipes 1211 of different air intake pipes 121 have different lengths to transport hot air through different air intake pipes 121 into the refrigerator 200, heating different chambers of the refrigerator 200. The exhaust assembly 13 includes at least one exhaust pipe 131, which passes through the support plate 111 and is fixedly connected to the support plate 111. The exhaust pipe 131 includes an exhaust inner pipe 1311 that extends into the refrigerator 200. The length of the exhaust inner pipe 1311 is less than the length of the shortest intake inner pipe 1211. Hot air inside the refrigerator 200 can be discharged from the refrigerator 200 through the exhaust inner pipe 1311.

[0027] Specifically, the refrigerator 200 has a motor and a piston at its bottom. Disassembling the motor and piston at the bottom of the refrigerator 200 exposes the flange of the refrigerator 200. During maintenance of the refrigerator 200, the inner air inlet pipe 1211 is inserted into the refrigerator 200, and the support plate 111 is connected to the flange. Hot air enters the refrigerator 200 through different air inlet pipes 121 to heat the inner walls of each chamber of the refrigerator 200.

[0028] like Figure 3 As shown, the rewarming device 100 is further equipped with a heater 300 capable of blowing out hot air. When using the rewarming device 100 to maintain the refrigerator 200, the heater 300 blows out hot air. The hot air enters the refrigerator 200 through the inlet pipes 1211 of different lengths, heating the inner walls of the different chambers corresponding to the different lengths of the inlet pipes 1211. As the rewarming device 100 continuously inputs hot air into the refrigerator 200, the hot air that first enters the refrigerator 200 flows upward under pressure, uniformly heating the inner walls of each chamber of the refrigerator 200, and is discharged from the refrigerator 200 through the exhaust pipe 131 after flowing to the exhaust pipe 131.

[0029] With the above configuration, the support plate 111 is connected to the flange of the refrigerator 200, and hot air is introduced into the refrigerator 200 through the air inlet pipe 121 to directly heat the refrigerator 200, thereby improving the reheating efficiency of the refrigerator 200, reducing the reheating cost, and the reheating device 100 uniformly heats the inner walls of each chamber of the refrigerator 200, preventing damage to local components of the refrigerator 200 due to high temperature.

[0030] like Figure 3 As shown, in some embodiments, the reheating device 100 includes a plurality of heat dissipation pipes 14, the plurality of heat dissipation pipes 14 including a first heat dissipation pipe 141, the first heat dissipation pipe 141 being fitted onto all the air inlet pipes 1211, wherein the end of the first heat dissipation pipe 141 facing away from the support plate 111 has an opening 1411 to receive hot air circulating in the refrigerator 200 and to evenly diffuse the hot air to the inner wall of the refrigerator 200; the end of the first heat dissipation pipe 141 facing the support plate 111 is closed to prevent the hot air entering the first heat dissipation pipe 141 from flowing upward through the first heat dissipation pipe 141 directly, which would reduce the reheating efficiency.

[0031] Each intake pipe 1211 has an exhaust port. The exhaust port of each intake pipe 1211 is located at the end of the intake pipe 1211 that is away from the support plate 111. The position of the opening 1411 of the first heat dissipation pipe 141 is not lower than the position of the exhaust port of the shortest intake pipe 1211, so that hot air can flow through the area below the first heat dissipation pipe 141.

[0032] For example, the intake pipe 121 includes a first intake pipe 121a and a second intake pipe 121b. The first intake pipe 121a and the second intake pipe 121b each include a corresponding first intake inner pipe 1211a and a second intake inner pipe 1211b. The length of the first intake inner pipe 1211a is less than the length of the second intake inner pipe 1211b. The opening 1411 of the first heat dissipation pipe 141 is at the same height as the exhaust port of the first intake inner pipe 1211a in the vertical direction. The hot air blown into the refrigerator 200 through the first intake inner pipe 1211a collides with the inner wall of the refrigerator 200 located below the first intake inner pipe 1211a and is reflected, entering the first heat dissipation pipe 141 through the opening 1411 of the first heat dissipation pipe 141 and spreading evenly to the inner wall of the refrigerator 200.

[0033] like Figure 3 As shown, in some embodiments, a plurality of heat dissipation pipes 14 include a second heat dissipation pipe 142, each air inlet pipe 1211 has an exhaust port, the exhaust port of each air inlet pipe 1211 is located at the end of the air inlet pipe 1211 opposite to the support plate 111, the second heat dissipation pipe 142 is fitted to the exhaust port of the longest air inlet pipe 1211, and diffuses the hot air evenly from the bottom of the reheating device 100 to the inner wall of the refrigerator 200, thereby improving the reheating effect of the refrigerator 200.

[0034] For example, the intake pipe 121 includes a first intake pipe 121a and a second intake pipe 121b. The first intake pipe 121a and the second intake pipe 121b each include a corresponding first intake inner pipe 1211a and a second intake inner pipe 1211b. The length of the first intake inner pipe 1211a is less than the length of the second intake inner pipe 1211b. The second heat dissipation pipe 142 has an opening at one end away from the support plate 111. The opening of the second heat dissipation pipe 142 is at the same height as the exhaust port of the second intake inner pipe 1211b in the vertical direction. The hot air blown into the refrigerator 200 through the second intake inner pipe 1211b is reflected after colliding with the inner wall of the refrigerator 200 located below the second intake inner pipe 1211b, and enters the second heat dissipation pipe 142 through the opening of the second heat dissipation pipe 142, and is evenly diffused to the inner wall of the refrigerator 200.

[0035] like Figure 3 As shown in the embodiment of this application, a plurality of heat dissipation pipes 14 extend along the vertical direction of the reheating device 100, and a plurality of exhaust holes 143 are provided on the side wall of each heat dissipation pipe 14. The plurality of exhaust holes 143 are distributed circumferentially along the corresponding heat dissipation pipe 14, so that the hot air entering the heat dissipation pipe 14 can be blown radially toward the inner wall of the refrigerator 200, thereby improving the reheating efficiency and making the heating effect more uniform.

[0036] like Figure 3 As shown, in some embodiments, the refrigerator 200 has two refrigeration chambers 21 with different inner diameters and distributed along its own extension direction. The first heat dissipation pipe 141 and the second heat dissipation pipe 142 are located in different refrigeration chambers 21 and form a gap with the inner wall of the refrigeration chamber 21. The inner diameter of the first heat dissipation pipe 141 is larger than the inner diameter of the second heat dissipation pipe 142.

[0037] It should be noted that the inner walls surrounding the two refrigeration chambers 21 are the inner walls of different chambers of the refrigeration unit 200. By blowing hot air into the refrigeration chambers 21, the inner walls of the refrigeration unit 200 can be heated, thereby heating the different chambers corresponding to the different inner walls.

[0038] Specifically, the cooling cavity 21 that houses the first heat dissipation pipe 141 is defined as the first cooling cavity 211. The length of the first heat dissipation pipe 141 in the vertical direction is less than the depth of the first cooling cavity 211 in the vertical direction. The hot air blown out by the first heat dissipation pipe 141 can be blown toward the inner wall of the first cooling cavity 211 and flow in the first cooling cavity 211 through the gap between the first heat dissipation pipe 141 and the inner wall of the first cooling cavity 211, thereby heating the inner wall of the first cooling cavity 211.

[0039] The cooling cavity 21 that houses the second heat dissipation pipe 142 is defined as the second cooling cavity 212. The length of the second heat dissipation pipe 142 in the vertical direction is less than the depth of the second cooling cavity 212 in the vertical direction. The hot air blown out by the second heat dissipation pipe 142 can be blown toward the inner wall of the second cooling cavity 212 and flow in the second cooling cavity 212 through the gap between the second heat dissipation pipe 142 and the inner wall of the second cooling cavity 212, thereby heating the inner wall of the second cooling cavity 212.

[0040] The above settings heat the inner walls of different cooling chambers 21, making the heating effect more uniform.

[0041] In some embodiments, the support component 11 further includes a connecting plate 112 (see...) Figure 2 The connecting plate 112 is fitted with the exhaust inner pipe 1311 and all the intake inner pipes 1211, and is connected to the exhaust inner pipe 1311 and the intake inner pipe 1211. The connecting plate 112 cooperates with the support plate 111 to limit the exhaust inner pipe 1311 and the intake inner pipe 1211, and fix the exhaust inner pipe 1311 and the intake inner pipe 1211.

[0042] In some embodiments, the air intake pipe 121 includes an air intake outer pipe 1212 connected to the air intake inner pipe 1211. The air intake outer pipe 1212 is located on the side of the support plate 111 opposite to the air intake inner pipe 1211, and the air intake outer pipe 1212 is adapted to house the heater 300.

[0043] Specifically, the outer intake pipe 1212 and the inner intake pipe 1211 are integrally formed, and the connection between the outer intake pipe 1212 and the inner intake pipe 1211 passes through the support plate 111. The extension direction of the outer intake pipe 1212 is parallel to the vertical direction.

[0044] In some possible embodiments, at least one air inlet pipe 1212 extends at a certain angle to the vertical direction, which improves the overall compactness of the reheating device 100 while preventing adjacent air inlet pipes 1212 from obstructing the heater 300 when any air inlet pipe 1212 is connected to the heater 300.

[0045] In some embodiments, the heater 300 is configured as a hot air blower, which can be turned off at any time and whose power is controllable, making it easy to achieve precise temperature control for heating the refrigerator 200.

[0046] Specifically, an adapter tube 15 is connected to one end of the outer air intake pipe 1212 away from the inner air intake pipe 1211. The adapter tube 15 can adapt to the shape of the air outlet of the heater 300 and limit the heater 300 in the extension direction of the outer air intake pipe 1212, so as to avoid the need for the operator to control the position of the heater 300 during the process of heating the refrigerator 200 using the reheating device 100, thereby improving the ease of use of the reheating device 100.

[0047] In some embodiments, the air intake assembly 12 includes a first air intake pipe 121a and a second air intake pipe 121b. The first air intake pipe 121a includes a first inner air intake pipe 1211a, and the second air intake pipe 121b includes a second inner air intake pipe 1211b. The length of the first inner air intake pipe 1211a is shorter than the length of the second inner air intake pipe 1211b. The reheating device 100 can cooperate with the heater 300 to reheat the refrigerator 200 in the following heating manner:

[0048] like Figure 4 The diagram shows the airflow direction of the reheating device 100 and heater 300 working together to reheat the refrigerator 200 using a first heating method. Hot air is received and transported through the second intake pipe 121b. The hot air enters the second refrigeration chamber 212 through the second intake pipe 121b and is blown towards the inner wall below the second refrigeration chamber 212. After contacting the inner wall below the second refrigeration chamber 212, it is reflected to the second heat dissipation pipe 142. Through the second heat dissipation pipe 142, it is evenly diffused to part of the inner wall of the second refrigeration chamber 212 and flows upward, uniformly heating the inner wall of the second refrigeration chamber 212 before being discharged from the refrigerator 200 through the first intake pipe 121a and the exhaust pipe 131.

[0049] like Figure 5 The diagram shows the airflow direction of the reheating device 100 and heater 300 working together to reheat the refrigerator 200 using a second heating method. Hot air is received and transported through the first intake pipe 121a. The hot air enters the first refrigeration chamber 211 through the first intake pipe 121a and is blown towards the inner wall below the first refrigeration chamber 211. After contacting the inner wall below the first refrigeration chamber 211, it is reflected to the first heat dissipation pipe 141. Through the first heat dissipation pipe 141, it is evenly diffused to part of the inner wall of the first refrigeration chamber 211 and flows upward, uniformly heating the inner wall of the first refrigeration chamber 211 before being discharged from the refrigerator 200 through the exhaust pipe 131.

[0050] like Figure 6The diagram shows the airflow direction of the reheating device 100 and the heater 300 working together to reheat the refrigerator 200 using a third heating method. Hot air is simultaneously received and transported through the first intake pipe 121a and the second intake pipe 121b. The hot air entering the first intake pipe 121a enters the first cooling chamber 211 and is blown toward the inner wall below the first cooling chamber 211. After contacting the inner wall below the first cooling chamber 211, it is reflected to the first heat dissipation pipe 141, and then diffuses evenly to part of the inner wall of the first cooling chamber 211 and flows upward. The hot air entering the second intake pipe 121b enters the second cooling chamber 212 and is blown toward the inner wall below the second cooling chamber 212. After contacting the inner wall below the second cooling chamber 212, it is reflected to the second heat dissipation pipe 142, and then diffuses evenly to part of the inner wall of the second cooling chamber 212 and flows upward. The hot air entering the refrigerator 200 through the first intake pipe 121a and the second intake pipe 121b is discharged from the refrigerator 200 through the exhaust pipe 131.

[0051] By using the above heating method, hot air is delivered through different air inlet pipes 121 to heat different refrigeration chambers 21, which improves the flexibility of the reheating device 100 in heating the refrigeration unit 200 and avoids the problem of local overheating caused by heating all refrigeration chambers 21 at the same time, which could damage the refrigeration unit 200.

[0052] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A reheating device, applied to the refrigeration unit of a crystal pulling equipment, characterized in that, The rewarming device includes: A support assembly, the support assembly including a support plate connected to the refrigeration unit, which closes the flange opening of the refrigeration unit; An air intake assembly includes at least two air intake pipes that pass through the support plate and are fixedly connected to the support plate. The air intake pipes are adapted to transport hot air and include an inner air intake pipe that extends into the refrigerator. The lengths of the inner air intake pipes of different air intake pipes are different. An exhaust assembly includes at least one exhaust pipe that passes through and is fixedly connected to the support plate. The exhaust pipe includes an inner exhaust pipe that extends into the refrigeration unit, and the length of the inner exhaust pipe is less than the length of the shortest inner intake pipe.

2. The rewarming device according to claim 1, characterized in that, The rewarming device includes a plurality of heat dissipation pipes, including a first heat dissipation pipe, which is fitted onto all of the air inlet pipes. The first heat dissipation pipe has an opening at one end away from the support plate to receive the hot air circulating in the refrigerator and to evenly diffuse the hot air to the inner wall of the refrigerator.

3. The rewarming device according to claim 2, characterized in that, The intake inner pipe includes an exhaust port, which is located at the end of the intake inner pipe away from the support plate. The opening of the first heat dissipation pipe is not lower than the position of the exhaust port of the shortest intake inner pipe.

4. The rewarming device according to claim 3, characterized in that, The plurality of heat dissipation pipes include a second heat dissipation pipe, which is fitted onto the exhaust port of the longest of the inner intake pipe.

5. The rewarming device according to claim 4, characterized in that, The refrigerator has two cooling cavities with different inner diameters and distributed along its own extension direction. The first heat dissipation pipe and the second heat dissipation pipe are located in different cooling cavities and form a gap with the inner wall of the cooling cavity. The inner diameter of the first heat dissipation pipe is larger than the inner diameter of the second heat dissipation pipe.

6. The rewarming device according to claim 2, characterized in that, The sidewalls of the heat dissipation pipes are provided with a number of exhaust holes, which are distributed at intervals along the circumference of the corresponding heat dissipation pipes.

7. The rewarming device according to claim 1, characterized in that, The support assembly also includes a connecting plate, which is fitted with the exhaust inner pipe and all of the intake inner pipe, and is connected to the exhaust inner pipe and the intake inner pipe.

8. The rewarming device according to claim 1, characterized in that, The rewarming device is equipped with a heater capable of blowing out hot air. The air inlet pipe includes an air inlet outer pipe connected to the air inlet inner pipe. The air inlet outer pipe is located on the side of the support plate opposite to the air inlet inner pipe. The air inlet outer pipe is adapted to house the heater.

9. The rewarming device according to claim 8, characterized in that, An adapter tube is connected to one end of the outer air inlet pipe that is away from the inner air inlet pipe. The adapter tube can adapt to the shape of the air outlet of the heater and limit the heater in the extension direction of the outer air inlet pipe.

10. The rewarming device according to claim 1, characterized in that, The support plate is detachably connected to the flange.

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