Helium purging and vacuuming connecting pipeline device for helium detection equipment

CN224758034UActive Publication Date: 2026-09-15SHANGHAI MORIOKA MACHINERY MANUFACTURING CO LTD
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Patent Information

Application Number
CN202522536555.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-11-28
Publication Date
2026-09-15
Estimated Expiration
2035-11-28

AI Technical Summary

Technical Problem

[0003]现有氦检设备存在抽真空速度慢、氦气输送不畅的问题,影响氦检流程的整体效率,且还存在管路布局分散、连接繁琐的问题,导致清氦、抽真空操作效率低,维护难度大的问题

Benefits of technology

本方案中一种氦检设备的清氦抽真空连接管路装置输送装置采用真空泵与双向罗茨泵的组合结构,双向罗茨泵可高效完成抽真空和氦气输送的双向作业,相比现有技术中单一或低效的泵体组合,大幅加快抽真空速度,保障氦气输送的流畅性,从核心环节解决了现有氦检设备抽真空慢、氦气输送不畅的问题,显著提升氦检流程的整体效率;通过集成化的管道连接装置,将竖向管、直向管、横向管等部件整合,使输送装置、真空箱、氦气罐之间的管路连接紧凑有序,替代了现有技术中管路分散、连接繁琐的布局。

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Abstract

The utility model discloses a kind of helium detection equipment's helium purging vacuum connection pipeline device, including device ontology, device ontology includes base, first vacuum tank, second vacuum tank, conveying device, helium tank and pipeline connecting device, first vacuum tank, second vacuum tank, conveying device, helium tank are located at the top of base, first vacuum tank and second vacuum tank are located conveying device front side, helium tank is located conveying device right side, conveying device is connected with first vacuum tank, second vacuum tank respectively by pipeline connecting device;Pipeline connecting device includes vertical tube, straight tube, transverse tube, first connecting pipe and second connecting pipe, vertical tube is installed in straight tube bottom rear end, transverse tube is located straight tube front side, straight tube is connected with transverse tube, first connecting pipe is installed in transverse tube left end.This kind of device can greatly speed up vacuum speed, guarantee the fluency of helium delivery.
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Description

Technical Field

[0001] This utility model relates to the field of helium detection technology, specifically to a helium cleaning and vacuuming connection pipeline device for a helium detection equipment. Background Technology

[0002] Helium leak detection is an industrial inspection method that uses helium as a tracer gas and mass spectrometry to detect leaks. This technology employs positive or negative pressure modes, working in conjunction with a vacuum chamber and a connection system between the workpiece under inspection. Core equipment includes a helium mass spectrometer leak detector, a vacuum chamber, and an automated transport system. In the field of power battery manufacturing, pre-helium leak detection can achieve leak rate detection at the 10^-6 mbar·L / s level, while post-helium leak detection uses vacuum adsorption to verify the seal.

[0003] Existing helium testing equipment suffers from slow vacuuming speed and poor helium delivery, affecting the overall efficiency of the helium testing process. Furthermore, it has issues with scattered pipeline layout and cumbersome connections, resulting in low efficiency of helium cleaning and vacuuming operations and high maintenance difficulty.

[0004] Therefore, a solution is needed. Utility Model Content

[0005] (a) Technical problems to be solved To address the shortcomings of existing technologies, this utility model provides a helium cleaning and vacuum connection pipeline device for a helium detection equipment, thereby solving the problems mentioned in the background art.

[0006] (II) Technical Solution To achieve the above objectives, this utility model provides the following technical solution: a helium cleaning and vacuum connection pipeline device for a helium detection equipment, comprising a device body, the device body including a base, a first vacuum chamber, a second vacuum chamber, a conveying device, a helium tank, and a pipeline connection device. The first vacuum chamber, the second vacuum chamber, the conveying device, and the helium tank are all located on top of the base. The first vacuum chamber and the second vacuum chamber are both located in front of the conveying device, and the helium tank is located on the right side of the conveying device. The conveying device is connected to the first vacuum chamber and the second vacuum chamber respectively through the pipeline connection device; the pipeline connection device includes a vertical pipe and a straight pipe. The system comprises a horizontal tube, a first connecting tube, and a second connecting tube. The vertical tube is installed at the rear end of the bottom of the vertical tube, and the horizontal tube is located in front of the vertical tube. The vertical tube is connected to the horizontal tube. The first connecting tube is installed at the left end of the horizontal tube, and the second connecting tube is installed at the right end of the horizontal tube. Both the first and second connecting tubes have a box-type connecting joint at their bottom. The first connecting tube is connected to the first vacuum box through the box-type connecting joint, and the second connecting tube is connected to the second vacuum box through the box-type connecting joint. An electrically controlled valve is provided in the middle section of the vertical tube, and the first and second body connecting tubes are respectively provided at the rear of the vertical tube.

[0007] Preferably, the conveying device includes a vacuum pump and a bidirectional Roots pump. One end of the vacuum pump is connected to the connecting pipe of the second body, and one end of the bidirectional Roots pump is connected to the connecting pipe of the first body. The other end of the bidirectional Roots pump is provided with a helium pipe, and the bidirectional Roots pump is connected to a helium tank through the helium pipe.

[0008] Preferably, both the first vacuum chamber and the second vacuum chamber are provided with protective frames on their outer sides. The bottom of the protective frame is fixed to the top of the base. The protective frame is located below the horizontal tube and has a rectangular structure.

[0009] Preferably, a set of pipe fixing devices is fitted onto the transverse pipe. The bottom of the set of pipe fixing devices is fixed to the top of a set of protective frames by screws. The pipe fixing device includes a fixing ring and a fixing block. A set of fixing blocks is provided and the set of fixing blocks is welded to the bottom left and bottom right ends of the fixing ring. The fixing ring has a U-shaped structure, and the fixing block has a rectangular structure. The surface of the fixing block is provided with fixing holes.

[0010] (III) Beneficial Effects This utility model provides a helium cleaning and vacuuming connection pipeline device for a helium detection equipment. It has the following beneficial effects: In this solution, the helium cleaning and vacuuming connection pipeline device of a helium detection equipment adopts a combination structure of a vacuum pump and a bidirectional Roots pump. The bidirectional Roots pump can efficiently complete the bidirectional operation of vacuuming and helium delivery. Compared with the single or inefficient pump combination in the prior art, it greatly speeds up the vacuuming speed and ensures the smoothness of helium delivery. It solves the problems of slow vacuuming and poor helium delivery in the existing helium detection equipment from the core link, and significantly improves the overall efficiency of the helium detection process. Through the integrated pipeline connection device, vertical pipes, straight pipes, horizontal pipes and other components are integrated, so that the pipeline connection between the delivery device, vacuum box and helium tank is compact and orderly, replacing the scattered and cumbersome layout of the pipeline in the prior art.

[0011] With the help of the pipe fixing device, the horizontal pipe is firmly fixed to the protective frame by the U-shaped fixing ring and the fixing block with fixing hole, which further enhances the regularity of the pipeline, reduces the operational obstacles caused by pipeline disorder, reduces the difficulty of helium cleaning and vacuuming operations, and facilitates the later maintenance of the equipment. By setting up a first vacuum chamber and a second vacuum chamber, helium testing can be performed on multiple workpieces simultaneously. Compared with the single vacuum chamber structure that may exist in the prior art, the processing capacity of the equipment is improved, and the overall efficiency of the helium testing process is further optimized. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2This is a schematic diagram of the pipe connection device of this utility model; Figure 3 This is a schematic diagram of the structure at point A of this utility model.

[0013] In the diagram, 1. Device body; 2. Base; 3. First vacuum chamber; 4. Second vacuum chamber; 5. Conveying device; 6. Helium tank; 7. Vertical pipe; 8. Straight pipe; 9. Horizontal pipe; 10. First connecting pipe; 11. Second connecting pipe; 12. Box body connecting joint; 13. First body connecting pipe; 14. Second body connecting pipe; 15. Electrically controlled valve; 16. Vacuum pump; 17. Bidirectional Roots pump; 18. Helium pipe; 19. Protective frame; 20. Pipe fixing device; 21. Fixing ring; 22. Fixing block; 23. Fixing hole; 24. Pipe connecting device. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Please see Figure 1-3 This utility model provides a technical solution: Example

[0016] To address the aforementioned issues: existing helium testing equipment suffers from slow vacuuming speed and poor helium delivery, affecting the overall efficiency of the helium testing process. Furthermore, the equipment suffers from scattered pipeline layouts and cumbersome connections, resulting in low efficiency of helium cleaning and vacuuming operations, as well as high maintenance difficulty.

[0017] The solution is as follows: A helium cleaning and vacuum connection pipeline device for a helium detection equipment includes a device body 1. The device body 1 includes a base 2, a first vacuum chamber 3, a second vacuum chamber 4, a conveying device 5, a helium tank 6, and a pipeline connection device 24. The first vacuum chamber 3, the second vacuum chamber 4, the conveying device 5, and the helium tank 6 are all located on top of the base 2. The first vacuum chamber 3 and the second vacuum chamber 4 are both located in front of the conveying device 5, and the helium tank 6 is located on the right side of the conveying device 5. The conveying device 5 is connected to the first vacuum chamber 3 and the second vacuum chamber 4 respectively through the pipeline connection device 24. The pipeline connection device 24 includes a vertical pipe 7, a straight pipe 8, a horizontal pipe 9, a first connecting pipe 10, and a second connecting pipe 24. The vertical pipe 7 is installed at the bottom rear end of the straight pipe 8, and the horizontal pipe 9 is located in front of the straight pipe 8. The straight pipe 8 is connected to the horizontal pipe 9. The first connecting pipe 10 is installed at the left end of the horizontal pipe 9, and the second connecting pipe 11 is installed at the right end of the horizontal pipe 9. Both the first connecting pipe 10 and the second connecting pipe 11 are provided with a box-type connecting joint 12 at their bottom. The first connecting pipe 10 is connected to the first vacuum box 3 through the box-type connecting joint 12, and the second connecting pipe 11 is connected to the second vacuum box 4 through the box-type connecting joint 12. The vertical pipe 7 is provided with an electrically controlled valve 15 in the middle section. The first machine body connecting pipe 13 and the second machine body connecting pipe 14 are respectively provided on the rear side of the vertical pipe 7.

[0018] Analysis of the above: Vertical pipe 7, straight pipe 8, horizontal pipe 9, first connecting pipe 10, and second connecting pipe 11 form a multi-level pipeline network. Electrically controlled valve 15 controls the opening and closing of vertical pipe 7. First body connecting pipe 13 and second body connecting pipe 14 connect to conveying device 5. Box connecting joint 12 connects to the vacuum box. Vacuuming and helium delivery path management is achieved through pipeline switching and valve control. During vacuuming, conveying device 5 evacuates gas to the vacuum box through horizontal pipe 9 and first / second connecting pipes 10 / 11. During helium delivery, helium is delivered to the vacuum box via conveying device 5, vertical pipe 7, straight pipe 8, and horizontal pipe 9. Electrically controlled valve 15 can be opened / closed according to the working status of the vacuum box (e.g., closing the passage of second vacuum box 4 when first vacuum box 3 is working) or process stage (vacuuming / helium delivery switching). The integrated pipeline design reduces connection points and lowers the risk of leakage. Electrically controlled valve 15 achieves automated pipeline control, making operation convenient and efficient. The box connecting joint 12 has a unified interface, facilitating the connection and maintenance of the vacuum box. Example

[0019] Please see Figure 1-3The present invention provides a technical solution based on Embodiment 1: the conveying device 5 includes a vacuum pump 16 and a bidirectional Roots pump 17. One end of the vacuum pump 16 is connected to the second body connecting pipe 14, and one end of the bidirectional Roots pump 17 is connected to the first body connecting pipe 13. The other end of the bidirectional Roots pump 17 is provided with a helium pipe 18, and the bidirectional Roots pump 17 is connected to a helium tank 6 through the helium pipe 18.

[0020] Analysis of the above content: The bidirectional Roots pump 17 has bidirectional working characteristics. It can work with the vacuum pump 16 to evacuate the vacuum chamber (as a backing pump to enhance pumping efficiency), and it can also draw in helium from the helium tank 6 through the helium pipe 18 and deliver it to the vacuum chamber (as a delivery pump). The vacuum pump 16 further increases the vacuum level inside the vacuum chamber. During the evacuation stage, the vacuum pump 16 and the bidirectional Roots pump 17 work together to quickly reduce the pressure in the vacuum chamber. During the helium delivery stage, the bidirectional Roots pump 17 switches its working mode (or reverses) to deliver helium from the helium tank 6 into the vacuum chamber. The pump set can be started, stopped, and its working intensity can be adjusted according to the vacuum level requirements. The bidirectional Roots pump 17 is a "two-in-one" pump, which simplifies the equipment structure and reduces costs. The synergy of the pump set significantly improves the evacuation speed and helium delivery efficiency, solving the pain points of slow evacuation and poor helium delivery in the existing technology. Example

[0021] Please see Figure 1-3 Based on Embodiment 1, this utility model provides a technical solution: both the first vacuum chamber 3 and the second vacuum chamber 4 are provided with protective frames 19 on their outer sides. The bottom of the protective frame 19 is fixed to the top of the base 2. The protective frame 19 is located below the horizontal tube 9 and has a rectangular structure.

[0022] Analysis of the above content: Installed on the outside of the first vacuum chamber 3 and the second vacuum chamber 4, and fixed at the bottom on the base 2, it provides physical protection for the vacuum chambers and provides installation support points for the pipeline fixing device 20; it prevents the vacuum chambers from being impacted by external forces during equipment operation; it provides a safe protection boundary for operators during maintenance to avoid accidental contact with the equipment; the rectangular structure is stable and reliable, ensuring the safety of the vacuum chambers and providing a foundation for pipeline fixing, thus improving the overall structural stability of the device. Example

[0023] Please see Figure 1-3Based on Embodiment 1, this utility model provides a technical solution: a set of pipe fixing devices 20 are fitted on the transverse pipe 9. The bottom of the set of pipe fixing devices 20 is fixed to the top of a set of protective frames 19 by screws. The pipe fixing device 20 includes a fixing ring 21 and a fixing block 22. A set of fixing blocks 22 is provided and the set of fixing blocks 22 is welded to the bottom left and bottom right ends of the fixing ring 21 respectively. The fixing ring 21 has a U-shaped structure, and the fixing block 22 has a rectangular structure. Fixing holes 23 are opened on the surface of the fixing block 22.

[0024] Analysis of the above: The U-shaped fixing ring 21 is fitted onto the transverse pipe 9, and the fixing block 22 is fixed to the top of the protective frame 19 by screws (passing through the fixing hole 23), thereby firmly fixing the transverse pipe 9 and suppressing pipe vibration and displacement; when the equipment is running, pipe vibration is effectively suppressed by the fixing device; during maintenance, the pipe can be adjusted or repaired by removing the screws; the U-shaped fixing ring 21 is compatible with the shape of the transverse pipe 9 and is firmly fixed; the fixing hole 23 facilitates installation and disassembly, making maintenance convenient; the orderly pipe layout reduces the risk of leakage caused by shaking and improves equipment reliability.

[0025] Working principle: During operation, the base 2 provides stable support for the entire device body 1, integrating the first vacuum chamber 3, the second vacuum chamber 4, the conveying device 5, the helium tank 6, and the pipeline connection device 24. During operation, the workpiece is first placed in the first vacuum chamber 3 and / or the second vacuum chamber 4. The bidirectional Roots pump 17 in the conveying device 5, which has bidirectional working characteristics, is connected to the vertical pipe 7 of the pipeline connection device 24 via the first body connecting pipe 13. It starts in conjunction with the vacuum pump 16 (connected to the vertical pipe 7 via the second body connecting pipe 14), and the gas flows through the vertical pipe 7 and the vertical... Pipe 8, horizontal pipe 9, and first / second connecting pipes 10 / 11 evacuate gas into the vacuum chamber. Electrically controlled valve 15 precisely controls the flow of the pipelines to accommodate single / dual vacuum chamber operations. Simultaneously, the pipe fixing device 20, fitted onto horizontal pipe 9 (which clamps the pipeline with fixing ring 21, and is fixed to the protective frame 19 via fixing block 22 and fixing hole 23), suppresses pipeline vibration. After the vacuum is achieved, the bidirectional Roots pump 17 switches modes, drawing helium from helium tank 6 through helium pipe 18 and delivering it into the vacuum chamber through the aforementioned pipelines. After helium testing, the pump group evacuates again to clear the helium. During this process, the coordinated design of the bidirectional Roots pump 17 and vacuum pump 16 significantly improves the vacuuming speed and the smoothness of helium delivery. The dual vacuum chambers 3 and 4 enable multi-station parallel processing. The integrated pipelines and fixing device 20 reduce connection points and leakage risks. The electrically controlled valve 15 achieves automated control, significantly improving overall helium testing efficiency and reducing operation and maintenance difficulty.

[0026] The present invention comprises: 1. Device body; 2. Base; 3. First vacuum chamber; 4. Second vacuum chamber; 5. Conveying device; 6. Helium tank; 7. Vertical pipe; 8. Straight pipe; 9. Horizontal pipe; 10. First connecting pipe; 11. Second connecting pipe; 12. Box body connecting joint; 13. First machine body connecting pipe; 14. Second machine body connecting pipe; 15. Electrically controlled valve; 16. Vacuum pump; 17. Bidirectional Roots pump; 18. Helium pipe; 19. Protective frame; 20. Pipe fixing device; 21. Fixing ring; 22. Fixing block; 23. Fixing hole; 24. Pipe connection. The connecting device and its components are all general standard parts or parts known to those skilled in the art. Their structure and principle can be learned by those skilled in the art through technical manuals or conventional experimental methods. The problem solved by this utility model is that existing helium detection equipment has the problems of slow vacuuming speed and poor helium delivery, which affects the overall efficiency of the helium detection process. In addition, there are also problems of scattered pipeline layout and complicated connection, resulting in low efficiency of helium cleaning and vacuuming operations and high maintenance difficulty. This utility model can greatly speed up the vacuuming speed and ensure the smooth delivery of helium through the combination of the above components.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0028] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A helium cleaning and vacuum connection pipeline device for a helium detection equipment, characterized in that: The device includes a main body (1), which includes a base (2), a first vacuum chamber (3), a second vacuum chamber (4), a conveying device (5), a helium tank (6), and a pipe connection device (24). The first vacuum chamber (3), the second vacuum chamber (4), the conveying device (5), and the helium tank (6) are all located on the top of the base (2). The first vacuum chamber (3) and the second vacuum chamber (4) are both located in front of the conveying device (5). The helium tank (6) is located on the right side of the conveying device (5). The conveying device (5) is connected to the first vacuum chamber (3) and the second vacuum chamber (4) respectively through the pipe connection device (24). The pipe connection device (24) includes a vertical pipe (7), a straight pipe (8), a horizontal pipe (9), a first connecting pipe (10), and a second connecting pipe (11). The vertical pipe (7) is installed at the rear end of the bottom of the straight pipe (8), and the horizontal pipe (9) is located in front of the straight pipe (8). The straight pipe (8) is connected to the horizontal pipe (9). The first connecting pipe (10) is installed at the left end of the horizontal pipe (9), and the second connecting pipe (11) is installed at the right end of the horizontal pipe (9). Both the first connecting pipe (10) and the second connecting pipe (11) are provided with a box-type connecting joint (12) at the bottom. The first connecting pipe (10) is connected to the first vacuum box (3) through the box-type connecting joint (12), and the second connecting pipe (11) is connected to the second vacuum box (4) through the box-type connecting joint (12). An electrically controlled valve (15) is provided in the middle section of the vertical pipe (7), and a first machine body connecting pipe (13) and a second machine body connecting pipe (14) are respectively provided on the rear side of the vertical pipe (7). The conveying device (5) includes a vacuum pump (16) and a bidirectional Roots pump (17). One end of the vacuum pump (16) is connected to the second body connecting pipe (14), and one end of the bidirectional Roots pump (17) is connected to the first body connecting pipe (13). The other end of the bidirectional Roots pump (17) is provided with a helium pipe (18), and the bidirectional Roots pump (17) is connected to a helium tank (6) through the helium pipe (18). The first vacuum chamber (3) and the second vacuum chamber (4) are both provided with protective frames (19) on the outside. The bottom of the protective frame (19) is fixed to the top of the base (2). The protective frame (19) is located below the horizontal tube (9). The protective frame (19) has a rectangular structure. A set of pipe fixing devices (20) is fitted on the transverse pipe (9). The bottom of the set of pipe fixing devices (20) is fixed to the top of a set of protective frames (19) by screws. The pipe fixing device (20) includes a fixing ring (21) and a fixing block (22). A set of fixing blocks (22) is provided and the set of fixing blocks (22) is welded to the bottom left and bottom right ends of the fixing ring (21). The fixing ring (21) has a U-shaped structure and the fixing block (22) has a rectangular structure. The surface of the fixing block (22) is provided with fixing holes (23).