An integrated ion implantation-anneal repair station

Abstract

The application discloses an integrated ion implantation-annealing repair work station, and belongs to the technical field of heat treatment equipment, which is used for providing an integrated ion implantation-annealing repair work station capable of effectively reducing the pollution risk in the workpiece transfer process. The work station comprises a furnace body, the two opposite ends of the furnace body are open, the furnace body is provided with a furnace cover at each open end, the middle part of the furnace body is connected with an isolation door through a lifter, the isolation door is suitable for dividing the furnace body into two chambers, the furnace body is provided with an upper flame hole at the top of the first chamber and a lower flame hole at the bottom, and a flame gas supply device is arranged outside the furnace body, and the main part of the flame gas supply device is a fire supply box. By arranging the openable and closable isolation door structure in the furnace body, the internal space of the furnace body is formed into two chambers, one chamber is used for ion implantation to heat the workpiece, and the other chamber is used for heat preservation annealing of the workpiece. When the workpiece is subjected to the two processes of heating and annealing, the workpiece does not need to leave the furnace body, and the pollution risk is effectively reduced.

Description

Technical Field

[0001] This application relates to the field of heat treatment equipment technology, and in particular to an integrated ion implantation-annealing repair workstation. Background Technology

[0002] Existing repair equipment is mostly of a discrete structure, and the ion introduction and annealing processes require multiple transfers of the battery cells, resulting in low production efficiency and increased pollution risk. Utility Model Content

[0003] The purpose of this application is to provide an integrated ion implantation-annealing repair workstation that can effectively reduce the risk of contamination during workpiece transfer.

[0004] To achieve the above objectives, this application provides an integrated ion implantation-annealing repair workstation: comprising a furnace body with open ends at opposite directions, a furnace cover at each open end, and an isolation door connected to the middle of the furnace body via a lifter. The isolation door is adapted to divide the furnace body into two chambers. The furnace body has an upper flame port at the top and a lower flame port at the bottom of the first chamber. A flame supply device is disposed outside the furnace body, the main body of which is a flame supply box. The output end is connected to an upper and lower flame distribution hood via a refractory pipe. The upper flame distribution hood completely covers the upper flame vent, and the lower flame distribution hood completely covers the lower flame vent. A tray is installed inside the furnace body between the upper and lower flame vents, and the tray has convection grooves that run through the upper and lower surfaces. A heating rod and a temperature sensor are installed on the inner wall of the second chamber of the furnace body. The furnace body also has an electrical distribution box containing a circuit board that is electrically connected to the heating rod and the temperature sensor, thereby achieving precise control of the annealing temperature.

[0005] As a preferred embodiment, the inner sidewalls of the furnace body are provided with flush transverse sliding grooves, which are suitable for cooperating with the tray to form a sliding pair, taking into account both configuration stability and ease of assembly and disassembly.

[0006] As a preferred embodiment, the main body of the tray is a carrying plate, and the carrying plate is densely covered with convection grooves to allow high-temperature gaseous ion flow to pass through.

[0007] As a preferred embodiment, the edge of the carrier plate has an upwardly extending border, the carrier plate is rectangular, and the border only surrounds three sides of the carrier plate, making it more convenient to remove the workpiece from the carrier plate 701 that is not surrounded by the border 703.

[0008] As a preferred embodiment, the side of the frame located in the middle facing away from the carrying plate is provided with an inner handle for easy removal or placement of the tray.

[0009] As a preferred embodiment, the main body of the isolation door is an insulated door panel. The top of the furnace body is provided with a guide groove suitable for the insulated door panel to pass through. The top of the furnace body has a guide plate flush with the inner wall of the guide groove. The two inner side walls of the furnace body are provided with side wall grooves suitable for cooperating with the two sides of the insulated door panel to form a sliding pair. The inner bottom surface of the furnace body is provided with a bottom recessed groove suitable for accommodating the bottom of the insulated door panel, forming a stepped mating surface, which can effectively block air convection.

[0010] As a preferred embodiment, the top two sides of the insulated door panel have traction lugs, and the lifting device is a hydraulic cylinder with its two ends connected to the furnace body and the traction lugs respectively, which can smoothly drive the insulated door panel to move relative to the furnace body.

[0011] As a preferred embodiment, the upper edge of the two furnace body ends has an upper baffle and the lower edge has a lower baffle. A limiting shaft is connected between the upper baffle and the lower baffle. The furnace cover has a shaft hole, which is suitable for the limiting shaft to pass through to form a rotating pair. Each furnace cover has an outer handle on its outer side for easy opening or closing.

[0012] Compared with the prior art, the beneficial effects of this application are as follows: (1) By setting an openable and closable isolation door structure in the furnace body, the internal space of the furnace body is divided into two chambers. One chamber is used for ion implantation to heat the workpiece, and the other chamber is used for heat preservation and annealing of the workpiece. The workpiece does not need to leave the furnace body when performing the two processes of heating and annealing, which effectively reduces the risk of contamination during the transfer process. (2) When the isolation door inside the furnace is completely closed, the work in the first chamber and the second chamber inside the furnace will not affect each other. Ion implantation and annealing can be carried out simultaneously inside the furnace, which further improves production efficiency. Attached Figure Description

[0013] Figure 1 This is a first three-dimensional schematic diagram of the overall structure of the integrated ion implantation-annealing repair workstation.

[0014] Figure 2 This is a second three-dimensional schematic diagram of the overall structure of the integrated ion implantation-annealing repair workstation.

[0015] Figure 3 A three-dimensional cross-sectional view of the tray of the integrated ion implantation-annealing repair workstation configured inside the furnace.

[0016] Figure 4 This is a three-dimensional cross-sectional view of the furnace body of the integrated ion implantation-annealing repair workstation.

[0017] Figure 5A three-dimensional structural diagram of the tray of this integrated ion implantation-annealing repair workstation.

[0018] Figure 6 This is a three-dimensional structural diagram of the furnace lid of the integrated ion implantation-annealing repair workstation.

[0019] Figure 7 A three-dimensional structural diagram of the flame gas of this integrated ion implantation-annealing repair workstation.

[0020] Figure 8 This is a three-dimensional structural diagram showing the connection between the lift and the isolation door of the integrated ion implantation-annealing repair workstation.

[0021] In the diagram: 1. Furnace body; 101. Guide chute; 102. Guide plate; 103. Side wall chute; 104. Bottom groove; 105. Horizontal chute; 106. Upper flame vent; 107. Lower flame vent; 108. Upper baffle; 109. Lower baffle; 110. Limiting shaft; 2. Furnace cover; 201. Outer handle; 202. Shaft hole; 3. Lifter; 4. Isolation door; 401. Insulation door plate; 402. Traction ear plate; 5. Flame supply equipment; 501. Fire supply box; 502. Refractory tube; 503. Upper flame distribution hood; 504. Lower flame distribution hood; 6. Electrical distribution box; 7. Tray; 701. Loading plate; 702. Convection groove; 703. Frame; 704. Inner handle; 8. Heating rod; 9. Temperature sensor. Detailed Implementation

[0022] The present application will be further described below with reference to specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0023] In the description of this application, it should be noted that the directional terms such as "center", "lateral", "longitudinal", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation and positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. They should not be construed as limiting the specific protection scope of this application.

[0024] It should be noted that the terms "first," "second," etc., in the specification and claims of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0025] The terms “comprising” and “having”, and any variations thereof, in the specification and claims of this application are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0026] like Figure 1-8 The integrated ion implantation-annealing repair workstation shown includes a high-temperature resistant furnace body 1, which can be made of boron nitride material. The furnace body 1 is usually wrapped with ceramic heat insulation material. The furnace body 1 is rectangular, with two open ends that are opposite each other and have a smaller area. Each open end of the furnace body 1 is provided with a furnace cover 2. Specifically, the upper edge of the two ends of the furnace body 1 has an upper baffle 108 and the lower edge has a lower baffle 109. A limiting shaft 110 is connected between the upper baffle 108 and the lower baffle 109. The furnace cover 2 has a shaft hole 202 for the limiting shaft 110 to pass through to form a rotating pair. That is, the furnace cover 2 is located between the upper baffle 108 and the lower baffle 109 and is rotatably connected to the furnace body 1. Each furnace cover 2 has an outer handle 201 on its outer side for easy opening and closing. Opening the furnace cover 2 allows operation inside the furnace body 1, and closing the furnace cover 2 creates a relatively sealed environment inside the furnace body 1.

[0027] The top two sides of the insulated door panel 401 have traction ear plates 402, which protrude significantly from the side of the insulated door panel 401. The middle of the furnace body 1 is connected to an isolation door 4 via a lifter 3. The isolation door 4 is made of a high-temperature resistant and heat-insulating material, such as ceramic fiber material. The isolation door 4 can divide the furnace body 1 into two chambers.

[0028] The main body of the isolation door 4 is the insulated door panel 401. The top two sides of the insulated door panel 401 have traction ear plates 402. The lifting device 3 is usually a hydraulic cylinder, with its two ends connected to the furnace body 1 and the traction ear plates 402 respectively. The lifting device 3 uses a hydraulic cylinder, which can provide a large thrust and has excellent static stability. The lifting device 3 will drive the insulated door panel 401 to move relative to the furnace body 1. When the lifting device 3 extends, the insulated door panel 401 will move away from the furnace body 1, and the connecting area of ​​the two chambers in the furnace body 1 will gradually increase. When the lifting device 3 retracts, the insulated door panel 401 will move deeper into the furnace body 1, and the connecting area of ​​the two chambers in the furnace body 1 will gradually decrease until it is completely isolated.

[0029] The top of the furnace body 1 is provided with a guide groove 101 for the insulated door plate 401 to pass through. The top of the furnace body 1 has a guide plate 102 that is flush with the inner wall of the guide groove 101 to increase the contact area between the furnace body 1 and the insulated door plate 401, thereby improving the guiding constraint of the furnace body 1 on the insulated door plate 401. The two inner side walls of the furnace body 1 are provided with side wall grooves 103 to cooperate with the two sides of the insulated door plate 401 to form a sliding pair. The inner bottom surface of the furnace body 1 is provided with a bottom recess 104 to accommodate the bottom of the insulated door plate 401. When the insulated door plate 401 is fully fitted with the interior of the furnace body 1, the mating surface between the insulated door plate 401 and the furnace body 1 forms a step shape, which can effectively prevent air exchange and heat flow between the two chambers inside the furnace body 1.

[0030] The furnace body 1 has several densely distributed upper flame holes 106 at the top and several densely distributed lower flame holes 107 at the bottom of the first chamber, allowing high-temperature plasma to enter the first chamber of the furnace body 1. A flame supply device 5 is installed outside the furnace body 1; this is essentially a combustion device for mixing and igniting fuel gas and air. The main body of the flame supply device 5 is a combustion box 501, which contains a fuel gas pipe and an air turbine. The turbine drives airflow, and then uses a siphon effect to draw the fuel gas from the end of the fuel gas pipe into the combustion chamber. The fuel gas mixed in the combustion chamber... When air is ignited, a violent oxidation reaction occurs, turning it into a high-temperature gaseous ion stream, i.e., a flame. The output end of the fire supply box 501 is connected to an upper flame distribution hood 503 and a lower flame distribution hood 504 through a refractory pipe 502. The upper flame distribution hood 503 completely covers the upper flame vent 106, and the lower flame distribution hood 504 completely covers the lower flame vent 107. The high-temperature gaseous ions will enter the upper flame distribution hood 503 and the lower flame distribution hood 504 through the refractory pipe 502, and finally enter the furnace body 1 through the upper flame vent 106 and the lower flame vent 107 to heat the workpiece.

[0031] The furnace body 1 contains a tray 7 located between the upper flame vent 106 and the lower flame vent 107. The workpiece is placed on the tray 7. The tray 7 has convection grooves 702 that run through its upper and lower surfaces. The inner sidewalls of the furnace body 1 have flush transverse sliding grooves 105 that fit perfectly with the tray 7 to form a sliding pair. The main body of the tray 7 is a rectangular carrying plate 701. The carrying plate 701 is densely covered with convection grooves 702, allowing the high-temperature gaseous ion flow above to reach the workpiece through the convection grooves 702. Below the plate 701, the high-temperature gaseous ion flow below can reach the top of the carrier plate 701 through the convection channel 702. The edge of the carrier plate 701 has an upwardly extending frame 703. The frame 703 only surrounds the three sides of the carrier plate 701 and is C-shaped. The side of the frame 703 in the middle that faces away from the carrier plate 701 is provided with an inner handle 704. The inner handle 704 faces away from the direction of the isolation door 4, so that it is convenient to pull the tray 7 out of the furnace body 1 and also convenient to put the tray 7 into the furnace body 1.

[0032] The furnace body 1 has two sets of heating rods 8 and temperature sensors 9 installed on the inner wall of the second chamber. There are two sets of heating rods 8, located on the left and right side walls of the furnace body 1 respectively. There are two temperature sensors 9, located at the inner bottom and inner top of the furnace body 1 respectively. The furnace body 1 is also equipped with a power distribution box 6, which is used to supply power to the entire workstation. The power distribution box 6 also contains a circuit board, which is electrically connected to the heating rods 8 and temperature sensors 9. It acquires the signal fed back by the temperature sensors 9 and supplies power to the heating rods 8 at the same time, forming a feedback system for annealing temperature control. This is achieved by inputting the program into the circuit board, which is a mature existing technology and will not be described in detail here.

[0033] Working principle: In the initial state, the lifter 3 retracts, and the isolation door 4 is completely closed inside the furnace body 1, completely isolating the first and second chambers within the furnace body 1. The flame gas supply equipment 5 is off. The furnace cover 2 of the first chamber is opened, and the workpiece to be heated is placed on the tray 7 located inside the furnace body 1. Then, the furnace cover 2 is closed, and the flame gas supply equipment 5 is started, simultaneously injecting high-temperature gaseous ion streams above and below the workpiece, allowing the workpiece to be heated quickly and evenly. After sufficient heating time, the flame gas process equipment is shut off, and the lifter 3 extends, causing the isolation door 4 to rise. This connects the first and second chambers within the furnace body 1. The high-temperature air remaining in the first chamber mixes with the air in the second chamber, causing the air in the second chamber to heat up. However, due to the residual heat in the air... Since the quantity is relatively small, it is necessary to supply power to the heating rod 8 until the temperature sensor 9 detects that the ambient temperature in the second chamber has reached the set stability required for annealing. Open the furnace cover 2 of the second chamber, use pliers to put the workpiece on the tray 7 into the second chamber of the furnace body 1, and then the lifter 3 drives the isolation door 4 to descend, completely separating the first chamber and the second chamber in the furnace body 1 again. Finally, close the furnace cover 2 of the second chamber, leaving the workpiece in the second chamber of the furnace body 1 to complete the annealing. Throughout the process, the workpiece does not leave the furnace body 1, effectively reducing the risk of contamination. Furthermore, during the workpiece annealing process, the first chamber of the furnace body 1 can still carry out ion flow implantation heating. As long as the isolation door 4 is closed, the work in the first chamber and the second chamber of the furnace body 1 will not affect each other.

[0034] The basic principles, main features, and advantages of this application have been described above. Those skilled in the art should understand that this application is not limited to the above embodiments. The embodiments and descriptions in the specification are merely the principles of this application. Various changes and modifications can be made to this application without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection claimed by this application is defined by the appended claims and their equivalents.

Claims

1. An integrated ion implantation-annealing repair workstation, characterized in that: The furnace includes a furnace body (1) with open ends facing away from each other. A furnace cover (2) is provided at each open end of the furnace body (1). An isolation door (4) is connected to the middle of the furnace body (1) via a lifter (3). The isolation door (4) is suitable for dividing the furnace body (1) into two chambers. An upper flame vent (106) is provided at the top of the first chamber, and a lower flame vent (107) is provided at the bottom. A flame supply device (5) is provided outside the furnace body (1). The main body of the flame supply device (5) is a fire supply box (501). The output end of the fire supply box (501) is connected to an upper fire distribution hood via a refractory pipe (502). The furnace body (1) is equipped with an upper flame hood (503) and a lower flame hood (504). The upper flame hood (503) completely covers the upper flame vent (106), and the lower flame hood (504) completely covers the lower flame vent (107). The furnace body (1) is provided with a tray (7) located between the upper flame vent (106) and the lower flame vent (107). The tray (7) has a convection groove (702) that runs through the upper and lower surfaces. The furnace body (1) is provided with a heating rod (8) and a temperature sensor (9) on the inner wall of the second chamber. The furnace body (1) is also provided with a power distribution box (6). The power distribution box (6) contains a circuit board that is electrically connected to the heating rod (8) and the temperature sensor (9).

2. The integrated ion implantation-annealing repair workstation as described in claim 1, characterized in that: The furnace body (1) has a flush transverse sliding groove (105) on its inner sidewall, which is suitable for cooperating with the tray (7) to form a sliding pair.

3. The integrated ion implantation-annealing repair workstation as described in claim 2, characterized in that: The main body of the tray (7) is a carrying plate (701), and the carrying plate (701) is densely covered with the convection grooves (702).

4. The integrated ion implantation-annealing repair workstation as described in claim 3, characterized in that: The edge of the carrier plate (701) has an upwardly extending border (703), the carrier plate (701) is rectangular, and the border (703) surrounds only three sides of the carrier plate (701).

5. The integrated ion implantation-annealing repair workstation as described in claim 4, characterized in that: An inner handle (704) is provided on the side of the frame (703) located in the middle that faces away from the loading plate (701).

6. The integrated ion implantation-annealing repair workstation as described in any one of claims 1 to 5, characterized in that: The main body of the isolation door (4) is an insulated door panel (401). The top of the furnace body (1) is provided with a guide groove (101) suitable for the insulated door panel (401) to pass through. The top of the furnace body (1) has a guide plate (102) flush with the inner wall of the guide groove (101). The two inner side walls of the furnace body (1) are provided with side wall grooves (103) suitable for cooperating with the two sides of the insulated door panel (401) to form a sliding pair. The inner bottom surface of the furnace body (1) is provided with a bottom recess (104) suitable for accommodating the bottom of the insulated door panel (401).

7. The integrated ion implantation-annealing repair workstation as described in claim 6, characterized in that: The top two sides of the insulated door panel (401) have traction ear plates (402), and the lifting device (3) adopts a hydraulic cylinder, with both ends connected to the furnace body (1) and the traction ear plates (402) respectively.

8. The integrated ion implantation-annealing repair workstation as described in claim 6, characterized in that: The upper edge of the two furnace bodies (1) has an upper baffle (108) and the lower edge has a lower baffle (109). A limiting shaft (110) is connected between the upper baffle (108) and the lower baffle (109). The furnace cover (2) has a shaft hole (202) for the limiting shaft (110) to pass through to form a rotating pair. Each furnace cover (2) has an outer handle (201) on its outer side.

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