Cap taking assembly and multi-slice cassette

Abstract

The utility model provides a kind of cover taking assembly and multi-slice piece box, it is related to silicon wafer processing equipment technical field, cover taking assembly includes: connecting structure, drive structure and clamping structure;Drive structure is located on connecting structure;Clamping structure is located on connecting structure, and is connected with drive structure;Wherein, clamping structure includes support seat, first pressure axle and first elastic member, first pressure axle includes first stem and first head, first stem is worn in support seat;First elastic member is sleeved on first stem, and one end is abutted to the first head of first pressure axle, other end is abutted to support seat.When clamping structure carries out cover taking to piece box, first pressure axle elastically abuts to box body, first elastic member is extruded by support seat and the head of first pressure axle and compresses, and first pressure axle is elastically supported self-adaptively, to enable first pressure axle to limit the position of box body, avoid the collision of box cover and silicon wafer in piece box, silicon wafer is not prone to damage, and strong interaction.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer processing equipment technology, and in particular to a cover removal component and a multi-wafer cassette. Background Technology

[0002] Multi-wafer cassettes are used to load silicon wafers of different sizes and transport them along a conveyor line. To improve the efficiency of the conveyor line, a lid is provided at the top opening of the cassette. Once the cassette has been transported to the designated location, the silicon wafers need to be removed from it. Before removing the wafers, a standard robotic arm is used to remove the lid.

[0003] However, during the cap removal process, the robotic arm is unstable, which makes it easy for the cap to collide with the silicon wafer and damage it. The interaction between the robotic arm and the wafer cassette is poor.

[0004] In view of this, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this invention is to provide a cover-removing component and a multi-wafer cassette that is less likely to damage silicon wafers and has good interaction with the wafer cassette, thereby solving the problems of easily damaged silicon wafers and poor interaction between the robotic arm and the wafer cassette.

[0006] To achieve the above objectives, the present invention employs the following technical means:

[0007] A first aspect of this utility model provides a cap removal assembly, comprising:

[0008] Connection structure;

[0009] A driving structure is disposed on the connection structure;

[0010] A clamping structure is provided on the connecting structure and connected to the driving structure, so as to rise and fall under the drive of the driving structure;

[0011] The clamping structure includes a support base, a first pressure shaft, and a first elastic element. The first pressure shaft includes a first rod and a first head. The first rod passes through the support base and can rise and fall relative to the support base. The first elastic element is sleeved on the first rod, with one end abutting against the first head of the first pressure shaft and the other end abutting against the support base.

[0012] Optionally, the clamping structure further includes a second pressure shaft and a second elastic element. The second pressure shaft includes a second head and a second rod portion. The second rod portion passes through the support base and can rise and fall relative to the support base. The second elastic element is sleeved on the second rod portion, with one end abutting against the second head and the other end abutting against the support base.

[0013] Optionally, the clamping structure includes two second pressure shafts, with a lifting plate connected between the two second pressure shafts.

[0014] Optionally, the clamping structure further includes a gripper cylinder, a lid-lifting fixing plate, and a pair of pneumatic grippers. The gripper cylinder is connected to the lid-lifting fixing plate, and the pair of pneumatic grippers are disposed on the lid-lifting fixing plate.

[0015] Optionally, the connection structure may include a plurality of clamping structures, all of which may be detachably mounted on the connecting structure.

[0016] Optionally, the connecting structure includes a base plate, a vertical plate, and a motor mounting base. The vertical plate is vertically disposed on the base plate, and the motor mounting base is slidably disposed on the vertical plate, capable of rising and falling. The driving structure is disposed on the vertical plate and the motor mounting base. The clamping structure is disposed on the lower surface of the base plate.

[0017] Optionally, the driving structure includes a driving component, a gear, a rack, a guide rail, and a slider. The driving component is mounted on the motor mounting base; the gear is sleeved on the output shaft of the driving component; the rack is disposed on the vertical plate and meshes with the gear; the guide rail is disposed on the motor mounting base, and the slider is disposed on the vertical plate and slidably disposed on the guide rail.

[0018] Optionally, a reinforcing rib is provided between the base plate and the vertical plate.

[0019] In a second aspect, this utility model provides a multi-segment wafer box, wherein any of the above-described lid-removing components is used to remove the lid from the multi-segment wafer box. The multi-segment wafer box includes a box body and a lid covering the box body. The lid is provided with a spring-loaded pressing structure, and one end of the spring-loaded pressing structure is connected to a silicon wafer pressure plate.

[0020] Optionally, the lid further includes a pin and a third elastic element, the third elastic element being connected to the pin, the pin being configured to pass through the box body and the lid to fix the lid to the box body.

[0021] Compared with the prior art, this utility model brings the following technical effects:

[0022] The cap removal assembly of this utility model has a clamping structure including a support base, a first pressure shaft, and a first elastic element. The first pressure shaft includes a first rod and a first head. The first rod passes through the support base and can rise and fall relative to the support base. The first elastic element is sleeved on the first rod, with one end abutting against the head of the first pressure shaft and the other end abutting against the support base. When the clamping structure removes the cap from the wafer cassette, the first pressure shaft elastically abuts against the body of the wafer cassette. The first elastic element is compressed by the pressure of the support base and the head of the first pressure shaft, and adaptively elastically supports the first pressure shaft, so that the first pressure shaft can restrict the position of the cassette body. This avoids collision between the wafer cassette cap and the silicon wafer inside the wafer cassette body during the opening process, making the silicon wafer less prone to damage and providing strong interactivity. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 The diagram shows a schematic representation of the slice-picking assembly and the multi-slice slice box according to some embodiments of the present invention.

[0025] Figure 2 A plan view of a slice-retrieving assembly and a multi-slice cassette according to some embodiments of the present invention is shown;

[0026] Figure 3 It shows Figure 2 A magnified view of part A;

[0027] Figure 4 The diagram shows a schematic diagram of the connection structure of some embodiments of the present invention;

[0028] Figure 5 The diagram shows a schematic representation of the drive structure of some embodiments of the present invention.

[0029] Figure 6 The diagram shows a structural schematic of the clamping structure according to some embodiments of the present invention;

[0030] Figure 7 The diagram shows a structural schematic of a multi-segment chip box according to some embodiments of the present invention;

[0031] Figure 8 It shows Figure 7 A magnified view of part B.

[0032] Explanation of key component symbols:

[0033] 100-Lid removal assembly; 10-Connecting structure; 11-Base plate; 12-Vertical plate; 13-Motor mounting base; 14-Reinforcing rib; 20-Drive structure; 21-Drive component; 22-Gear; 23-Rack; 24-Slider; 25-Guide rail; 30-Clamping structure; 31-Support base; 32-Grip cylinder; 33-Pneumatic gripper; 34-First pressure shaft; 35-First elastic element; 36-Second pressure shaft; 37-Second elastic element; 38-Lid lifting pressure plate; 39-Lid lifting fixing plate;

[0034] 200-Wafer box; 210-Box body; 220-Box lid; 221-Silicon wafer pressure plate; 222-Spring pressing structure; 223-Pin shaft; 224-Third elastic element. Detailed Implementation

[0035] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0036] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0037] Please see Figures 1-8 In a first aspect, this invention provides a cover removal assembly 100 for removing the cover from a wafer cassette 200. It should be noted that the wafer cassette 200 includes a body 210 and a cover 220 disposed on the body 210. The cover 220 is used to encapsulate the silicon wafers inside the body 210 to prevent them from falling out of the opening of the body 210. This improves the transport efficiency of the body 210 on the transmission line.

[0038] Once the wafer cassette 200 is transported to the designated position, the cover needs to be removed from the wafer cassette 200 by the cover removal assembly 100. However, the cover removal of the commonly used robotic arm is unstable, which causes the cover 220 to easily collide with the silicon wafer and damage the silicon wafer, resulting in poor interaction with the wafer cassette 200.

[0039] To resolve the above issues, please refer to [link / reference]. Figures 1-3 , Figure 6The cover removal assembly 100 includes: a connecting structure 10, a driving structure 20, and a clamping structure 30. The driving structure 20 is disposed on the connecting structure 10; the clamping structure 30 is disposed on the connecting structure 10 and connected to the driving structure 20, so as to rise and fall under the drive of the driving structure 20.

[0040] The lid removal assembly 100 completes one lid removal operation in two steps. In the first step, the drive structure 20 drives the clamping structure 30 to descend until the clamping structure 30 is on both sides of the lid 220 of the tablet cassette 200, and the drive clamping structure 30 clamps the lid 220 of the tablet cassette 200. In the second step, the drive structure 20 drives the clamping structure 30 to rise, and the clamping structure 30 separates the lid 220 from the cassette body 210.

[0041] The clamping structure 30 includes a support base 31, a first pressure shaft 34, and a first elastic member 35. The first pressure shaft 34 includes a first rod and a first head. The first rod passes through the support base 31 and can rise and fall relative to the support base 31. The first elastic member 35 is sleeved on the first rod, with one end abutting against the first head of the first pressure shaft 34 and the other end abutting against the support base 31.

[0042] The cap removal assembly 100 of this utility model has a clamping structure 30 including a support base 31, a first pressure shaft 34, and a first elastic member 35. The first pressure shaft 34 includes a first rod and a first head. The first rod passes through the support base 31 and can rise and fall relative to the support base 31. The first elastic member 35 is sleeved on the first rod, with one end abutting against the head of the first pressure shaft 34 and the other end abutting against the support base 31. When the clamping structure 30 removes the cap from the wafer cassette 200, the first pressure shaft 34 elastically abuts against the body 210 of the wafer cassette 200. The first elastic member 35 is compressed by the pressure of the support base 31 and the head of the first pressure shaft 34, and adaptively elastically supports the first pressure shaft 34, so that the first pressure shaft 34 can restrict the position of the body 210, thereby avoiding collision between the cap 220 of the wafer cassette 200 and the silicon wafer inside the body 210 of the wafer cassette 200 during the process of opening the cap. The silicon wafer is not easily damaged, and the interaction is strong.

[0043] The first head is located at the bottom of the first rod, and the cross-sectional area of ​​the first head is configured to be slightly larger than the cross-sectional area of ​​the first rod, so that the first head can support the first elastic member 35 to prevent the elastic member from falling off the first pressure shaft 34, thus ensuring strong stability.

[0044] The first rod passes through the support base 31 and can rise and fall relative to the support base 31. Specifically, when the clamping structure 30 clamps the lid 220, the first pressure shaft 34 abuts against the box body 210, and the box body 210 simultaneously pushes the first pressure shaft 34 back, so that the head of the first pressure shaft 34 moves towards the support base 31. The support base 31 and the head of the first pressure shaft 34 together compress the first elastic member 35. When the clamping structure 30 releases the lid 220, the first pressure shaft 34 disengages from the lid 220, and the first elastic member 35 restores its elastic deformation, so that the first head of the first pressure shaft 34 moves away from the support base 31. That is to say, when the clamping structure 30 clamps the lid 220, the first elastic member 35 provides elastic support to the first pressure shaft 34. When the clamping structure 30 disengages from the lid 220, the first elastic element 35 restores its elastic deformation, causing the first pressure shaft 34 to automatically reset and remain in the reset position. The first pressure shaft 34 and the support base 31 maintain a stable position, which can avoid unnecessary friction between the first pressure shaft 34 and the support base 31 during the movement of the lid removal assembly 100 and improve its service life.

[0045] It should be emphasized that in this embodiment, the lid 220 of the wafer cassette 200 is elastically fixed by the elasticity of the first elastic member 35, so as to adaptively adjust the position of the lid 220 during the clamping process of the clamping structure 30. First, in this scenario, the material of the wafer cassette 200 must be a fragile and easily broken sheet material, such as silicon wafers or photovoltaic cells. Second, the elasticity of the first elastic member 35 must be used to prevent the body 210 from moving. In this embodiment, the first elastic member 35 can be a spring.

[0046] In one specific embodiment, the clamping structure 30 further includes a second pressure shaft 36 and a second elastic member 37. The second pressure shaft 36 includes a second head and a second rod. The second rod passes through the support base 31 and can rise and fall along the support base 31. The second elastic member 37 is sleeved on the second rod, with one end abutting against the second head and the other end abutting against the support base 31.

[0047] The structure of the second pressure shaft 36, the connection relationship between the second pressure shaft 36 and the support base 31, and the arrangement of the second elastic element 37 are similar to those of the first pressure shaft 34, and will not be described in detail here.

[0048] The second pressure shaft 36 abuts against the lid 220 of the wafer cassette 200, providing elastic support to the lid 220 via the second elastic element 37. This counteracts the reaction force of the silicon wafer pressure plate 221 on the lid of the wafer cassette 200, keeping the pin 223 suspended in the opening, reducing or eliminating friction, and facilitating the gripper cylinder 32 to hold the lid of the wafer cassette 200. The second elastic element 37 can be a spring. Selecting springs with the same elasticity for both the first elastic element 35 and the second elastic element 37 ensures that the first pressure shaft 34 and the second pressure shaft 36 have the same elasticity, further improving the stability of the clamping structure 30's elastic support for the cassette body 210.

[0049] Combination Figure 7 and Figure 8 It should be noted that the multi-wafer cassette 200 includes a cassette body 210 and a cassette cover 220 covering the cassette body 210. The cassette cover 220 is provided with a spring-loaded pressing structure 222, one end of which is connected to a silicon wafer pressure plate 221. The cassette cover 220 also includes a pin 223 and a third elastic element 224. The third elastic element 224 is connected to the pin 223, and the pin 223 is configured to pass through the cassette body 210 and the cassette cover 220 to fix the cassette cover 220 to the cassette body 210.

[0050] Thus, when silicon wafers are loaded into the wafer cassette 200, the silicon wafer will exert a reaction force on the spring-loaded structure 222 when it abuts against the wafer. This reaction force will engage and fix the pin 223, which is inserted into the cassette cover 220 and the cassette body 210, between the cover 220 and the cassette body 210. The engagement of the pin 223 can improve the conveying stability during the wafer cassette 200 transport, but it will hinder the cover removal mechanism. Therefore, a second pressure shaft 36 is used to apply an elastic force to the cover 220 to balance the reaction force, so that the pin 223 is in a suspended state. The suspended state means that the pin 223 does not contact or interact with the cassette body 210 and the cover 220 during the current and future movement.

[0051] Please refer to it again. Figures 1-3 , Figure 6 In one specific embodiment, the clamping structure 30 includes two second pressure shafts 36, and a lifting pressure plate 38 is connected between the two second pressure shafts 36.

[0052] It is worth noting that the distance between the two second pressure rollers 36 is slightly longer than the width of the tablet box 200, and the lid lifting pressure plate 38 is slightly longer than the tablet box 200. Thus, the lid lifting pressure plate 38 can achieve lid lifting and tablet taking for different tablet specifications, and has high versatility.

[0053] It should be noted that the length of the wafer cassette 200 remains constant, while its width is configured to accommodate the required size of the silicon wafers. In other words, the larger the silicon wafer the cassette 200 needs to accommodate, the wider it is. Conversely, the smaller the silicon wafer the cassette 200 needs to accommodate, the narrower it is. For example, common wafer sizes are full wafers, half wafers, or quarter wafers. By setting the length of the lifting cover slightly longer than the width of the cassette 200 when loading full wafers, the lifting cover can also be adapted to cassettes 200 loading half-wafer or quarter-wafer wafers.

[0054] Furthermore, the lifting pressure plate 38 is fixed to the bottom end of the two second pressure shafts 36 so that the lifting pressure plate 38 is in contact with the lid 220 of the tablet box 200. The surface contact can effectively increase the contact area between the lifting pressure plate 38 and the tablet box 200, and improve the stability of the clamping structure 30 elastically abutting against the lid 220.

[0055] Additionally, the clamping structure 30 includes two first pressure shafts 34, which are arranged along a first direction of the cap-removing assembly 100. The clamping structure 30 also includes two sets of second pressure shafts 36, with each set containing two second pressure shafts 36, and the two pressure shafts and their connected cap-removing pressure plates 38 are arranged facing a second direction. The first and second directions are perpendicular to each other, and [see attached diagram]. Figure 6 The coordinate axes are shown in the diagram.

[0056] The first pressure shaft 34 provides elastic support for the box body 210, and the second pressure shaft 36 provides elastic support for the box lid 220. Through the coordinated operation of the first pressure shaft 34 and the second pressure shaft 36, the working stability of the clamping structure 30 is further improved.

[0057] In one specific embodiment, the clamping structure 30 further includes a gripper cylinder 32, a lid-lifting fixing plate 39, and a pair of pneumatic grippers 33. The gripper cylinder 32 is connected to the lid-lifting fixing plate 39, and the pair of pneumatic grippers 33 are disposed on the lid-lifting fixing plate 39.

[0058] The gripper cylinder 32 is used to drive a pair of pneumatic grippers 33 to move closer or further apart in the horizontal direction, so that the pair of pneumatic grippers 33 can clamp together on the lid 220, or release the lid 220 synchronously.

[0059] For example, the gripper cylinder 32 is a double-extension cylinder, which can drive the two lid-lifting fixing plates 39 to move synchronously, thereby driving the grippers on each lid-lifting fixing plate 39 to move synchronously. In this way, the consistency of the gripper's moving position can be guaranteed, and the gripping and releasing of the box body 210 can be stably completed. Of course, the specific connection relationship of the gripper cylinder 32, the lid-lifting fixing plate 39 and the pair of pneumatic grippers 33 is not limited to the form described in this embodiment.

[0060] It should be noted that the ends of the pneumatic grippers 33 are all equipped with hooks, and the hooks of the two pneumatic grippers 33 are arranged facing each other. When the pneumatic grippers hold the lid 220, the two hooks respectively engage with the slots provided on the lid 220 from the first direction, thereby realizing the limiting of the lid 220 by the gripping structure 30.

[0061] In one specific embodiment, the cap removal assembly 100 includes a plurality of clamping structures 30, all of which are detachably mounted on the connecting structure 10.

[0062] To further improve cap removal efficiency, a plurality of clamping structures 30 are provided on the cap removal assembly 100, each clamping structure 30 corresponding to a cassette. For example, please refer to... Figure 7 Four film trays 200 are mounted on the substrate. Please refer to [link / reference]. Figure 1 and Figure 2 In order to grip four film boxes 200, the lid-removing assembly 100 is provided with four clamping structures 30. It is easy to see that when two film boxes 200 are provided on the carrier, the lid-removing assembly 100 only needs to be provided with two clamping structures 30.

[0063] Thus, on the one hand, by integrating multiple clamping structures 30 onto the cap-removing assembly 100, the drive structure 20 can be shared, resulting in a simple and compact structure for the cap-removing assembly 100. On the other hand, the clamping structures 30 and the connecting structure 10 are modularly configured to accommodate an appropriate number of clamping structures 30 depending on the number of cartridges 200, making it flexible and reliable to use.

[0064] Please see Figure 4 and Figure 5 In one specific embodiment, the connecting structure 10 includes a base plate 11, a vertical plate 12, and a motor mounting base 13. The vertical plate 12 is vertically disposed on the base plate 11, and the motor mounting base 13 is slidably disposed on the vertical plate 12. The driving structure 20 is disposed on the vertical plate 12 and the motor mounting base 13. The clamping structure 30 is disposed on the lower surface of the base plate 11.

[0065] The connecting structure 10 is used to mount the drive structure 20 and is configured to not contact the clamping structure 30. That is, the drive structure 20 is mounted on the connecting structure 10, and the connecting structure 10 is mounted on the drive structure 20.

[0066] The driving structure 20 and the clamping structure 30 are the two parts with the largest mass in the entire cap removal assembly 100. By setting the driving structure 20 and the cap removal structure on the upper and lower sides of the connecting structure 10 respectively, the center of gravity of the entire cap removal assembly 100 is kept approximately at the geometric center of the entire cap removal assembly 100, which can ensure the working stability of the cap removal assembly 100.

[0067] Furthermore, the vertical plate 12 is directly and fixedly connected to the base plate 11. For example, the vertical plate 12 and the base plate 11 can be integrally formed. Alternatively, the vertical plate 12 and the base plate 11 can be fixed together by fastening screws.

[0068] In one specific embodiment, the drive structure 20 includes a drive member 21, a gear 22, a rack 23, a guide rail 25, and a slider 24. The drive member 21 is mounted on the motor mounting base 13; the gear 22 is sleeved on the output shaft of the drive member 21; the rack 23 is disposed on the vertical plate 12 and meshes with the gear 22; the guide rail 25 is disposed on the motor mounting base 13, and the slider 24 is disposed on the vertical plate 12 and slidably disposed on the guide rail 25.

[0069] The drive unit 21 is used to output the driving force in the direction of rotation. The gear 22 is sleeved on the output shaft of the drive unit 21 and is connected to the rack 23 to convert the driving force into the upward and downward motion of the rack 23.

[0070] The motor mounting base 13 is slidably mounted on the vertical plate 12 by the cooperation of the guide rail 25 and the slider 24. The gear 22 and rack 23 mesh with each other at only one point, which causes the motor mounting base 13 to deflect during operation, resulting in limited motion accuracy. The guide rail 25 limits the slider 24, ensuring that the motor mounting base 13 can only move up and down relative to the vertical plate 12, greatly improving the motion accuracy of the motor mounting base 13, thereby enhancing the motion accuracy of the clamping structure 30 and further improving the stability of the cap-removing assembly 100 during cap removal.

[0071] It is easy to see that the positions of the guide rail 25 and the slider 24 can be interchanged. That is, the slider 24 is set on the motor mounting base 13, and the guide rail is set on the vertical plate 12.

[0072] In one specific embodiment, a reinforcing rib 14 is provided between the base plate 11 and the vertical plate 12.

[0073] The reinforcing rib 14 is a right triangle. The reinforcing rib 14 can increase the contact area between the base plate 11 and the vertical plate 12, thereby improving the mechanical strength of the base plate 11 and the vertical plate 12 and improving the load-bearing capacity of the connecting structure 10.

[0074] Please see Figure 7 and Figure 8 In a second aspect, this utility model provides a multi-segment wafer cassette 200, which includes a body 210 and a cover 220 disposed on the body 210. The cover 220 is provided with a spring-loaded pressing structure 222, which is connected to a silicon wafer pressure plate 221.

[0075] The multi-wafer cassette 200 of this invention features a silicon wafer pressure plate 221 and a spring-loaded pressing structure 222. When the cassette body 210 contains silicon wafers, the wafers push the silicon wafer pressure plate 221 upwards, causing the spring-loaded pressing structure 222 to contract. This spring-loaded pressing structure 222 then applies an elastic force downwards to the silicon wafer pressure plate 221, causing the silicon wafer pressure plate 221 to elastically press the silicon wafers. Whether in the wafer cassette 200 conveying scenario or the wafer cassette 200 lid removal scenario, the elastic pressure plate can adaptively press against the silicon wafers according to changes in external conditions, ensuring a stable and reliable position of the silicon wafers within the cassette body 210. This prevents collisions and damage to the peripheral walls of the cassette body 210, resulting in a low wafer breakage rate.

[0076] It should be noted that the multi-segment box 200 of this utility model can be used in conjunction with the cap removal component 100 of the above embodiment, or it can be used independently without the cap removal component 100.

[0077] The spring-pressing structure 222 includes multiple guide posts, each with a fourth elastic element mounted on it. The guide posts guide the direction of the fourth elastic element, making the direction of its elastic deformation controllable, thus allowing for more accurate movement of the silicon wafer pressure plate 221.

[0078] In one specific embodiment, the lid 220 further includes a pin 223 and a third elastic member 224. The third elastic member 224 is connected to the pin 223, which is configured to pass through the body 210 and the lid 220 to fix the lid 220 to the body 210. The third elastic member 224 may be a spring.

[0079] The lid 220 has a first positioning hole (not shown), and the body 210 has a second positioning hole (not shown). The inner diameter of both the first and second positioning holes is configured to be slightly larger than the pin 223, so that the pin 223 can be inserted into or removed from the first and second positioning holes.

[0080] Specifically, when the housing 210 is empty or has insufficient silicon wafers, the first positioning hole is lower than the second positioning hole. That is, the first and second positioning holes are offset, preventing the pin 223 from being inserted into either hole. When the housing 210 is loaded with enough silicon wafers or is fully loaded, the cover 220 is lifted to a certain height so that the first and second positioning holes are at the same height and coaxially aligned. Thus, the pin 223, under the elastic action of the third elastic element 224, inserts into the first and second positioning holes to fix the cover 220 onto the housing 210.

[0081] The cover 220 is still pressed upward by the silicon wafer and moves upward so that the pin 223 engages in the first positioning hole and the second positioning hole.

[0082] See Figures 1-3and Figure 6 In the cover assembly 100, the second pressure shaft 36 abuts against the cover 220 of the wafer cassette 200, providing elastic support to the cover 220 via the second elastic member 37. This counteracts the reaction force of the silicon wafer pressure plate 221 covering the wafer cassette 200, keeping the pin 223 suspended in the opening, reducing or eliminating friction, and facilitating the gripper cylinder 32 to hold the cover 220. The suspended state means that the pin 223 does not contact or interact with the cassette body 210 or the cover 220 during current or future movement.

[0083] The pins 223 can be in two sets, with each set having two pins 223. The direction of movement of the pins 223 is described in [reference needed]. Figure 8 As indicated by the arrow in the diagram. The third elastic element 224 drives the pin 223 toward the second positioning hole and continuously provides a preload to keep the pin 223 continuously within the second positioning hole.

[0084] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom still fall within the protection scope of this invention.

Claims

1. A cap removal assembly, characterized in that, include: Connection structure; A driving structure is disposed on the connection structure; A clamping structure is provided on the connecting structure and connected to the driving structure, so as to rise and fall under the drive of the driving structure; The clamping structure includes a support base, a first pressure shaft, and a first elastic element. The first pressure shaft includes a first rod and a first head. The first rod passes through the support base and can rise and fall relative to the support base. The first elastic element is sleeved on the first rod, with one end abutting against the first head of the first pressure shaft and the other end abutting against the support base.

2. The cap removal assembly according to claim 1, characterized in that, The clamping structure further includes a second pressure shaft and a second elastic element. The second pressure shaft includes a second head and a second rod. The second rod passes through the support base and can rise and fall relative to the support base. The second elastic element is sleeved on the second rod, with one end abutting against the second head and the other end abutting against the support base.

3. The cap removal assembly according to claim 2, characterized in that, The clamping structure includes two second pressure shafts, and a lifting pressure plate is connected between the two second pressure shafts.

4. The cap removal assembly according to claim 3, characterized in that, The clamping structure also includes a gripper cylinder, a lid-lifting fixing plate, and a pair of pneumatic grippers. The gripper cylinder is connected to the lid-lifting fixing plate, and the pair of pneumatic grippers are disposed on the lid-lifting fixing plate.

5. The cap removal assembly according to claim 1, characterized in that, It includes multiple clamping structures, all of which are detachably mounted on the connecting structure.

6. The cap removal assembly according to claim 1, characterized in that, The connecting structure includes a base plate, a vertical plate, and a motor mounting base. The vertical plate is vertically disposed on the base plate, and the motor mounting base is slidably disposed on the vertical plate, capable of rising and falling. The driving structure is disposed on the vertical plate and the motor mounting base. The clamping structure is disposed on the lower surface of the base plate.

7. The cap removal assembly according to claim 6, characterized in that, The driving structure includes a driving component, a gear, a rack, a guide rail, and a slider. The driving component is mounted on the motor mounting base. The gear is sleeved on the output shaft of the driving component. The rack is disposed on the vertical plate and meshes with the gear. The guide rail is disposed on the motor mounting base, and the slider is disposed on the vertical plate and slidably disposed on the guide rail.

8. The cap removal assembly according to claim 7, characterized in that, A reinforcing rib is provided between the base plate and the vertical plate.

9. A multi-segment tablet box, wherein the lid-removing assembly according to any one of claims 1 to 8 is used to remove the lid from the multi-segment tablet box, characterized in that, The multi-wafer cassette includes a cassette body and a cassette cover covering the cassette body. The cassette cover is provided with a spring-loaded pressing structure, and one end of the spring-loaded pressing structure is connected to a silicon wafer pressure plate.

10. The multi-segment cassette according to claim 9, characterized in that, The lid also includes a pin and a third elastic element, the third elastic element being connected to the pin, the pin being configured to pass through the box body and the lid to fix the lid to the box body.

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