An oht trolley and process equipment therefor

Abstract

The utility model discloses an OHT trolley and process equipment relates to the field of OHT trolley. This kind of OHT trolley includes OHT trolley, wireless communication device, drive arrangement and T -shaped adjusting plate, the OHT trolley is slidably connected with lifting piece in, the bottom of lifting piece is provided with limit piece. This kind of OHT trolley, adopt the structure of installing wireless communication device on OHT trolley top, when OHT trolley reaches process equipment station and carries out feeding and discharging, uses internet and main station PLC communication through wireless communication device, main station PLC carries out communication with each process equipment through Mitsubishi CC -Link IE Field network, uploads carrier ID to Mitsubishi CC -Link IE Field network before the end of handshaking, downloads carrier ID after the end of handshaking, completes a complete handshaking process, only needs a Mitsubishi CCLINK IE Field module to reach the same function, reaches the purpose of saving communication cost.

Description

Technical Field

[0001] This utility model relates to the field of OHT carts, and in particular to an OHT cart and its manufacturing equipment. Background Technology

[0002] In semiconductor automated material handling systems (AMHS), the use of E84 optical communicators for communication during loading and unloading of process equipment has become the mainstream design. The core is based on the SEMI E84 protocol, which uses optical signals to achieve non-contact data transmission, ensuring high-speed and reliable automated handover, and is widely used in the handling of wafer carriers.

[0003] Currently, the communication design for loading and unloading semiconductor AMHS equipment and process equipment uses E84 optical communicators. However, E84 optical communicators only support simple IO communication. Each loading / unloading port requires a separate E84 optical communicator, and the number of E84 optical communicators corresponds to the number of workstations. In addition, E84 optical communicators must be paired with RFID readers to read the information of the carrier. On the one hand, purchasing multiple E84 optical communicators and RFID readers is costly, and on the other hand, a large number of communication devices is inconvenient during assembly. Utility Model Content

[0004] The purpose of this invention is to provide an OHT cart and its manufacturing equipment to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an OHT cart and its manufacturing equipment, comprising: The OHT trolley has a lifting block that is slidably connected inside, and the bottom of the lifting block is provided with a limit component. A wireless communication device is installed on top of the OHT vehicle; A drive unit, which is mounted above the OHT trolley, is used to drive the OHT trolley to slide at the bottom of the track; A T-shaped adjustment plate is slidably connected inside the OHT trolley, and an adaptive stop block is fixedly connected to the T-shaped adjustment plate.

[0006] The OHT vehicle is equipped with wireless power supply components at both ends. An installation plate is fixedly connected to the outer peripheral wall of the OHT vehicle. A limit plate is fixedly connected inside the OHT vehicle. The T-shaped adjustment plate is slidably connected between the limit plates.

[0007] A top plate is fixedly connected to the OHT trolley, the wireless communication device is installed on the top plate, and a lifting device is installed on the top plate. The lifting device is used to drive the lifting block, and the driving device is installed on the lifting device.

[0008] The limiting component includes a limiting gripper and a circular stop block. The limiting gripper is slidably connected to the bottom of the lifting block, and the circular stop block is fixedly connected to the bottom of the lifting block.

[0009] A sheet-like pressure sensor is fixedly installed inside the T-shaped adjustment plate. The adaptive abutment is made of rubber. A protrusion is fixedly connected to the side of the adaptive abutment near the sheet-like pressure sensor. The position of the protrusion corresponds to that of the sheet-like pressure sensor.

[0010] A threaded sleeve is fixedly connected inside the T-shaped adjusting plate, and a double-threaded screw is rotatably connected inside the OHT trolley. The double-threaded screw is threadedly connected to the threaded sleeve.

[0011] A servo motor is installed on one side of the OHT trolley. The servo motor is mounted on a mounting plate, and one end of the double-threaded screw is fixedly connected to the output end of the servo motor.

[0012] The second aspect of this utility model provides a process equipment, including the OHT trolley.

[0013] The technical effects and advantages of this utility model are as follows: This OHT (Outbound Handling) vehicle employs a structure with a wireless communication device installed on top of the vehicle. When the OHT vehicle arrives at the process equipment station and performs loading and unloading, it communicates with the master PLC via the Internet through the wireless communication device. The master PLC communicates with each process equipment through the Mitsubishi CC-Link IE Field network. Before the handshake ends, the carrier ID is uploaded to the Mitsubishi CC-Link IE Field network, and after the handshake ends, the carrier ID is downloaded, completing a complete handshake process. Only one Mitsubishi CC-Link IE Field module is needed to achieve the same function, thus saving communication costs. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the lifting device structure of this utility model; Figure 3 This is a schematic diagram of the adjusting plate structure of this utility model; Figure 4 This is a schematic diagram of the adaptive blocking structure of this utility model; Figure 5 This is a schematic diagram of the structure of the sheet-like pressure sensor of this utility model.

[0015] In the diagram: 1. OHT trolley; 101. Mounting plate; 2. Top plate; 3. Limiting plate; 4. Wireless power supply component; 5. Wireless communication device; 6. Lifting device; 7. Drive device; 8. Servo motor; 9. Double threaded screw; 10. Threaded sleeve; 11. Lifting block; 12. Limiting gripper; 13. Circular stop block; 14. T-shaped adjusting plate; 1401. Sheet-shaped pressure sensor; 15. Adaptive stop block; 1501. Protrusion block. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] This utility model provides, for example Figure 1 - Figure 3 The OHT vehicle shown includes: The OHT trolley 1 has a sliding connection to a lifting block 11 inside. The bottom of the lifting block 11 is equipped with a limiter. The OHT trolley 1 serves as the main structure of the entire equipment, supporting other components and providing space for the installation and operation of internal components. The OHT trolley 1 is made of lightweight and sturdy materials, which reduces its own weight and reduces operating energy consumption while ensuring structural strength. Its internal design has a reasonable space layout for installing components such as the lifting block 11 and the T-shaped adjustment plate 14. Wireless communication device 5, installed above OHT cart 1, is used to communicate with the main PLC via the Internet when OHT cart 1 arrives at the process equipment station for loading and unloading, enabling data transmission and interaction. Wireless communication device 5 uses a high-performance industrial-grade wireless module with stable signal reception and transmission capabilities, adapting to the complex electromagnetic environment of a semiconductor factory. It establishes a connection with the main PLC via wireless signal, transmitting status information and vehicle information of OHT cart 1 to the main PLC and receiving control commands from the main PLC. The drive device 7 is installed above the OHT trolley 1. The drive device 7 is used to drive the OHT trolley 1 to slide at the bottom of the track, so as to realize the movement of the OHT trolley 1 between different workstations. The drive device 7 includes a drive motor and a transmission mechanism. The drive motor is installed on the lifting device 6. The drive motor drives the OHT trolley 1 to slide at the bottom of the track, so that the OHT trolley 1 can run smoothly on the track. The T-shaped adjusting plate 14 is slidably connected inside the OHT trolley 1. An adaptive stop block 15 is fixedly connected to the T-shaped adjusting plate 14. The T-shaped adjusting plate 14 moves left and right by cooperating with the double threaded screw 9, which drives the adaptive stop block 15 fixedly connected to it to move, so as to stop the carriers of different sizes and achieve adaptive clamping of the carriers to prevent the wafer carriers from shaking during transportation.

[0018] The OHT trolley 1 has wireless power supply components 4 installed at both ends. The OHT trolley 1 has mounting plates 101 fixedly connected to its outer perimeter wall. The OHT trolley 1 has limit plates 3 fixedly connected inside. The T-shaped adjustment plate 14 is slidably connected between the limit plates 3.

[0019] The OHT trolley 1 is fixedly connected to a top plate 2, a wireless communication device 5 is installed on the top plate 2, a lifting device 6 is installed on the top plate 2, the lifting device 6 is used to drive the lifting block 11, and a driving device 7 is installed on the lifting device 6.

[0020] The limiting component includes a limiting gripper 12 and a circular abutment 13. The limiting gripper 12 is slidably connected to the bottom of the lifting block 11, and the circular abutment 13 is fixedly connected to the bottom of the lifting block 11.

[0021] A sheet-like pressure sensor 1401 is fixedly installed inside the T-shaped adjusting plate 14. The adaptive abutment 15 is made of rubber, and a protrusion 1501 is fixedly connected to the side of the adaptive abutment 15 near the sheet-like pressure sensor 1401. The protrusion 1501 corresponds to the position of the sheet-like pressure sensor 1401 and is used to squeeze the sheet-like pressure sensor 1401, transmitting the pressure of the adaptive abutment 15 on the carrier to the sheet-like pressure sensor 1401. The protrusion 1501 has a cylindrical or conical structure and is integrally formed with the adaptive abutment 15. When the adaptive abutment 15 contacts the carrier, the protrusion 1501 squeezes the sheet-like pressure sensor 1401, causing the sheet-like pressure sensor 1401 to generate a corresponding electrical signal. When the pressure value of the sheet-like pressure sensor 1401 reaches a preset standard, the servo motor 8 stops rotating.

[0022] A threaded sleeve 10 is fixedly connected inside the T-shaped adjusting plate 14, and a double-threaded screw 9 is rotatably connected inside the OHT trolley 1. The double-threaded screw 9 is threadedly connected to the threaded sleeve 10.

[0023] A servo motor 8 is mounted on one side of the OHT carriage 1, and is installed on the mounting plate 101. One end of a double-threaded screw 9 is fixedly connected to the output end of the servo motor 8. Driven by the servo motor 8, the double-threaded screw 9 rotates, causing the T-shaped adjusting plate 14 to move left and right, thereby adjusting the position of the adaptive stop block 15. The double-threaded screw 9 is a screw with opposite thread directions at both ends, and its two ends are rotatably connected to the OHT carriage 1 through bearings. When the servo motor 8 drives the double-threaded screw 9 to rotate, the two threaded sleeves 10 move simultaneously in opposite directions, thereby causing the two T-shaped adjusting plates 14 and the adaptive stop block 15 to move towards the center or both sides.

[0024] The second aspect of this utility model provides a process equipment, including the OHT trolley.

[0025] Example 1: This utility model provides an OHT (Output-to-Consumer) cart, whose communication process relies on a wireless communication device 5. The wireless communication device 5 is installed on the top plate 2 of the OHT cart 1, employing a high-performance industrial-grade wireless module with stable signal transmission and reception capabilities, adaptable to the complex electromagnetic environment of a semiconductor factory. When the OHT cart 1 arrives at the process equipment station for loading and unloading, the wireless communication device 5 establishes a connection with the master PLC via the Internet. The master PLC communicates with each process equipment through the Mitsubishi CC-Link IE Field network. Before the handshake ends, the carrier ID is uploaded to the Mitsubishi CC-Link IE Field network; after the handshake ends, the carrier ID is downloaded, completing a full handshake process. Only one Mitsubishi CC-Link IE Field module is needed to achieve the same function, thus saving communication costs.

[0026] Example 2: During transportation, the low-cost OHT trolley of this utility model achieves stable operation and adaptive clamping of the carrier through the coordinated operation of multiple components. The drive device 7 is installed on the lifting device 6, which is fixed on the top plate 2. The drive motor drives the OHT trolley 1 to slide at the bottom of the track, realizing movement between different workstations. The lifting block 11 is slidably connected inside the OHT trolley 1, and its bottom has a limiting component composed of a limiting claw 12 and a circular abutment 13. The T-shaped adjusting plate 14 is slidably connected between the limiting plates 3, and realizes left and right movement by cooperating with the double-threaded screw 9. The threads of the double-threaded screw 9 are opposite at both ends, and one end is connected to the servo motor 8, which is installed on the mounting plate 101. The servo motor 8 drives the double-threaded screw 9 to rotate, so that the two threaded sleeves 10 drive the two T-shaped adjusting plates 14 and the adaptive abutment 15 to move towards the middle or sides to abut against carriers of different sizes. The adaptive abutment 15 is made of rubber, and there is a protrusion 1501 on the side near the sheet pressure sensor 1401, corresponding to the position of the sensor. When the adaptive abutment block 15 contacts the carrier, the protrusion block 1501 squeezes the sheet-like pressure sensor 1401, generating an electrical signal. When the pressure value reaches the preset standard, the servo motor 8 stops rotating to prevent the wafer carrier from shaking during transportation and ensure safe and stable transportation.

[0027] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An OHT cart, characterized in that, include: The OHT trolley (1) has a lifting block (11) slidably connected inside it, and the bottom of the lifting block (11) is provided with a limiter; Wireless communication device (5), which is installed above the OHT trolley (1); A drive unit (7) is mounted above the OHT trolley (1) and is used to drive the OHT trolley (1) to slide at the bottom of the track; T-shaped adjustment plate (14) is slidably connected inside the OHT trolley (1), and an adaptive stop block (15) is fixedly connected to the T-shaped adjustment plate (14).

2. The OHT trolley according to claim 1, characterized in that, The OHT vehicle (1) is equipped with wireless power supply components (4) at both ends. An installation plate (101) is fixedly connected to the outer peripheral wall of the OHT vehicle (1). A limiting plate (3) is fixedly connected inside the OHT vehicle (1). The T-shaped adjustment plate (14) is slidably connected between the limiting plates (3).

3. The OHT trolley according to claim 1, characterized in that, The OHT trolley (1) is fixedly connected to a top plate (2), the wireless communication device (5) is installed on the top plate (2), the top plate (2) is equipped with a lifting device (6), the lifting device (6) is used to drive the lifting block (11), and the driving device (7) is installed on the lifting device (6).

4. An OHT trolley according to claim 3, characterized in that, The limiting component includes a limiting gripper (12) and a circular stop (13). The limiting gripper (12) is slidably connected to the bottom of the lifting block (11), and the circular stop (13) is fixedly connected to the bottom of the lifting block (11).

5. An OHT trolley according to claim 1, characterized in that, A sheet pressure sensor (1401) is fixedly installed inside the T-shaped adjustment plate (14). The adaptive abutment block (15) is made of rubber. A protrusion block (1501) is fixedly connected to the side of the adaptive abutment block (15) close to the sheet pressure sensor (1401). The position of the protrusion block (1501) corresponds to that of the sheet pressure sensor (1401).

6. An OHT trolley according to claim 2, characterized in that, A threaded sleeve (10) is fixedly connected inside the T-shaped adjusting plate (14), and a double threaded screw (9) is rotatably connected inside the OHT trolley (1). The double threaded screw (9) is threadedly connected to the threaded sleeve (10).

7. An OHT trolley according to claim 6, characterized in that, A servo motor (8) is provided on one side of the OHT trolley (1). The servo motor (8) is mounted on the mounting plate (101). One end of the double threaded screw (9) is fixedly connected to the output end of the servo motor (8).

8. A process equipment, characterized in that, It includes the OHT vehicle as described in any one of claims 1 to 7.

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