An apparatus for automatically detecting the crystal orientation of a single crystal silicon rod

Abstract

The utility model belongs to single crystal silicon rod detection technical field, concretely relates to a device of automatic detection single crystal silicon rod crystal direction, including device main part, the lateral surface fixedly connected with the collection shell of device main part, the positive surface fixedly connected with the controller of collection shell. The utility model discloses the limiting guide rod that sets up, and the limiting opening of limiting guide rod inner ring is matched with the size of adjusting plug rod, can carry out accurate constraint to the moving track of crystal direction detector assembly, avoids the detection error that the component deviation leads to in the detection process, and the stop plate that the object horizontal board bottom is connected with the positioning plug rod cooperation through the butt joint lever, can carry out stable clamping to single crystal silicon rod, prevents single crystal silicon rod to sway and influence crystal direction judgement when detecting, and the extraction shell that sets up is connected with the object horizontal board through the limiting frame, and the cooperation pull handle is convenient for the taking of single crystal silicon rod, and the pull block of positioning plug rod one side has simplified the single crystal silicon rod's fixing and loosening operation, and this has improved the working efficiency of single crystal silicon rod crystal direction detection.

Description

Technical Field

[0001] This utility model belongs to the field of single crystal silicon rod detection technology, specifically relating to a device for automatically detecting the crystal orientation of single crystal silicon rods. Background Technology

[0002] A single-crystal silicon rod is a columnar crystal made of high-purity single-crystal silicon material. It is one of the core basic materials in the semiconductor and photovoltaic industries. Its essence is a single crystal structure formed by silicon atoms arranged in a strict periodic pattern. This regular atomic arrangement gives it excellent electrical and mechanical properties. Users need to test it when processing single-crystal silicon rods.

[0003] A search revealed that Chinese patent CN203824893U discloses a "Single Crystal Silicon Rod Crystal Orientation Detection Device," comprising a bracket, a support arm, a crystal orientation detection sensor bracket, a cylinder, a fixed protective cover, a lifting protective cover, and a crystal orientation detection sensor. This invention can automatically detect the crystal orientation of a crystal rod clamped on a worktable, employing a non-contact measurement method. It boasts high detection accuracy, fast response, short processing time, and automatic control. Its simple structure and low cost eliminate the need for manual intervention, making it suitable for fully automated control in single crystal silicon rod production line workshops.

[0004] However, the following defects still exist: (1) In existing single-crystal silicon rod crystal orientation detection devices, the detector is prone to shift during the detection process, resulting in a large detection error. Moreover, most devices use simple clamping or lack dedicated fixing parts, causing the single-crystal silicon rod to shake during detection, which affects the accuracy of crystal orientation judgment.

[0005] (2) The process of picking up and fixing single crystal silicon rods is complicated, lacking convenient picking and placing structures and simplified fixing components. Operators need to spend a lot of time loading, unloading and fixing the materials, resulting in low overall testing efficiency.

[0006] To address this, a device for automatically detecting the crystal orientation of a single-crystal silicon rod is proposed. Utility Model Content

[0007] The purpose of this utility model is to address the existing problems.

[0008] To achieve the above-mentioned objectives, this utility model provides the following technical solution: The present invention is as follows: an automatic detection device for the crystal orientation of a single crystal silicon rod, comprising a device body, a receiving shell fixedly connected to the side surface of the device body, a controller fixedly connected to the front surface of the receiving shell, a limiting rod fixedly connected to the front surface of the device body, a mounting base plate sleeved on the outer ring surface of the limiting rod, and a fixing block fixedly connected to the front surface of the mounting base plate.

[0009] A motor is fixedly connected to the side surface of the fixing block, a storage plate is fixedly sleeved at the top of the output shaft of the motor, a limiting frame is fixedly connected to the side surface of the storage plate, a pull-out shell is limited and snapped onto the side surface of the limiting frame, and a pull handle is fixedly connected to the front surface of the pull-out shell.

[0010] A limiting guide rod is fixedly connected to the upper surface of the main body of the device. A telescopic rod is fixedly connected to the upper surface of the limiting guide rod. An adjusting rod is fixedly connected to the upper surface of the telescopic rod. A crystal orientation detector assembly is fixedly connected to the side surface of the adjusting rod. A docking rod is fixedly connected to the bottom surface of the placement plate. A baffle is fixedly connected to the side surface of the docking rod. A positioning rod is inserted into the inner ring surface of the baffle. A return spring is fixedly connected to one side of the baffle. A fixing plate is fixedly connected to the outer ring surface of the positioning rod.

[0011] As a preferred technical solution of this utility model, the inner ring surface of the limiting guide rod is provided with a limiting opening, and the size of the limiting opening and the adjusting rod are matched. The limiting opening can accurately limit the movement trajectory of the adjusting rod, avoid the adjusting rod from shifting when it drives the crystal orientation detector assembly to adjust its position, and ensure that the crystal orientation detector assembly can always be aligned with the single crystal silicon rod on the horizontal plate, thereby improving the accuracy of crystal orientation detection.

[0012] As a preferred technical solution of this utility model, the side surface of the main body of the device is fixedly connected with a support foot, and the support foot is symmetrically arranged with the vertical center line of the main body of the device as the axis of symmetry. The support foot can provide a stable support foundation for the entire device. The symmetrical arrangement makes the supporting force on the main body of the device evenly distributed, avoiding the device from tilting or shaking due to the shift of the center of gravity during operation, and ensuring the smooth progress of the crystal orientation detection of single crystal silicon rod.

[0013] As a preferred technical solution of this utility model, the upper surface of the receiving shell is fixedly connected with a partition plate, and there are multiple partition plates that are parallel to each other. The partition plates can divide the internal space of the receiving shell into multiple independent storage areas, which facilitates the classification and storage of items such as testing tools, repair parts and related records after testing, and avoids the inconvenience of retrieval due to mixed items. The multiple and parallel design makes the storage areas neat and orderly, and improves the space utilization of the receiving shell.

[0014] As a preferred technical solution of this utility model, the extraction shell is connected to the storage horizontal plate through a limiting frame, and the limiting frame is symmetrically arranged with the vertical center line of the storage horizontal plate as the axis of symmetry. The limiting frame serves to connect and limit the extraction shell, and the symmetrical arrangement ensures that the extraction shell is accurately installed on the storage horizontal plate and avoids offset.

[0015] As a preferred technical solution of this utility model, a crystal orientation detector assembly is fixedly connected to the upper surface of the crystal orientation detector assembly, and the crystal orientation detector assembly is connected between the crystal orientation detector assembly and the adjustment rod. The crystal orientation detector assembly is the core control component of the entire crystal orientation detection system, which can receive the crystal orientation information of the single crystal silicon rod collected by the crystal orientation detector assembly and analyze and process this information.

[0016] As a preferred technical solution of this utility model, the baffle is connected to the horizontal plate by a connecting rod, and there are multiple connecting rods. The multiple connecting rods can enhance the firmness of the connection between the baffle and the horizontal plate, and prevent the baffle from loosening or falling off due to force when limiting the single crystal silicon rod. The baffle can be used in conjunction with the positioning rod to clamp and fix the single crystal silicon rod on the horizontal plate, and prevent the single crystal silicon rod from moving during the testing process.

[0017] As a preferred technical solution of this utility model, a pull block is fixedly connected to one side of the positioning rod, and the pull block is connected between the positioning rod and the fixing plate. The pull block provides the operator with a convenient point of force application, allowing the operator to adjust the position of the positioning rod by pulling the pull block, thereby realizing the clamping or loosening operation of the monocrystalline silicon rod. The pull block and the fixing plate are connected by the positioning rod, so that pulling the pull block can drive the positioning rod to move synchronously.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. By setting a limiting guide rod, and ensuring that the limiting opening of the inner ring of the limiting guide rod matches the size of the adjusting rod, the movement trajectory of the crystal orientation detector assembly can be precisely constrained, avoiding detection errors caused by component offset during the detection process. The baffle at the bottom of the placement plate, connected by the docking rod, cooperates with the positioning rod to stably clamp the monocrystalline silicon rod, preventing the monocrystalline silicon rod from shaking during detection and affecting the crystal orientation judgment. The set extraction shell is engaged with the placement plate through the limiting frame, and the pull handle facilitates the picking and putting of the monocrystalline silicon rod. The pull block on one side of the positioning rod simplifies the fixing and loosening operation of the monocrystalline silicon rod, which improves the working efficiency of monocrystalline silicon rod crystal orientation detection.

[0019] 2. The main body of the device, with its symmetrically arranged support feet on the sides, provides uniform and stable support for the whole, preventing the device from tilting due to a shift in the center of gravity during operation. The mounting base is connected to the main body of the device via a limiting rod, and the motor is firmly connected to the mounting base via a fixing block. This multi-fixing structure ensures the stability of the components during operation. Attached Figure Description

[0020] Figure 1 A schematic diagram of the overall structure of the device for automatically detecting the crystal orientation of a single-crystal silicon rod provided by this utility model; Figure 2 A top view of the device for automatically detecting the crystal orientation of a single-crystal silicon rod provided by this utility model; Figure 3 A bottom view of the device for automatically detecting the crystal orientation of a single-crystal silicon rod provided by this utility model; Figure 4 The device for automatically detecting the crystal orientation of a single-crystal silicon rod provided by this utility model Figure 3 Enlarged view of the structure at point A in the middle; Figure 5 This is a side cross-sectional schematic diagram of the device for automatically detecting the crystal orientation of a single-crystal silicon rod provided by this utility model.

[0021] The attached diagram lists the components represented by each number as follows: 1. Main body of the device; 2. Controller; 3. Adjusting rod; 4. Retractable shell; 5. Partition plate; 6. Limiting rod; 7. Mounting base plate; 8. Fixing block; 9. Motor; 10. Storage plate; 11. Limiting frame; 12. Extraction shell; 13. Pull handle; 14. Limiting guide rod; 15. Telescopic rod; 16. Crystal orientation detector assembly; 17. Crystal orientation detection main board assembly; 18. Limiting opening; 19. Connecting rod; 20. Baffle; 21. Return spring; 22. Fixing plate; 23. Positioning rod; 24. Pull block; 25. Support foot. Detailed Implementation

[0022] To make the objectives and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific embodiments of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.

[0023] Please see Figure 1-5 The present invention provides a technical solution: an automatic detection device for the crystal orientation of a single crystal silicon rod, comprising a device body 1, a receiving shell 4 fixedly connected to the side surface of the device body 1, a controller 2 fixedly connected to the front surface of the receiving shell 4, a limiting rod 6 fixedly connected to the front surface of the device body 1, a mounting base plate 7 fitted onto the outer ring surface of the limiting rod 6, a fixing block 8 fixedly connected to the front surface of the mounting base plate 7, and a motor 9 fixedly connected to the side surface of the fixing block 8.

[0024] In this embodiment, a limiting opening 18 is provided on the inner ring surface of the limiting guide rod 14, and the limiting opening 18 and the adjusting rod 3 are matched in size. The limiting opening 18 can accurately limit the movement trajectory of the adjusting rod 3, preventing the adjusting rod 3 from shifting when it drives the crystal orientation detector assembly 16 to adjust its position. This ensures that the crystal orientation detector assembly 16 can always be aligned with the single crystal silicon rod on the horizontal plate 10, improving the accuracy of crystal orientation detection. A support foot 25 is fixedly connected to the side surface of the device body 1, and the support foot 25 is symmetrically arranged with the vertical center line of the device body 1 as the axis of symmetry. The support foot 25 can provide a stable support foundation for the entire device. The symmetrical arrangement makes the supporting force on the device body 1 evenly distributed, preventing the device from tilting or shaking due to the shift of the center of gravity during operation, and ensuring the smooth operation of the single crystal silicon rod crystal orientation detection.

[0025] like Figure 1-5 As shown, based on Embodiment 1, this utility model provides a technical solution: Preferably, a storage horizontal plate 10 is fixedly sleeved at the top of the output shaft of the motor 9, a limiting frame 11 is fixedly connected to the side surface of the storage horizontal plate 10, a pull-out shell 12 is limited and snapped onto the side surface of the limiting frame 11, a pull handle 13 is fixedly connected to the front surface of the pull-out shell 12, and a limiting guide rod 14 is fixedly connected to the upper surface of the device body 1.

[0026] In this embodiment, a partition plate 5 is fixedly connected to the upper surface of the receiving shell 4, and there are multiple partition plates 5 that are parallel to each other. The partition plates 5 can divide the internal space of the receiving shell 4 into multiple independent storage areas, which facilitates the classification and storage of items such as testing tools, repair parts, and related records after testing, avoiding the inconvenience of retrieval due to mixed items. The multiple and parallel design makes the storage areas neat and orderly, improving the space utilization of the receiving shell 4. The extraction shell 12 is connected to the storage horizontal plate 10 through the limiting frame 11, and the limiting frame 11 is symmetrically set with the vertical center line of the storage horizontal plate 10 as the axis of symmetry. The limiting frame 11 serves to connect and limit the extraction shell 12. The symmetrical setting ensures that the installation position of the extraction shell 12 on the storage horizontal plate 10 is accurate and avoids offset.

[0027] like Figure 1-5As shown, based on Embodiment 1, this utility model provides a technical solution: Preferably, a telescopic rod 15 is fixedly connected to the upper surface of the limiting guide rod 14, an adjusting rod 3 is fixedly connected to the upper surface of the telescopic rod 15, a crystal orientation detector assembly 16 is fixedly connected to the side surface of the adjusting rod 3, a docking rod 19 is fixedly connected to the bottom surface of the placement crossbar 10, a baffle 20 is fixedly connected to the side surface of the docking rod 19, a positioning rod 23 is inserted into the inner ring surface of the baffle 20, a reset spring 21 is fixedly connected to one side of the baffle 20, and a fixing plate 22 is fixedly connected to the outer ring surface of the positioning rod 23.

[0028] In this embodiment, a crystal orientation detector assembly 17 is fixedly connected to the upper surface of the crystal orientation detector assembly 16. The crystal orientation detector assembly 17 is connected to the crystal orientation detector assembly 16 and the adjusting rod 3. The crystal orientation detector assembly 17 is the core control component of the entire crystal orientation detection system. It can receive the crystal orientation information of the single crystal silicon rod collected by the crystal orientation detector assembly 16 and analyze and process this information. The baffle 20 is connected to the placement plate 10 through the docking rod 19. There are multiple docking rods 19. The multiple docking rods 19 can enhance the firmness of the connection between the baffle 20 and the placement plate 10 and prevent the baffle 20 from being used to inspect the single crystal silicon rod. When the limit is applied, it may loosen or fall off due to force. The baffle 20 can be used in conjunction with the positioning rod 23 to clamp and fix the monocrystalline silicon rod on the horizontal plate 10, preventing the monocrystalline silicon rod from moving during the testing process. A pull block 24 is fixedly connected to one side of the positioning rod 23, and the pull block 24 is connected to the fixing plate 22 through the positioning rod 23. The pull block 24 provides a convenient force application point for the operator, allowing the operator to adjust the position of the positioning rod 23 by pulling the pull block 24, thereby realizing the clamping or loosening operation of the monocrystalline silicon rod. The pull block 24 is connected to the fixing plate 22 through the positioning rod 23, so that pulling the pull block 24 can drive the positioning rod 23 to move synchronously.

[0029] Working principle: When the user uses the device, the user needs to check the overall status of the device and ensure that the support feet 25 symmetrically arranged on the side of the main body 1 of the device are in stable contact with the ground to ensure the stability of the device during operation. By taking out the single crystal silicon rod to be used and the testing auxiliary tools through the multiple parallel partition plates 5 on the upper surface of the shell 4, the user completes the material preparation before testing. Hold the pull handle 13 on the front surface of the extraction shell 12 and pull out the extraction shell 12 along the limiting frame 11 symmetrically arranged on the side surface of the horizontal plate 10. Place the single crystal silicon rod to be tested into the extraction shell 12, and then connect the extraction shell 12 back to the placement plate 10 through the limiting frame 11 to complete the initial placement of the single crystal silicon rod. Pull the pull block 24 on one side of the positioning rod 23 to move the positioning rod 23 outward. At this time, the return spring 21 on one side of the baffle 20 is compressed. After the position of the single crystal silicon rod is adjusted, release the pull block 24. The return spring 21 rebounds and pushes the baffle 20. With the help of the fixing plate 22 on the outer ring surface of the positioning rod 23, the single crystal silicon rod is clamped and fixed. The baffle 20 is firmly connected to the placement plate 10 through multiple docking rods 19 to ensure the fixing effect. Operate the controller 2 on the front surface of the collection shell 4 to start the telescopic rod 15 on the upper surface of the limiting guide rod 14. The telescopic rod 15 drives the adjusting rod 3 on the upper surface to move along the limiting opening 18 opened on the inner ring surface of the limiting guide rod 14. The limiting opening 18 matches the size of the adjusting rod 3 to ensure precise movement until the crystal orientation detector assembly 16 on the side surface of the adjusting rod 3 is aligned with the detection position of the single crystal silicon rod to be tested. The controller 2 starts the motor 9. The motor 9 is fixedly connected to the mounting base plate 7 through the fixing block 8. The mounting base plate 7 is limitedly sleeved with the main body 1 of the device through the limiting rod 6. The output shaft of the motor 9 drives the placement horizontal plate 10 fixedly sleeved at the top to rotate, so that the single crystal silicon rod moves with the device. The rotation of the single crystal silicon rod; the crystal orientation detector assembly 16 collects crystal orientation information at different angles of the single crystal silicon rod and transmits the information to the crystal orientation detection motherboard assembly 17. The crystal orientation detection motherboard assembly 17 analyzes and processes the information. After the detection is completed, the crystal orientation detection motherboard assembly 17 feeds back the detection results to the controller 2. The operator stops the motor 9 and the crystal orientation detector assembly 16 through the controller 2, pulls the pull block 24 again to release the single crystal silicon rod, pulls out the extraction shell 12 to take out the single crystal silicon rod that has been tested, and finally puts the extraction shell 12 back in place to complete one single crystal silicon rod crystal orientation detection operation.

[0030] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the field.

Claims

1. An automatic device for detecting the crystal orientation of a single-crystal silicon rod, comprising a device body (1), characterized in that: A receiving shell (4) is fixedly connected to the side surface of the main body (1) of the device, a controller (2) is fixedly connected to the front surface of the receiving shell (4), a limiting rod (6) is fixedly connected to the front surface of the main body (1), and a mounting base plate (7) is fitted onto the outer ring surface of the limiting rod (6). A fixing block (8) is fixedly connected to the front surface of the mounting base plate (7), a motor (9) is fixedly connected to the side surface of the fixing block (8), a storage horizontal plate (10) is fixedly sleeved at the top of the output shaft of the motor (9), a limiting frame (11) is fixedly connected to the side surface of the storage horizontal plate (10), a pull-out shell (12) is limited and snapped to the side surface of the limiting frame (11), a pull handle (13) is fixedly connected to the front surface of the pull-out shell (12), and a limiting guide rod (14) is fixedly connected to the upper surface of the device body (1). The upper surface of the limiting guide rod (14) is fixedly connected to a telescopic rod (15), the upper surface of the telescopic rod (15) is fixedly connected to an adjusting rod (3), the side surface of the adjusting rod (3) is fixedly connected to a crystal orientation detector assembly (16), the bottom surface of the placement plate (10) is fixedly connected to a docking rod (19), the side surface of the docking rod (19) is fixedly connected to a baffle (20), the inner ring surface of the baffle (20) is limited and inserted with a positioning rod (23), one side of the baffle (20) is fixedly connected to a reset spring (21), and the outer ring surface of the positioning rod (23) is fixedly connected to a fixing plate (22).

2. The device for automatically detecting the crystal orientation of a single-crystal silicon rod according to claim 1, characterized in that, The inner ring surface of the limiting guide rod (14) has a limiting opening (18), and the limiting opening (18) and the adjusting rod (3) are matched in size.

3. The device for automatically detecting the crystal orientation of a single-crystal silicon rod according to claim 1, characterized in that, The side surface of the device body (1) is fixedly connected with a support foot (25), and the support foot (25) is symmetrically arranged with the vertical center line of the device body (1) as the axis of symmetry.

4. The device for automatically detecting the crystal orientation of a single-crystal silicon rod according to claim 1, characterized in that, The upper surface of the receiving shell (4) is fixedly connected with a partition plate (5), and there are multiple partition plates (5) that are parallel to each other.

5. The device for automatically detecting the crystal orientation of a single-crystal silicon rod according to claim 1, characterized in that, The extraction shell (12) is connected to the storage plate (10) through the limiting frame (11), and the limiting frame (11) is symmetrically set with the vertical center line of the storage plate (10) as the axis of symmetry.

6. The device for automatically detecting the crystal orientation of a single-crystal silicon rod according to claim 1, characterized in that, The crystal orientation detector assembly (16) is fixedly connected to the upper surface of the crystal orientation detector assembly (17), and the crystal orientation detector assembly (17) is connected to the crystal orientation detector assembly (16) and the adjustment rod (3).

7. The device for automatically detecting the crystal orientation of a single-crystal silicon rod according to claim 1, characterized in that, The baffle (20) is connected to the storage plate (10) via a connecting rod (19), and there are multiple connecting rods (19).

8. The device for automatically detecting the crystal orientation of a single-crystal silicon rod according to claim 1, characterized in that, A pull block (24) is fixedly connected to one side of the positioning rod (23), and the pull block (24) is connected between the positioning rod (23) and the fixing plate (22).

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