Wafer contact portion of positioning pin for wafer cleaning device

CN309436155SActive Publication Date: 2025-08-12SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
CN202430593841.2
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2024-05-30
Filing Date
2024-09-18
Publication Date
2025-08-12
Estimated Expiration
2039-09-18

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Abstract

1. Name of the product of this design: Wafer contact portion of a positioning pin for a wafer cleaning device. 2. Purpose of this design product: This product as a whole is used to fix the wafer in a specified position inside the wafer cleaning device, and the part that requires protection is the part that contacts the wafer. 3. The key design point of this design product lies in the shape of the part indicated by the solid line. 4. The picture or photo that best illustrates the key points of the design: enlarged view of part A. 5. The solid line portion is the portion for which protection is sought, and the dotted line is the dividing line used to distinguish the portion for which protection is sought from other portions.
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