Multi-zone showerhead and body for semiconductor processing

Abstract

1. Name of the designed product: multi-zone showerhead and body for semiconductor processing. 2. Use of the designed product: the designed product is used in semiconductor processing equipment and is configured to flow fluid onto a semiconductor substrate. 3. Design points of the designed product: in the shape, pattern and combination thereof of the product. 4. Picture or photograph best indicating the design points: design 1 perspective view 1. 5. Design 1 is designated as the basic design. 6. Other circumstances requiring explanation Other explanation: the product part depicted by the dashed line does not constitute part of the claimed design.

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