Interferometer and method for operating it

Abstract

Interferometer (200) with a first mirror element (202) and a second mirror element (206) spaced apart from the first mirror element (202) by an adjustable resonator slit (204), wherein the interferometer (200) has the following features: A first drive device (100) configured to adjust a gap height (104) of the resonator gap (204), wherein the first drive device (100) has a first adjustment range (208) and wherein the first drive device (100) is configured to switch between a first gap height range (106) and a second gap height range (108); and a second drive device (102) designed to adjust the gap height (104), wherein the second drive device (102) has a second adjustment range (210) that complements and / or extends the first adjustment range (208) and is designed to adjust the gap height (104) within the gap height ranges (106, 108).

Description

State of the art

[0001] The invention relates to a device or a method according to the preamble of the independent claims. The present invention also relates to a computer program.

[0002] Microelectromechanical actuators have a small adjustment range. This adjustment range can be smaller than the desired adjustment range of a resonator gap in an interferometer.

[0003] US2013279005A1 describes an FPI spectrometer in which the resonator gap is adjusted by two electrostatically actuated mechanisms that can be controlled independently of each other. Both actuating mechanisms act in the same direction and on the same spring, meaning that the tunable range remains limited due to the risk of snapping. Disclosure of the invention

[0004] Against this background, the approach presented here introduces an interferometer, a method for operating an interferometer, and finally a corresponding computer program according to the main claims. Advantageous further developments and improvements of the device specified in the independent claim are possible through the measures listed in the dependent claims.

[0005] A large adjustment range can be achieved by combining at least two drives. In the approach presented here, the gap height is adjusted by adding the adjustment travel of at least two drives. This allows the gap height to be set with high accuracy over a wide range.

[0006] An interferometer is presented comprising a first mirror element and a second mirror element spaced apart from the first mirror element by an adjustable resonator slit, wherein the interferometer has the following features: a first drive device configured to adjust the gap height of the resonator gap, wherein the first drive device has a first adjustment range; and a second drive device is designed to adjust the gap height, wherein the second drive device has a second adjustment range that complements and / or extends the first adjustment range.

[0007] An interferometer can be understood as a Fabry-Perot interferometer, which is designed to filter and transmit a wavelength range of electromagnetic waves from a wavelength spectrum through a slit between two opposing mirror elements, the wavelength range of which depends on the slit height. The radiation intensity of this wavelength range can then be measured by the interferometer. By changing the slit height, different wavelength ranges can be filtered, and thus the wavelength spectrum can be recorded using a plurality of measured radiation intensities. The slit height can be understood as the distance between the two mirror elements. A drive mechanism can be configured to move at least one of the mirror elements in response to an electrical control signal and / or to hold it in a position specified by the control signal.

[0008] The first adjustment range can have at least one discrete end position. A discrete end position can, for example, be defined by a rest position of at least one of the mirror elements. In the rest position, the drive mechanisms can, for example, be deactivated. The rest position can be defined by at least one spring system.

[0009] The end position can be determined by a stop device. The stop device can be coupled to the first drive unit. A very precise positioning can be achieved by a mechanical stop against an opposing element. The stop device can, for example, comprise columns and / or walls that are oriented essentially perpendicular to a principal plane of extension of a mirror element.

[0010] A first spring assembly can be arranged between the stop device and a substrate of the interferometer. This spring assembly can be referred to as a spring system. The spring assembly allows the stop device to be deflected by the drive unit against a restoring force until the stop device makes contact. When the drive unit is deactivated, the restoring force returns the stop device to its rest position.

[0011] A second spring assembly can be arranged between the stop device and the first mirror element. This second spring assembly allows the mirror element to be deflected from the end position of the stop device against a restoring force, and after deflection, it is moved back into its end position by the restoring force.

[0012] The first drive unit can be coupled to the first mirror element. The first mirror element can be coupled to a substrate of the interferometer via a first spring assembly. The mirror element can be directly connected to the substrate via the spring assembly. The first drive unit can drive the first mirror element.

[0013] The second drive unit can be coupled to the second mirror element. The second drive unit can drive the second mirror element.

[0014] The second mirror element can also be coupled to the substrate via a spring mechanism.

[0015] The second drive unit can also be coupled to the first mirror element. The second drive unit can act on both mirror elements and move them towards or away from each other.

[0016] Furthermore, a method for operating an interferometer is presented, wherein in one step of the adjustment a slit width of a resonator slit of the interferometer between a first mirror element of the interferometer and a second mirror element of the interferometer is set using a first drive device and / or a second drive device.

[0017] Also advantageous is a computer program product or computer program with program code that can be stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical memory and is used to carry out, implement and / or control the steps of the method according to one of the embodiments described above, in particular if the program product or program is executed on a computer or device.

[0018] Examples of the approach presented here are shown in the drawings and explained in more detail in the following description. It shows: Fig. 1 a representation of a control scheme for an interferometer according to an exemplary embodiment; Fig. 2 a block diagram of an interferometer according to an exemplary embodiment; Fig. 3 a schematic representation of an interferometer according to an exemplary embodiment; Fig. 4 a schematic representation of an interferometer according to an exemplary embodiment; Fig. 5 a schematic representation of an interferometer according to an exemplary embodiment; Fig. 6 a schematic representation of an interferometer according to an exemplary embodiment; Fig. 7 a schematic representation of drive devices according to an exemplary embodiment; Fig. 8 a schematic representation of an interferometer according to an exemplary embodiment; Fig. 9 a schematic representation of an interferometer according to an exemplary embodiment; Fig. 10 a schematic representation of an interferometer according to an exemplary embodiment; and Fig. 11 a flowchart of a method for operating an interferometer according to an exemplary embodiment.

[0019] In the following description of favorable embodiments of the present invention, the same or similar reference numerals are used for the elements shown in the various figures and acting similarly, without repeating these elements.

[0020] Fig. Figure 1 shows a diagram of a control scheme for an interferometer according to an exemplary embodiment. The control scheme can be used for an interferometer with two independently controllable drive units 100, 102 for setting the slit height 104 of a resonator slit. In the control scheme shown here, the first drive unit 100 is used to switch between a first slit height range 106 and a second slit height range 108. The second drive unit 102 is used to set the slit height 104 within the slit height ranges 106, 108. Here, the slit height ranges 106, 108 overlap in an overlap range 110. This allows slit heights 104 within the overlap range 110 to be set from both slit height ranges 106, 108.

[0021] The first drive unit 100 has two defined end positions and changes the gap height 104 without intermediate positions between the end positions. The second drive unit 102 is continuously variable and changes the gap height 104 proportionally to a control signal 112.

[0022] In Fig. Figure 1 shows an overlap 110 of the measuring ranges 106, 108. Here, coarse actuation to two rest positions 106, 108 takes place in order to fine-tune these rest positions 106, 108 by means of the second actuation mechanism 102.

[0023] Fig. Figure 2 shows a block diagram of an interferometer 200 according to an exemplary embodiment. The interferometer 200 comprises a first mirror element 202, a second mirror element 206 spaced apart from the first mirror element 202 by an adjustable resonator gap 204, a first drive unit 100, and a second drive unit 102. The interferometer 200 can be operated using the Fig. The control scheme shown in section 1 can be used.

[0024] The first mirror element 202 is driven by both drive units 100 and 102, which are connected in series. The second mirror element 206 is stationary. The first drive unit 100 is configured to adjust the gap height 104 of the resonator gap 204 between the first gap height range 106 and the second gap height range 108. The first drive unit 100 has a first adjustment range 208. The second drive unit 102 is also configured to adjust the gap height 104. The second drive unit 102 has a second adjustment range 210 that complements the first adjustment range 208.

[0025] In other words, a Fabry-Perot interferometer (FPI) device 200 with multi-stage actuation is presented. A schematic representation of the drive arrangement is shown. In the sketch, positions 106 and 108 are two possible positions of the first mirror element 202, which are achieved by digital switching of the coarse actuator 100. However, the coarse actuator 100 and / or the fine actuator 102 could equally well act on the second mirror element 206. The mirror elements 200 and 206 can be actuated in the same or opposite directions. Likewise, the actuation can be unilateral or bilateral.

[0026] Conventional micromechanical Fabry-Perot interferometers (FPIs) are inherently limited in their operating range by the presence of higher-order interference patterns at lower wavelengths. For analytical applications, operation over the broadest possible wavelength range is desirable.

[0027] The approach presented here creates a micromechanical Fabry-Perot interferometer 200 with an extended spectral measurement range 104, not limited by pull-in, and a fine resolution even at shorter wavelengths.

[0028] In Fabry-Perot interferometers 200, the resonance condition for maximum transmission is met at a slit spacing of 104, which is equal to an integer multiple of half the wavelength.

[0029] When tuning a capacitively driven Fabry-Perot interferometer 200, it is desirable to use the lowest possible control voltages, as this allows for more energy-efficient operation and also enables the use of simpler and less expensive control electronics. The slit spacing 104 should also behave as linearly as possible across the measurement range. In particular, for optimal spectral sampling, due to the narrower half-width of the resonances at shorter wavelengths (i.e., small slit spacings), it would be desirable for voltage increments to result in smaller changes in the slit spacing than at larger slit spacings. However, a simple capacitive drive, in which the mirror elements 202 and 206 are moved towards each other, contradicts this. The smaller the slit 104, the greater the increase in force and thus the change in slit spacing for the same control voltage increment.If a force threshold is exceeded, a snapping motion can occur and the electrodes will touch.

[0030] For maximum resolution across the entire tuning range, the mirrors of the Fabry-Perot interferometer 200 should be as plane-parallel to each other as possible, and should remain so even during actuation. Conventionally, the mirror layers 202 and 206 can already exhibit mechanical tensile stress in their neutral position. When a deflection stress is applied, the mechanical stress in the mirror layers 202 and 206 increases further. This, in total, limits the maximum size of conventional Fabry-Perot mirrors; excessively large mirrors would crack.

[0031] An advantageous control method is a coarse control of the first actuating mechanism 100 by means of which one or both mirror elements 202, 206 are moved into one of at least two or more defined positions 106, 108 or measuring positions. The two or more coarse positions 106, 108 can either be defined by mechanical stops or implemented by discrete control signals, the level of which can be selected depending on the measurement task. The size of the optical slit 104 is then adjusted by the continuous or quasi-continuous fine control of a second actuating mechanism 102.

[0032] The stop positions of the coarse control can be selected so that the measuring ranges resulting from the fine control overlap, allowing a continuous spectrum to be composed.

[0033] Using one or more narrowband light sources / spectral lines, the two actuation mechanisms 100, 102 can be autocalibrated against each other.

[0034] Fig. Figure 3 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment. The interferometer 200 essentially corresponds to the interferometer in Fig. 2. In contrast, the first drive unit 100 acts on the first mirror element 202, while the second drive unit 102 acts on the second mirror element 206. In other words, both mirror elements 202 and 206 are driven and movable.

[0035] The interferometer 200 is designed as a layered structure on a substrate 300. The two mirror elements 202, 206 are sections of mirror layers 302 arranged parallel to the substrate 300. The mirror elements 202, 206 are arranged above a cavity 304 of the substrate 300. Laterally to the mirror elements 202, 206, the mirror layers 302 are perforated by spring perforations 306 to form spring systems 308, 310. The spring systems 308, 310 allow the mirror elements 202, 206 to move in order to adjust the slit height 104 of the resonator slit 204. Outside the mirror elements 202, 206 and spring systems 308, 310, the mirror layers 302 are spaced from the substrate 300 and from each other by spacer layers 312.

[0036] The first drive unit 100 is arranged in the area of ​​the first spring system 308. The first drive unit 100 is designed as a capacitive actuator 100. First electrodes of the capacitive actuator 100 are arranged on the substrate 300, while second electrodes of the capacitive actuator 100 are arranged on spring elements of the first spring system 308. When an electrical voltage is applied to the electrodes, an attractive force results between the electrodes, and the first mirror element 202 is pulled by the spring elements of the first spring system 308 from a rest position toward the substrate 300. The first mirror element 202 is moved until stop elements 314 of the first mirror element 202 abut the substrate 300 and define a deflected position of the first mirror element 202.In other words, the first mirror element 202 is moved back and forth between the rest position and the deflected position by the first drive device 100 in order to change the gap height 104 between the first adjustment range and the second adjustment range.

[0037] The second drive unit 102 is arranged in the area of ​​the second spring system 310. The second drive unit 102 is designed as a piezoelectric actuator 102. At least one piezoelectric layer of the piezoelectric actuator 102 is arranged on spring elements of the second spring system 310. When an electrical voltage is applied to the piezoelectric layer, the length of the layer changes. This causes the spring elements to bend, and the second mirror element 206 is moved from a rest position by the spring elements, depending on the voltage value and direction. The second mirror element 206 can be moved in the direction of the first mirror element 202 until anti-stick bumps 316 contact the first mirror element 202. The anti-stick bumps 316 prevent adhesion of the smooth, reflective surfaces of the mirror elements 202 and 206.The second drive unit 102 is designed to move the second mirror element 206 steplessly within the second gap height range.

[0038] The micromechanical interferometer device 200 presented here consists of at least one substrate 300, at least two mirror elements 202, 206 arranged one above the other and spaced apart by a slit 204, flexible suspensions 308, 310 by which at least one of the mirror elements 202, 206 is suspended on the substrate 300, at least two independently controllable actuation mechanisms 100, 102 for adjusting the slit size 104, wherein for each actuation mechanism 100, 102 there exists an independently controllable spring system 308, 310 in one of the mirror elements 202, 206.

[0039] The spring systems 308, 310 can be configured as membranes, ring membranes, or as discretely structured spring elements. The actuation mechanisms 100, 102 can act either all on one of the mirror elements 202, 206, on several mirror elements 202, 206, or on only one mirror element 202, 206 each. The actuation mechanisms 100, 102 can move either one or more mirror elements 202, 206 relative to the substrate 300, or relative to each other. At least one of the mirror elements 202, 206 and / or the substrate 300 has stops 314 facing one of the other mirror elements 202, 206 and / or the substrate 300, the stops 314 being configured as one-dimensional columns or as two-dimensional walls.

[0040] The actuation mechanisms 100, 102 can be capacitive or electrostatic and / or piezoelectric and / or thermal.

[0041] The approach presented here requires lower electrical voltages for tuning than a fully analog Fabry-Perot interferometer. This results in more linear control. Furthermore, lower mechanical layer stresses in the mirror layers 302 occur during tuning. The interferometer 200 presented here has two defined optical resonance lengths, which can be used for calibrating the Fabry-Perot interferometer 200, as the distance between them is very well defined. Self-calibration is also possible via the two independent control circuits, with capacitive or piezoelectric detection via the second control circuit. This self-calibration can be used for temperature compensation and / or drift compensation.The interferometer 200 presented here can be manufactured cost-effectively, since only one cavity 304 is required, in comparison to a component with two electrostatic gaps.

[0042] Fig. Figure 4 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment. The interferometer 200 essentially corresponds to the interferometers in the Fig. 2 and Fig. 3. In contrast, here the second mirror layer 302 of the second mirror element 206 is arranged directly on the substrate 300, and the second mirror element 206 is stationary. The first mirror layer 302 of the first mirror element 202 is spaced from the second mirror layer 302 by a spacer layer 312 with a high thickness. To form the spring systems 308, 310, the first mirror layer 302 is thinned in sections 400 outside the first mirror element 202. The first spring system 308 and the second spring system 310 are connected in series. The drive units 100, 102 are arranged in the area of ​​the spring systems 308, 310. Both drive units 100, 102 are designed as capacitive actuators. The first electrodes are arranged in the thinned sections of the first mirror layer 302. The second electrodes are arranged on the second mirror layer 302.Between the spring systems 308, 310, the first mirror layer is formed into a stop area for the stop elements 314.

[0043] The first drive unit 100 moves the stop area, the second spring system 310, and the first mirror element 202 between the rest position and the deflected position defined by the stop element 314. The second drive unit 102 moves the first mirror element 202 independently of the first drive unit 100 from the rest position or the deflected position.

[0044] In other words, it shows Fig. 4 a cross-section through a Fabry-Perot interferometer 200, in which thinned membrane areas 400 act as spring systems 308, 310.

[0045] Fig. Figure 5 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment. The interferometer 200 essentially corresponds to the one described in Figure 5. Fig. 4 interferometers shown. In contrast, the spring systems 308, 310 are as in Fig. 3 formed by spring perforations 306. Additionally, the interferometer 200 shown here has a third spring system 500. The third spring system 500 is formed by spring perforations 306 through the second mirror layer 302. This allows the second mirror element 206 to also move. The third spring system 500 is arranged opposite the second spring system 310, and the second electrodes of the second drive unit 102 are arranged on the spring elements of the third spring system 500. The third spring system 500 is thus connected in parallel to the second spring system 310. The second drive unit 102 can therefore move the first mirror element 202 and the second mirror element 206 towards each other. In order to achieve the same change in the gap height 104 as in Fig. 4 A lower attractive force is required between the electrodes of the second drive device, since the attractive force acts uniformly on the second spring system 310 and the third spring system 500.

[0046] The interferometer 200 is shown in a rest position without force being applied by the drive devices 100, 102.

[0047] In an embodiment not shown, the interferometer 200 has a fourth spring system which is arranged parallel to the first spring system 308, analogous to the third spring system 500.

[0048] In other words, in Fig. 5 a Fabry-Perot interferometer 200 in zero state with capacitive control electrodes and stops 314 as well as separate spring systems 308, 310 for the two independently controllable electrostatic actuation mechanisms 100, 102 shown.

[0049] Fig. Figure 6 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment. The interferometer 200 corresponds to the interferometer 200 in Fig. 5. Here, the interferometer 200 is shown in its approximately maximum deflected state. The first spring system 108 is deflected by the first drive unit 100 to such an extent that the stop device 314 rests against the second mirror layer 302 in the deflected position. The second spring system 310 and the third spring system 500 are deflected by the second drive unit 102 to such an extent that the electrodes almost touch. The spring systems 310 and 500 are deflected in opposite directions. Direct contact between the first mirror element 202 and the second mirror element 206 is prevented by the anti-stick nubs 316.

[0050] Fig. Figure 7 shows a top view of drive units 100, 102 according to an exemplary embodiment. The drive units 100, 102 essentially correspond to the drive units in the Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 to Fig. 6. As in the Fig. 5 and Fig. Figure 6 shows the drive units 100 and 102 arranged in series. The first drive unit 100 is arranged on spring elements 700 of the first spring system 308. The second drive unit is arranged on spring elements 702 of the second spring system 310. The first mirror element 202 is round. The second spring system 310 surrounds the first mirror element 202. The stop area surrounds the second spring system in an annular shape. The spring elements 702 are S-shaped and connect the mirror element 202 to the stop area. The stops 314 are arranged in the stop area. The first spring system 308 surrounds the stop area in an annular shape. The spring elements 700 are S-shaped, opposite to the spring elements 702, and connect the stop area to the surrounding mirror layer 302.

[0051] Fig. Figure 8 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment. The interferometer 200 corresponds essentially to the preceding illustrations. In contrast, the interferometer has a bridge 800 that connects the first mirror element 202 to the substrate 300. The bridge 800 is flexible and resists deformation with a negligible spring force. The bridge 800 represents the first spring system 308. The bridge 800 has electrical conductors 802 for supplying the drive units 100, 102. The second drive unit 102 has an annular electrode 804 that rotates circularly around the first mirror element 202. The electrode 804 is enclosed in a ring by the second spring system 310. The spring elements of the second spring system 310 bridge a gap 806 or a cavity between the first drive unit 100 and the second drive unit 102.The first drive unit 100 also has a ring-shaped electrode 808 that circularly surrounds the second spring system 310. The bridge 800 gives the unit, consisting of the first mirror element 202, the electrode 804, the second spring system 310, and the electrode 808, a ladle shape.

[0052] In other words, it shows Fig. Figure 8 shows a detailed top view of the suspension 800 of a Fabry-Perot interferometer 200 according to an exemplary embodiment. One of the mirror elements 202 can be shaped like a paddle. It has no restoring force and can be switched back and forth between two positions. This is particularly advantageous in the case of electrostatic actuation because smaller areas are sufficient. Additionally, this design has the advantage that mechanical tensile stresses in the layers of the mirror element 202 caused by external influences have no effect, which increases the drift stability of the component 200.

[0053] Fig. Figure 9 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment. As in Fig. Figure 3 shows two mirror layers 302 separated from the substrate 300 and from each other by spacer layers 312. The first mirror layer 302 is positioned between the second mirror layer 302 and the substrate 300. The first mirror element 202 is arranged as shown in Figure 3. Fig. The first mirror element 202 is suspended in a ladle-like shape from a flexible bridge 800 and can be described as a free-floating mirror ladle. The first drive unit 100 has three electrodes. One electrode is arranged on the substrate 300. The other electrode is arranged on the second mirror layer 302. The middle electrode 808 is arranged between the two other electrodes. Thus, the middle electrode 808 can be pulled towards the second mirror layer 302 or towards the substrate 300. The middle electrode 808 is rigidly connected to the stop device 314. The stop device 314 has a stop in the direction of the substrate 300 and a stop in the direction of the second mirror layer 302. Due to the flexible bridge 800, the first mirror element 202 does not have a defined stable rest position. Because of the stop device 314, the first mirror element 202 has two defined deflected positions.Here, the first mirror element 202 is shown deflected towards the second mirror layer 302. The gap height 104 is small.

[0054] The second drive unit 102 has two opposing electrodes. One of the electrodes is directly coupled to the first mirror element 202 and arranged within the second spring system 310. The other electrode is arranged in the plane of the second mirror layer 302.

[0055] In one embodiment, the interferometer 200 has, as in the Fig. 5 and Fig. 6 a third spring system 500 integrated into the second mirror layer 302. The third spring system 500 decouples the second mirror element 206 from the plane of the second mirror layer 302.

[0056] Fig. Figure 10 shows a representation of an interferometer 200 according to an exemplary embodiment. The interferometer corresponds to the one in Fig. The interferometers shown are 9. Here, the first mirror element 202 is shown in its second deflected, defined position. The slit height 104 is at its maximum.

[0057] The Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9 to Fig. Figure 10 primarily shows embodiments with dual capacitive or electrostatic actuators 100, 102. Analogous embodiments with piezoelectric, thermal, and / or capacitive actuators in any combination, for example, electrostatic and piezoelectric, are also conceivable. The deflection of at least one of the mirror elements 202, 206 can be effected via the actuators 100, 102 in the same direction, in the opposite direction, or in both directions. In this way, nonlinearities in the actuators can be compensated.

[0058] In one embodiment, the mirror elements 202 and 206 can be moved both towards and away from each other. This creates, for example, a larger tunable measuring range when using capacitive control, by increasing the first electrostatic gap by 30% and the second electrostatic gap by a further 30%.

[0059] In a design with two independent electrostatic actuation mechanisms 100, 102, it may be advantageous to use a smaller electrostatic gap for the coarse control than for the fine control, in order to be able to snap one of the mirrors 202, 206 into its measuring position more easily, i.e. with less control voltage, via the coarse control.

[0060] For each actuation mechanism 100, 102 there exists a corresponding spring system 308, 310 in at least one of the mirror elements 202, 206, so that the spring can be designed, for example, with respect to a restoring force suitable for the actuation mechanism 100, 102.

[0061] Fig. Figure 11 shows a flowchart of a method 1100 for operating an interferometer according to an exemplary embodiment. The method 1100 includes a step 1102 of adjustment, in which a slit width of a resonator slit of the interferometer between a first mirror element of the interferometer and a second mirror element of the interferometer is adjusted using a first drive unit and / or a second drive unit.

[0062] In other words, it shows Fig.11 A flowchart of a method for tuning a Fabry-Perot interferometer with at least two independently actuated adjustment systems, characterized in that a first digital adjustment system is used to move a first element or mirror element into one of two or more defined positions by discrete actuation, while a second, analog adjustment system is used to quasi-continuously change the distance between the mirror elements. Spacers are used to define the discrete positions of the first mirror element. The actuation mechanism can be piezoelectric, capacitive, or thermal.

[0063] If an embodiment includes an “and / or” connection between a first feature and a second feature, this is to be read as meaning that the embodiment according to one embodiment has both the first feature and the second feature, and according to another embodiment either only the first feature or only the second feature.

Claims

[1] Interferometer (200) comprising a first mirror element (202) and a second mirror element (206) spaced apart from the first mirror element (202) by an adjustable resonator slit (204), wherein the interferometer (200) has the following features: A first drive device (100) configured to adjust a gap height (104) of the resonator gap (204), wherein the first drive device (100) has a first adjustment range (208) and wherein the first drive device (100) is configured to switch between a first gap height range (106) and a second gap height range (108); and a second drive device (102) designed to adjust the gap height (104), wherein the second drive device (102) has a second adjustment range (210) that complements and / or extends the first adjustment range (208) and is designed to adjust the gap height (104) within the gap height ranges (106, 108). [2] Interferometer (200) according to claim 1, wherein the first adjustment range (208) has at least one discrete end position. [3] Interferometer (200) according to claim 2, wherein the end position is determined by a stop device (314), the stop device (314) being coupled to the first drive device (100). [4] Interferometer (200) according to claim 3, in which a first spring device (308) is arranged between the stop device (314) and a substrate (300) of the interferometer (200). [5] Interferometer (200) according to claim 4, in which a second spring device (310) is arranged between the stop device (314) and the first mirror element (202). [6] Interferometer (200) according to one of the preceding claims, wherein the first drive device (100) is coupled to the first mirror element (202), the first mirror element (202) being coupled to a substrate (300) of the interferometer (200) via a first spring device (308). [7] Interferometer (200) according to one of the preceding claims, wherein the second drive unit (102) is coupled to the second mirror element (206). [8] Interferometer (200) according to claim 7, wherein the second drive unit (102) is further coupled to the first mirror element (202). [9] Method (1100) for operating an interferometer (200) according to any one of the preceding claims 1 to 8, wherein in a step (1102) of setting a slit width (104) of a resonator slit (204) of the interferometer (200) between a first mirror element (202) of the interferometer (200) and a second mirror element (206) of the interferometer (200) is set using a first drive device (100) and / or a second drive device (102), wherein the first drive device (100) is used to switch between a first slit height range (106) and a second slit height range (108), and the second drive device (102) is used to set the slit height (104) within the slit height ranges (106, 108). [10] Computer program configured to perform the method (1100) according to any one of the preceding claims. [11] Machine-readable storage medium on which the computer program according to claim 10 is stored.

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