MEMS converter

Abstract

A MEMS transducer 100, 200 is proposed, preferably configured as a vertical MEMS loudspeaker. The MEMS transducer 100, 200 comprises: a stationary unit 110 and a movable displacement unit 105, which are coupled together, a combination unit comprising a damping unit 235 and / or a drive unit, wherein the combination unit is arranged between the stationary unit 110 and the movable displacement unit 105, wherein the movable displacement unit 105 and / or the damping unit 235 of the combination unit are designed to interact with a fluid 140 surrounding the stationary unit 110 and / or the displacement unit 105 and / or the damping unit 235 of the combination unit, and wherein the combination unit comprising damping unit 235 is designed to effect an essentially linear damping behavior of the MEMS transducer 100, 200, i.e. a damping behavior independent of a deflection 10 of the displacement unit 105, based thereon.

Description

[0001] The invention relates to a MEMS converter which is designed, for example, as a loudspeaker, microphone or pump. State of the art

[0002] A MEMS converter is known from document US 10,457,544 B2.

[0003] The object of the invention is to provide an improved MEMS converter.

[0004] This object is solved by the independent claim. Further advantageous embodiments of the invention are the subject of the dependent claims. Disclosure of the invention

[0005] A MEMS (micro electromechanical system) converter is proposed, preferably designed as a MEMS loudspeaker. The MEMS converter comprises: a fixed unit and a movable displacement unit (membrane) which are coupled together, a combination unit comprising a damping unit and / or a drive unit, wherein the combination unit is arranged between the fixed unit and the movable displacement unit, wherein the movable displacement unit and / or the combination unit are designed to interact with a fluid surrounding the fixed unit and / or the displacement unit and / or the combination unit, and The damping unit and / or drive unit comprising the combination unit is designed to effect a substantially linear damping behavior of the MEMS transducer, i.e., a damping behavior independent of a deflection of the displacement unit. Substantially linear damping behavior can be understood as predominantly linear damping behavior. The stationary unit can, for example, correspond to the fixed part of the MEMS transducer, e.g., a substrate wafer, and the displacement unit can correspond to the movable part, i.e., the membrane.

[0006] The proposed MEMS converter 100, 200 can form a layered system, wherein the stationary unit and the displacement unit can each be configured as layers. Furthermore, the combination unit, comprising the drive unit and / or the damping unit, can be configured as one or more layers.

[0007] A key challenge for MEMS-based loudspeakers is achieving the highest possible SPL (Sound Pressure Level), whereby this performance parameter (SPL) should be as uniform or constant as possible across the human audible frequency range, i.e., the frequency range between 20 Hz and 20 kHz. In addition to the characteristic SPL parameter, sound quality—expressed in the performance parameter THD (total harmonic distortion)—represents another acoustic requirement for the MEMS transducer.

[0008] Such resonant behavior of the system leads to uncompensable peaks and / or dips in the SPL versus frequency response. Furthermore, such peaks and dips can be reduced or optimized with sufficiently high damping (adjusting the resonator Q). Previously known MEMS-based loudspeakers feature structures that, in addition to their primary function, also influence the damping of the MEMS transducer / loudspeaker. These previously used structures exhibit damping characteristics of a primarily nonlinear nature (i.e., dependent on the displacement element or membrane displacement). The nonlinear damping behavior has a detrimental effect on the THD performance parameter, i.e., the sound quality.

[0009] Through the design of the proposed damping element, the linear behavior and quality of the resonator system, i.e., the proposed MEMS transducer, can be advantageously adjusted such that the resonance behavior lies outside the relevant frequency range, for example, and has no significant negative impact on the sound quality. Thus, the acoustic requirements of the MEMS transducer can be advantageously met. The displacement element, as a membrane, can be oriented planarly or vertically. Alternatively, multiple displacement elements or multiple membranes can be arranged, which can move relative to one another.

[0010] It should be noted that MEMS transducers with multiple diaphragms moving relative to each other form a so-called volume element between two adjacent diaphragms. The formation of such a volume element limits the displacement, or amplitude, of the diaphragm, which in turn contradicts the idea of ​​scaling SPL by multiplying the number of diaphragms. Furthermore, before a diaphragm collides with a neighboring diaphragm, another effect occurs: nonlinear squeeze film damping. This nonlinear effect can result in nonlinear distortion at diaphragm movement amplitudes in the range of 10%-20% of the gap distance to the neighboring diaphragm. This leads to an increase (deterioration) in the system's total harmonic distortion (THD) performance parameter, which is undesirable for audio applications.Based on the use and design of the proposed damping unit, the acoustic requirements for the MEMS transducer can be advantageously met in the MEMS transducer even when using several adjacent displacement elements or membranes.

[0011] In a further embodiment, the damping unit and the drive unit of the combination unit are spatially separated. The drive unit is arranged between the stationary unit and the movable displacement unit. This advantageously prevents large and possibly particle-laden fluid volumes (e.g., air volumes if the fluid is air) from flowing through an area with high field strengths (provided the physical operating principle of the drive and / or damping unit of the combination unit is based, for example, on an electrostatic operating principle) and the drive unit from becoming contaminated.

[0012] In a further embodiment, the damping unit and / or the drive unit of the combination unit are based on an electrostatic and / or piezoelectric and / or electrodynamic and / or thermoelectric and / or magnetostrictive and / or electromagnetic operating principle. This allows known physical operating principles to be utilized particularly easily and advantageously, and appropriate materials or functional layers can be used for them. Furthermore, this allows for the greatest possible flexibility in the design of the proposed combination unit, comprising the damping unit and / or drive unit.

[0013] In a further embodiment, the MEMS converter, provided that the combination unit comprises at least the damping unit and that the damping unit is based on an electrostatic operating principle, has a plurality of actuator elements designed as electrodes. The plurality of actuator elements designed as electrodes are designed to engage with one another and are each arranged on one side of the displacement unit and on one side of the stationary unit. A fluid chamber containing fluid is formed between the interlocking electrodes. The interlocking electrodes are each supplied with voltage signals in order to displace the fluid from the fluid chamber upon deflection of the displacement unit and to generate a damping force acting on the electrodes and / or the displacement unit, which brings about a linear damping behavior of the MEMS converter.This allows the MEMS converter to be designed to be very compact.

[0014] In a further embodiment, the MEMS converter, provided the combination unit comprises at least the drive unit and the drive unit is based on an electrostatic operating principle, has a plurality of actuator elements designed as electrodes. At least a first electrode pair and a second electrode pair are spaced apart from one another and each connected on one side to the stationary element. A fluid chamber containing fluid is formed between the first electrode pair and the second electrode pair. An individual electrode is connected to the displacement unit on one side and is designed to protrude at least partially into the fluid chamber on one side.The first and second electrode pairs and the single electrode are each subjected to voltage signals to generate a driving force for the deflection of the displacement unit. Upon deflection of the displacement unit, the fluid is displaced from the fluid chamber and a damping force acting on the first and second electrode pairs and / or the single electrode and / or the displacement unit is generated, resulting in a linear damping behavior of the MEMS transducer. Advantageously, the proposed MEMS transducer can thus be designed to be particularly simple and compact, and the acoustic requirements can be reliably met.

[0015] In a further embodiment, if the combination unit comprises the damping unit and the drive unit and these are each based on an electrostatic operating principle, the MEMS converter has a plurality of actuator elements designed as electrodes. Several electrodes of the plurality of electrodes are assigned to the damping unit and several electrodes of the plurality of electrodes are assigned to the drive unit of the combination unit. At least a first electrode pair and a second electrode pair, which are assigned to the drive unit of the combination unit, are spaced apart from one another and each connected on one side to the stationary element. A fluid chamber containing fluid is formed between the first electrode pair and the second electrode pair.A single electrode, assigned to the drive unit of the combination unit, is connected to the displacement unit on one side and is designed to extend at least partially into the fluid chamber on one side. The first and second pairs of electrodes and the single electrode, assigned to the drive unit of the combination unit, are each supplied with voltage signals to generate a driving force for deflecting the displacement unit. The electrodes assigned to the damping unit of the combination unit are designed to mesh with one another and are arranged on one side of the displacement unit and on one side of the stationary unit.Between the electrodes assigned to the damping unit of the combination unit, additional fluid chambers are formed with fluid to displace the fluid from the fluid chamber and / or the additional fluid chambers upon deflection of the displacement unit and to generate a damping force acting on the electrodes of the damping unit and / or the drive unit of the combination unit and / or the displacement unit, which results in a linear damping behavior of the MEMS transducer. Advantageously, the proposed MEMS transducer can thus be designed particularly simply and compactly, and the acoustic requirements can be reliably met.

[0016] In a further embodiment, the plurality of actuator elements configured as electrodes and / or the displacement unit and / or the stationary unit each have openings that are permeable to the fluid. This can advantageously further support the essentially linear damping behavior of the MEMS converter, since the openings can each form damping elements.

[0017] In a further embodiment, the stationary unit and the movable displacement unit are arranged in one plane. A deflection of the displacement unit (membrane) occurs perpendicular to the plane in which the stationary unit and / or the movable displacement unit are arranged. Advantageously, the proposed MEMS transducer or loudspeaker thus forms a vertical MEMS transducer designed as a loudspeaker. The displacement and / or compression of the fluid thus occurs vertically to the plane in which the displacement unit or membrane is arranged.

[0018] In another embodiment, a deflection direction of the movable displacement unit corresponds to a sound propagation direction. This is advantageous for resulting near-field loudspeakers. Only in this case does a sound propagation direction exist. If the MEMS transducer is designed as an in-ear loudspeaker, there is no sound propagation or no sound propagation direction. This is because the space in which the sound is transmitted from the loudspeaker to the eardrum is too small to allow wave propagation (similar to the principle of an air pump that is held closed by a hose).

[0019] In a further embodiment, the stationary unit and the movable displacement unit are mechanically coupled to one another via a spring unit. The spring unit has at least one spring element that is connected on one side to the stationary unit and on one side to the movable displacement unit and / or is arranged in a recess in the displacement unit. This advantageously provides a restoring force for the movable displacement unit. Furthermore, transverse movement of the movable displacement unit can be avoided by using a sufficiently rigid spring unit. Guide elements can optionally be used in the MEMS converter to prevent transverse movement.

[0020] In another embodiment, the MEMS transducer is designed as a loudspeaker, microphone, or pump. This advantageously enables a wide range of applications using the proposed damping unit and / or drive unit. If the MEMS transducer is designed as a microphone, beams, for example, can be equipped with position-sensing elements (e.g., piezoresistive, piezoelectric, capacitive, etc.) instead of actuating elements or actuators as the drive unit.

[0021] The above-described properties, features, and advantages of this invention, as well as the manner in which they are achieved, will become clearer and more readily understood in connection with the following description of exemplary embodiments, which are explained in more detail in conjunction with the schematic drawings. They show: Fig. 1a a schematic representation of a MEMS converter in plan view; Fig. 1b a schematic cross-sectional view of the MEMS converter in Fig. 1a with a combination unit comprising a drive and / or damping unit; Fig. 2 a schematic representation of a proposed first embodiment for the combination unit in Fig. 1b; Fig. 3 a schematic representation of a proposed second embodiment for the combination unit in Fig. 1b; Fig. 4a is a schematic representation of a proposed third embodiment for the combination unit in Fig. 1b; Fig. 4b a schematic representation of a proposed alternative to the combination unit in Fig. 4a; and Fig. 5 another schematic cross-sectional view of a MEMS converter.

[0022] Please note that the figures are merely schematic and not to scale. Therefore, components and elements shown in the figures may be exaggerated or reduced in size for clarity. Furthermore, please note that the reference numerals in the figures have been chosen to be unchanged or similar when referring to identical or similarly designed elements and / or components.

[0023] Fig. Figure 1a shows a schematic representation of a MEMS converter 100, 200 in plan view and illustrates a plane 5 in which a fixed unit 110 and a movable displacement unit 105, 205 of the MEMS converter 100, 200 (also shown in the following figures) are arranged. Plane 5 can be considered as at least one wafer plane, and the fixed unit 110 and the displacement unit 105, 205 each correspond to layers. It is also conceivable that the combination unit described below, comprising a drive unit and / or a damping unit, is formed as one or more layers, so that the proposed MEMS converter 100, 200 forms a layer system. The movable displacement unit 105, 205 of the following figures is each formed as a membrane of the MEMS converter 100, 200.A deflection of the displacement unit 105, 205 occurs perpendicular to the plane 5 in which the fixed unit and the movable displacement unit 105, 205 are arranged. A deflection direction 10 is shown schematically in . Fig. 1a and the following figures.

[0024] The MEMS converter 100, 200 can be designed as a loudspeaker, microphone, or pump. The MEMS converter 100, 200 is preferably designed as a MEMS loudspeaker and, due to the deflection direction 10 explained above, in particular as a so-called vertical MEMS loudspeaker.

[0025] Fig. Figure 1b shows a schematic cross-sectional view along section line 15 of the MEMS converter 100 in Fig. 1a with a combination unit comprising a drive and / or damping unit 130, 135. The MEMS transducer 100 preferably forms a MEMS loudspeaker and, as mentioned above, a vertical MEMS loudspeaker due to the deflection of the movable displacement unit 105 along the deflection direction 10. The MEMS transducer 100 or MEMS loudspeaker has a fixed unit 110 and a movable displacement unit 105 designed as a membrane, which are coupled to one another. The displacement unit 105 can form an upper side of the MEMS transducer 100 or chip, but this is not mandatory.

[0026] The fixed unit 110 and the movable displacement unit 105 are mechanically coupled to one another via a spring unit 115 to provide a restoring force for the displacement unit 105 during its deflection 10. The spring unit 115 has a first spring element 120, which is connected on one side to the fixed unit 110 and on one side to the movable displacement unit 105. The spring unit 115 further has a second spring element 125, which is connected on one side to the fixed unit 110 and on one side to the movable displacement unit 105.

[0027] The MEMS transducer 100 or MEMS loudspeaker also has the above-mentioned combination unit, comprising a drive and / or damping unit 130, 135, wherein the drive mechanism of the movable displacement unit 105 as a membrane is based on a physical operating principle, which will be explained with reference to the following figures.

[0028] The combination unit, comprising the drive and / or damping unit 130, 135, is arranged between the stationary unit 110 and the displacement unit 105. The displacement unit 105 and / or the damping unit 130 are designed to interact with a fluid 140 surrounding the stationary unit 110 and / or the displacement unit 105 and / or the damping unit 130 and / or the drive unit 135. The fluid 140 can be, for example, air, but is not limited thereto. A signal (current or voltage) applied to the displacement unit 105, which is designed as a membrane, can have a temporal variation, which is translated into a temporal variation of a deflection of the displacement unit 105. The vertical movement of the displacement unit 105 can then be transmitted into the surrounding fluid 140 in the form of sound.

[0029] If the fluid 140 corresponds to air, the vertical movement of the displacement unit 105 displaces the air and changes the air pressure on the upper side of the MEMS converter 100, within the MEMS converter 100, i.e., between the fixed unit 110 and the displacement unit 105, as well as on the rear side of the MEMS converter 100 due to openings 145 on the fixed unit 110. The opening 145 of the fixed unit 110 is optional. If it is omitted, the above-mentioned area between the fixed unit 110 and the displacement unit 105 can be considered the rear volume. The aforementioned openings 145 can influence the damping behavior of the MEMS converter 100.

[0030] The acoustic performance (acoustic requirement) of a MEMS loudspeaker is largely determined by: • a high and constant SPL (SPL: Sound Pressure Level) across the frequency range of the human audible range, ie over the frequency range 20Hz... 20kHz • High sound quality expressed by low THD (THD: total harmonic distortion). Existing concepts have limitations in this regard. A key aspect, or rather the physical cause, of the limitations of previous concepts regarding the requirement of a constant SPL across the entire frequency range is that the MEMS converter exhibits undesirable resonant frequencies in the frequency range under consideration. Such resonance behavior of the MEMS converter leads to uncompensable peaks and / or dips in the SPL performance parameter over the frequency.

[0031] Furthermore, such peaks and / or dips can be reduced or optimized by sufficiently high damping (adapting the resonator quality). Previously known MEMS-based loudspeakers have structures that, in addition to their primary function, also influence the damping of the MEMS transducer 100. These previously used structures have a damping characteristic of a primarily nonlinear nature, i.e., dependent on the deflection of the membrane, i.e., the displacement unit 105. However, the nonlinear behavior of the damping has a detrimental effect on the performance parameter THD, i.e., the sound quality.

[0032] The proposed MEMS converter 100 differs from previous concepts in that the damping unit 130 used causes a substantially linear (i.e., with predominantly linear characteristics) damping behavior of the MEMS converter 100, i.e., a damping behavior that is independent of a deflection of the displacement unit 105 along the deflection direction 10, based on the structure of the damping unit 130 and the interaction with the above-mentioned surrounding fluid 140. The proposed structure of the damping unit 130 will be explained in more detail with reference to the following figures.

[0033] The displacement unit 105 designed as a membrane can also have openings 150 that are permeable to the fluid 140 and can thus have an additional influence on the damping behavior of the MEMS converter 100.

[0034] Fig. Figure 2 shows a schematic representation of a proposed first embodiment for the combination unit in Fig. 1b, comprising the damping unit 235. The damping unit 235 in Fig. 2 is based on an electrostatic operating principle and, for this purpose, comprises a plurality of actuator elements 255, which are designed as electrodes 257. The electrodes 257 are further configured to engage 265 with one another, i.e., to form electrode combs or electrode fingers that engage or protrude into one another. For this purpose, the electrodes 257 are each arranged on one side of the displacement unit 105 and on one side of the stationary unit 110.

[0035] The electrostatic operating principle of the damping unit 235 in Fig. 2 is based on the force that arises between the two planar electrodes 257 (comb electrodes) with different electrical potentials, serving as actuator elements 255. In the simplest case, the arrangement corresponds to a plate capacitor, with one of the two plates being movably suspended due to the connection to the displacement unit 105. When a voltage is applied, the displacement unit 105 (membrane) warps in the direction 10 of the counter electrode, which is connected to the stationary unit 110.

[0036] Fluid chambers 259 are formed between the displacement unit 105 and the stationary unit 110 in order to displace the fluid 140 as a fluid flow 263 from the fluid chambers 259 during the deflection 10 of the displacement unit 105 and to generate a damping force acting on the electrodes 257 of the damping unit 235 and / or the displacement unit 105, which damping force causes a linear damping behavior (which can have slide film damping components, for example in the region of the intermeshing 265 electrodes 257 and / or narrow region damping components, for example in the region of the intermeshing 265 electrodes 257 and / or in the region of the fluid flow 263 through the opening 260) of the MEMS converter 100. The fluid chambers 259 can correspond to air chambers, so that the air can flow through the electrode gap and / or the optional openings 260 as fluid 140 or fluid stream 263. The openings 260 can also form damping elements, as mentioned above.contribute advantageously to the essentially linear damping behavior of the MEMS converter.

[0037] For example, the fluid chambers can each have a width of approximately 5 µm. However, different dimensions are also conceivable.

[0038] Optionally, the electrodes 257, which are connected on one side to the fixed unit 110, can be designed as a perforated matrix into which the electrodes 257, which are connected on one side to the displacement unit 105, protrude.

[0039] Fig. Figure 3 shows a schematic representation of a proposed second embodiment 335 for the combination unit in Fig. 1b. The combination unit in Fig. 3 has at least the drive unit 330. The physical operating principle can preferably also correspond to the electrostatic operating principle explained above.

[0040] In addition to the electrostatic operating principle, the combination unit (as well as a spatially separated drive unit of the combination unit in Fig. 4a and b) in alternative, not shown embodiments, also based on a piezoelectric (utilizing the inverse piezoelectric effect for a piezoelectric functional layer) and / or electrodynamic (utilizing a force effect experienced by a soft magnetic material in a variable magnetic field (gradient)) and / or thermoelectric (based on a cold and a warm functional layer) and / or magnetostrictive (based on a contraction or expansion of a functional layer in the presence of a magnetic field) and / or electromagnetic principle (utilizing the Lorentz force). It is understood that this also applies to the figures explained above and the following figures.

[0041] The actuator elements 355, designed as electrodes 357, comprise a first electrode pair 367, a second electrode pair 369, and a single electrode 370. The first electrode pair 367 and the second electrode pair 369 are each connected on one side to the stationary unit 110 and can each be designed as balanced comb electrodes. Balanced refers to the applied potential or the applied signal, for example, a DC voltage signal. To apply the potential to the individual electrodes of an electrode pair 367, 369, a separating layer, e.g., an oxide layer or an air gap, can be formed between the individual electrodes.

[0042] A fluid chamber 359 is formed between the first electrode pair 367 and the second electrode pair 369. The fluid chamber 359 or its width or the distance between the first and second electrode pairs 367, 369 can be, for example, approximately 1 µm. However, different dimensions are also conceivable. The individual electrode 370 is connected to the displacement unit 105 on one side and is designed to protrude at least partially into the fluid chamber 359 on one side. The individual electrode can be supplied with an alternating voltage signal in order to produce a driving force for deflecting the displacement unit 105 and in order to displace the fluid 140 from the fluid chamber upon deflection of the displacement unit 105.to cause a fluid flow 263 and to generate a damping force acting on the first and second electrode pair 367, 369 and / or the single electrode 370 and / or the displacement unit 105, which causes a linear damping behavior of the MEMS converter 100. The damping can therefore be similar to . Fig. 2 must be implemented.

[0043] Fig. Figure 4a shows a schematic representation of a proposed third embodiment for the combination unit in Fig. 1b, which in Fig. 4a has a drive unit 430 and a damping unit 435. In contrast to the previous figures, the drive unit 435 is spatially separated from the damping unit 430 of the combination unit. The drive unit 435 is also arranged between the displacement unit 105 and the stationary unit 110 and could also be positioned in an alternative embodiment at the location of the damping unit 430 and the damping unit 430 at the location of the drive unit 435. The operating principle of the drive unit 435 (and / or the damping unit 430) can be designed as described above, preferably electrostatically, wherein the drive unit 435 is similar to the explanation in Fig. 3 (and comprise balanced comb electrodes or two electrode pairs 467, 469 and a single electrode 370) and the damping unit 430 similar to the explanation in Fig. 2, therefore, reference is made to the above description. In contrast to the previous figures, in Fig. 4a additional fluid chambers 459 and a different opening 460 of the actuator element designed as an electrode or, as shown, as the first electrode pair 467.

[0044] Fig. Figure 4b shows a schematic representation of a proposed alternative to the combination unit in Fig. 4a. In contrast to Fig. 4a, the actuator elements 255 of the damping unit 435 of the combination unit, which are designed as electrodes, can be Fig. 4b each have openings 260 that are permeable to the fluid 140. The above explanation applies to the openings 260.

[0045] Fig. 5 shows a further schematic cross-sectional view of a MEMS converter 200. It is understood that the features described above are also fully applicable to the MEMS converter 200. In contrast to Fig. 1b, the spring unit 215 can be Fig. 5 comprise a first and second spring element 220, 225, wherein the second spring element 225 can be arranged in a recess 227 of the displacement unit 105. It is understood that, in a different embodiment not shown, both spring elements 220, 225 can also be arranged in recesses of the displacement unit 105.

[0046] To prevent a transverse movement of the MEMS converter 100, 200 during the movement of the membrane designed as a displacement unit 105, at least one guide element (not shown) can optionally be used.

[0047] The invention has been described in detail using preferred embodiments. Instead of the described embodiments, further embodiments are conceivable, which may include further modifications or combinations of the described features. For this reason, the invention is not limited to the disclosed examples, since other variations may be derived therefrom by a person skilled in the art without departing from the scope of the invention. QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] US 10,457,544 B2

[0002]

Claims

[1] MEMS converter (100, 200), comprising: a fixed unit (110) and a movable displacement unit (105, 205) which are coupled together, a combination unit comprising a damping unit (135, 235, 335, 435) and / or a drive unit (130, 330), wherein the combination unit is arranged between the fixed unit (110) and the movable displacement unit (105, 205), wherein the movable displacement unit (105, 205) and / or the combination unit are designed to interact with a fluid (140) surrounding the fixed unit (110) and / or the displacement unit (105, 205) and / or the combination unit, and wherein the damping unit (135, 235, 335, 435) and / or drive unit (130, 330) comprising the combination unit is designed to effect a substantially linear damping behavior of the MEMS converter (100, 200), i.e. a damping behavior independent of a deflection (10) of the displacement unit (105, 205), based thereon. [2] MEMS converter according to claim 1, wherein the damping unit (135, 235, 335, 435) and / or the drive unit (130, 330, 430) of the combination unit are based on an electrostatic and / or piezoelectric and / or electrodynamic and / or thermoelectric and / or magnetostrictive and / or electromagnetic operating principle. [3] MEMS converter according to claim 2, wherein, if the combination unit comprises at least the damping unit (135, 235, 335, 435) and if the damping unit (135, 235, 335, 435) is based on an electrostatic operating principle, the MEMS converter (100, 200) has a plurality of actuator elements (255) which are designed as electrodes, wherein the actuator elements (255) formed as a plurality of electrodes are designed to engage one another (265) and are each arranged on one side of the displacement unit (105, 205) and on one side of the fixed unit (110), wherein a fluid chamber (259) with fluid (140) is formed between the interlocking electrodes (265), wherein the interlocking electrodes (265) are each subjected to voltage signals in order to displace the fluid (140) from the fluid chamber (259) upon a deflection (10) of the displacement unit (105, 205) and to generate a damping force acting on the electrodes and / or the displacement unit (105, 205), which causes a linear damping behavior of the MEMS converter (100, 200). [4] MEMS converter according to claim 2, wherein, if the combination unit comprises at least the drive unit (130, 330) and if the drive unit (130, 330) is based on an electrostatic operating principle, the MEMS converter (100, 200) has a plurality of actuator elements (355) which are designed as electrodes, wherein at least a first pair of electrodes (367) and a second pair of electrodes (369) are spaced apart from each other and are each connected on one side to the fixed element (110), wherein a fluid chamber (359) with fluid (140) is formed between the first electrode pair (367) and the second electrode pair (369), wherein a single electrode (370) is connected on one side to the displacement unit (105, 205) and is designed to protrude at least partially into the fluid chamber (359) on one side, wherein the first and second electrode pairs (367, 369) and the individual electrode (370) are each subjected to voltage signals in order to effect a driving force for the deflection (10) of the displacement unit (105, 205) and in order to displace the fluid (140) from the fluid chamber (359) during the deflection (10) of the displacement unit (105, 205) and to generate a damping force acting on the first and second electrode pairs (367, 369) and / or the individual electrode (370) and / or the displacement unit (105, 205), which damping force effects a linear damping behavior of the MEMS transducer (100, 200). [5] MEMS converter according to one of claims 2 to 4, wherein, if the combination unit comprises the damping unit (235, 435) and the drive unit (430) and these are each based on an electrostatic operating principle, the MEMS converter (100, 200) has a plurality of actuator elements (255, 355) which are designed as electrodes, wherein a plurality of electrodes of the plurality of electrodes of the damping unit (235, 435) and a plurality of electrodes of the drive unit (430) are assigned to the combination unit, wherein at least a first pair of electrodes (467) and a second pair of electrodes (469) associated with the drive unit (430) of the combination unit are spaced apart from one another and are each connected on one side to the fixed element (110), wherein a fluid chamber (359) with fluid is formed between the first electrode pair (467) and the second electrode pair (469), wherein a single electrode (370) assigned to the drive unit (430) of the combination unit is connected on one side to the displacement unit (105, 205) and is designed to protrude at least partially into the fluid chamber (359) on one side, wherein the first and second pair of electrodes (467, 469) and the single electrode (470) associated with the drive unit (430) of the combination unit are each supplied with voltage signals to cause a driving force for deflecting (10) the displacement unit (105, 205), wherein the electrodes assigned to the damping unit (235, 435) of the combination unit are designed to engage with each other (265) and are arranged on one side of the displacement unit (105, 205) and on one side of the fixed unit (110), wherein between the electrodes assigned to the damping unit (235, 435) of the combination unit, further fluid chambers (459) with fluid (140) are formed in order to displace the fluid (140) from the fluid chamber (359) and / or the further fluid chambers (459) upon deflection (10) of the displacement unit (105, 205) and to generate a damping force acting on the electrodes of the damping unit (235, 435) of the combination unit and / or the drive unit (430) of the combination unit and / or the displacement unit (105, 205), which brings about a linear damping behavior of the MEMS transducer (100, 200). [6] MEMS converter according to claim 5, wherein the damping unit (235, 435) and the drive unit (430) of the combination unit are spatially separated. [7] MEMS converter according to one of claims 3 to 6, wherein the plurality of actuator elements (255, 355) designed as electrodes and / or the displacement unit (105, 205) and / or the fixed unit (110) each have openings (145, 150, 260, 360, 460) which are permeable to the fluid (140). [8] MEMS converter according to one of the preceding claims, wherein the fixed unit (110) and the movable displacement unit (105, 205) are arranged in a plane (5), wherein a deflection (10) of the displacement unit (105, 205) takes place perpendicular to the plane (5) in which the fixed unit (110) and / or the movable displacement unit (105, 205) are arranged. [9] MEMS converter according to one of the preceding claims, wherein the fixed unit (110) and the movable displacement unit (105, 205) are mechanically coupled to one another via a spring unit (115, 215), wherein the spring unit (115, 215) has at least one spring element (120, 125, 220, 225) which is connected on one side to the fixed unit (110) and on one side to the movable displacement unit (105, 205) and / or is arranged in a recess (227) of the displacement unit (205). [10] MEMS converter according to one of the preceding claims, wherein the MEMS converter (100, 200) is designed as a loudspeaker, microphone or pump.

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