Laser device and laser processing machine

Abstract

A laser device comprises: a laser module that outputs a plurality of laser beams; and a beam combining module that combines the plurality of laser beams into a combined beam, which is a laser beam with a single optical axis, wherein the laser module comprises a plurality of laser beam sources, a plurality of first optical transmission systems, and a first housing. Each of the plurality of first optical transmission systems is provided for an associated one of the plurality of laser beam sources and shapes one of the laser beams output from the plurality of laser beam sources into parallel light or a nearly parallel light state. The first housing contains the plurality of laser beam sources and the plurality of first optical transmission systems and has a sealed interior having a window through which the laser beams output from the plurality of laser beam sources pass.The first housing is detachable from the beam merging module. The first housing and / or the beam merging module comprise a positioning element that positions the first housing relative to the beam merging module.

Description

Area

[0001] The present disclosure relates to a laser device that outputs laser light and a laser processing machine. background

[0002] Conventionally, a laser device that outputs a high-power laser beam has been proposed. Patent Literature 1 discloses a laser device including a first housing containing a plurality of laser modules including laser diodes, and a second housing containing an optical condenser system for condensing laser beams from the plurality of laser modules. In the laser device described in Patent Literature 1, a fast-axis collimator and a polarizing plate are provided for each of the laser modules in the first housing, and a slow-axis collimator is provided in the second housing. The first housing and the second housing are provided in contact with each other, and a port for communication is provided for each of the laser modules at a position through which the laser beam output from the laser module passes. Furthermore, the communication port has a window. Citation listPatent literature

[0003] Patent Literature 1: Japanese Patent Application, Publication No. 2019 - 192 756 Brief description of the inventionProblem to be solved by the invention

[0004] The higher the output power of the laser diode, the more easily the laser diode is affected by the surrounding environment, such as dust. Therefore, measures such as sealing the periphery of the laser diode are typically taken to prevent contamination of the emitting surface of the laser diode. Especially when replacing components, the surrounding environment is often poor due to dust in the air, etc., and it is necessary to consider reducing this influence. However, the aforementioned conventional technology has a problem in that the configuration of the laser module does not consider the influence of the surrounding environment, such as dust. Furthermore, when the laser device is installed in a laser processing machine, it is necessary to reduce the time for replacing components to reduce machine downtime.In the aforementioned conventional technique, an optical transmission system including the fast-axis collimator, the polarizing plate, and the slow-axis collimator for transmitting the laser beam output from the laser module to the converging optical system is distributed and sealed in the first housing and the second housing for each of the laser modules. Therefore, when replacing a set of components in the first housing, each optical component of the optical transmission system distributed in the first housing and the second housing needs to be adjusted, which has led to a problem that the time for replacing components cannot be reduced because the replacement work cannot be performed smoothly.

[0005] The present disclosure has been made in view of the above, and an object of the present disclosure is to provide a laser device configured to reduce the influence of the surrounding environment on a laser module upon replacement of components and to reduce the time of replacement of components, compared with the conventional technique. Means of solving the problem

[0006] To solve the above problem and achieve the object, a laser device of the present disclosure includes: a laser module that outputs a plurality of laser beams; and a beam combining module that combines the plurality of laser beams into a combined beam, which is a laser beam having a single optical axis. The laser module includes a plurality of laser beam sources, a plurality of first relay optical systems, and a first housing. The plurality of laser beam sources output the laser beams. Each of the plurality of first relay optical systems is provided for an associated one of the plurality of laser beam sources and shapes one of the laser beams output from the plurality of laser beam sources into parallel light or a near-parallel light state.The first housing contains the plurality of laser beam sources and the plurality of first optical transmission systems and has a sealed interior with a window through which the laser beams emitted by the plurality of laser beam sources pass. The first housing is detachable from the beam combining module. The first housing and / or the beam combining module include a positioning element that positions the first housing relative to the beam combining module. Effects of the invention

[0007] The laser device according to the present disclosure is configured to reduce the influence of the surrounding environment on the laser module when replacing components and to reduce the time of replacing components, compared with the conventional technique. Short description of the drawings Fig. 1 is a diagram schematically showing an example of a configuration of a laser device according to a first embodiment. Fig. 2 is a diagram schematically showing an example of a configuration of a laser device according to a second embodiment. Fig. 3 is a diagram schematically showing another example of a configuration of the laser device according to the second embodiment. Fig. 4 is a diagram schematically showing an example of a configuration of a laser processing machine according to a third embodiment. Description of embodiments

[0008] Hereinafter, a laser device and a laser processing machine according to embodiments of the present disclosure will be described in detail with reference to the drawings. First embodiment.

[0009] Fig. 1 is a diagram schematically showing an example of a configuration of a laser device according to a first embodiment. A laser device 1 includes a laser module 10 that outputs a plurality of laser beams L1, a beam combining module 30 that combines the plurality of laser beams L1 output from the laser module 10 into a combined beam L2, which is a laser beam with a single optical axis, a fiber coupling module 50 that couples the combined beam L2 into a transmission fiber 70, which is an optical fiber, and a laser diode driving power supply 60 that drives laser diode (LD) elements of the laser module 10. In the first embodiment, the laser module 10, the beam combining module 30, and the fiber coupling module 50 each have a structure with a sealed interior.In addition, the laser module 10, the beam combining module 30 and the fiber coupling module 50 are each detachable from one another.

[0010] The laser module 10 includes a housing 11, a plurality of LD units 12-1, 12-2, ..., and 12-n, a plurality of first optical transmission systems 13-1, 13-2, ..., and 13-n, power supply units 14, cables 15, a manifold 16, and tubes 17. Note that the character "n" is an integer of 2 or more. Further, in the following description, the plurality of LD units 12-1, 12-2, ..., and 12-n are referred to as LD units 12 unless individually distinguished. Similarly, the plurality of first optical transmission systems 13-1, 13-2, ..., and 13-n are referred to as first optical transmission systems 13 unless individually distinguished.

[0011] The housing 11 is a box-shaped member that houses the plurality of LD units 12 and the plurality of first optical transmission systems 13. In this example, the housing 11 has a hollow cuboid shape. The housing 11 has a configuration in which its interior is maintained airtight. The housing 11 includes therein an installation base 111 where the plurality of LD units 12 and the plurality of first optical transmission systems 13 are installed. The installation base 111 has reference shaft arrangement holes at positions where the LD units 12 are installed. The reference shaft arrangement hole is a hole into which a rod-shaped reference shaft 124 described later is inserted. A surface of the installation base 111 on which the LD units 12, the first optical transmission systems 13, and the like are installed is referred to as an installation surface.

[0012] The housing 11 has, on its side surface in contact with the beam merging module 30, an opening at a position where the laser beams L1 output from the plurality of LD units 12 go out. The housing 11 includes a sealed window 112 in the opening. A sealing member (not shown) is provided between an edge of the opening of the housing 11 and an outer peripheral portion of the window 112. According to an example, an O-ring as an example of the sealing member is placed at the outer peripheral portion of the window 112 through which the laser beams L1 do not pass, thereby sealing the opening of the housing 11. This can prevent leakage or inflow of gas through a gap between the housing 11 and the window 112, and can keep the interior of the housing 11 airtight.The window 112 is formed of a material through which the laser beams L1 output from the LD units 12 can pass. Although not shown, the housing 11 has an opening for passing the cables 15 at a position where the power supply units 14 are provided, and has an opening for passing the pipes 17 at a position where the manifold 16 is provided. The housing 11 corresponds to a first housing.

[0013] The LD unit 12 is a unit mounted on the installation base 111 inside the housing 11 and outputs the laser beam L1 having a predetermined wavelength. The plurality of LD units 12 are arranged in the laser module 10 and output the laser beams L1 having different wavelengths from each other. The LD unit 12 is positioned on the installation base 111 and fixed to the installation base 111 by inserting the reference shaft 124 into both the reference shaft mounting hole provided in advance in the installation base 111 and a reference shaft mounting hole provided on a rear surface of the LD unit 12.

[0014] The LD unit 12 includes a matching element 121, a heat sink 122, an LD bar 123 and the reference shaft 124.

[0015] The adjustment member 121 is a member on which the LD bar 123 is placed and fixed so that the laser beam L1 is emitted in a predetermined direction. The adjustment member 121 includes, on its rear surface, the reference shaft arrangement hole into which the reference shaft 124 is inserted in a direction perpendicular to an installation surface of the adjustment member 121. The rear surface of the adjustment member 121 is a surface in contact with the installation surface of the installation base 111. The adjustment member 121 is fixed to the installation base 111 such that the reference shaft 124 is inserted into both the reference shaft arrangement hole of the adjustment member 121 and the reference shaft arrangement hole of the installation base 111. By doing so, the adjustment member 121 is fixed and positioned on the installation base 111.The reference shaft mounting hole in the adjustment member 121 is provided at one end on the side where the laser beam L1 is output, and the installation base 111 is rotatable about the reference shaft 124 in the plane of the installation surface. This means that when the adjustment member 121 is rotated about the reference shaft 124 in the plane of the installation surface, the emission direction of the laser beam L1 can be changed.

[0016] The heat sink 122 is a heat dissipation element for preventing or reducing a temperature rise of the LD ingot 123 and is attached to the matching element 121. A flow path through which a cooling medium flows is provided within the heat sink 122. According to one example, the heat sink 122 includes a pipe connection portion 122a at one end on a side opposite the side where the laser beam L1 is output. The pipe connection portion 122a is connected to the pipe 17, which is connected to the manifold 16.

[0017] The LD bar 123 is a structure including an LD element that outputs the laser beam L1, and a cathode electrode and an anode electrode that supply power to the LD element, and is attached to the heat sink 122. The LD element is an edge-emitting laser that emits the laser beam L1 toward the first optical transmission system 13. Of the side surfaces of the LD element, the side surface facing the window 112 side of the case 11 is an emission surface from which the laser beam L1 is emitted. The side surface on a side opposite the emission surface is a reflection surface that reflects the laser beam L1. According to one example, the LD element uses gallium arsenide (GaAs) as a substrate and indium gallium arsenide (InGaAs) as an active layer. The LD bar 123 is the same as a laser diode bar.

[0018] The reference shaft 124 fixes the adjustment member 121 at a predetermined position on the installation base 111. According to one example, the reference shaft 124 is provided aligned with the position of the emission surface of the LD bar 123.

[0019] The LD unit 12, which is fixed to the installation base 111 via the reference shaft 124, rotates the adjustment member 121 around the reference shaft 124 in the plane of the installation surface of the installation base 111, thereby adjusting an optical axis of the laser beam L1 emitted from the LD bar 123. That is, the LD unit 12 has a structure that can be rotated around the emission surface when adjusting the direction of the optical axis of the laser beam L1 emitted from the emission surface. Note that the LD unit 12, which includes the LD bar 123, corresponds to a laser beam source that outputs a laser beam.

[0020] The first relay optical system 13 is an optical element mounted on the installation base 111 inside the housing 11 at a predetermined distance from the emission surface of the LD bar 123, is provided for an associated one of the plurality of LD units 12, and performs optical axis adjustment of the laser beam L1 output from the LD unit 12. According to one example, the first relay optical system 13 shapes the laser beam L1 output from the LD unit 12 into parallel light or a near-parallel light state. According to one example, the first relay optical system 13 includes a fast-axis collimator (SAC) and a slow-axis collimator (LAC). The SAC is an optical component that collimates a fast-axis component of the laser beam L1 emitted from the LD bar 123 of the LD unit 12.The LAC is an optical component that collimates a slow-axis component of the laser beam L1. Note that the first optical transmission system 13 may include other optical elements, such as a polarizing plate, that require little optical axis adjustment. The SAC corresponds to a first optical component, and the LAC corresponds to a second optical component.

[0021] In the conventional technique, the SAK and the LAK are housed in separate cases, so when adjusting an optical axis for replacing the LD bar or the like, both the case containing the SAK and the case containing the LAK need to be opened to perform the work. However, in the first embodiment, the SAK and the LAK are collectively arranged within the case 11 constituting the laser module 10. Therefore, because the SAK and the LAK are collectively arranged in a single case 11, when adjusting an optical axis of the LD unit 12 during assembly of the laser module 10, the work only needs to be performed in the single case 11, and is simpler than the conventional procedure.

[0022] The power supply unit 14 is a component that transmits the cable 15, which supplies power from the LD drive power supply 60 to the LD bar 123 of the LD unit 12. The power supply unit 14 is connected to the position of the opening (not shown) provided in the housing 11 via a sealing member 141, such as a gasket. A hermetic component can be used for the power supply element 14. Therefore, the LD drive power supply 60 and the LD bar 123 can be connected by a cable 61 and the cable 15. When the laser module 10 is detached, it is sufficient that the cable 61 is detached from the outside of the power supply unit 14. Note that for the sake of simplicity of description, Fig. 1 shows only two of the power supply units 14, however, enough power supply units 14 are provided to supply the power from the LD driver power supply 60 to the LD bars 123 via the cables 61 and 15.

[0023] The cables 15 electrically connect the power supply units 14 and the LD bars 123 of the LD units 12 within the housing 11. The cables 15 supply the power from the LD drive power supply 60, which will be described later, to the LD bars 123.

[0024] The distributor 16 is a transfer element that includes flow paths for supplying the cooling medium to the heat sinks 122 of the LD units 12. The distributor 16 is connected to the outside of the housing 11 by a sealing element 161, such as a gasket, and includes the flow paths branched to carry the cooling medium from a cooling device (not shown) to the heat sinks 122 of the LD units 12, and includes flow paths connected to return the cooling medium returning from the heat sinks 122 of the LD units 12 together to the cooling device. The distributor 16 includes, on its side surface connected to the housing 11, a plurality of pipe connection sections 162 associated with the heat sinks 122 of the LD units 12. The pipe connecting sections 162 are connected to the pipe connecting sections 122a of the LD units 12 via the pipes 17.Note that on the side surface of the housing 11 to which the manifold 16 is attached, the opening (not shown) is provided to cover all the pipe connection portions 162. Further, the manifold 16 is connected to the housing 11 via the sealing member 161 provided along an outer edge portion of the opening. This seals the manifold 16 and the housing 11. Because the manifold 16 is provided to cover the opening with the sealing member 161 therebetween, the manifold 16 can also be regarded as a part of the component that seals the housing 11. The manifold 16 also includes pipe connection portions 163 connected to pipes 75 extending from the cooling device. To detach the laser module 10, it is sufficient that the pipes 75 connected to the cooling device are detached from the pipe connection portions 163.

[0025] The tubes 17 connect the pipe connecting portions 162 of the manifold 16 and the pipe connecting portions 122a of the heat sinks 122 of the LD units 12 within the housing 11 and serve as flow paths through which the cooling medium flows. Because the position of the LD unit 12 around the reference shaft 124 is adjustable, the tube 17 preferably has a flexible structure, such as a hose.

[0026] The beam merging module 30 comprises a housing 31, a wavelength dispersion element 33 and a partially reflecting mirror 35.

[0027] The housing 31 is a box-shaped member containing the wavelength dispersing element 33 and the partially reflecting mirror 35. In this example, the housing 31 has a hollow cuboid shape. The housing 31 has a configuration in which its interior is kept airtight. The housing 31 includes an opening on a side surface in contact with the housing 11 of the laser module 10. The housing 31 includes a sealed window 311 in the opening. The position of the window 311 coincides with the position of the window 112 of the housing 11 of the laser module 10. A sealing member (not shown) is provided between an edge of the opening of the housing 31 and the window 311. The laser beams L1 output from the laser module 10 enter through the window 311. The window 311 is formed of a material through which the laser beams L1 can pass.

[0028] The housing 31 includes an opening on a lateral surface in contact with the fiber coupling module 50. The housing 31 includes a sealed window 312 in the opening. A sealing element (not shown) is provided between an edge of the opening of the housing 31 and the window 312. The window 312 is formed of a material through which the combined beam L2 can pass. The housing 31 corresponds to a second housing.

[0029] The wavelength dispersive element 33 combines the laser beams L1 emitted from a plurality of laser modules 10 and having different wavelengths into a single combined beam L2 with a single optical axis. Alternatively, the wavelength dispersive element 33 separates the single combined beam L2 reflected by the partially reflecting mirror 35 into a plurality of laser beams L1 that propagate to the respective laser modules 10 in a state where the optical axis directions are different from each other. An example of the wavelength dispersive element 33 is a prism, a diffraction grating, or the like.

[0030] The partially reflecting mirror 35 transmits a portion of the combined beam L2 combined by the wavelength dispersive element 33 and reflects the remainder to the laser module 10. The partially reflecting mirror 35 forms an external optical resonator with the plurality of LD bars 123 of the laser module 10. That is, the external optical resonator is formed between the partially reflecting mirror 35 and the reflecting surfaces, which are surfaces on the side opposite to the emitting surfaces, of the LD bar 123, and a portion of the combined beam L2 amplified by the external optical resonator is output from the partially reflecting mirror 35 to the outside. The resonator that oscillates the laser beams L1 with such a configuration is called a wavelength beam combiner (WBE) resonator.

[0031] In the example of Fig. 1, the beam combining module 30 includes a second optical transmission system 32, a third optical transmission system 34, and a fourth optical transmission system 36. The second optical transmission system 32, the third optical transmission system 34, and the fourth optical transmission system 36 are contained within the housing 31.

[0032] The second optical transmission system 32 is arranged between the laser module 10 and the wavelength dispersive element 33 and functions to shape the laser beams L1 incident on the wavelength dispersive element 33. According to one example, the second optical transmission system 32 collimates the laser beams L1. An example of an element constituting the second optical transmission system 32 is a lens. The polarizing plate may be arranged not in the first optical transmission system 13, but in the second optical transmission system 32. The second optical transmission system 32 is provided if necessary.

[0033] The third relay optical system 34 is arranged between the wavelength-dispersion element 33 and the partially reflecting mirror 35 and functions to shape the combined beam L2 emitted from the wavelength-dispersion element 33 and incident on the partially reflecting mirror 35. According to one example, the third relay optical system 34 shapes the combined beam L2 to a suitable beam diameter and divergence angle. An example of an element constituting the third relay optical system 34 is a lens group composed of one or more lenses. The third relay optical system 34 is provided as needed.

[0034] The fourth optical transmission system 36 is arranged at a subsequent stage of the partially reflecting mirror 35 and has a function of shaping the combined beam L2 emitted from the partially reflecting mirror 35 and incident on the fiber coupling module 35. According to one example, the fourth optical transmission system 36 shapes the combined beam L2 to a suitable beam diameter and divergence angle. Although Fig. 1 shows an example in which a single laser module 10 is connected to the beam combining module 30. In other cases, multiple laser modules 10 are connected to the beam combining module 30. In such a case, the fourth optical relay system 36 has a function of changing the positions of the combined beams L2 from the laser modules 10 to predetermined positions. As an example of changing the positions of the combined beams L2, the combined beams L2 from the multiple laser modules 10 are placed at predetermined intervals in a plane perpendicular to the propagation direction of the combined beams L2.Alternatively, according to another example, a plurality of partially reflecting mirrors 35 are provided, which are associated with the plurality of laser modules 10, and the combined beams L2 from the plurality of partially reflecting mirrors 35 are further combined into a single combined beam L2. An example of an element constituting the fourth optical relay system 36 is a lens group composed of one or more lenses. The fourth optical relay system 36 is provided if necessary.

[0035] The fiber coupling module 50 comprises a housing 51 and a fifth optical transmission system 52.

[0036] The housing 51 is a box-shaped member containing the fifth optical transmission system 52. In this example, the housing 51 has a hollow cuboid shape. The housing 51 has a configuration in which its interior is kept airtight. The housing 51 includes an opening on a side surface in contact with the beam combiner module 30. The housing 51 includes a sealed window 511 in the opening. The position of the window 511 coincides with the position of the window 312 of the housing 31 of the beam combiner module 30. A sealing member (not shown) is provided between an edge of the opening of the housing 51 and the window 511. The combined beam L2 from the beam combiner module 30 enters through the window 511. The window 511 is formed of a material through which the combined beam L2 can pass.The housing 51 comprises a fiber connection section 53 to which the transmission fiber 70 is connected.

[0037] The fifth optical transmission system 52 is an optical system arranged between the beam combining module 30 and the transmission fiber 70, and causes the combined beam L2 emitted by the beam combining module 30 to enter a core of the transmission fiber 70. An example of an element constituting the fifth optical transmission system 52 is a lens group composed of one or more lenses.

[0038] The LD driver power supply 60 supplies the power for driving the LD bars 123 to the LD bars 123 of the laser module 10. The LD driver power supply 60 is connected to the power supply units 14 of the laser module 10 via the cables 61. The power supply units 14 electrically connect the cables 61 and the cables 15 within the laser module 10.

[0039] Here, the housing 11 of the laser module 10 and the housing 31 of a laser merging module include a positioning element for positioning the housings so that the housings can be installed at predetermined positions in the laser device 1. The positioning element is a member provided on the housing 11 and / or the housing 31 and performs positioning when the housing 31 is connected to the beam merging module 30. Fig. 1 shows a case where the positioning element is the holding surfaces 21. In the case where the positioning element is the holding surfaces 21, the holding surfaces 21 are plate-like members provided in contact with the two housings 11 and 31 at multiple positions around a contact surface where the housing 11 of the laser module 10 and the housing 31 of the laser merging module 30 are in contact with each other. With the provided holding surfaces 21, the housings can be positioned when they are attached to each other. The positioning element also includes a pin, a keyway, and the like.When the positioning element is the pin, one or more of the pins are provided on a surface of one of the housings in contact with the other housing, and a hole into which the pin is inserted is provided at a position corresponding to the pin on a surface of the other housing, whereby the housings can be positioned when attached to each other. When the positioning element is the keyway, a projection called a key extending in one direction is provided on the surface of one of the housings in contact with the other housing, and a groove extending in a direction allowing the projection to be inserted therein is provided at a position corresponding to the projection on the surface of the other housing, whereby the housings can be positioned when attached to each other.

[0040] Likewise, the housing 31 of the beam combining module 30 and the housing 51 of the fiber coupling module 50 include a positioning element for positioning the housings so that the housings can be installed at predetermined positions in the laser device 1. The positioning element may be the same as the positioning element described above, which is used between the laser module 10 and the beam combining module 30. The example in Fig. 1 shows a case in which the positioning element is holding surfaces 41.

[0041] Next, an overview of the operation of the laser device 1 with such a configuration will be described. The laser device 1 outputs laser light by operating a so-called external resonator. First, the output of the laser beam L1 from one of the LD units 12 will be described. When the laser beam L1 output from the LD bar 123 of one of the LD units 12 hits the wavelength dispersing element 33 at a predetermined angle, the laser beam L1 is diffracted at a predetermined angle and propagated to the partial reflecting mirror 35. A portion of the laser beam L1 is reflected by the partial reflecting mirror 35. The reflected laser beam L1 is diffracted by the wavelength dispersing element 33 in the direction of the original LD ​​bar 123. The reciprocating movement of the laser beam L1 between the reflection surface of the LD bar 123 and the partial reflecting mirror 35 is repeated.Then, only the laser beam L1 having the wavelength which has reciprocated several times between the reflection surface of the LD bar 123 and the partially reflecting mirror 35, that is, only the laser beam L1 having the optical resonance wavelength, is output from the partially reflecting mirror 35.

[0042] When multiple LD bars 123 are provided to output laser beams L1 having different wavelengths from each other, that is, by wavelength combining, high-power laser beam L1 can be generated. In this case, in the laser module 10, the placement of the LD units 12 is adjusted so that the laser beams L1 output from the LD bars 123 become the combined beam L2 with the single optical axis by the wavelength dispersing element 33. This means that the optical axes of the LD bars 123 are adjusted by the placement of the LD units 12. As a result, the laser beams L1 of all the LD bars 123 diffracted by the wavelength dispersing element 33 become the combined beam L2 with the single optical axis. On the other hand, the combined beam L2 reflected by the partially reflecting mirror 35 returns to the original LD ​​bars 123 through the wavelength dispersing element 33.

[0043] In the laser device 1 comprising the LD units 12 with the plurality of LD bars 123, the LD bars 123 constituting the LD units 12 as the laser beam sources generally have a lifetime. The first embodiment proposes a structure in which it is assumed that the LD bars 123 are replaced.

[0044] It is known that the higher the output power of the LD ingot 123, the more easily the LD ingot 123 is affected by the surrounding environment, such as dust or dirt. Therefore, to prevent contamination of the LD ingot 123, especially its emission surface, measures such as sealing the periphery of the emission surface are commonly taken. Because the surrounding environment is often poor when replacing the component, it is necessary to consider reducing this influence.

[0045] In a conventional laser device, the replacement of the LD bar, which is due to the LD bar reaching the end of its service life, is performed at the location where the laser device is installed. After opening the housing and replacing the LD bar, it is particularly necessary to adjust the SAK and LAK associated with the replaced LD bar while observing the shape of the laser beam output from the transmission fiber. Furthermore, in the conventional laser device, the SAK and LAK are contained in separate housings, so the adjustment is performed while the housings are open. This adjustment work generally takes time. Therefore, during work at a location where the surrounding environment is poor, dirt and the like adhere to the optical component and burn, which can affect the quality of the laser beam.Because the conventional laser device requires the LD bar to be replaced and adjusted in an impure environment with surrounding dirt, there is a problem that the quality of the laser beam cannot be guaranteed. The first embodiment provides the laser device 1 configured to allow the LD bar 123 to be replaced in a shorter time than in the conventional laser device, while ensuring the quality of the laser beam L1 in an impure environment.

[0046] Therefore, as described above, in the first embodiment, the laser module 10 is detachable from the beam merging module 30, so that when the LD bar 123 is replaced due to the LD bar 123 reaching the end of its life, the entire laser module 10 is replaced instead of the LD bar 123.

[0047] Furthermore, the LD bar 123 is usually replaced at the location where the laser device 1 is installed, and the surrounding environment is not clean at the time of replacement. A clean environment is considered to refer to a state of the surrounding environment in which the density of contaminants such as dust or dirt in the atmospheric environment is lower than a predetermined reference value. As described above, in the first embodiment, the laser module 10 includes the LD units 12 including the LD bars 123, the first optical transmission systems 13, and the like in the sealed-in interior housing 11. A new piece of the laser module 10, which replaces the laser module 10 to be replaced, is stored in the clean environment until replacement.This can prevent the entry of dirt or dust into the interior of the housing 11 and the LD bar 123 is not affected by the surrounding environment even in the unclean surrounding environment.

[0048] Furthermore, the housing 11 of the laser module 10 contains the LD units 12 including the LD bars 123, and the first optical transmission systems 13 provided for the associated LD units 12 and including the SAC and the LAC, respectively. Upon assembling the laser module 10, the optical axis alignment between the LD units 12 and the first optical transmission systems 13 is completed. This eliminates the need to perform on-site optical axis alignment of the SAC and the LAC when replacing the laser module 10, allowing the laser module 10 with the LD bars 123 to be replaced in a shorter time than before.

[0049] Specifically, the laser module 10 is assembled in a clean environment in which dirt or the like in the air is less than or equal to a predetermined level. In the clean environment, while a lid of the housing 11 is open, the components such as the LD units 12 and the first optical transmission systems 13 are installed in the housing 11, and then adjustment of the installed positions, angles, and the like of the components is performed. The adjustment is performed so that desired laser characteristics are achieved when the laser module is combined with the beam combining module 30, and after the adjustment, the components are fixed. According to one example, the adjustment is performed by attaching the laser module 10 to be assembled to a reference beam combining module having the same configuration as the beam combining module 30 shown in FIG. Fig. 1, or by using a laser beam adjusting device.

[0050] When the laser module 10 is mounted on the reference beam combining module, the laser beams L1 are output from the LD bars 123 of the assembled laser module 10, and the optical axis adjustment is performed while observing the output power and shape of the combined beam L2 from the transmission fiber 70. During the optical axis adjustment, the emission angle of the laser beam L1 from the LD bar 123 can be adjusted by rotating the LD unit 12 around the reference shaft 124, or the position of the first transmission optical system 13 can be adjusted.

[0051] When using the laser beam adjusting device, the laser module 10 is installed at a predetermined position, and the optical axis adjustment is performed so that the laser beams L1 are emitted from the LD bars 123 to the laser beam adjusting device provided at a position corresponding to the position of the wavelength dispersive element 33 of the beam merging module 30. An example of the laser beam adjusting device is a camera, a pinhole, or the like provided at a predetermined position.

[0052] After the optical axis adjustment is performed, the laser module 10, the first relay optical systems 13, and the like are mounted, and the lid is closed and sealed to seal the interior of the casing 11. This means that all the LD units 12 and the associated first relay optical systems 13 have undergone optical axis adjustment, so that the wavelength dispersion element 33 of the beam combiner module 30 is irradiated with the laser beams L1 when the laser module 10 is connected to the beam combiner module 30. The assembled laser module 10 is stored in a clean environment until replacement occurs. Then, the laser module 10 is transferred to a location where the laser device 1 is installed with the LD bar 123 that has reached the end of its service life, and the replacement is performed on-site.

[0053] When replacing the laser module 10, the cables 61 connected to the power supply units 14 and the pipes 75 connected to the manifold 16 of the laser module 10 to be replaced in the laser device 1 are detached, and then the laser module 10 is detached from the beam merging module 30. Next, the new piece of the laser module 10 manufactured as described above is connected to the beam merging module 30. At this time, the modules are connected by aligning the positioning element provided on the housing 31 of the beam merging module 30 with the positioning element provided on the housing 11 of the laser module 10. This allows the laser module 10 to be connected to the beam merging module 30 while maintaining an accurate mechanical position of the laser module 10 relative to the beam merging module 30.After the new laser module 10 has been connected to the beam merging module 30, the cables 61 are connected to the power supply units 14 and the pipes 75 are connected to the distributor 16.

[0054] The LD bars 123 and the first transmission optical systems 13 in the laser module 10 have already undergone optical axis adjustment during assembly, and therefore, optical axis adjustment is usually not performed after replacing the laser module 10. However, due to the replacement of the laser module 10, the input position of the combined beam L2, which is the wavelength-combined beam output from the beam combiner module 30, onto the transmission fiber 70 needs to be adjusted. Therefore, processing is performed in which the laser beams L1 are output from the laser module 10 and the position of the fifth transmission optical system 52 or the transmission fiber 70 is adjusted while observing the output power of the combined beam L2 from the transmission fiber 70.Alternatively, processing is performed in which the position of the fifth transmission optical system 52 or the transmission fiber 70 is adjusted while measuring a condition, such as a condition of scattered light at an input end of the transmission fiber 70, which is different from the condition of the converged beam L2 emitted from the transmission fiber 70. When this adjustment is completed, the replacement of the laser module 10 is completed.

[0055] It should be noted that during the assembly of the beam combiner module 30, the optical components arranged within the housing 31 are also subjected to adjustment in a clean environment to obtain the desired laser characteristics, as in the case of the above laser module 10, and are secured after the adjustment is completed. The assembled beam combiner module 30 is stored in the clean environment until replacement occurs.

[0056] Furthermore, the beam combiner module 30 and the fiber coupling module 50 can each be replaced individually. Even in this case, due to the replacement of the beam combiner module 30 or the fiber coupling module 50, the input position of the combined beam L2 output from the beam combiner module 30 must be adjusted to the transmission fiber 70. However, the beam combiner module 30 and the fiber coupling module 50 are optically and mechanically designed and assembled in advance to such an extent that adjustment of the optical components in the modules 30 and 50 is not required during replacement, thus eliminating the need to adjust the components in the modules 30 and 50 during replacement.

[0057] Furthermore, Fig. 1 only shows the main components of the laser device 1 of the first embodiment and does not show components that are not directly related to the configuration of the first embodiment. However, the laser module 10, the beam merging module 30, and the fiber coupling module 50 are equipped not only with the optical interfaces but also with interface sections for electricity, cooling water, and the like. Although not shown, according to one example, the modules 10, 30, and 50 also include a pipe of a cooling system necessary for cooling, electrical cables of sensors, and the like.

[0058] In addition, as described above, not only one piece of the laser module 10 but also two or more of the laser modules 10 can be connected to the beam merging module 30.

[0059] Note that in the above description, the windows 112, 311, 312, and 511 are provided at the positions through which the laser beams L1 pass on the respective casings 11, 31, and 51 of the laser module 10, the beam combining module 30, and the fiber coupling module 50. However, the windows 112 and 311 provided between the laser module 10 and the beam combining module 30 may be formed as a single window and divided by the two casings 11 and 31, and / or the windows 312 and 511 provided between the beam combining module 30 and the fiber coupling module 50 may be formed as a single window and divided by the two casings 31 and 51.

[0060] The laser device 1 according to the first embodiment includes: the laser module 10, which includes the plurality of LD units 12 including the LD bars 123 and fixed to the installation base 111 via the reference shafts 124, and the first transmission optical systems 13, each of which is provided for an associated one of the LD units 12, wherein the LD units 12 and the first transmission optical systems 13 are sealed and contained within the housing 11; the beam combining module 30, which combines the plurality of laser beams L1 from the laser module 10 into the single combined beam L2; and the fiber coupling module 50, which causes the combined beam L2 from the beam combining module 30 to enter the transmission fiber 70.The modules 10, 30, and 50 are each detachable, the optical components are each pre-assembled in a clean environment, so that the desired laser characteristics are achieved when the modules 10, 30, and 50 are brought together, and the interior of each of the casings 11, 31, and 51 containing the optical components is sealed. Therefore, even if the laser device 1 is installed in a poor environmental environment, the laser module 10, the beam merging module 30, and the fiber coupling module 50 can be replaced without dust or the like getting in the way of the laser light in the laser module 10. This makes it possible to prevent or reduce deterioration or the like due to contamination of the optical components and to maintain the laser device 1 with high reliability for a long time.

[0061] Furthermore, in the laser module 10, the LD bars 123 and the first transmission optical systems 13 are pre-adjusted and fixed in the clean environment, so that the desired laser characteristics are achieved when the laser module 10 is combined with the beam merging module 30. Therefore, while conventionally, a measuring instrument such as a beam profiler is brought to the location where the laser device 1 is installed to adjust the optical components included in the LD bars 123 and the first transmission optical systems 13, according to the first embodiment, the laser module 10 can be replaced without bringing the measuring instrument to the location. Furthermore, instead of replacing the LD bars 123 individually, the entire laser module 10 is replaced, so that a plurality of the LD bars 123 can be replaced in a short time.

[0062] The beam combining module 30 uses the WSC system to combine the multiple laser beams L1 from the laser module 10 into a single combined beam L2 and outputs the combined beam L2. That is, the beam combining module 30 includes the wavelength dispersive element 33, such as a diffraction grating, and irradiates the WSC with the laser beams L1 output from direct diode lasers (DDLs) as the multiple LD bars 123 of the laser module 10, thereby forming a single laser beam L1. In the WSC system, the quality of the beams output from the LD bars 123 is directly dependent on the beam quality of a laser oscillator, that is, the laser device 1.However, in the first embodiment, when assembling the laser module 10, the LD units 12 and the first relay optical systems 13 undergo optical axis adjustment, so that even after replacing the laser module 10, high-quality laser beams L1 can be directly output. This means that with the beam combining module 30 using the wavelength dispersing element 33, the laser device 1 with good beam quality is obtained. While replacing the LD bars 123 conventionally requires adjusting the plurality of LD bars 123 at the installation position where the laser device 1 is installed, in the first embodiment, the laser light with high beam quality can be output without finely adjusting the optical axis of the optical components in the laser module 10. Therefore, the first embodiment has an excellent effect compared to the conventional technique.

[0063] As described above, according to the first embodiment, during long-term use of the laser device 1, it is possible to easily replace the laser module 10 equipped with the plurality of LD bars 123 constituting the laser beam sources, which have a limited lifetime. Furthermore, by assembling and adjusting the laser module 10 in the clean environment, it is possible to reduce a risk, such as damage to the optical components, due to dirt. Furthermore, by keeping the laser module 10 in a clean state, work can be performed without allowing dirt or the like to enter when replacing the laser module 10, regardless of the environment where the laser device 1 is installed. This can improve the quality of the laser device 1.

[0064] Furthermore, the beam combiner module 30 has a structure in which the optical components, including the wavelength dispersing element 33 and the partially reflecting mirror 35, are sealed within the housing 31. This can prevent dust or the like from entering the beam combiner module 30 when replacing the laser module 10 with a limited lifetime. This can extend the lifetime of the laser device 1. Second embodiment.

[0065] Fig. Fig. 2 is a diagram schematically showing an example of a configuration of a laser device according to a second embodiment. Note that components similar to those in Fig. 1 are the same, are designated by the same reference numerals as those assigned to such components in Fig. 1, and therefore their description is omitted below and differences to Fig. 1. A laser device 1A according to the second embodiment further includes a clean air circulation device 80 and air pipes 95, wherein the clean air circulation device 80 circulates clean air, which is purified air, within the laser module 10, the beam merging module 30, and the fiber coupling module 50.

[0066] The clean air circulation device 80 includes a filter 81 and a circulation pump 82. The filter 81 includes a particulate filter configured to remove contaminants, which are particles in the air, a moisture absorber for dehumidifying the air, and an organic filter such as activated carbon. The particles in the air include dust, dirt, and the like in addition to the contaminants. An example of the circulation pump 82 is a fan. This means that the clean air circulation device 80 is a device that removes the contaminants and circulates the dehumidified air in the laser module 10, the beam merging module 30, and the fiber coupling module 50.

[0067] The air pipe 95 is a pipe that serves as an air flow path. The air pipes 95 connect the clean air circulation device 80 to the housing 11 of the laser module 10 and connect the clean air circulation device 80 to the housing 51 of the fiber coupling module 50. An example of the air pipe 95 is a hose.

[0068] The example of Fig. 2 shows a configuration in which the laser module 10, the beam combining module 30, the fiber coupling module 50, and the clean air circulation device 80 are connected in series, with the air circulating through them in sequence.

[0069] The housing 11 of the laser module 10 includes an opening 113 on a side surface to which the air tube 95 is connected, and includes an opening 114 on a side surface connected to the housing 31 of the beam combiner module 30. The housing 31 of the beam combiner module 30 includes an opening 313 on a side surface connected to the housing 11 of the laser module 10, and includes an opening 314 on a side surface connected to the fiber coupling module 50. The housing 51 of the fiber coupling module includes an opening 512 on a side surface connected to the housing 31 of the beam combiner module 30, and includes an opening 513 on a side surface to which the air tube 95 is connected.

[0070] Opening 114 on the housing 11 of the laser module 10 and opening 313 on the housing 31 of the beam combiner module 30 are connected. Opening 314 on the housing 31 of the beam combiner module 30 and opening 512 on the housing 51 of the fiber coupling module 50 are connected. Openings 113, 114, 313, 314, 512, and 513 are each connected by a connection point, according to one example.

[0071] When modules 10, 30, and 50 are moved during replacement, the openings are covered and sealed, so that the interior of modules 10, 30, and 50 can be sealed even during their movement. When modules 10, 30, and 50 are replaced, the openings only need to be connected by removing the opening covers. If the openings are the connection points, only the connection points need to be connected.

[0072] Although Fig. 2 shows the example in which the clean air circulation device 80 and the modules 10, 30 and 50 are connected in series, the clean air circulation device 80 and the modules 10, 30 and 50 may be connected in parallel. Fig. Fig. 3 is a diagram schematically showing another example of the configuration of the laser device according to the second embodiment. Note that components similar to those in Fig. 1 and Fig. 2 are the same, are designated by the same reference numerals as those which denote such components in Fig. 1 and Fig. 2, and therefore their description is omitted below and differences to Fig. 1 and Fig. 2. A Fig. The laser device 1B shown in Figure 3 further comprises a buffer device 90. The buffer device 90 is arranged between the clean air circulation device 80 and the modules 10, 30, and 50 and includes internal flow paths that divide the air to be sent from the clean air circulation device 80 to the modules 10, 30, and 50 and combine the air returning from the modules 10, 30, and 50 to the clean air circulation device 80. This means that the buffer device 90 includes an outlet 91 from which the air is sent out and an inlet 92 into which the air flows.

[0073] In Fig. 3, the housing 11 of the laser module 10 includes two openings for the opening 113 and one opening 115, to which the air tubes 95 are connected. The housing 31 of the beam merging module 30 includes two openings 315 and 316, to which the air tubes 95 are connected. The housing 51 of the fiber coupling module 50 includes two openings for the opening 513 and one opening 514, to which the air tubes 95 are connected. The openings 113, 315, and 514 are connected to the outlet 91 of the buffer device 90, and the openings 115, 316, and 513 are connected to the inlet 92 of the buffer device 90. Furthermore, the clean air circulation device 80 and the buffer device 90 are connected by air tubes 96.

[0074] In addition to the configurations of Fig. 2 and Fig. 3 can be the series connection of Fig. 2 and the parallel connection of Fig. 3 can be combined to form another connection form.

[0075] In the laser devices 1A and 1B, clean and dry air from which the particles have been removed after passing through the filter 81 in the clean air circulation device 80 is output to each of the modules 10, 30 and 50 by the circulation pump 82 and circulated by the Fig. 2 or Fig. 3. Then, the air returning to the clean air circulation device 80 is processed into clean and dry air from which impurities such as airborne dust, water vapor, and the like have been removed by the filter 81, and is again output to each of the modules 10, 30, and 50.

[0076] In the laser devices 1A and 1B of the second embodiment, the modules 10, 30, and 50 are connected to the clean air circulation device 80 via the air pipes 95 and 96, and the air is circulated between the modules 10, 30, and 50 and the clean air circulation device 80. Therefore, the clean air circulation device 80 can remove impurities due to outgassing from the components used in the laser module 10, the beam merging module 30, and the fiber coupling module 50. This makes it possible to further prevent or reduce deterioration or the like due to contamination of the optical components and to maintain the laser devices 1A and 1B with high reliability for a long time. Third embodiment.

[0077] A third embodiment will describe a laser processing machine including the laser device 1, 1A or 1B according to the first or second embodiment. Fig. 4 is a diagram schematically showing an example of a configuration of a laser processing machine according to the third embodiment. A laser processing machine 200 irradiates a workpiece 208 with the converged beam L2 to process the workpiece 208. In the third embodiment, components similar to those in the first or second embodiment are denoted by the same reference numerals as those assigned to such components in the first or second embodiment, and therefore, the following descriptions thereof will be omitted, and a configuration different from that of the first or second embodiment will be mainly described.

[0078] The laser processing machine 200 includes the laser device 1 described in the first embodiment, which emits the converged beam L2, the transmission fiber 70 that transmits the converged beam L2 output from the laser device 1, and a machining unit 201 that machines the workpiece 208 with the converged beam L2. Note that the laser device 1 may be the laser device 1A or 1B described in the second embodiment. The transmission fiber 70 is connected between the laser device 1 and the machining unit 201 and transmits the converged beam L2 output from the laser device 1. The machining unit 201 includes a machining head 202 that emits the converged beam L2 to the workpiece 208, and a stage 203 that supports the workpiece 208.An optical beam adjustment system 204, a mirror 205, and a condenser lens 206 are provided within the processing head 202. The laser processing machine 200 moves the converged beam L2 and the workpiece 208 relative to each other and irradiates the workpiece 208 with the converged beam L2. When the workpiece 208 is irradiated with the converged beam L2, finely machined holes 209 are formed at designated positions on the workpiece 208, according to one example.

[0079] The workpiece 208 is, for example, an electronic substrate, such as a flexible substrate or a multilayer substrate. These substrates are formed of resin and copper foil. The wavelength of the combined beam L2 is preferably a wavelength in the ultraviolet range, which can be absorbed by both the resin and the copper. Note that the workpiece 208 is not limited to the electronic substrate as long as it can be machined using the combined beam L2. The machined hole 209 is, for example, a blind hole or a through hole. A plurality of machined holes 209 formed in the workpiece 208 may include machined holes 209 of different sizes.The laser processing machine 200 is not limited to one that forms the machined holes 209, and may be one that performs machining such as marking.

[0080] The optical beam adjustment system 204 adjusts the beam diameter and beam profile of the combined beam L2 emitted by the laser device 1 to a desired beam diameter and beam profile, which are set in advance. The combined beam L2 with the adjusted beam diameter and beam profile is guided to the condenser lens 206 by reflection by the mirror 205. The machining head 202 focuses the combined beam L2 onto the workpiece 208 using the condenser lens 206.

[0081] The laser processing machine 200 moves the stage 203 in an X direction and a Y direction, which are directions perpendicular to the center line of the converged beam L2. The X direction and Y direction are perpendicular to each other. Open arrows shown in Fig. 4 indicate the directions in which the stage 203 is moved. The Fig. The laser processing machine 200 shown in Fig. 4 moves the object table 203 relative to the processing head 202, whereby the combined beam L2 and the workpiece 208 are moved relative to each other.

[0082] Note that the laser processing machine 200 can move the combined beam L2 and the workpiece 208 relative to each other without moving the stage 203. The laser processing machine 200 can fix the position of the stage 203 and control the incident position of the combined beam L2 on the workpiece 208. In this case, deflection means such as a galvanometric mirror or a polygon mirror can be used as the configuration for changing the incident position of the combined beam L2. In this case, an Fθ lens can be used as the condenser lens 206.

[0083] According to the third embodiment, during long-term use of the laser device 1, 1A, or 1B, it is possible to easily replace the laser module 10 equipped with the multiple LD bars 123 constituting the laser beam sources, which have limited lifetimes. By assembling and adjusting the laser module 10 in a clean environment, it is also possible to reduce risks such as damage to the optical components due to dirt. Furthermore, by keeping the laser module 10 in a clean state, work can be performed without allowing dirt or the like to enter when replacing the laser module 10, regardless of the environment in which the laser device 1, 1A, or 1B is installed. This can improve the product quality of the laser processing machine 200 using such a laser device 1, 1A, or 1B.

[0084] The configurations shown in the above embodiments each show only one example, so that other known technology may be combined, the embodiments may be combined with each other, or the configurations may be partially omitted and / or modified without departing from the scope of the present disclosure. List of reference symbols 1, 1A, 1B laser device; 10 laser module; 11, 31, 51 housing; 12, 12-1, 12-2, ..., 12-n LD unit; 13, 13-1, 13-2, ..., 13-n first optical transmission system; 14 Energy supply unit; 15, 61 cables; 16 distributors; 17.75 pipe; 21, 41 holding surface; 30 beam merging module; 32 second optical transmission system; 33 wavelength dispersion element; 34 third optical transmission system; 35 partially reflecting mirror; 36 fourth optical transmission system; 50 fiber coupling module; 52 fifth optical transmission system; 53 fiber connection section; 60 LD driver power supply; 70 transmission fibers; 80 clean air circulation device; 81 filters; 82 circulation pump; 90 buffer device; 91 outlet; 92 entrance; 95, 96 air tube; 111 installation base; 112, 311, 312, 511 windows; 113, 114, 115, 313, 314, 315, 316, 512, 513, 514 opening; 121 adjustment element; 122 heat sink; 122a, 162, 163 pipe connection section; 123 LD bars; 124 reference shaft; 141, 161 sealing element; 200 laser processing machines; 201 processing unit; 202 machining head; 203 Object table; 204 optical beam adjustment system; 205 mirrors; 206 condenser lens; 208 workpiece; 209 machined hole; L1 laser beam; L2 merged beam. QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] JP 2019 - 192 756

[0003]

Claims

[1] A laser device comprising: a laser module for outputting a plurality of laser beams; and a beam combining module for combining the plurality of laser beams into a combined beam which is a laser beam having a single optical axis, wherein the laser module comprises: multiple laser beam sources for outputting the laser beams; a plurality of first optical transmission systems, each of which is provided for an associated one of the plurality of laser beam sources, for shaping the laser beams output from the plurality of laser beam sources into parallel light or a state of nearly parallel light, respectively; and a first housing containing the plurality of laser beam sources and the plurality of first optical transmission systems and comprising a window through which the laser beams output from the plurality of laser beam sources pass, the first housing having a sealed interior, the first housing being detachable from the beam combining module, and wherein the first housing and / or the beam merging module comprises a positioning element for positioning the first housing relative to the beam merging module. [2] The laser device according to claim 1, wherein the plurality of laser beam sources each comprise: a laser diode bar for outputting the laser beam; an adaptation element for attaching the laser diode bar; and a reference shaft for fixing the adjustment element to an installation base provided within the first housing and allowing the adjustment element to rotate around an emission surface of the laser diode bar, and wherein an orientation of the plurality of laser beam sources on the installation base is each set so that the laser beam is output in a predetermined direction. [3] A laser device according to claim 1 or 2, wherein the plurality of first optical transmission systems each comprise: a first optical component for collimating a fast-axis component of the laser beam emitted by the associated one of the laser beam sources; and a second optical component for collimating a slow-axis component of the laser beam. [4] Laser device according to one of claims 1 to 3, wherein the beam merging module comprises: a wavelength dispersing element for shaping the plurality of laser beams output from the laser module into the combined beam; a partially reflecting mirror for transmitting a portion of the combined beam; and a second housing containing the wavelength dispersing element and the partially reflecting mirror and each comprising a window at an input position of the laser beams from the laser module and at an output position of the combined beam, the second housing having a sealed interior space. [5] The laser device according to any one of claims 1 to 4, further comprising a clean air circulation device for removing impurities and circulating dehumidified air between the laser module and the beam merging module. [6] Laser processing machine, comprising: the laser device according to any one of claims 1 to 5; and a machining unit for machining a workpiece with the combined beam.

Images