Optoelectronic device

The hybrid optoelectronic device integrates event and light intensity sensors through a layered structure with quantum dots, addressing sensitivity and speed limitations by allowing independent operation and broader wavelength detection.

FR3153691B1Active Publication Date: 2025-10-24STMICROELECTRONICS INT NV
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Patent Information

Application Number
FR2023010461
Authority / Receiving Office
FR · FR
Patent Type
Patents
Current Assignee / Owner
Filing Date
2023-09-29
Publication Date
2025-10-24
Estimated Expiration
2043-09-29

AI Technical Summary

Technical Problem

Existing optoelectronic devices, such as event cameras, struggle to efficiently combine event data and light intensity data, leading to limitations in sensitivity, speed, and spatial information retention.

Method used

A hybrid optoelectronic device is designed with a layered structure comprising a first chip for event data generation and a second chip for light intensity data, connected via molecular bonding, utilizing a continuous layer of quantum dots or photosensitive perovskite materials to generate charges across a wider wavelength range, allowing independent operation of event and light intensity sensors.

Benefits of technology

The device enhances sensitivity and speed by enabling non-simultaneous generation of event and light intensity images without spatial information loss, while expanding the range of detectable wavelengths beyond standard photodiodes.

✦ Generated by Eureka AI based on patent content.

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Abstract

Optoelectronic device The present description relates to a device comprising at least one set (10) of pixels, the set comprising at least one first pixel (14) generating event data and at least one second pixel (12) generating light intensity data, each first and second pixel comprising a portion of a layer, said portion forming a photodiode, the device further comprising a first chip (16) comprising a first substrate (20) and a first interconnection network (22), and a second chip (18) comprising a second substrate (28) and a second interconnection network (30), the first and second chips being fixed to each other by the interconnection networks, the layer (40) being located on a first face of the second substrate opposite a second face of the second substrate on which the interconnection network is located. Figure for abstract: Fig. 1
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Description

Title of the invention: Optoelectronic device Technical field

[0001] The present description relates generally to electronic devices, and more specifically to optoelectronic devices. Prior art

[0002] Event cameras, like standard cameras, comprise a plurality of pixels, each pixel being configured to provide a value corresponding to a location of an observed scene. However, unlike a standard camera, i.e. a camera in which each pixel is configured to periodically provide a light intensity value corresponding to the location, an event camera is configured to provide information indicating a change in the light intensity. Event cameras are therefore configured to provide an event image of a scene. Standard cameras are therefore configured to provide a light intensity image of a scene. Thus, a standard camera is a synchronous camera making it possible to obtain at a frame rate a succession of images comprising as many intensity values ​​as there are pixels.An event camera is a synchronous or asynchronous camera that provides, for each pixel, information indicating the change in brightness of the corresponding location in the scene. When the scene is still, a standard camera continues to provide, periodically, all the intensity values, while an event camera does not provide a value, indicating the absence of change. Summary of the invention

[0003] One embodiment overcomes all or part of the drawbacks of known optoelectronic devices.

[0004] One embodiment provides a device comprising at least one set of pixels, the set comprising at least a first pixel generating event data and at least a second pixel generating light intensity data, each first and second pixel comprising a portion of a layer, said portion forming a photodiode, the device further comprising a first chip comprising a first substrate and a first interconnection network, and a second chip comprising a second substrate and a second interconnection network, the first and second chips being fixed to each other by the interconnection networks, the layer being located on a first face of the second substrate opposite a second face of the second substrate on which the interconnection network is located.

[0005] According to one embodiment, the device is an event camera.

[0006] According to one embodiment, the first chip comprises at least a portion of a control circuit of the first pixel and the second chip comprises the control circuit of the at least one second pixel.

[0007] According to one embodiment, a part of the control circuit of the first pixel is in the second chip.

[0008] According to one embodiment, the first and second chips are fixed by molecular bonding.

[0009] According to one embodiment, the device comprises a plurality of sets of pixels arranged in a matrix.

[0010] According to one embodiment, each set comprises four second pixels surrounding a first pixel.

[0011] According to one embodiment, each set comprises eight second pixels surrounding a first pixel.

[0012] According to one embodiment, each set comprises three second pixels and a first pixel arranged in matrices.

[0013] According to one embodiment, the layer is continuous.

[0014] According to one embodiment, the layer completely covers the first face of the second substrate.

[0015] According to one embodiment, the material of the layer is homogeneous.

[0016] According to one embodiment, the layer is in contact with the second substrate.

[0017] According to one embodiment, the layer is a layer of quantum dots or colloidal quantum dots.

[0018] According to one embodiment, the layer is made of a photosensitive perovskite material based on lead or tin or a volume heterojunction composed of photosensitive organic semiconductors. Brief description of the drawings

[0019] These characteristics and advantages, as well as others, will be explained in detail in the following description of particular embodiments given without limitation in relation to the attached figures among which:

[0020] [Fig.l] represents a sectional view of an embodiment of an optoelectronic device;

[0021] [Fig.2] represents a perspective view of the embodiment of [Fig.l];

[0022] [Fig.3] represents an example of a pixel control circuit;

[0023] [Fig.4A] represents an alternative arrangement of a set of pixels; and

[0024] [Fig.4B] represents another variant of arrangement of a set of pixels. Description of the embodiments

[0025] The same elements have been designated by the same references in the different figures. In particular, the structural and / or functional elements common to the different embodiments may have the same references and may have identical structural, dimensional and material properties.

[0026] For the sake of clarity, only the steps and elements useful for understanding the described embodiments have been shown and are detailed.

[0027] Unless otherwise specified, when referring to two elements connected to each other, this means directly connected without intermediate elements other than conductors, and when referring to two elements connected (in English "coupled") to each other, this means that these two elements can be connected or be connected by means of one or more other elements.

[0028] In the following description, when reference is made to absolute position qualifiers, such as the terms "front", "back", "top", "bottom", "left", "right", etc., or relative position qualifiers, such as the terms "above", "below", "upper", "lower", etc., or to orientation qualifiers, such as the terms "horizontal", "vertical", etc., reference is made unless otherwise specified to the orientation of the figures.

[0029] Unless otherwise specified, the expressions "about", "approximately", "substantially", and "of the order of" mean to within 10%, preferably to within 5%.

[0030] [Fig.l] represents a sectional view of an embodiment of an optoelectronic device. [Fig.2] represents a perspective view of the embodiment of [Fig.l]. More specifically, [Fig.l] represents a sectional view along a plane AA of the device of [Fig.2].

[0031] Figures 1 and 2 represent a set 10 of pixels of the optoelectronic device. The set 10 corresponds for example to a part of an image capture device, for example a camera. The set 10 comprises at least one pixel 12 and at least one pixel 14. More precisely, the set 10 comprises at least one pixel 12 of an event camera and at least one pixel 14 of a standard camera. The pixel 14 is for example a pixel of the "global shutter" type, or a pixel of the "rolling shutter" type. The set 10 therefore makes it possible to obtain event data and standard brightness data. The camera is therefore an event camera, or neuromorphic camera ("event-based camera" in English).

[0032] In the example of figures 1 and 2, the set 10 comprises only one pixel 12 and four pixels 14. The pixel 12 is surrounded by the pixels 14. The device, i.e. for example the camera, comprises a plurality of sets 10, preferably arranged in a matrix.

[0033] The device comprises a first chip 16 and a second chip 18. The first chip 16 comprises a semiconductor substrate 20 and an interconnection network 22. The substrate 20 comprises an upper face 20a and a lower face 20b. Similarly, the interconnection network comprises an upper face 22a and a lower face 22b. The interconnection network 22 is fixed on the substrate 20. More precisely, the lower face 22b of the interconnection network 22 is fixed on the upper face 20a of the substrate 20.

[0034] The substrate 20 is for example made of silicon. Electronic components, not shown in FIGS. 1 and 2, are formed in and on the substrate 20. For example, electronic components are formed at the upper face of the substrate 20.

[0035] The substrate 20 comprises at least a portion of the control circuit of the pixel 12. In other words, at least a portion of the electronic components forming the control circuit of the pixel 12 are located in and on the substrate 20. For example, the substrate comprises an amplifier, logic circuits, memory cells and a reading circuit, synchronous or asynchronous, of the pixel 12. Certain components may be common to several pixels.

[0036] The interconnection network 22 comprises a stack of insulating layers, metal tracks 24 located in the insulating layers, and conductive vias 26 located in the insulating layers and connecting the conductive tracks together. The lower layer of the stack of insulating layers is located in contact with the substrate 20, and in particular with the upper face of the substrate 20. The upper layer of the stack, that is to say the insulating layer of the interconnection network furthest from the substrate 20, comprises for example metal tracks 28. The tracks 28 are flush with the upper face 22a of the interconnection network.

[0037] Similarly, the second chip 18 comprises a semiconductor substrate 28 and an interconnection network 30. The substrate 28 comprises an upper face 28a and a lower face 28b. Similarly, the interconnection network comprises an upper face 30a and a lower face 30b. The interconnection network 30 is fixed on the substrate 28. More precisely, the lower face 30b of the interconnection network 30 is fixed on the upper face 28a of the substrate 28.

[0038] The substrate 28 is for example made of silicon. Electronic components, not shown in FIGS. 1 and 2, are formed in and on the substrate 28. For example, electronic components are formed at the upper face of the substrate 28.

[0039] The substrate 28 preferably comprises entirely the control circuits of the pixels 14. In particular, the substrate 28 preferably comprises the reading circuits of the pixels 14. The substrate 28 comprises, for example, a part of the control circuit of the pixel 12.

[0040] The interconnection network 30 comprises a stack of insulating layers, metal tracks 32 located in the insulating layers, and conductive vias 34 located in the insulating layers and connecting the conductive tracks together. The lower layer of the stack of insulating layers is located in contact with the substrate. 28, and in particular with the upper face of the substrate 28. The upper layer of the stack, that is to say the insulating layer of the interconnection network furthest from the substrate 28, comprises for example metal tracks 36. The tracks 36 are flush with the upper face 30a of the interconnection network.

[0041] The chips 16 and 18 are fixed to each other. More precisely, the arrays 22 and 30 are fixed to each other. More precisely, the upper face 22a of the array 22 and the upper face 30a of the array 30 are fixed to each other. In the example of FIGS. 1 and 2, the chips 16 and 18 are fixed by molecular bonding. Thus, the tracks 28 and 36 are placed so as to be in contact with each other. Alternatively, the chips 16 and 18, more precisely the upper faces 22a and 30a, can be fixed in another way, for example by solder balls, for example solder balls between the tracks 28 and 36.

[0042] The chips 16 and 18 are thus electrically connected. In other words, the substrates 20 and 28 are electrically connected by means of vias 26, tracks 24, tracks 28, tracks 36, tracks 32 and vias 34.

[0043] The assembly 10 further comprises a layer 40. The layer 40 comprises, for example, quantum dots (QDs). The layer 40 comprises, for example, colloidal quantum dots (CQDs). The layer 40 may, alternatively, be made of photosensitive perovskite materials based on lead or tin. In other words, the layer 40 is, for example, made of a material having a formula of type ABX3, in which the element A is among the following elements: Methylammonium, formamidinium or cesium, in which the element B is among the following elements: lead or tin, and in which the element X is a halide, that is to say an element among the following elements: iodine, chlorine or bromine.The quantum dots of layer 40 may be made of perovskites, for example photosensitive perovskites based on lead or tin as described above, or passivated with photosensitive perovskites based on lead or tin. Layer 40 may also be a volume heterojunction composed of photosensitive organic semiconductors such as PDPP3T and fullerenes. Layer 40 is located on chip 18, more precisely on substrate 28, more precisely on the lower face 28b of substrate 28. Layer 40 is for example in contact with at least a portion of substrate 28. In other words, layer 40 and substrate 28 are not separated by an interconnection network.

[0044] Layer 40 is a continuous layer. Layer 40 preferably completely covers face 28b. In other words, layer 40 preferably does not include any opening uncovering face 28b. Layer 40 is common to the set of pixels 10. Preferably, layer 40 is common to all the pixels of the device.

[0045] The layer 40 comprises quantum dots. The quantum dots of the layer 40 are for example located in a layer made of a material other than a semiconductor material, for example in an electrically insulating material, for example in a resin.

[0046] By quantum dot, it is meant that each quantum dot forms a confinement zone by quantum effect in all dimensions, that is to say in the three dimensions of space. Each quantum dot therefore preferably has dimensions, in all directions, of the order of a few tens of nanometers, in other words less than 100 nm, preferably between 2 nm and 15 nm.

[0047] Each quantum dot comprises a core made of a semiconductor material, for example lead sulfide. Said core preferably has dimensions in all directions of the order of a few tens of nanometers, in other words less than 100 nm. Each quantum dot further comprises ligands extending from the core. The ligands are preferably made of organic aliphatic molecules or organometallic and inorganic molecules.

[0048] Due to their net charge and dipole moment, the ligands modify the effective doping of the quantum dot layers as well as their electronic affinity. For example, the ligands of the quantum dots of layer 40 may be molecules acting as N-type dopants, for example organic molecules such as thiolates.

[0049] Layer 40 constitutes photodiodes. In other words, layer 40 generates charges, in the layer, when light rays at an operating wavelength of layer 40, depending on the quantum dots, are absorbed by layer 40.

[0050] The materials composing the quantum dots and the dimensions of each quantum dot, in particular the dimensions of the semiconductor core, determine the absorption wavelengths of the quantum dots, i.e. the operating wavelengths of the photodiode. The operating wavelengths correspond, for example, to the near infrared, i.e. wavelengths between 700 nm and 1.6 mm. The operating wavelengths can also correspond to the mid-infrared, i.e. wavelengths between 1.6 pm and 4 pm, or to the visible, i.e. wavelengths between 300 nm and 700 nm.

[0051] It is possible to choose an operating wavelength from a wider wavelength range than the wavelength range possible with a standard photodiode, i.e. a photodiode not comprising a quantum dot layer. Indeed, the quantum dot layers correspond to an absorption curve having a peak significantly localized on a wavelength, said wavelength depending on the materials of the quantum dot and being able to be any wavelength from a range of wavelengths including at least the wavelengths from 300 nm to 4 pm.

[0052] For example, layer 40 comprises a single type of quantum dots. In other words, all the quantum dots of layer 40 have, for example, a core made of the same material and ligands made of the same material. Preferably, layer 40 is homogeneous. In other words, the composition of layer 40 is preferably identical throughout layer 40.

[0053] The layer 40 comprises different regions 42, 44. Each pixel 14 comprises a region 44. Each pixel 12 comprises a region 42. Each region 42 is the portion of the layer 40 generating charges for the corresponding pixel 12. Similarly, each region 14 is the portion of the layer 40 generating charges for the corresponding pixel 14.

[0054] Each pixel comprises, for example, means for attracting the charges generated throughout the region. For example, each pixel comprises a first electron extracting layer, or electrode, or hole extracting layer, not shown, in contact with the lower face of the layer 40. Each pixel comprises, for example, a second hole extracting layer, or electrode, or electron extracting layer, in contact with the upper face of the layer 40. The second extracting layer is transparent to the operating wavelengths of the pixel covered by said second layer. The first and second extracting layers are, for example, made of doped silicon, for example formed by doped regions of the substrate 28 in the case of the first layer, or of a metal oxide, for example TiOx, ZnO, AZO, IGZO, MoOx, CoO, CuOx NiOx.For example, each pixel includes a means for attracting charges to circuits located in substrates 20 and 28 corresponding to said pixel.

[0055] Thus, during operation of the device, charges are generated throughout the layer 40. The charges located in each region 42, 44 are attracted by said means towards the circuits corresponding to the pixel associated with the regions 42, 44.

[0056] The regions 42 have for example a rectangular shape, preferably a square, having a beveled corner. The beveled corners of the four regions 42 are turned towards the same point, that is to say towards the center of the assembly so that the parts of the layer 40 located at the center of the assembly, between the beveled corners, form the regions 44. Thus, the regions 42 comprise, in the same row of pixels, two parallel sides, one being shorter than the other, the short sides being in contact with each other. Similarly, the regions 42 comprise, in the same column of pixels, that is to say in the direction opposite to the direction of the rows, two parallel sides, one being shorter than the other, the short sides being in contact with each other. Each region 42 further comprises a side connecting the shorter sides of said region 42, said side corresponding to a side of region 44. Region 44 is thus a quadrilateral in top view. Thus, region 44 is entirely surrounded by region 42.

[0057] The sets 10 are for example arranged in a matrix in the device. Preferably, each set 10 comprises pixels distinct from the pixels of the other sets. Thus, each pixel 14 is for example separated from the pixel 14 of another set by pixels 12 of two sets 10.

[0058] In one operating mode of the device, the pixels can operate non-simultaneously, so as to be able to generate the event and light intensity images at different times. When only the event image is generated, only the event sensors operate, all the charges then being collected by a charge extraction layer located in the corresponding pixels. This is permitted, among other things, by the continuity of the layer 40. This makes it possible to increase the sensitivity and speed of the event sensor, without loss of spatial information and spectral aliasing.

[0059] In another mode of operation, the event sensor is turned off and the photocharges generated in the event pixels are distributed between the adjacent pixels.

[0060] It is also possible to operate, in another operating mode, the two types of sensors simultaneously, the electric field generated by each electrode allowing the collection of charges without electrical interference (“electrical cross-talk”) between the pixels.

[0061] [Fig. 3] represents an example of a pixel control circuit. More precisely, [Fig. 3] schematically represents a pixel 12 as well as a pixel 14.

[0062] The pixel 12 comprises a photodiode 50. The photodiode 50 corresponds to the portion 42 of the layer 40 associated with said pixel 12. The photodiode 50 comprises a terminal, for example the cathode, connected, preferably connected, for example by means of doped wells of the substrate 28 of the chip 18, to a node for applying a bias voltage Vbias.

[0063] The pixel 12 further comprises a control circuit for the pixel 12. The control circuit for the pixel 12 comprises a control circuit 52 (RS / GS) for the photodiode 50. Each photodiode 50, i.e. each pixel 12, comprises for example a circuit 52. The circuit 52 is located in the substrate 28, preferably entirely in the substrate 28. The photodiode 50 of the pixel is connected, preferably connected, to the circuit 52.

[0064] A circuit 54 is located in the substrate 28. The circuit 54 is an analog-to-digital converter. The circuit 54 is preferably entirely in the substrate 28. The circuit 54 is for example common to several pixels 12, for example common to all pixels 12 of a set 10, for example only to pixels 12 of a set 10. The circuit 54 is for example connected, preferably connected, to the circuit 52.

[0065] A circuit 56 is located in the substrate 28. The circuit 56 is a pixel reading circuit, for example the reading circuit of the set 10. The circuit 56 is preferably entirely in the substrate 28. The circuit 56 is for example common to several pixels 12, for example common to all the pixels 12 of a set 10, for example only to the pixels 12 of a set 10. The circuit 56 is for example connected, preferably connected, to the circuit 54. The circuit 56 provides, on an output 58, a value representative of the illumination of one or more pixels 12, for example pixels 12 of the set 10.

[0066] The pixel 14 comprises a photodiode 60. The photodiode 60 corresponds to the portion 44 of the layer 40 associated with said pixel 14. The photodiode 60 comprises a terminal, for example the cathode, connected, preferably connected, for example by means of doped wells of the substrate 28 of the chip 18, to a node for applying a bias voltage Vbias.

[0067] The pixel 14 comprises a control circuit for the pixel 14. The control circuit for the pixel 14 comprises, for example, a circuit 62 having the function of applying a logarithm to the value obtained by the photodiode 60. The circuit 62 is, for example, connected, to the anode of the photodiode 60. The circuit 62 is, for example, located, preferably entirely, in the substrate 28.

[0068] The pixel 14 comprises a circuit 64. The circuit 64 is an amplifier, for example of the common drain type. The circuit 64 is for example connected, preferably connected, to the circuit 62. The circuit 64 is for example located, preferably entirely, in the substrate 28.

[0069] The control circuit of the pixel 14 further comprises other components located in the substrate 20. The control circuit of the pixel 14 comprises for example an amplifier 66 connected, preferably connected, to the circuit 64. The control circuit of the pixel 14 further comprises a logic circuit 68, for example a high-pass filter, associated with a memory 70. The circuit 68 is connected, preferably connected, to the amplifier 66, so as to receive as input the signal amplified by the amplifier 66. The memory 70 is configured to contain a value obtained by the logic circuit 68.

[0070] Similarly, the control circuit of the pixel 14 comprises another logic circuit 72, for example a high-pass filter, associated with a memory 74. The circuit 72 is connected, preferably connected, to the amplifier 66, so as to receive as input the signal amplified by the amplifier 66. The memory 74 is configured to contain a value obtained by the logic circuit 72.

[0071] According to one embodiment, the amplifier 66 is for example configured to be able to be reset, the reset depending for example on the output values ​​of the circuits 68 and 72. For example, the pixel 17 may comprise a logic circuit not shown, for example an OR gate. Said logic circuit is for example in the chip 16. Said logic circuit comprises for example an input connected, preferably connected, to the output of the circuit 68, another input connected, preferably connected, to the output of the circuit 72 and an output connected, preferably connected, to an input of the amplifier 66. For example, when the logic circuit not shown provides a first binary value, the amplifier is reset.

[0072] The pixel 14 further comprises a data processing circuit 76 and a reading circuit 78. The circuit 76 is for example connected, preferably connected, to the memories 70 and 74 and the circuit 78 is for example connected, preferably connected, to the circuit 76. The circuits 76 and 78 are for example common to several pixels 14.

[0073] Thus, the substrate 28 comprises the control circuit of the pixels 12, preferably the entire control circuit of the pixels 12. The substrate 20 preferably does not comprise any component of the control circuit of the pixels 12. The substrate 20 comprises at least a portion of the control circuit of the pixel 14. The substrate 28 may, for example, comprise a portion of the control circuit of the pixel 14. The components of the control circuits located in the different substrates are connected to each other by the interconnection networks 22 and 30. In particular, the components of the control circuit of the pixel 14 located on the substrates 20 and 28 are connected to each other by the interconnection networks 22 and 30.

[0074] [Fig.4A] represents an alternative arrangement of a set of pixels. More precisely, [Fig.4A] represents a top view of a layer 40 of a set of pixels 12 and 14 such as the set of figures 1 and 2.

[0075] In the example of [Fig.4A], the set of pixels comprises one pixel 14 and three pixels 12, the pixels being arranged in a matrix. The set thus comprises a column of two pixels 12 and a column comprising one pixel 14 and one pixel 12.

[0076] The set of pixels is for example arranged in a matrix with other identical sets. Each pixel 14 is thus surrounded by pixels 12 of the same set and neighboring sets.

[0077] [Fig.4B] represents another alternative arrangement of a set of pixels. More precisely, [Fig.4B] represents a top view of a layer 40 of a set of pixels 12 and 14 such as the set of FIGS. 1 and 2.

[0078] In the example of [Fig.4B], the set of pixels comprises one pixel 14 and eight pixels 12, the pixels being arranged in a matrix. The set thus comprises two columns of three pixels 12 and one column comprising one pixel 14 and two pixels 12, such that the pixel 14 is surrounded by the pixels 12.

[0079] The set of pixels is for example arranged in a matrix with other identical sets. Each pixel 14 is thus separated from the neighboring pixels 14 by at least two pixels 12.

[0080] An advantage of the described embodiments is that the pixel size is not limited by the distance required by the via fabrication methods, as is the case in devices in which the photodiode is connected to the substrate by the interconnection network.

[0081] Another advantage of the described embodiments is that the control circuits, divided over several chips, make it possible to bring the pixels closer together.

[0082] Another advantage of the embodiments described above is that the device can provide an event image and a light intensity image, for example non-simultaneously, the event and standard pixels being able to be read independently.

[0083] Another advantage of the described embodiments is that it is possible to form a complete screen, by using a layer of quantum dots. In other words, charges can be generated over the entire surface of the screen. There is no area between the pixels in which charges cannot be generated.

[0084] Another advantage of the described embodiments is that the range of possible wavelengths is greater, depending on the choice of quantum dots.

[0085] Various embodiments and variations have been described. Those skilled in the art will understand that certain features of these various embodiments and variations could be combined, and other variations will occur to those skilled in the art.

[0086] Finally, the practical implementation of the embodiments and variants described is within the reach of those skilled in the art from the functional indications given above.

Claims

Claims

1. A device comprising at least one set (10) of pixels, the set comprising at least one first pixel (14) generating event data and at least one second pixel (12) generating light intensity data, each first pixel comprising a portion of a layer (40) forming a photodiode (60) of said pixel for generating charges for said first pixel and each second pixel comprising a portion of said layer (40) forming a photodiode (50) of said second pixel for generating charges for said second pixel, the device further comprising a first chip (16) comprising a first substrate (20) and a first interconnection network (22), and a second chip (18) comprising a second substrate (28) and a second interconnection network (30), the first and second chips being fixed to each other by the interconnection networks,the layer (40) being located on a first face of the second substrate opposite a second face of the second substrate on which the interconnection network is located.,

2. The device of claim 1, wherein the device is an event camera.

3. Device according to claim 1 or 2, wherein the first chip (16) comprises at least part of a control circuit of the first pixel (14) and the second chip (18) comprises the control circuit of the at least one second pixel (12).

4. A device according to any one of claims 1 to 3, wherein part of the control circuit of the first pixel (14) is in the second chip (18).

5. A device according to any one of claims 1 to 4, wherein the first and second chips are attached by molecular bonding.

6. A device according to any one of claims 1 to 5, wherein the device comprises a plurality of sets of pixels arranged in a matrix.

7. Device according to claim 6, wherein each set comprises four second pixels (12) surrounding said at least one first pixel (14).

8.

9.

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14.

15. Device according to claim 6, wherein each set comprises eight second pixels (12) surrounding said at least one first pixel (14). Device according to claim 6, wherein each set comprises three second pixels (12) and said at least one first pixel (14) arranged in matrices. A device according to any one of claims 1 to 9, wherein the layer (40) is continuous. Device according to any one of claims 1 to 10, in which the layer (40) entirely covers the first face of the second substrate. Device according to any one of claims 1 to 11, in which the material of the layer (40) is homogeneous. Device according to any one of claims 1 to 12, wherein the layer (40) is in contact with the second substrate. A device according to any one of claims 1 to 13, wherein the layer is a layer of quantum dots or colloidal quantum dots. Device according to any one of claims 1 to 13, in which the layer is made of a photosensitive perovskite material based on lead or tin or a bulk heterojunction composed of photosensitive organic semiconductors.