Microfluidic device used for the sampling, preconcentration, separation or detection of gases

Abstract

The invention relates to a microfluidic device comprising: A support component (1) which comprises: A separate inlet fluidic channel (13) and outlet fluidic channel (14), integrated into the body (10) of said component and each opening respectively at the first protruding pattern and / or the second protruding pattern, A microfluidic component (2) separate from the support component (1), comprising: An electrical circuit, A fluidic circuit comprising at least one fluidic inlet (23) and one fluidic outlet (24), Said microfluidic component (2) comprising a first face arranged to bear against the support component (12) to be raised relative to a receiving surface, A mechanical clamping system to ensure that the microfluidic component (2) is held against the support component (1), Electrical connection means arranged to connect to the electrical circuit of the microfluidic component. Figure to be published with the abstract: Figure 2

Description

Title of the invention: Microfluidic device used for the sampling, preconcentration, separation or detection of gases Technical field of the invention

[0001] The present invention relates to a microfluidic device which can in particular be used for the sampling, preconcentration, separation or detection of gases. State of the art

[0002] In a known manner, a silicon microfluidic component used for gas preconcentration comprises a cavity filled with an adsorbent material and controlled heating means in order to establish a temperature in its cavity. This type of component is in particular intended to receive a gas flow and makes it possible to block / store compounds of the gas flow in its cavity or to release them totally or partially. Such a unit, with low thermal capacity, can in fact be thermally controlled quickly and at low power. The temperature to which the unit is heated makes it possible to vary the adsorption equilibrium constants of the compounds on the adsorbent phase. Tables make it possible in particular to indicate the compounds which will be fixed or released by a preconcentration unit according to the nature of the adsorbent used as well as the temperature fixed at the unit.

[0003] This type of preconcentration component is used in particular in more complete miniaturized gas analysis systems. The microfluidic component can thus be coupled to a chromatography column. In these miniaturized systems, to circulate the gases, the components are for example connected to each other using capillaries assembled by gluing. This fluidic connection solution, however, has several drawbacks: - It requires each capillary to be glued to the components; - There is a significant risk of leakage at the connections fluidics;

[0004] To overcome these drawbacks, the solution described in patent application WO2020 / 170070A1 consists of using a microfluidic module to provide the interface between a preconcentrator-type microfluidic component and a chromatography column. This microfluidic module makes it possible to ensure fluidic connections using seals and mechanical clamping means.

[0005] However, the solution described in this document is not successful in that the component is mounted cantilevered on the module, which could lead to risks of mechanical breakage as well as reliability defects at the level of the connections. fluidics. Furthermore, the proposed arrangement does not allow for reliable management of the thermal operating conditions of the module independently of the preconcentrator-type microfluidic component and the chromatography column.

[0006] To operate reliably, a microfluidic component, for example made of silicon as in the state of the art, must meet the following requirements: - Have fluid connections that are easy to implement, while remaining perfectly watertight whatever the operating conditions; - Be thermally insulated, while allowing reliable management of thermal operating conditions; - Have a sufficiently compact and easily handled architecture; - Be easily electrically connectable to an external unit;

[0007] The aim of the invention is therefore to propose a microfluidic device integrating a microfluidic component, such as for example a preconcentrator type component, which is suitable for meeting these requirements. Statement of the invention

[0008] This goal is achieved by a microfluidic device comprising: - A support component which includes: • A body having at least one receiving surface, • On the receiving surface, a protruding pattern and a second protruding pattern, each emerging relative to said receiving surface, • A separate inlet fluid channel and outlet fluid channel, integrated into the body of said component and each opening respectively at the level of the first protruding pattern and / or the second protruding pattern, - A microfluidic component separate from the support component, comprising: • An electrical circuit, • A fluid circuit comprising at least one fluid inlet and one fluid outlet, - Said microfluidic component comprising a first face arranged to bear against the first projecting pattern and the second projecting pattern to be raised relative to the receiving surface, - Sealing means arranged between said microfluidic component and said support component to ensure sealed fluidic connections on the one hand between the inlet fluidic channel of the support component and the fluidic inlet of the microfluidic component and on the other hand between the fluidic channel output of the support component and the fluidic output of the microfluidic component, when the microfluidic component is positioned in abutment against the first protruding pattern and the second protruding pattern, - A mechanical clamping system comprising at least one spacer arranged to bear against a second face of the microfluidic component, opposite its first face, - Said mechanical clamping system comprising at least one cover fixed on the support component against said spacer and arranged to keep said microfluidic component pressed against the first projecting pattern and the second projecting pattern, and to ensure said sealed fluidic connections, - Electrical connection means comprising several electrical contact pads arranged to connect to the electrical circuit of the microfluidic component.

[0009] According to a particular feature, the body of the support component comprises a cavity at the bottom of which the first projecting pattern and the second projecting pattern are arranged.

[0010] According to another feature, the body of the support component comprises a lateral passage opening into said cavity.

[0011] According to another feature, said at least one spacer is formed from an independent piece of flexible material.

[0012] According to another feature, the body of the support component comprises at least two notches made on the periphery of the cavity and arranged to each receive a separate end of said at least one spacer.

[0013] Advantageously, the ratio between the contact surface of the microfluidic component against the two protruding patterns and the surface of its first face is between 0.1 and 0.5.

[0014] According to another particular feature, the electrical connection means comprise an electrical connection card on which said electrical contact pads are arranged.

[0015] According to another feature, the cover comprises several through holes each crossed by a separate electrical contact pad.

[0016] According to another feature, the sealing means comprise flat or O-ring seals.

[0017] According to another feature, the electrical circuit of the microfluidic component comprises a heating resistor.

[0018] According to another feature, the fluidic circuit of the microfluidic component comprises a cavity filled with an adsorbent material, arranged between its fluidic inlet and its fluidic outlet. Brief description of the figures

[0019] Other characteristics and advantages will appear in the detailed description which follows, given with reference to the appended drawings in which: Figures 1A to 1E represent, seen in perspective, the microfluidic device of the invention, according to the different phases of its assembly; [Fig.2] shows in sectional view and schematically, the principle of production of the microfluidic device of the invention;

[0020]

[0021] Detailed description of at least one embodiment The microfluidic device of the invention mainly comprises: A first component, called support component 1; A second component, called microfluidic component 2, this component being the functional component of the device; Sealing means used to ensure watertight fluid connections; A mechanical system allowing the microfluidic component 2 to be adapted to the support component 1; Electrical connection means used to connect an external unit to the microfluidic component 2;

[0022] For the remainder of the description, an orthonormal reference frame X, Y, Z is defined. The terms used such as “upper”, “lower”, “above”, “below” or equivalent are to be understood by referring to the Z direction drawn vertically. Support component

[0023]

[0024] [Fig.lA] [Fig.2]

[0025] The support component 1 has a main body 10, formed from an independent part advantageously made of a thermally conductive material, such as a metal or a metal alloy. This part is for example made of aluminum.

[0026] In a non-limiting manner, the body 10 of the support component has a parallelepiped external shape.

[0027] The body 10 of the support component comprises at least one surface called the receiving surface 104, for example formed from its upper face.

[0028] Advantageously, the receiving surface 104 may comprise a cavity 100 hollowed out in a suitable manner to accommodate the microfluidic component 2.

[0029] In the bottom of the cavity 100, the support component 1 may carry at least one projecting pattern and advantageously at least two projecting patterns 11, 12 relative to the bottom of the cavity 100. The two projecting patterns 11, 12 are preferably separated from each other to create an air passage between them. The two projecting patterns 11, 12 form advantageously part of the body 10 of the support component 1.

[0030] In its body 10, the support component 1 integrates at least a first fluidic channel, called the inlet fluidic channel 13, and advantageously a second fluidic channel, called the outlet fluidic channel 14.

[0031] The inlet fluid channel 13 opens, on one side, in the direction Z, advantageously at the level of the first projecting pattern 11 and on the other side onto a lateral face of the body 10 of the support component 1.

[0032] The outlet fluid channel 14 opens, on one side, along the direction Z, advantageously at the level of the second projecting pattern 12 and on the other side onto a lateral face of the body 10 of the support component 1, for example the face opposite that onto which the inlet fluid channel 13 opens.

[0033] Each channel is for example formed by making two holes through two perpendicular faces of the support component 1, a first hole along X, Y through the lateral face and a hole along Z through the upper face.

[0034] To connect each fluid channel to an external fluid system, each fluid channel can be provided with a connector.

[0035] It should be noted that the two fluid channels 13, 14 could open at the level of a single protruding pattern 11, 12, the other protruding pattern then only performing the sole function of raising.

[0036] Advantageously, the mouth of each fluid channel can have on its periphery an imprint of a shape adapted to accommodate an O-ring or flat seal (visible [Fig.2] - see below).

[0037] Advantageously, the support component 1 may comprise several alignment stops 15 arranged in the cavity 100 to mechanically wedge the microfluidic component in the X, Y plane.

[0038] The body 10 of the support component 1 advantageously comprises a lateral passage 101 produced on a lateral face and opening into the interior of the cavity 100.

[0039] At the periphery of the cavity 100, the receiving surface may have several holes 102 intended to accommodate screws for fixing a cover (see below) of the mechanical system. The receiving surface may also have a recess 103, of a shape adapted to accommodate said cover, made at the periphery of said holes.

[0040] Around the perimeter of the cavity 100, the support component 1 may have several notches 16 arranged symmetrically in pairs. A spacer is then placed between two notches (see below).

[0041] Advantageously, the body of the support component 1 is structured by machining. The upper face of the body 10 is therefore machined to form the cavity 100, the two projecting patterns 11, 12, the lateral passage 101, the holes 102, the notches 16, the recess 103, the alignment stops 15. The body is therefore a single piece, obtained directly, without external assembly. However, it would of course be possible to produce the support component in several pieces, assembled together, by gluing or another suitable solution. Microfluidic component

[0042] [Fig.lB]

[0043] [Fig.2]

[0044] As indicated above, the microfluidic component 2 corresponds to the functional component of the device. It is intended to perform a function, which may be a sampling, analysis, detection function, etc. It may, for example, be a preconcentrator, a chromatographic separation column, a thermal conductivity detector (commonly called TCD), or any other type of sensor (resistive, inductive, etc.) or electrical means such as electrical heating means.

[0045] It thus comprises at least one electrical circuit used to implement its function.

[0046] It also comprises a fluid circuit comprising at least one fluid inlet 23 and one fluid outlet 24, between which the fluid to be sampled / analyzed can circulate.

[0047] In a preconcentrator type function, the microfluidic component 2 comprises a cavity filled with an adsorbent material and controlled electrical heating means in order to establish a temperature in its cavity. This type of component is in particular intended to receive a gas flow and makes it possible to block / store compounds of the gas flow in its cavity or to release them totally or partially.

[0048] In a non-limiting manner, the microfluidic component 2 is for example produced in the form of a chip 20 composed of a silicon substrate (one of the faces of which contains pads for electrical connection to the electrical circuit of the component) and a cover, for example made of glass or silicon, assembled on the silicon substrate (for example by anodic sealing or bonding), and in which the fluidic inlet 23 and the fluidic outlet 24 are produced.

[0049] The chip 20 is for example rectangular in shape, having an upper face and a lower face each extending in the X, Y plane, its thickness in the Z direction being advantageously small compared to the other two dimensions.

[0050] According to a particular aspect of the invention, the chip 20 forming the microfluidic component 2 is positioned in the cavity 100 of the support component 1, bearing by its lower face against the two projecting patterns 11, 12. It is thus raised relative to the bottom of the cavity 100. The alignment stops 15 are positioned to wedge said chip 20 in X, Y. The chip 20 therefore has a size suitable for being positioned in the cavity of the support component, wedged in X, Y by the alignment stops 15.

[0051] Advantageously, the ratio between the contact surface of the lower face of the chip 10 against the two protruding patterns 11, 12 and the total surface of the lower face of the chip 20 is between 0.1 and 0.5, advantageously equal to 0.25. In this way, heat dissipation can be optimized, contact being minimized between the two elements.

[0052] The fluid inlet 23 and the fluid outlet 24 of the microfluidic component are arranged on the microfluidic component 2 to be positioned opposite, respectively, the mouth of the inlet fluid channel 13 and the mouth of the outlet fluid channel 14 of the support component 1, when the microfluidic component is mechanically wedged on the support component 1.

[0053] It should be noted that the lateral passage 101 made in the support component 1 is made to open into the cavity 100, the projecting patterns 12, 13 being dimensioned to raise the microfluidic component 2 sufficiently so that the lateral passage opens at least partially under the microfluidic component 2 when the latter is positioned and wedged in the cavity 100.

[0054] On its upper face, the chip 20 of the microfluidic component comprises several electrical connection points 200, making it possible to connect its electrical circuit to an external unit intended for its power supply and control. Sealing means

[0055] [Fig.2]

[0056] According to a particular aspect of the invention, the device comprises sealing means arranged to ensure sealed fluidic connections between the support component and the microfluidic component.

[0057] In a non-limiting manner, these sealing means may comprise a first seal 33, for example toric or flat, arranged to ensure the sealed fluidic connection between the inlet fluidic channel 13 of the support component 1 and the fluidic inlet 23 of the microfluidic component 2 and a second seal 34, for example toric or flat, arranged to ensure the fluidic connection between the outlet fluidic channel 14 of the support component 1 and the fluidic outlet 24 of the microfluidic component 2.

[0058] Depending on the configuration of the fluid connections to be sealed, other solutions could of course be considered. The shape of the seal could in fact be adapted to the position and shape of the fluid connections to be made. Mechanical clamping system

[0059] [Fig.lC]

[0060] [Fig.lD]

[0061] [Fig.2]

[0062] According to a particular aspect of the invention, the device comprises a mechanical system having the function of: - Keep the microfluidic component 2 pressed against the two protruding patterns 11, 12; - Ensure watertight fluidic connections between the fluidic part of the support component 1 and the fluidic part of the microfluidic component 2; - Leave the side passage 101 open to allow heat dissipation from the microfluidic component 2;

[0063] The mechanical system advantageously comprises a spacer device which is positioned at least partially against only a part of the upper face of the microfluidic component. Advantageously, this device may comprise two spacers 41, 42.

[0064] Each spacer 41, 42 is advantageously made of a flexible, thermally insulating material, for example silicone.

[0065] Each spacer is advantageously positioned to extend between two distinct support notches 16 each made on a distinct edge delimiting the cavity 100 of the support component 1, each notch 16 being made to allow the spacer 41, 42 to transmit sufficient mechanical support against the microfluidic component 2, so that the latter then comes to bear sufficiently against the two projecting patterns 11, 12 placed vertically at the bottom of the cavity.

[0066] It should be noted that each spacer 41, 42 is advantageously positioned in X, Y above a distinct protruding pattern 11, 12, separated from the latter by the thickness of the chip 20.

[0067] The mechanical clamping system also comprises a cover 5 which bears against the spacers 41, 42. This cover 5 is fixed to the support component 1, for example using screws 50 adapted to be screwed into the dedicated holes 102. The cover 5 thus performs a clamping function to hold the microfluidic component 2 in place on the support component 1 and ultimately ensures sealing at the fluid connections. This cover 5 is sized to fit in X, Y in the dedicated embedding imprint 103, made on the periphery of the cavity 100.

[0068] It should be noted that the presence of the spacers 41, 42 between the cover 5 and the microfluidic component 2 makes it possible to minimize the mechanical contact between these two elements, making it possible to reduce the thermal exchanges as much as possible and to leave the upper face of the microfluidic component 2 in contact with the ambient air, via the lateral passage 101 of the support component 1.

[0069] Advantageously, the cover 5 may comprise several through holes 51 along Z. Each through hole is made so as to be positioned in screw- with respect to an electrical connection point 200 separate from the microfluidic component 2 when the microfluidic component 2 is wedged in the cavity and the cover 5 embedded in the support component 1.

[0070] The cover 5 and the spacers 41, 42 can be made from several separate pieces. But it would also be possible to combine them into a single piece. The spacers 41, 42 can, for example, be overmolded onto the cover 5. Electrical connection means

[0071] [Fig.lE]

[0072] [Fig.2]

[0073] Since the microfluidic component 2 comprises at least one electrical circuit, it must be able to be connected to an external unit (not shown) for power supply and control.

[0074] In the case of an electrical circuit which integrates a heating resistor, it may be a question of supplying power to and controlling the heating temperature, possibly using in addition a temperature probe, for example integrated into the microfluidic component 2.

[0075] The electrical connection means advantageously comprise an electrical connection card 6, independent of or integral with the cover 5. When the card 6 and the cover 5 are integral, they form a single piece, fulfilling both functions.

[0076] The electrical connection card 6 is positioned above the cover 5 and is fixed by its lower face against the upper face of the cover 5.

[0077] This card 6 may comprise on its lower face several electrical contact pads 60. As indicated above, the cover 5 comprises several through holes 51 along Z, each hole 51 being able to be crossed by at least one electrical contact pad 60 distinct from the electrical connection card 6.

[0078] The free end of each electrical contact pad 60 is arranged to come into contact with an electrical connection point 200 separate from the electrical circuit of the microfluidic component 2.

[0079] For example, the card 6 may comprise two electrical contact pads for powering a heating resistor of the electrical circuit of the microfluidic component 2 and two other electrical contact pads for connecting to a temperature probe. The electrical connection card 6 may then be connected to the external unit, used to power the resistor and regulate the heating temperature, via the probe.

[0080] It should be noted that the electrical contact pads 60 must project relative to the lower plane of the cover 5 and be chosen with a contact travel greater than the thickness of the spacers 41, 42, in order to each contact an electrical connection point. 200 separate from the electrical circuit of the microfluidic component 2.

[0081] Advantageous architecture of the device and advantages

[0082] [Fig.2]

[0083] Considering the various elements described above, in summary, an architecture The advantage of the device is therefore as follows: - The support component 1, made of aluminum, machined on its upper face to form the cavity 100, the protruding patterns 11, 12 at the bottom of the cavity, the notches 16 for receiving two spacers, the alignment stops 15 of the microfluidic component 2, the embedding imprint 103 of the cover 5, the holes 102 for fixing the cover 5, the lateral passage 101, the inlet fluidic channel 13 and the outlet fluidic channel 14; - The sealing means, composed of two O-rings 33, 34, each positioned at the mouth, respectively of the inlet fluid channel 13 and of the outlet channel 14 on the upper face of the support component 1; - The microfluidic component 2 coming to be positioned in abutment against the two projecting patterns 11, 12, by establishing the fluidic connections between its fluidic inlet 23 and its fluidic outlet 24, respectively with the inlet fluidic channel 13 and the outlet fluidic channel 14, by crushing the two O-rings 33, 34 positioned on these connections; - Two spacers 41, 42 positioned in support against the upper face of the microfluidic component 2; - A cover 5 which is fixed to the support component 1, to exert sufficient support against the spacers 41, 42 and transmit mechanical support from the microfluidic component 2 against the support component 1; - An electrical connection card 6 which is fixed to the cover 5, its electrical contact pads 60 passing through the holes 51 made through the cover 5 to contact the electrical connection points 200 available on the upper face of the microfluidic component 2;

[0084] It should be noted that in the case of a microfluidic component 2 integrating heating means, the support component 1 can itself be heated by an external device.

[0085] In a non-limiting manner, the device can be designed and sized as follows: - Dimensions of the microfluidic component: 21x7.6x1.225 mm3 - Fluid inlet / outlet diameter: 500pm - Inner diameter of O-rings: 1mm and thickness 0.5mm - Support component material: aluminum - Cover material: PEEK - O-ring and spacer material: silicone - Elevation of the microfluidic component = 500pm

[0086] This architecture thus presents numerous advantages, including: - Protection of the microfluidic component 2 which is housed in the cavity 100 and covered by the cover 5; - Precise and easy alignment and positioning of the O-rings 33, 34 and the microfluidic component 2, thanks to the presence of dedicated reception areas; - Ease of replacement of the microfluidic component 2, without the need for capillary bonding as in the state of the art, the support component 1 providing the fluidic interface; - Thermal insulation of the microfluidic component 2 from the support component 1 and the cover 5, thanks to the presence of the protruding patterns 11, 12 and the spacers 41, 42; - Improved heat dissipation enabled by the presence of the lateral passage 101 and by the elevation of the microfluidic component 2; - Advantageous use of a thermally conductive material (e.g. aluminum) for the support component 1, which allows easy heating of the fluid channels internal to the support component 1, without reducing the heating rates of the components and limits the adsorption of low-volatile compounds on the walls of the fluid channels of the support;

Claims

Claims

1. Microfluidic device characterized in that it comprises: - A support component (1) which comprises: • A body (10) having at least one receiving surface (104), • On the receiving surface (104), a protruding pattern (11) and a second protruding pattern (12), each emerging relative to said receiving surface, • A separate inlet fluid channel (13) and outlet fluid channel (14), integrated into the body (10) of said component and each opening respectively at the level of the first protruding pattern and / or the second protruding pattern, - A microfluidic component (2) separate from the support component (1), comprising: • An electrical circuit, • A fluid circuit comprising at least one fluid inlet (23) and one fluid outlet (24), - Said microfluidic component (2) comprising a first face arranged to bear against the first projecting pattern (11) and the second projecting pattern (12) to be raised relative to the receiving surface, - Sealing means arranged between said microfluidic component (2) and said support component (1) to ensure sealed fluidic connections on the one hand between the inlet fluidic channel (13) of the support component and the fluidic inlet (23) of the microfluidic component and on the other hand between the outlet fluidic channel (14) of the support component and the fluidic outlet (24) of the microfluidic component, when the microfluidic component is positioned in abutment against the first projecting pattern and the second projecting pattern, - A mechanical clamping system comprising at least one spacer (41, 42) arranged to bear against a second face of the microfluidic component, opposite its first face, - Said mechanical clamping system comprising at least one cover (5) fixed on the support component (1) against said en- brace and arranged to hold said microfluidic component (2) in abutment against the first protruding pattern (11) and the second protruding pattern (12), and to ensure said sealed fluidic connections, - Electrical connection means comprising several electrical contact pads (60) arranged to connect to the electrical circuit of the microfluidic component.

2. Device according to claim 1, characterized in that the body (10) of the support component (1) comprises a cavity (100) at the bottom of which the first projecting pattern (11) and the second projecting pattern (12) are arranged.

3. Device according to claim 2, characterized in that the body (10) of the support component comprises a lateral passage (101) opening into said cavity (100).

4. Device according to claim 2 or 3, characterized in that said at least one spacer is formed from an independent piece of flexible material.

5. Device according to claim 4, characterized in that the body (10) of the support component comprises at least two notches made on the periphery of the cavity (10) and arranged to each receive a separate end of said at least one spacer.

6. Device according to one of claims 1 to 5, characterized in that the ratio between the contact surface of the microfluidic component against the two protruding patterns and the surface of its first face is between 0.1 and 0.

5.

7. Device according to one of claims 1 to 6, characterized in that the electrical connection means comprise an electrical connection card on which said electrical contact pads (60) are arranged.

8. Device according to claim 7, characterized in that the cover (5) comprises several through holes (51) each crossed by a separate electrical contact pad (60).

9. Device according to one of claims 1 to 8, characterized in that the sealing means comprise flat or O-ring seals.

10. Device according to one of claims 1 to 9, characterized in that the electrical circuit of the microfluidic component comprises a resistor heating.

11. Device according to one of claims 1 to 10, characterized in that the fluid circuit of the microfluidic component comprises a cavity filled with an adsorbent material, arranged between its fluid inlet (23) and its fluid outlet (24).

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